"CMOS-Based MEMS Mirror Driver for Maskless Lithography Systems."

Jaesik Lee et al. (2007)

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DOI: 10.1109/CICC.2007.4405762

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-02

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Jaesik Lee, Joseph Weiner, Hsin-Hung Chen, Yves Baeyens, Vladimir Aksyuk, Young-Kai Chen:
CMOS-Based MEMS Mirror Driver for Maskless Lithography Systems. CICC 2007: 401-404

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