Product: Diborane P-4586-E Date: September 2004

Praxair Material Safety Data Sheet

1. Chemical Product and Company Identification

Product Name: Diborane, compressed (MSDS No. Trade Name: Diborane

P-4586-E)
Chemical Name: Diborane Synonyms: Boroethane, boron hydride,
diboron hexahydride
Formula: B2H6 Chemical Family: Inorganic hydride
Telephone: Emergencies: 1-800-645-4633* Company Name: Praxair, Inc.
CHEMTREC: 1-800-424-9300* 39 Old Ridgebury Road
Routine: 1-800-PRAXAIR Danbury, CT 06810-5113
* Call emergency numbers 24 hours a day only for spills, leaks, fire, exposure, or accidents involving this
product. For routine information, contact your supplier, Praxair sales representative, or call
1-800-PRAXAIR (1-800-772-9247).

2. Composition/Information on Ingredients
See section 16 for important information about mixtures.
INGREDIENT CAS NUMBER CONCENTRATION OSHA PEL ACGIH TLV-TWA (2004)
Diborane 19287-45-7 >99%* 0.1 ppm 0.1 ppm
* The symbol > means “greater than.”

3. Hazards Identification

EMERGENCY OVERVIEW
DANGER! Toxic, flammable high-pressure gas.
May be fatal if inhaled.
May cause respiratory system, kidney, and nervous system damage.
Symptoms may be delayed.
Can ignite on contact with air.
May form explosive mixtures with air.
Causes eye and skin irritation.
May cause asthmatic reaction.
Self-contained breathing apparatus must be worn by rescue workers.
Odor: Sickly sweet.
THRESHOLD LIMIT VALUE: TLV-TWA 0.1 ppm (ACGIH, 2004). TLV-TWAs should be used as a
guide in the control of health hazards and not as fine lines between safe and dangerous concentrations.

Copyright © 1980, 1985, 1992, 1997, 2000, 2004, Praxair Technology, Inc. Page 1 of 8
All rights reserved.
Revised
Product: Diborane P-4586-E Date: September 2004

EFFECTS OF A SINGLE (ACUTE) OVEREXPOSURE:

INHALATION–May be fatal if inhaled. Diborane may irritate the respiratory tract, causing
headache, coughing, nausea, tightening of the chest, shortness of breath, chills, fever, and weakness.
May also damage the liver, kidneys, and central nervous system, producing drowsiness, dizziness,
blurred vision, muscle twitching, and, possibly, painful muscle spasms. Lack of oxygen can kill.
SKIN CONTACT–Diborane may irritate the skin, causing redness, possible swelling, and blisters.
SWALLOWING–An unlikely route of exposure. This product is a gas at normal temperature and
pressure.
EYE CONTACT–Diborane may irritate the eyes, causing redness and swelling of the conjunctiva.
EFFECTS OF REPEATED (CHRONIC) OVEREXPOSURE: Repeated exposure may sensitize
susceptible individuals, causing chronic respiratory distress.
OTHER EFFECTS OF OVEREXPOSURE: None known.
MEDICAL CONDITIONS AGGRAVATED BY OVEREXPOSURE: Because of its irritating
properties, diborane may aggravate an existing dermatitis.
SIGNIFICANT LABORATORY DATA WITH POSSIBLE RELEVANCE TO HUMAN HEALTH
HAZARD EVALUATION: None known.
CARCINOGENICITY: Diborane is not listed by NTP, OSHA, and IARC.

4. First Aid Measures

INHALATION: Immediately remove to fresh air. If not breathing, give artificial respiration. If
breathing, qualified personnel should give oxygen. Call a physician, even if no symptoms are present.
Consider any exposure as a potentially toxic dose.
SKIN CONTACT: Remove contaminated clothing and wash skin using plenty of soap and water. Wash
clothing before reuse. Call a physician.
SWALLOWING: An unlikely route of exposure. This product is a gas at normal temperature and
pressure.
EYE CONTACT: Immediately flush eyes thoroughly with warm water for at least 15 minutes. Hold the
eyelids open and away from the eyeballs to ensure that all surfaces are flushed thoroughly. Seek the
advice of a physician, preferably an ophthalmologist, immediately.
NOTES TO PHYSICIAN: Keep victims of overexposure under medical observation for 72 hours for
delayed onset of pulmonary edema. There is no specific antidote. Treatment should be directed at the
control of symptoms and the clinical condition of the patient
Contact the Poison Control Center in your area for additional information on patient management and
follow-up.

