"Modeling, scheduling, and performance evaluation for wafer fabrication: a ..."

Tsung-Che Chiang, An-Chih Huang, Li-Chen Fu (2006)

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DOI: 10.1109/TASE.2005.862198

access: closed

type: Journal Article

metadata version: 2020-04-02

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Tsung-Che Chiang, An-Chih Huang, Li-Chen Fu:
Modeling, scheduling, and performance evaluation for wafer fabrication: a queueing colored Petri-net and GA-based approach. IEEE Trans Autom. Sci. Eng. 3(3): 330-338 (2006)

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