"Charged device model metrology: limitations and problems."

Leo G. Henry et al. (2002)

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DOI: 10.1016/S0026-2714(02)00055-0

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type: Journal Article

metadata version: 2020-02-22

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Leo G. Henry, Jon Barth, Hugh Hyatt, Tom Diep, Michael Stevens:
Charged device model metrology: limitations and problems. Microelectron. Reliab. 42(6): 919-927 (2002)

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