"An IDEF0/Petri net approach to the system integration in semiconductor ..."

Jin-Shyan Lee, Pau-Lo Hsu (2003)

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DOI: 10.1109/ICSMC.2003.1245760

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Jin-Shyan Lee, Pau-Lo Hsu:
An IDEF0/Petri net approach to the system integration in semiconductor manufacturing systems. SMC 2003: 4910-4915

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