This paper presents an alternative for the control of parallel-plate electrostatic actuators, which combines the techniques of trajectory planning and robust ...
The goal of this paper is to present a method for the design of control systems for electrostatically actuated. MEMS, which can meet different performance ...
This paper presents an alternative for the control of parallel-plate electrostatic actuators, which combines the techniques of trajectory planning and robust ...
On the differential flatness and control of electrostatically actuated ...
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Abstract— Extending the stable travelling range of actuators forms one of the central topics in the control of electro- statically actuated MEMS.
This paper presents an alternative for the control of parallel-plate electrostatic actuators, which combines the techniques of trajectory planning and robust ...
Controlling the charge, rather than the voltage, on a parallel-plate, electrostatic actuator theoretically permits stable operation for all deflections.
Jun 16, 2010 · Based on the control signals, the DM changes its shape and provides the conjugate corrections to the optical distortions. Clearly, the typical ...
This paper presents an alternative for the control of parallel-plate electrostatic actuators, which is based on an essential property of nonlinear systems, ...
Oct 22, 2024 · ... Electrostatically Actuated MEMS ... differential flatness, and combines the techniques of trajectory planning and robust nonlinear control.
May 1, 2016 · The article presents an adaptive fuzzy control approach to the problem of control of electrostatically actuated MEMS, which is based on ...