"On-chip electrometer using MEMS parallel-plate pull-in sensing."

Russell Y. Webb, Noel C. MacDonald (2007)

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DOI: 10.1504/IJISTA.2007.014132

access: closed

type: Journal Article

metadata version: 2020-07-09

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Russell Y. Webb, Noel C. MacDonald:
On-chip electrometer using MEMS parallel-plate pull-in sensing. Int. J. Intell. Syst. Technol. Appl. 3(1/2): 149-162 (2007)

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