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Robust Surface Reconstruction in SEM Using Two BSE Detectors Deshan CHEN Atsushi MIYAMOTO Shun'ichi KANEKO Publication IEICE TRANSACTIONS on Information and Systems Vol.E96-D No.10 pp.2224-2234 Publication Date: 2013/10/01 Online ISSN: 1745-1361 DOI: 10.1587/transinf.E96.D.2224 Print ISSN: 0916-8532 Type of Manuscript: PAPER Category: Image Recognition, Computer Vision Keyword: scanning electron microscope (SEM), surface reconstruction, shadowing compensation, backscattering electron, Full Text: PDF(3.3MB)>>
Summary: This paper describes a robust three-dimensional (3D) surface reconstruction method that can automatically eliminate shadowing errors. For modeling shadowing effect, a new shadowing compensation model based on the angle distribution of backscattered electrons is introduced. Further, it is modified with respect to some practical factors. Moreover, the proposed iterative shadowing compensation method, which performs commutatively between the compensation of image intensities and the modification of the corresponding 3D surface, can effectively provide both an accurate 3D surface and compensated shadowless images after convergence. | ||||||||||
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