5. Fire Fighting Measures

FLASH POINT (test method): -130°F (-90°C) TCC
AUTOIGNITION TEMPERATURE: 125°F (51.7°C)
FLAMMABLE LIMITS IN AIR, % by volume: LOWER: 0.9% UPPER: 98%
EXTINGUISHING MEDIA: Diborane reacts violently with halogenated fire extinguishing agents, e.g.,
halon, carbon tetrachloride, etc. Protein-based foam or water is recommended.

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Product: Diborane P-4586-E Date: September 2004

SPECIAL FIRE FIGHTING PROCEDURES: DANGER! Toxic, flammable high-pressure gas

(see section 3). Evacuate all personnel from danger area. Do not approach area without self-contained
breathing apparatus and protective clothing. Immediately cool cylinders with water spray from maximum
distance, taking care not to extinguish flames. Remove ignition sources if without risk. If flames are
accidentally extinguished, explosive reignition may occur. Reduce toxic vapors with water spray or fog.
Stop flow of gas if without risk, while continuing cooling water spray. Reverse flow into cylinders may
cause rupture. Remove all cylinders from area of fire if without risk. Allow fire to burn out. On-site fire
brigades must comply with OSHA 29 CFR 1910.156.
UNUSUAL FIRE AND EXPLOSION HAZARDS: Toxic, flammable gas. May form explosive
mixtures with air and oxidizing agents. Heat of fire can build pressure in cylinder and cause it to rupture;
no part of cylinder should be subjected to a temperature higher than 125°F (52°C). Cylinders containing
diborane mixtures may be equipped with a pressure relief device. To provide maximum containment up to
cylinder burst pressure, cylinders of pure diborane are not equipped with a pressure relief device. If
leaking or spilled diborane catches fire, do not extinguish flames. Flammable and toxic vapors may
spread from leak and could explode if reignited by sparks or flames. Explosive atmospheres may linger.
Before entering area, especially confined areas, check with an appropriate device. To protect persons
from cylinder fragments and toxic fumes should a rupture occur, evacuate the area if the fire cannot be
brought under immediate control.
Diborane may ignite spontaneously in air at or slightly above room temperature. The concentration
required for ignition is, however, well above the permissible exposure level (TLV-TWA, section 2).
HAZARDOUS COMBUSTION PRODUCTS: Combustion of diborane in air or oxygen produces
boron oxide (B2O3).

6. Accidental Release Measures

STEPS TO BE TAKEN IF MATERIAL IS RELEASED OR SPILLED: DANGER! Toxic,
flammable high-pressure gas. Immediately evacuate all personnel from danger area. Do not approach
area without self-contained breathing apparatus and protective clothing. May form explosive mixtures
with air (see section 5). Before entering area, especially a confined area, check atmosphere with an
appropriate device. Remove all sources of ignition if without risk. Reduce vapors with fog or fine water
spray. Reverse flow into cylinder may cause rupture. Shut off flow if without risk. Ventilate area or move
cylinder to well-ventilated area. Prevent runoff from contaminating surrounding environment. Poisonous,
flammable vapors may spread from spill.
WASTE DISPOSAL METHOD: Prevent waste from contaminating the surrounding environment.
Keep personnel away. Discard any product, residue, disposable container, or liner in an environmentally
acceptable manner, in full compliance with federal, state, and local regulations. If necessary, call your
local supplier for assistance.

7. Handling and Storage

PRECAUTIONS TO BE TAKEN IN STORAGE: Store and use with adequate ventilation. Separate
diborane cylinders from oxygen and other oxidizers by at least 20 ft (6.1 m) or use a barricade of
noncombustible material. This barricade should be at least 5 ft (1.53 m) high and have a fire resistance
rating of at least ½ hour. Firmly secure cylinders upright to keep them from falling or being knocked
over. Screw valve protection cap firmly in place by hand. Store only where temperature will not exceed
125°F (52°C). Store full and empty cylinders separately. Use a first-in, first-out inventory system to
prevent storing full cylinders for long periods. Post “No Smoking or Open Flames” signs in storage and
use areas. There must be no sources of ignition. All electrical equipment in storage areas must be
explosion-proof. Storage areas must meet national electric codes for Class 1 hazardous areas.

