"Simulation study for a proposed segmented automated material handling ..."

Chiung-Hsi Hsieh et al. (2012)

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DOI: 10.1016/J.SIMPAT.2012.07.001

access: closed

type: Journal Article

metadata version: 2022-06-23

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Chiung-Hsi Hsieh, Chiwoon Cho, Taho Yang, Ting-Jiun Chang:
Simulation study for a proposed segmented automated material handling system design for 300-mm semiconductor fabs. Simul. Model. Pract. Theory 29: 18-31 (2012)

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