"Test and Testability of a Monolithic MEMS for Magnetic Field Sensing."

Vincent Beroulle et al. (2001)

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DOI: 10.1023/A:1012759320563

access: closed

type: Journal Article

metadata version: 2020-09-11

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Vincent Beroulle, Yves Bertrand, Laurent Latorre, Pascal Nouet:
Test and Testability of a Monolithic MEMS for Magnetic Field Sensing. J. Electron. Test. 17(5): 439-450 (2001)

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