[CITATION][C] Mechanical reliability of MEMS-structures under shock load
U Wagner, J Franz, M Schweiker, W Bernhard… - Microelectronics …, 2001 - Elsevier
For automotive applications, the mechanical reliability of MEMS-structures in accelerometers
and gyroscopes has to be ensured for harsh conditions. In this paper, we consider shock-
type loads which arise during drop-tests. These may lead to unforeseen contact of moving
structures, inducing large stresses potentially damaging the structures. We demonstrate an
approach to improve shock resistance using dynamic finite element analysis for the case of
polysilicon cantilevers. Comparison of the results with experimental data validates the …
and gyroscopes has to be ensured for harsh conditions. In this paper, we consider shock-
type loads which arise during drop-tests. These may lead to unforeseen contact of moving
structures, inducing large stresses potentially damaging the structures. We demonstrate an
approach to improve shock resistance using dynamic finite element analysis for the case of
polysilicon cantilevers. Comparison of the results with experimental data validates the …
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