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Sendahead samples reduce WIP risk but also reduce process throughput and tool utilization. Integrated metrology minimizes risk but may decrease throughput rate.
This paper explores the operational benefits of inte- grated metrology strategies versus stand-alone metrology via Simulation Modeling. 1 INTRODUCTION. Though ...
Send-ahead samples reduce WIP risk but also reduce process throughput and tool utilization. Integrated metrology minimizes risk but may decrease throughput rate ...
The operational cost of 300mm wafer production is signifi- cantly greater than that of 2OOmm fabs. Real-time moni- toring of product can save time and money ...
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Realizing 300mm Fab Productivity Improvements through Integrated Metrology ... production scheduling in a semiconductor wafer fabrication facility (wafer fab).
K. J. Stanley, Timothy D. Stanley, José Maia: Wafer fabrication: realizing 300mm fab productivity improvements through integrated metrology.
Realizing the potential of Moore's Law requires taking full advantage of device feature size reductions, yield improvement to near 100%, wafer size ...
Realizing 300 mm fab productivity improvements through integrated metrology · Engineering. Proceedings of the Winter Simulation Conference · 2002.
Wafer fabrication: realizing 300mm fab productivity improvements through integrated metrology · Jose Antonio Maia. Winter Simulation Conference, 2002. The ...
KLA's wafer manufacturing portfolio includes defect inspection and review, metrology and data management systems that help manufacturers manage quality.
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