But at 7nm the volume of data that needs to be processed is expected ... There will be some violations with the cut, which is for the mask layer. And there must be a termination rule with each block.” ...

There are other aspects as well. “The EUV mask infrastructure is ready for the insertion of EUV at 7nm,” said Meng Lee, director of product marketing at Veeco. “Mask manufacturers have been working ...

This paper will discuss the Metal DRC violations (7nm Technology) generally seen at the block level ... with the name CM1B.O.*. It is due to the overlapping of CutMetalM1 of Mask 2 or (Mask B) and the ...