Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Electron-beam lithography organic resist materials

In the course of our research on organic metals, we discovered that certain of these materials can function as electron-beam resists for high resolution lithography with a combination of unique features that have no parallel among conventional resist materials. ... [Pg.83]

See other pages where Electron-beam lithography organic resist materials is mentioned: [Pg.47] [Pg.233] [Pg.470] [Pg.1362] [Pg.159] [Pg.252] [Pg.159] [Pg.3637] [Pg.270] [Pg.244]

See also in sourсe #XX -- [ Pg.116 , Pg.119 ]

SEARCH

Beam resists

Electron beam

Electron beam resists

Electron lithography

Electron material

Electron resistance

Electron resists

Electronic materials

Electronic resistance

Electronic resistivity

Electronics materials

Lithography electron beam

Material resistance

Organic Resists

Resist materials organic resists

Resist organic

Resists materials