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Product: Diborane P-4586-E Date: September 2004

PRECAUTIONS TO BE TAKEN IN HANDLING: Protect cylinders from damage. Use a suitable

hand truck to move cylinders; do not drag, roll, slide, or drop. Electrical equipment must be non-sparking
or explosion-proof. Never attempt to lift a cylinder by its cap; the cap is intended solely to protect the
valve. Never insert an object (e.g., wrench, screwdriver, pry bar) into cap openings; doing so may damage
the valve and cause a leak. Use an adjustable strap wrench to remove over-tight or rusted caps. Open
valve slowly. If valve is hard to open, discontinue use and contact your supplier. For other precautions in
using diborane, see section 16.
For further information on storage, handling, and use of this product, see NFPA 55, Standard for the
Storage, Use, and Handling of Compressed and Liquefied Gases in Portable Cylinders, published by the
National Fire Protection Association.

8. Exposure Controls/Personal Protection

VENTILATION/ENGINEERING CONTROLS:
LOCAL EXHAUST–Use explosion-proof local exhaust ventilation with sufficient air flow to keep
the diborane concentration below the TLV in the worker’s breathing zone.
MECHANICAL (general)–Not recommended as a primary ventilation system to control worker’s
exposure.
SPECIAL–A canopy type of forced-air fume hood equipped with an explosion-proof device may be
more desirable for certain applications.
OTHER–None
RESPIRATORY PROTECTION: Use an air-supplied respirator or a full-face, positive-pressure, self-
contained breathing apparatus. Respiratory protection must conform to OSHA 29 CFR 1910.134. Select
per OSHA 29 CFR 1910.134 and ANSI Z88.2.
SKIN PROTECTION: Neoprene. (Rubber is attacked by diborane.)
EYE PROTECTION: Wear safety glasses when handling cylinders. Select per OSHA 29 CFR
1910.133.
OTHER PROTECTIVE EQUIPMENT: Metatarsal shoes for cylinder handling and protective
clothing where needed. Select per OSHA 29 CFR 1910.132 and 1910.133. Regardless of protective
equipment, never touch live electrical parts.

9. Physical and Chemical Properties

MOLECULAR WEIGHT: 27.67
SPECIFIC GRAVITY (Air = 1) at 70°F (21.1°C) and 1 atm: .955
SOLUBILITY IN WATER: Reacts
PERCENT VOLATILES BY VOLUME: 100
BOILING POINT at 1 atm: -134.5°F (-92.5°C)
MELTING POINT at 1 atm: -265.9°F (-165.5°C)
APPEARANCE, ODOR, AND STATE: Colorless gas at normal temperature and pressure;
repulsive, sickly sweet odor.

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Product: Diborane P-4586-E Date: September 2004

10. Stability and Reactivity

STABILITY: Unstable Stable
INCOMPATIBILITY (materials to avoid): Hydrocarbons, amines, aluminum, lithium, rubber, air,
water, oxidizing agents, halogens, halogenated compounds, nitric acid, liquefied nitrogen trifluoride.
HAZARDOUS DECOMPOSITION PRODUCTS: Boron dust, hydrogen, higher boranes. Above
572°F (300°C), diborane begins to dissociate into hydrogen and boron. It is hydrolyzed by water to form
hydrogen and boric acid.
HAZARDOUS POLYMERIZATION: May Occur Will Not Occur
CONDITIONS TO AVOID: Heat, contact with air or water. (See section 16.) Explodes on contact with
chlorine or oxygen.

11. Toxicological Information

LC50 = 80 ppm, 1 hr, rat. See section 3.

12. Ecological Information

No information available on ecological effects. Diborane does not contain any Class I or Class II ozone-
depleting chemicals. Diborane is not listed as a marine pollutant by DOT.

13. Disposal Considerations

WASTE DISPOSAL METHOD: Do not attempt to dispose of residual or unused quantities. Return
cylinder to supplier.

