"A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure."

Jian-Qiu Huang, Baoye Li, Wenhao Chen (2016)

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DOI: 10.3390/MI7050074

access: open

type: Journal Article

metadata version: 2020-05-30

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Jian-Qiu Huang, Baoye Li, Wenhao Chen:
A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure. Micromachines 7(5): 74 (2016)

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