Cleanroom HVAC Fundamental and

Energy Saving System

ASHRAE Indonisia Chapter, February 10, 2015

Wei Sun, P.E.

ASHRAE
Distinguished Lecturer
“Clean Spaces” Technical Committee (TC9.11) Chair (07-10)
“Healthcare Facilities” Technical Committee (TC9.6) Member
“Laboratory Systems” Technical Committee (TC9.10) Member
Society CTTC Committee Chair (12-13)
IEST
Society Vice President
ISO 14644 Standard, USA Representative
ENGSYSCO, INC.
President
Ann Arbor, Michigan
Web: www.engsysco.com Engsysco
Email: [email protected]
 Outline
Session 1

Classifications & Standards

Particle sources
Airflow quantity and pattern and floor arrangement
Airflow modeling & options to lower fan energy
consumption
Pressurization
Airlock performance and CFD simulation
 Outline
Session 2

Primary, secondary and tertiary HVAC air handling

systems design strategies
Demand flow control to conserve fan energy
Architectural construction materials, cleaning
procedures, testing standards
New demand flow control methods – manual and
automatic approaches
Samples of design/renovation photos and ideas
 Session 1:
Cleanroom Design Considerations
Cleanroom Design Considerations
(Applications)

Semiconductor Medical Devices

Microelectronic Optical Devices
Pharmaceutical Hospital
Biotechnology University Labs
Aerospace Food Processing
Automotive Miscellaneous
 Cleanroom Design Considerations
(Controlled Parameters)

Cleanroom - A special enclosed area, its environment

typically has the following controlled parameters:

Temperature Airflow Pattern

Humidity Room Pressure
Sound and Vibration Particle Contamination
Lighting (Airborne, Surface & Liquid-borne)
etc. Microbial Contamination
(Airborne, Surface & Liquid-borne)
Common Requirements
Electrostatic Discharge
Gaseous Contamination
Process Specifics
Special Requirements
 Cleanroom Standards in US
(Previous US Federal Standard and Current ISO Standards)
U.S. Federal
Airborne particulate cleanliness classes in cleanrooms and clean zones
Standard
(former US standard, canceled in November 2001)
209E

ISO
ISO-14644: Cleanrooms and Associated Controlled Environments
Document

ISO-14644-1 Classification of Air Cleanliness

ISO-14644-2 Cleanroom Testing for Compliance

Methods for Evaluating & Measuring Cleanrooms & Associated Controlled

ISO-14644-3
Environments

ISO-14644-4 Cleanroom Design & Construction

ISO-14644-5 Cleanroom Operations

ISO-14644-6 Terms, Definitions & Units

ISO-14644-7 Enhanced Clean Devices

ISO-14644-8 Molecular Contamination

ISO-14698-1 Biocontamination: Control General Principles

ISO-14698-2 Biocontamination: Evaluation & Interpretation of Data

Biocontamination: Methodology for Measuring Efficiency of Cleaning Inert

ISO-14698-3
Surfaces
 These Two Standards Similar?
(Comparison of FS-209E and ISO-14644 in Combined Table)

0.1 µm 0.2 µm 0.3 µm 0.5 µm 1 µm 5.0 µm

ISO
FS 209
14644 FS 209 ISO 14644 FS 209 ISO 14644 FS 209 ISO 14644 FS 209 ISO 14644 FS 209 ISO 14644 FS 209 ISO 14644
Class
Class
Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3
1 10 2
2 100 24 10 4
1 3 35 1,000 7.5 237 3 102 1 35 8
10 4 350 10,000 75 2,370 30 1,020 10 352 83
100 5 100,000 750 23,700 300 10,200 100 3,520 832 29
1000 6 1,000,000 237,000 102,000 1,000 35,200 8,320 7 293
10,000 7 10,000 352,000 83,200 70 2,930
100,000 8 100,000 3,520,000 832,000 700 29,300
9 35,200,000 8,320,000 293,000
 These Two Standards Similar?
(Air Cleanliness Class Definitions )

Air Cleanliness Class Definition - FS 209

FS 209E ISO 14644
Air Cleanliness Class Definition - ISO 14644

100,000,000 100,000,000

10,000,000 10,000,000
ISO-9
FS-100,000

1,000,000
PARTICLES PER CUBIC METERS

1,000,000

PARTICLES PER CUBIC METERS

ISO-8
FS-10,000

100,000 FS-100 100,000

ISO-7
FS-1,000

10,000 FS-10 10,000

ISO-6
ISO-4

1,000 FS-1 1,000 ISO-5

ISO-3

100 100

ISO-2

10 10
ISO-1

1 1
0.01 0.1 1 10 0.01 0.1 1 10
PARTICLE SIZE, μm PARTICLE SIZE, μm
 These Two
Air Cleanliness Standards
Class Similar?
Definition Comparison
Between FS 209 and ISO 14644
(Comparison of FS-209E and ISO-14644 in Overlapping Chart)
100,000,000

