FTIR spectroscopy for the hermeticity assessment of micro-cavities
D Veyrié, D Lellouchi, JL Roux, F Pressecq… - Microelectronics …, 2005 - Elsevier
This paper presents an alternative method for the hermeticity assessment of micro-cavities.
The method consists in monitoring the internal gas pressure of a cavity by Fourier Transform
Infra Red (FTIR) spectroscopy, and then deducing the cavity's leak rate from the pressure
variations. In order to carry out the IR transmission measurements, nitrous oxide was chosen
as bombing gas due to its excellent absorption properties for mid-IR radiations. First FTIR
spectroscopy measurements performed on test vehicles have demonstrated the method …
The method consists in monitoring the internal gas pressure of a cavity by Fourier Transform
Infra Red (FTIR) spectroscopy, and then deducing the cavity's leak rate from the pressure
variations. In order to carry out the IR transmission measurements, nitrous oxide was chosen
as bombing gas due to its excellent absorption properties for mid-IR radiations. First FTIR
spectroscopy measurements performed on test vehicles have demonstrated the method …
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