"Surface-micromachined microoptical elements and systems."

Richard S. Muller, Kam Y. Lau (1998)

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DOI: 10.1109/5.704276

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type: Journal Article

metadata version: 2022-02-28

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Richard S. Muller, Kam Y. Lau:
Surface-micromachined microoptical elements and systems. Proc. IEEE 86(8): 1705-1720 (1998)

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