"High-k MIM dielectric reliability study in 65nm node."

Ravi Achanta et al. (2022)

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DOI: 10.1109/IRPS48227.2022.9764589

access: closed

type: Conference or Workshop Paper

metadata version: 2022-05-09

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  dblp key:
  - conf/irps/AchantaMBKG22
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Ravi Achanta, V. McGahay, S. Boffoli, C. Kothandaraman, J. Gambino:
High-k MIM dielectric reliability study in 65nm node. IRPS 2022: 32-1

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