"Experimental study and analysis of corner compensation structures for CMOS ..."

Ravindra Mukhiya et al. (2011)

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DOI: 10.1016/J.MEJO.2010.08.018

access: closed

type: Journal Article

metadata version: 2024-10-06

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Ravindra Mukhiya, Alvise Bagolini, T. K. Bhattacharyya, Leandro Lorenzelli, M. Zen:
Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH. Microelectron. J. 42(1): 127-134 (2011)

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