This paper presents a high-performance interface for eddy current displacement sensors, intended for use in IC fabrication equipment.
Oct 1, 2013 · Abstract: This paper presents an integrated interface for eddy-current sensors (ECSs) for displacement measurement.
An integrated interface for eddy-current sensors (ECSs) for displacement measurement that achieves a considerably better trade-off between power consumption ...
Apr 25, 2024 · An interface for eddy current displacement sensors with 15-bit resolution and 20 MHz excitation. ESSCIRC 2010: 290-293. [+][–]. 2000 – 2009.
Nov 1, 2019 · Nabavi et al. An interface for eddy-current displacement sensors with 15-bit resolution and 20 MHz excitation. IEEE J. Solid-State Circuits.
Online publicatie dd 20 december 2012. An interface for eddy-current displacement sensors with 15-bit resolution and 20 MHz excitation M. R. Nabavi ...
An Interface for Eddy-Current Displacement Sensors With 15-bit Resolution and 20 MHz Excitation. MR Nabavi, M Pertijs, S Nihtianov. Solid-State Circuits, IEEE ...
An excitation frequency of 20 MHz enables the accurate sensing of targets with only a few tens of ?m thick conductive surfaces. The ADC sampling frequency is ...
In this paper we propose an interface system for low-power, high-resolution, and low-thermal-drift eddy-current displacement sensors. Section II presents a ...
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This paper presents a comprehensive study of demodulation techniques for high-frequency self-oscillating eddy-current displacement sensor (ECDS) interfaces.