The wafer handling robot actions in cluster tools used for semiconductor manufacturing should serve to maximize throughput while maintaining good wafer ...

The wafer handling robot actions in cluster tools used for semiconductor manufacturing should serve to maximize throughput while maintaining good wafer ...

Abstract— The wafer handling robot actions in cluster tools used for semiconductor manufacturing should serve to maximize throughput while maintaining good ...

This work develops a branch and bound algorithm to find an optimal robot sequence with minimum wafer delay and suggests a transient sequence based on cyclic ...

The wafer handling robot actions in cluster tools used for semiconductor manufacturing should serve to maximize throughput while maintaining good wafer ...

This work aims to optimize the start-up transient process of a single-arm cluster tool with purge operations and wafer residency time constraints

This work develops a Petri net model for the tool's operational behavior including the initial transient periods as well as the steady cycles and proposes ...

The key to solve this scheduling problem is to find a wafer loading sequence with the highest performance in terms of cycle time. With this idea, this work ...

By building Petri net model for the start-up process, a linear program is derived to search a feasible schedule with minimal makespan for time-constrained ...

Aug 4, 2023 · Jin and J. R. Morrison, “Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints,” in Proc. IEEE Int ...