14. Transport Information

DOT/IMO SHIPPING NAME: Diborane, compressed
HAZARD IDENTIFICATION PRODUCT
CLASS: 2.3 NUMBER: UN 1911 RQ: None
SHIPPING LABEL(s): POISON GAS, FLAMMABLE GAS*
PLACARD (when required): POISON GAS, FLAMMABLE GAS*
*The words in the POISON GAS diamond are INHALATION HAZARD.
SPECIAL SHIPPING INFORMATION: Cylinders should be transported in a secure position, in a
well-ventilated vehicle. Cylinders transported in an enclosed, nonventilated compartment of a vehicle can
present serious safety hazards.
Additional Marking: INHALATION HAZARD
Shipment of compressed gas cylinders that have been filled without the owner’s consent is a violation of
federal law [49 CFR 173.301(b)].

15. Regulatory Information

The following selected regulatory requirements may apply to this product. Not all such requirements are
identified. Users of this product are solely responsible for compliance with all applicable federal, state,
and local regulations.

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Product: Diborane P-4586-E Date: September 2004

U.S. FEDERAL REGULATIONS:

EPA (ENVIRONMENTAL PROTECTION AGENCY)
CERCLA: COMPREHENSIVE ENVIRONMENTAL RESPONSE, COMPENSATION, AND
LIABILITY ACT OF 1980 (40 CFR Parts 117 and 302):
Reportable Quantity (RQ): None
SARA: SUPERFUND AMENDMENT AND REAUTHORIZATION ACT:
SECTIONS 302/304: Require emergency planning based on Threshold Planning Quantity
(TPQ) and release reporting based on Reportable Quantities (RQ) of Extremely Hazardous
Substances (EHS) (40 CFR Part 355):
TPQ: 100 lb
EHS RQ: 100 lb
SECTIONS 311/312: Require submission of MSDSs and reporting of chemical inventories
with identification of EPA hazard categories. The hazard categories for this product are as
follows:
IMMEDIATE: Yes PRESSURE: Yes
DELAYED: Yes REACTIVITY: Yes
FIRE: Yes
SECTION 313: Requires submission of annual reports of release of toxic chemicals that
appear in 40 CFR Part 372.
Diborane does not require reporting under Section 313.
40 CFR 68: RISK MANAGEMENT PROGRAM FOR CHEMICAL ACCIDENTAL
RELEASE PREVENTION: Requires development and implementation of risk management
programs at facilities that manufacture, use, store, or otherwise handle regulated substances in
quantities that exceed specified thresholds.
Diborane is listed as a regulated substance in quantities of 2,500 pounds (1,134 kg) or greater.
TSCA: TOXIC SUBSTANCES CONTROL ACT: Diborane is listed on the TSCA inventory.
OSHA: OCCUPATIONAL SAFETY AND HEALTH ADMINISTRATION:
29 CFR 1910.119: PROCESS SAFETY MANAGEMENT OF HIGHLY HAZARDOUS
CHEMICALS: Requires facilities to develop a process safety management program based on
Threshold Quantities (TQ) of highly hazardous chemicals.
Diborane is listed in Appendix A as a highly hazardous chemical in quantities of 100 pounds
(45.5 kg) or greater.
STATE REGULATIONS:
CALIFORNIA: This product is not listed by California under the SAFE DRINKING WATER AND
TOXIC ENFORCEMENT ACT OF 1986 (Proposition 65).
PENNSYLVANIA: This product is subject to the PENNSYLVANIA WORKER AND
COMMUNITY RIGHT-TO-KNOW ACT (35 P.S. Sections 7301-7320).

16. Other Information

Be sure to read and understand all labels and instructions supplied with all containers of this product.
OTHER HAZARDOUS CONDITIONS OF HANDLING, STORAGE, AND USE: Toxic,
flammable high-pressure gas. May be fatal if inhaled. Do not breathe gas. Do not get vapors or liquid in
eyes, on skin, or on clothing. (See section 3.) Have safety showers and eyewash fountains immediately
available. Use piping and equipment adequately designed to withstand pressures to be encountered.

