Summary
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An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography Zhen MA David M. KLYMYSHYN Sven ACHENBACH Martin BORNER Nina DAMBROWSKY Jurgen MOHR Publication IEICE TRANSACTIONS on Electronics Vol.E90-C No.12 pp.2192-2197 Publication Date: 2007/12/01 Online ISSN: 1745-1353 DOI: 10.1093/ietele/e90-c.12.2192 Print ISSN: 0916-8516 Type of Manuscript: Special Section PAPER (Special Section on Recent Technologies for Microwave and Millimeter-wave Passive Devices) Category: Keyword: cavity resonators, micromachining, RF MEMS, X-ray lithography, high Q, Full Text: PDF(706KB)>>
Summary: An ultra-deep polymer cavity structure exposed using deep X-ray lithography is used as a template for metal electroforming to produce a 24-GHz cavity resonator. The metal cavity is 1.8 mm deep and has impressive structure, including extremely vertical and smooth sidewalls, resulting in low conductor loss. The measured resonator has an unloaded quality factor of above 1800 at a resonant frequency of 23.89 GHz. | |||||
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