"Deposition High Quality P-type Microcrystalline Silicon Thin Films by ..."

Qunchao Guo, Xinhua Geng (2019)

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DOI: 10.1109/ICSAI48974.2019.9010228

access: closed

type: Conference or Workshop Paper

metadata version: 2020-03-09

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Qunchao Guo, Xinhua Geng:
Deposition High Quality P-type Microcrystalline Silicon Thin Films by RF-PECVD. ICSAI 2019: 263-267

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