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Product: Diborane P-4586-E Date: September 2004

Prevent reverse flow. Reverse flow into cylinder may cause rupture. Use a check valve or other protective
device in any line or piping from the cylinder. May form explosive mixtures with air. Keep away from
heat, sparks or open flame. Ground all equipment. Use only spark-proof tools and explosion-proof
equipment. Keep away from oxidizing agents and from other flammables. Store and use with adequate
ventilation at all times. Use only in a closed system. Close valve after each use; keep closed even when
empty. Never work on a pressurized system. If there is a leak, close the cylinder valve. Blow down the
system in an environmentally safe manner in compliance with all federal, state, and local laws; then repair
the leak. Follow safe practices when returning cylinder to supplier. Be sure valve is closed; then install
valve outlet plug tightly. Never place a compressed gas cylinder where it may become part of an
electrical circuit.
Recommended Equipment: In semiconductor process gas and other suitable applications, Praxair
recommends the use of engineering controls such as gas cabinet enclosures, automatic gas panels (used to
purge systems on cylinder changeout), excess-flow valves throughout the gas distribution system, double
containment for the distribution system, and continuous gas monitors.
NOTE: Prior to using any plastics, confirm their compatibility with diborane.
MIXTURES: When you mix two or more gases or liquefied gases, you can create additional,
unexpected hazards. Obtain and evaluate the safety information for each component before you produce
the mixture. Consult an industrial hygienist or other trained person when you evaluate the end product.
Remember, gases and liquids have properties that can cause serious injury or death.
HAZARD RATING SYSTEMS:
NFPA RATINGS: HMIS RATINGS:
HEALTH =4 HEALTH =2
FLAMMABILITY =4 FLAMMABILITY =4
INSTABILITY =3 PHYSICAL HAZARD =3
SPECIAL =W
STANDARD VALVE CONNECTIONS FOR U.S. AND CANADA:
THREADED: CGA-350 connection is standard.
PIN-INDEXED YOKE: Not applicable
ULTRA-HIGH-INTEGRITY CONNECTION: CGA-632
Use the proper CGA connections. DO NOT USE ADAPTERS. Additional limited-standard
connections may apply. See CGA pamphlets V-1 and V-7 listed below.
Ask your supplier about free Praxair safety literature as referred to in this MSDS and on the label for this
product. Further information about this product can be found in the following pamphlets published by the
Compressed Gas Association, Inc. (CGA), 4221 Walney Road, 5th Floor, Chantilly, VA 20151-2923,
Telephone (703) 788-2700, Telephone (703) 412-0900, http://www.cganet.com/Publication.asp.
AV-1 Safe Handling and Storage of Compressed Gases
P-1 Safe Handling of Compressed Gases in Containers
V-1 Compressed Gas Cylinder Valve Inlet and Outlet Connections
V-7 Standard Method of Determining Cylinder Valve Outlet Connections for Industrial Gas
Mixtures
— Handbook of Compressed Gases, Fourth Edition

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Product: Diborane P-4586-E Date: September 2004

Praxair asks users of this product to study this MSDS and become aware of product hazards and safety
information. To promote safe use of this product, a user should (1) notify employees, agents, and
contractors of the information in this MSDS and of any other known product hazards and safety
information, (2) furnish this information to each purchaser of the product, and (3) ask each purchaser to
notify its employees and customers of the product hazards and safety information.

The opinions expressed herein are those of qualified experts within Praxair, Inc. We
believe that the information contained herein is current as of the date of this Material
Safety Data Sheet. Since the use of this information and the conditions of use of the
product are not within the control of Praxair, Inc., it is the user’s obligation to
determine the conditions of safe use of the product.

Praxair MSDSs are furnished on sale or delivery by Praxair or the independent distributors and suppliers
who package and sell our products. To obtain current Praxair MSDSs for these products, contact your
Praxair sales representative or local distributor or supplier, or download from www.praxair.com. If you
have questions regarding Praxair MSDSs, would like the form number and date of the latest MSDS, or
would like the names of the Praxair suppliers in your area, phone or write the Praxair Call Center (Phone:
1-800-PRAXAIR; Address: Praxair Call Center, Praxair, Inc., PO Box 44, Tonawanda, NY 14151-0044).
Praxair and the Flowing Airstream design are trademarks or registered trademarks of
Praxair Technology, Inc. in the United States and other countries.

Praxair, Inc.
39 Old Ridgebury Road
Danbury, CT 06810-5113

Printed in USA Page 8 of 8