"Resonant frequency tunable silicon fishbone-shaped MEMS double ended ..."

Hong Ding et al. (2016)

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DOI: 10.1109/NEMS.2016.7758240

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Hong Ding, Lifeng Fu, Yixiang Wang, Jin Xie:
Resonant frequency tunable silicon fishbone-shaped MEMS double ended tuning fork. NEMS 2016: 233-236

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