The failure to deliver reticles in an accurate and timely manner will negate many of the competitive advantages associated with automated wafer handling.
The failure to deliver reticles in an accurate and timely manner will negate many of the competitive advantages associated with automated wafer handling.
This article addresses the problem of reticle allocation in a stocker of an existing photolithography workshop of a 200 mm semiconductor wafer manufacturing ...
In this paper, we review the application of simulation analysis to explore centralized versus distributed reticle storage and handling alternatives for an ...
Implementing an automated reticle management system (ARMS) requires an evolution from traditional reticle storage and management methodologies. In this paper, ...
Murray and Miller [11] examined and compared two reticle storage system and transport strategies: centralized versus distributed. A simulation model was ...
We review the application of simulation analysis to explore centralized versus distributed reticle storage and handling alternatives for an overall ARMS ...
Missing: material systems:
In this paper, we review the applica- tion of simulation analysis to explore centralized versus distributed reticle storage and handling alternatives for an.
Automated material handling systems: automated reticle handling: a comparison of distributed and centralized reticle storage and transport. WSC 2003: 1360 ...
Automated Reticle Handling: A Comparison of Distributed and Centralized Reticle Storage and Transport Anne M. Murray and David J. Miller (IBM ...