10,000,000
ISO-9

FS-100,000

1,000,000
PARTICLES PER CUBIC METERS

FS-1,000
ISO-8

FS-10,000

100,000 FS-100
ISO-7
ISO-5

10,000 FS-10
ISO-6
ISO-4

1,000 FS-1

ISO-3

100
ISO-2

10
ISO-1

1
0.01 0.1 1 10
PARTICLE SIZE, μm

They are NOT identical, but roughly equivalent under certain classes
and particle sizes.
 ISO 14644 Classification
(Airborne Particle Sizes, Counts and Classifications in 3D Illustration)

Cleanroom Particle Counts Per ISO Classification

100,000,000

10,000,000

1,000,000

100,000
Particle Cou

10,000

1,000

100
nt / m

10

Class 9
3

Class 8
1

Class 7
Class 6
0.1

Class 5
µm 0.2

Class 4
Pa
rtic
µm 0.3
la ss
Class 3
le µm 0.5
s sC
ne
Class 2

Siz µm 1
e( nli
Class 1

Ch µm 5.0
l e a
an µm C
n el)
 Particle Sources & Control
Sources of Contamination Description Control Methods

Tighter exterior wall

construction, exterior
Infiltration through
zone pressurization,
doors, and cracks at
vestibules at main
windows, and walls
Outdoor air entrances, and seal
space penetrations.
Makeup air entering
External
through the air Multiple level filtrations
conditioning systems
Seal wall penetrations,
Infiltration through multiple level
Indoor transfer air doors, windows, and pressurizations &
between rooms wall penetrations for depressurizations to
pipes, ducts, etc. obtain proper airflow
directions
Largest source of
Garments, proper
internal particles: skin
People gowning procedures, air
scales, hair, textile
shower before entry
fibers
Work surface Rubbing one item Use cleanroom suitable
shedding against another or rated furniture
Process Spray, painting, Local filtration and
equipment welding, grinding exhaust
Equipment washing,
cleaning and
Internal Raw and semi-
During transport sterilization before
finished material
entry, use airlock &
pass-through
Liquids, During preparation,
pressurized gases processing and Local exhaust
used in process packaging
Chemicals used Use cleanroom suitable
Out-gassing to room
for cleaning or rated cleaners
Room Dust generated from Constructed with
construction wall, floor, ceiling, special building
materials door, fibrous insulation materials
Microbiological Contamination & Control

Unlike non-viable particles which can’t Control Methods

reproduce, microorganisms could
reproduce at a rapid rate if nutrition and Physical:
environment are favorable. • Heat
• Radiation
Microorganism can be classified as • Filtration
bacteria, algae, fungi, protozoa and
viruses. Some of these are essential, Chemical:
and harmless, while others are harmful • Sterilization
and dangerous. • Disinfection
 Airborne Particle Physical Controls

Filtration Dilution Isolation

Utilizing HEPA & ULPA Diluting internally Isolating particle
filters to remove contaminated air generations with barriers,
particles from supply with filtered clean air or removing directly from
air major sources

• Higher air change • Process exhaust

• HEPA: >99.97%
(@ 0.3μm MMD) rate, better dilution • Mini-environment
• ULPA: >99.999%
(@ 0.12μm MMD)
Typical Ceiling Filter Coverage

Class HEPA
Ceiling Filter
or
Coverage
US 209 ISO ULPA

9 5% - 15%
100,000 8 5% - 15%
10,000 7 15% - 20% HEPA
1,000 6 25% - 40%
100 5 35% - 70%
10 4 60% - 90%
1 3 60% - 100%
ULPA
2 80% - 100%
1 80% - 100%
 Cleanroom Airflow Quantity
(Much Higher Flow Rate for Cleanrooms)

Cleanroom Spaces
̶ Mainly to Dilute and Remove Particles
Type of Facilities

15

General Purpose Spaces

̶ To Meet Heating & Cooling Loads

6 25 600
Air Change Per Hour (ACH)

During “unoccupied mode” in evenings and weekends, particle

generation inside cleanrooms typically is much lower, therefore
energy saving from airflow rate reduction could be significant.
 Room Airflow Volume/Quantity
(Traditional Approaches: Table Methods)

