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M. Gentili

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1990 – 1999

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1990
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M. Gentili, A. Lucchesini, L. Scopa, Paolo Lugli, A. Paoletti, G. Messina, S. Santangelo, A. Tucciarone:
Modeling of electron beam scattering in high resolution lithography for the fabrication of X-Ray masks. Eur. Trans. Telecommun. 1(2): 143-147 (1990)

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