"Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs ..."

Yangyang Yan et al. (2015)

> Home

Details and statistics

DOI: 10.1109/3DIC.2015.7334568

access: closed

type: Conference or Workshop Paper

metadata version: 2021-02-16

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/3dic/YanDCLFK15
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/3dic/YanDCLFK15
Yangyang Yan, Yingtao Ding, Qianwen Chen, Kang Wook Lee, Takafumi Fukushima, Mitsumasa Koyanagi:
Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs applications. 3DIC 2015: TS5.2.1-TS5.2.5

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.