"An integrated and improved dispatching approach to reduce cycle time of ..."

Chia-Yu Chang, Kuo-Hao Chang (2012)

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DOI: 10.1109/CSCWD.2012.6221901

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Chia-Yu Chang, Kuo-Hao Chang:
An integrated and improved dispatching approach to reduce cycle time of wet etch and furnace operations in semiconductor fabrication. CSCWD 2012: 734-741

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