We show, for the first time, a BEOL carbon nanotube FET (CNFET) + Resistive RAM (RRAM) stack through monolithic 3D (M3D) integration, directly over silicon (Si ...

We present a foundry M3D technology offering that provides a BEOL CNFET+RRAM directly over FEOL silicon CMOS. For the first time, we demonstrate this technology ...

In this work, we present a novel 3D RRAM structure using low-dimensional materials, including 2D graphene and 1D carbon nanotube (CNT), as the edge electrodes.

“Foundry Monolithic 3D BEOL Transistor + Memory Stack: Iso-performance and Iso-footprint BEOL Carbon Nanotube FET+RRAM vs. FEOL Silicon FET+RRAM”, IEEE Symp.

Jul 23, 2024 · Paper Title: Foundry Monolithic 3D BEOL Transistor + Memory Stack : Iso-performance and Iso-footprint BEOL Carbon Nanotube FET+RRAM vs. FEOL ...

Jan 25, 2024 · ... Foundry Monolithic 3D BEOL Transistor + Memory Stack: Iso-performance and Iso-footprint BEOL Carbon Nanotube FET+RRAM vs. FEOL Silicon FET+RRAM” ...

This thesis experimentally implements and demonstrates foundry monolithic 3D using beyond-silicon nanotechnologies as a complementary integration path.

Foundry Monolithic 3D BEOL Transistor + Memory Stack: Iso-performance and Iso-footprint BEOL Carbon Nanotube FET+RRAM vs. FEOL Silicon FET+RRAM. VLSI ...

M. Nelson's 5 research works with 100 citations, including: Foundry Monolithic 3D BEOL Transistor + Memory Stack: Iso-performance and Iso-footprint BEOL ...

Apr 25, 2024 · Foundry Monolithic 3D BEOL Transistor + Memory Stack: Iso-performance and Iso-footprint BEOL Carbon Nanotube FET+RRAM vs. FEOL Silicon FET+RRAM.