This work presents two robust control laws for a parallel-plate electrostatic micro-actuator in the presence of uncertainties. The dynamical model of the system ...

Robust Control of an Electrostatically Actuated MEMS in the Presence of Parasitics and Parametric Uncertainties. Guchuan Zhu, Julien Penet, and Lahcen Saydy.

... In this work, we consider both the parasitics and parametric uncertainties, such as the variations of damping coefficient and loop resistance. We make then ...

Robust control of an electrostatically actuated MEMS in the presence of parasitics and parametric uncertainties. Guchuan Zhu, Penet J., Saydy L.

Robust control of an electrostatically actuated MEMS in the presence of parasitics and parametric uncertainties. Guchuan Zhu , J. Penet et Lahcen Saydy.

This work presents two robust control laws for a parallel-plate electrostatic microactuator in the presence of uncertainties. The dynamical model of the system, ...

Zhu et al. [26] presented two robust control laws for a parallel-plate electrostatic microactuator in the presence of parasitics and parametric uncertainties.

... electrostatic micro-actuator systems in the presence of parasitics, parameter uncertainties and external disturbances. This method integrates the adaptive ...

Robust control of an electrostatically actuated MEMS in the presence of parasitics and parametric uncertainties · G. ZhuJulien PenetL. Saydy. Engineering ...

This paper examines control strategies for electrostatically actuated microelectromechanical systems (MEMS), with the goals of using feasible measurements to ...