"The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual ..."

Tze Chiang Tin et al. (2021)

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DOI: 10.1109/ACCESS.2021.3103235

access: open

type: Journal Article

metadata version: 2021-09-02

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Tze Chiang Tin, Saw Chin Tan, Hing Yong, Jimmy Ook Hyun Kim, Eric Ken Yong Teo, Joanne Ching Yee Wong, Ching Kwang Lee, Peter Than, Angela Pei San Tan, Siew Chee Phang:
The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing. IEEE Access 9: 114255-114266 (2021)

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