A micro opto-mechanical displacement sensor is here presented. It is constituted by a sensing element based on two overlapped micro-diffraction gratings ...
Abstract― A micro opto-mechanical displacement sensor is here presented. It is constituted by a sensing element based on two overlapped micro-diffraction ...
It is constituted by a sensing element based on two overlapped micro-diffraction gratings (MDGs). They present a platinum layer (45 nm of thick) on a glass ...
Design and Characterization of a Micro-opto-mechanical ...
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In this chapter we report on the working principle, design, and experimental characterization of a micro-opto-mechanical displacement sensor, which exploits the ...
A micro opto-mechanical displacement sensor based on micro-diffraction gratings: Design and characterization. D Accoto, E Schena, M Cidda, M Francomano, P ...
This paper describes a compact and low cost micro-opto-electro-mechanical displacement sensor. Our purpose is the fabrication of a long range, ...
In this review, we briefly summarize different techniques for high-precision displacement sensing based on MOEMS and discuss the challenges for future ...
A micro opto-mechanical displacement sensor based on micro-diffraction gratings: Design and characterization. D Accoto, E Schena, M Cidda, M Francomano, P ...
In this paper, a displacement sensor based on polarization phase shifting with nanometer-level resolution and an extended range of operation is presented.
This dissertation presents the design, implementation, and characterization of a miniaturized optomechanical displacement sensor system heterogeneously ...
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