IEST RP-12.1 (Before 2007)

Classification Air Change

Per Hour (ACH)
ISO Class FS - 209 Class Range
8 100,000 5 – 48
7 10,000 6 0 – 90
6 1,00 0 150 – 240
5 100 240 – 480
4 10 300 – 540
3 1 360 – 540
2 360 – 600
1
 Airflow Quantity
(Problems of Traditional Approaches)

Intuitively, ACH value should be based on the

required cleanliness class and the activities
performed in the space. Activities that generate
higher level of particles would need higher ACH
than those that generate at lower level.
Cleanroom airflow rate should be ideally
provided “as needed” instead of “picking an
arbitrary rate from the table”, a better
approach should be similar as those of building
heating/cooling load calculations utilized today.
 Airflow Quantity
(New Method – Use Equations/Modeling to Estimate)

IEST RP-12.3 (2014)

Make-up AHU fan & filters EU
OA
Equation to calculate average room
CO
particle concentration: Recirculation fan

(1   )  G
(1  EUC )  (1  EH )  m  CO 
CS  ACH SA

m  (EUC  EH  EUC  EH )  (1  m ) EA HEPA

Ce Cleanroom filter EH
particle
concentration CS
Airborne particle concentration CS Leakage air
Q Surface
(cleanliness class) is a function of RA
Particle
deposition D
RA
generation G
multiple variables: CS CS

CO = Outdoor make-up air concentration (count/m3)

ACH = Air change per hour in cleanroom (1/hr)
G = Particle generation rate in room (count/m3/hr)
EUC= Combined filters' efficiency (in series) inside make-up AHU and recirculation
fan/AHU units (%)
EH = HEPA or ULPA filter efficiency in cleanroom (%)
θ = Percentage of generated particles deposited on exposed surfaces (%)
m = Ratio of outside air (OA) in supply air (SA)
 Variables’ Significances on Air Cleanliness
(Example: Case-Specific Analysis)

Effect of Room Particle Generation Rate G Effect of Final HEPA Filter Efficiency EH

Effect of AHU Combined Filters’ Efficiency EUC Effect of Outdoor Air Intake Concentration Co
Options to Lower Fan Energy Consumption
(Based on Modeling Technique)

Since many variables can affect the room air cleanliness, so more
options are available than using a high ACH rate (or velocity)
alone to ensure a specified cleanliness, sometimes, options below
may be more cost effective:

Select equipment, machinery, furniture and room construction

materials with lower particle generation level
Isolate and remove high-concentration particles generated in
cleanroom
Enhanced surface cleaning protocol to minimize surface
particles to become airborne particles
Design return and exhaust air systems effectively for particle
exit
Maintain proper pressurization, depressurization could cause
particle gain through leakage
 Room Airflow Patterns

Non-Unidirectional Mixed
(Conventional) Flow Flow

Unidirectional Mini-Environment
Flow Flow
 Cleanroom Floor Arrangements

Service Area

Office and
Ballroom Support One Big
Areas Cleanroom

Service Area

Service Area
Shared Return Air
R R R R R Chase (TYP)
Office and
Service Chase Support Multiple Small
Cleanrooms
Areas Cleanrooms
R R R R R

Service Area

Service Area
Mini-Cleanrooms
Office and C C C C
Mini-Environment Support Cleanrooms Less-clean
Areas C C C C Cleanroom

Service Area
Pressurized Plenum (Fan Tower) Arrangement

Scrubbed Exhaust Air Visitors Corridor

Silencer Waff le Slab Process Corridor

Fan Tow er Maint. Corridor Raised Floor Ceili ng + Filter Stair Case

Pressurized Plenum

Cleanroom

Return Air

Basement

Make-Up Air Cooling Coil Perforated Slab Process Exhaust Submai ns Gas Cabinets
Pump Chemical Supply Systems Process Supply Systems

ITRI
 Fan Filter Units (FFU) Arrangement

Scrubbed Exhaust Air

3.5m

2.2m

3.6m
Stair Case
Cleanroom
9.6m

4.8m
Ret urn Air

4.8m

0. 0m
Basement

Make-Up Air Gas Cabinets Process Suppl y Syst ems Submains Process Supply Submains Scrubber

ITRI
Pressure Differential Criteria and Control

Purposes of Pressurization
To direct desired flow directions
To minimize undesired airborne particles, microbial
and/or chemical fume migrations

Conditions of Room Pressure Control

Static Condition – Door closed
Transient (dynamic) Condition – Door is being
opened and closed
 Particle Migration Control
(Room Pressure Control)

