"Capacitive micromachined ultrasonic transducer as a resonant temperature ..."

Zhikang Li et al. (2013)

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DOI: 10.1109/NEMS.2013.6559912

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-10

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Zhikang Li, Libo Zhao, Zhiying Ye, Hongyan Wang, Yulong Zhao, Zhuangde Jiang:
Capacitive micromachined ultrasonic transducer as a resonant temperature sensor. NEMS 2013: 1092-1095

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