As a guest user you are not logged in or recognized by your IP address. You have
access to the Front Matter, Abstracts, Author Index, Subject Index and the full
text of Open Access publications.
In view of the high total cost of semiconductor manufacturing assets, respective equipment needs to be as productive as possible. To avoid needless idling and unnecessary downtime, scheduling and maintenance strategies are important in practice. This paper presents a novel approach to reduce the substantial setup costs inherent to ion implantation by deriving scheduling constraints based on current equipment conditions. Consequently, a supervised learning pipeline is established that utilizes built-in sensors and process target data to accurately predict setup costs. The derived constraints are integrated into scheduling, thereby enhancing its efficiency through dynamic dispatching adaptations. The application of our method is projected to significantly improve equipment availability by avoiding more than 100 hours of potential downtime annually.
This website uses cookies
We use cookies to provide you with the best possible experience. They also allow us to analyze user behavior in order to constantly improve the website for you. Info about the privacy policy of IOS Press.
This website uses cookies
We use cookies to provide you with the best possible experience. They also allow us to analyze user behavior in order to constantly improve the website for you. Info about the privacy policy of IOS Press.