Scennario 1: Room Prerssurized

SA - (EA+RA) = ΔV = ΣQ > 0

Offset
Flow
Total Room Total Room
ΔV
Supply Airflow Exhaust and/or

Supply Airflow
Total Room
(SA) Return Airflow

and/or Return Airflow

Total Room Exhaust
(EA+RA) Total Leakage

(SA)
Airflows
Room ΣQ

(EA+RA)
+

Positively
Pressurized
 Particle Migration Control
(Room Pressure Control)

Scennario 2: Room Non-Prerssurized

SA - (EA+RA) = ΔV = ΣQ = 0

Offset
Flow
ΔV = 0

Total Room Exhaust and/or

Total Room Total Room
Supply Airflow Exhaust and/or
(SA) Return Airflow

Supply Airflow

Return Airflow
(EA+RA) Total Leakage

Total Room

(EA+RA)
Airflows

(SA)
Room ΣQ = 0

Non-Pressurized
 Particle Migration Control
(Room Pressure Control)

Scennario 3: Room De-prerssurized

SA - (EA+RA) = ΔV = ΣQ < 0

Total Room Exhaust and/or Return

Offset
Flow
Total Room Total Room ΔV
Supply Airflow Exhaust and/or
(SA) Return Airflow

(EA+RA)
Airflow
(EA+RA)
Total Leakage

Supply Airflow
Room Airflows

Total Room
ΣQ
Negatively

(SA)
- De-pressurized
Traditional Rule-of-Thumb Design Methods

Flow Percentage Method (Example: VA Hospital Std.)

• Neutral: SA – (RA+EA) = 0
• Positive (+): SA - (RA+EA) = 15% of SA
• Positive (++): SA - (RA+EA) = 30% of SA
• Negative (-): (RA+EA) – SA = 15% of SA
• Negative (- -): (RA+EA) – SA = 30% of SA

Flow Differential Method (Example: CDC Guideline)

• Neutral: SA – (RA+EA) = 0
• Positive : SA - (RA+EA) = Min. 60 L/s (125 CFM)
• Negative : (RA+EA) – SA = Min. 60 L/s (125 CFM)

Problem with these rule-of-thumb approaches: Each room may

have different air-tightness on enclosure, a fixed offset value ΔV
without field adjustment capability could cause problem in
control.
 Particle Migration Control
(Airlock)

Air Lock AIRFLOW CORRIDOR

+
AIRFLOW CORRIDOR
+
An intermediate room AIRLOCK AIRLOCK

between adjacent ++ ++
areas with different
cleanliness to AIRFLOW CLEANROOM AIRFLOW CLEANROOM

+++ -
minimize particles,
microbial and/or fume CASCADING AIRLOCK BUBBLE AIRLOCK

migrations.
AIRFLOW CORRIDOR AIRFLOW CORRIDOR
+ -
Type AIRLOCK AIRLOCK AIRLOCK
Cascading -- ++ --
Bubble
Sink AIRFLOW CLEANROOM CLEANROOM
AIRFLOW

Dual Compartment - -

SINK AIRLOCK DUAL COMPARTMENT AIRLOCK

 Particle Migration Control
(Airlock Selection)
Type of Cleanroom Selection Functionality of Airlock Relative
of Airlock Pressure
How To Select Relationship

 Positive pressure Cascading  Prevent cleanroom being Cleanroom: +++

An Airlock?  No fume or bio agent contaminated from dirty Airlock: ++
corridor air
 No containment Corridor: +
needed  Prevent cleanroom being
contaminated from
Answer questions surrounding spaces
through cracks
below:
 Negative pressure Bubble  Prevent cleanroom being Cleanroom: -
 Has fume or bio contaminated from dirty Airlock: ++
Is the room in agent contamination corridor air
Corridor: +
positive or  Containment needed  Prevent cleanroom fume
or bio agent releasing to
negative pressure? corridor

 Negative pressure Sink  Prevent cleanroom being Cleanroom: -

 Has fume or bio contaminated from dirty Airlock: --
Has fume or bio agent contamination corridor air
Corridor: +
contamination?  Containment needed  Allow cleanroom fume or
bio agent releasing to
airlock. No personal
protective equipment is
If containment needed
is needed?  Negative pressure Dual  Prevent cleanroom being Cleanroom: -
Compart- contaminated from dirty
 Has toxic fume or Neg. Airlock: - -
ment corridor air
If personal hazardous bio agent Pos. Airlock: ++
contamination, or has  Prevent cleanroom fume
protection potent compound or bio agent releasing to Corridor: -
substances corridor
is needed?  Containment needed  Personal protective
 Personal protection equipment (such as
needed pressurized suit and
respirator) is required
Airlock Function & Transient Performance
(Dynamic Performance Simulation)

