"Silicon Torsional Scanning Mirror."

Kurt E. Petersen (1980)

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DOI: 10.1147/RD.245.0631

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type: Journal Article

metadata version: 2020-05-12

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Kurt E. Petersen:
Silicon Torsional Scanning Mirror. IBM J. Res. Dev. 24(5): 631-637 (1980)

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