"Guiding Template Design for Lamellar DSA with Multiple Patterning and ..."

An-Jie Shih, Shao-Yun Fang, Yi-Yu Liu (2020)

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DOI: 10.1145/3400302.3415706

access: closed

type: Conference or Workshop Paper

metadata version: 2021-01-18

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An-Jie Shih, Shao-Yun Fang, Yi-Yu Liu:
Guiding Template Design for Lamellar DSA with Multiple Patterning and Self-Aligned Via Process. ICCAD 2020: 21:1-21:6

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