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IP address: 172.70.127.97
Time: 2024-09-23T20:22:20Z
URL: https://scholar.google.com/scholar?q=Two-Dimensional+Micro-%2FNanoradian+Angle+Generator+with+High+Resolution+and+Repeatability+Based+on+Piezo-Driven+Double-Axis+Flexure+Hinge+and+Three+Capacitive+Sensors