"Design and Nanomotion Control of a Noncontact Stage with Squeeze Bearings."

Hayato Yoshioka, Toshimichi Gokan, Hidenori Shinno (2008)

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DOI: 10.20965/IJAT.2008.P0018

access: closed

type: Journal Article

metadata version: 2020-07-09

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Hayato Yoshioka, Toshimichi Gokan, Hidenori Shinno:
Design and Nanomotion Control of a Noncontact Stage with Squeeze Bearings. Int. J. Autom. Technol. 2(1): 18-23 (2008)

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