"Target setting with consideration of target-induced operation variability ..."

Yu-Ting Kao, Shi-Chung Chang, Chun-Ming Chang (2014)

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DOI: 10.1109/COASE.2014.6899413

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-01

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Yu-Ting Kao, Shi-Chung Chang, Chun-Ming Chang:
Target setting with consideration of target-induced operation variability for performance improvement of semiconductor fabrication. CASE 2014: 774-779

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