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Authors: Eric Syrbe ; Sebastian Buettner ; Michael Pfeifer and Steffen Weissmantel

Affiliation: Laserinstitut Hochschule Mittweida, Technikumplatz 17, Mittweida, Germany

Keyword(s): Excimer Laser, Micro-Optics, Micro-Lenses, Fluorine Laser, Direct Laser Fabrication, Micro Machining.

Abstract: Fluorine laser micro-structuring enables the generation of micro-optics in glasses and other wide band gap materials. For the generation of micro-lenses, we developed a new micro-structuring method and the appropriate hardware. The process is based on the mask projection technique and uses a set of different circular masks, which are placed consecutively within the laser beam. This creates a ring-shaped ablation area with variable inner radius. By using an appropriate set of masks, it is possible to generate a surface with a defined spherical shape. The measured radii of curvature of the structured micro-lenses are in the range of 90 μm up to 250 μm with corresponding surface roughness values to below 100 nm. The entire process and requirements are described, and the results are presented.

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Paper citation in several formats:
Syrbe, E. ; Buettner, S. ; Pfeifer, M. and Weissmantel, S. (2024). Developing a Sequential Mask Projection Technique for Micro-Lens Generation Using Excimer Laser Micro-Structuring. In Proceedings of the 12th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS; ISBN 978-989-758-686-6; ISSN 2184-4364, SciTePress, pages 21-27. DOI: 10.5220/0012377400003651

@conference{photoptics24,
author={Eric Syrbe and Sebastian Buettner and Michael Pfeifer and Steffen Weissmantel},
title={Developing a Sequential Mask Projection Technique for Micro-Lens Generation Using Excimer Laser Micro-Structuring},
booktitle={Proceedings of the 12th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS},
year={2024},
pages={21-27},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0012377400003651},
isbn={978-989-758-686-6},
issn={2184-4364},
}

TY - CONF

JO - Proceedings of the 12th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS
TI - Developing a Sequential Mask Projection Technique for Micro-Lens Generation Using Excimer Laser Micro-Structuring
SN - 978-989-758-686-6
IS - 2184-4364
AU - Syrbe, E.
AU - Buettner, S.
AU - Pfeifer, M.
AU - Weissmantel, S.
PY - 2024
SP - 21
EP - 27
DO - 10.5220/0012377400003651
PB - SciTePress

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