Cleanroom

Airlock Room

Gown Room

Door Motion with delay period of 4 seconds

Airlock Function & Transient Performance
(Dynamic Performance Simulation)
Airlock Function & Transient Performance
(Simulation - Pressure Field Variation With Time)

Cleanroom

Airlock Room

Gown Room

Pressure Variation in Pascal Delay = 4 sec

Airlock Function & Transient Performance
(Simulation - Velocity Contour Variation With Time)

Cleanroom

Airlock Room

Gown Room

Velocity Variation in ft/min at 42 inches from floor with Time

Delay = 4 sec
Airlock Function & Transient Performance
(Simulation - Velocity Vector at 42” Above Floor)

Cleanroom

Airlock Room

Gown Room

Flow distribution (arrow color shows velocity variation in ft/min)

Delay = 4 sec
Airlock Function & Transient Performance
(Particle Migration from Gown Room to Airlock to Cleanroom)

Cleanroom

Airlock Room

Gown Room
 Particle Migration Control
(Pressure Stabilizer)

Pressure Stabilizer
A dynamic control
approach: Use an
pressure-adjustable
automatic relief damper
as a leakage regulator
to maintain a minimum
room pressure when a
door is opened.
End of Session 1
 Pressure Differential Criteria and Control
(Pressure Differential (∆P) Across Cleanroom Envelope)

Door in Door in
Closed Opening/Closing
Cleanliness Class
Condition (Static) Condition (Dynamic)
Difference Between
Cleanroom and
Minimum Pressure
Adjacent Less-clean Area
Differential (∆P) Installation of Airlock
Between Rooms

One -Class Difference

0.04 in.
(e.g. ISO Classes 7 and 8 Not Required
(10 Pa)
adjacent rooms across door)

Required if door operation is frequent

(more than 30 times daily)
(1) Install a two-door airlock to replace
single door which separates two
Two-Class Difference areas.
0.04 in. (2) Min. 0.02 in. (5 Pa) across each door
(e.g. ISO Classes 6 and 8
(10 Pa) of the airlock
adjacent rooms across door)
(3) Time delay between two doors in
airlock

Not Required if door operation is not

frequent (30 times or less daily)

Three or More-Class Required

Difference (1) Install a two-door airlock to replace
(e.g. ISO Classes 5 and 8 single door which separates two
adjacent rooms across door) 0.04 in. areas.
(10 Pa) (2) Min. 0.02 in. (5 Pa) across each door
of the airlock
Cleanroom Surrounded By (3) Time delay between two doors in
Non-Cleanroom Areas airlock
Pressure Differential Criteria and Control
(Control Strategies)

The “offset” value (ΔV) equals the total leakage airflow

(ΣQ) of the room.
To maintain a specific room pressure value, the room’s
offset valve (ΔV) must be controlled and maintained at
the appropriate value.
The treatment of the room “offset” value defines a
pressurization control. Typical pressurization control
strategies are: Direct Pressure-Differential Control,
Differential Flow Tracking Control, and Hybrid Control.
Pressure Differential Criteria and Control
(Direct Pressure-Differential Control (DP))
Utilizes a pressure differential sensor to measure the pressure
difference. It ignores the specific offset value, instead, it directly
controls the airflow control devices to achieve the required pressure
differential.

Room Room
SUPPLY Exhaust Total Exhaust
AIR Supply Hood Hood Air from Room
Valve Valve
Exhaust Exhaust

Total Supply
Air to Room

DP
Sensor DP
Hood
Leakage ROOM Valve &
Air CONTROLLER Controller

DS
Door Velocity Leakage
Switch Sensor Air

CORRIDOR CHEMICAL Fume or

T LAB Hood
Sash
Thermostat Sensor
Pressure Differential Criteria and Control
(Differential Flow Tracking Control (DF))

Intuitively assumes an offset value to control their respective

airflow devices. Maintain the same offset value throughout the
operation to keep pressurization constant.

Room Room
SUPPLY Exhaust Total Exhaust
AIR Supply Hood Hood Air from Room
Valve Valve
Exhaust Exhaust

Total Supply
DP Air to Room
DP
Monitor
Flow Flow
Sensor Sensor

Leakage Hood
Air ROOM Valve &
CONTROLLER Controller

DS
Door Velocity Leakage
Switch Sensor Air

CORRIDOR CHEMICAL Fume or

T LAB Hood
Sash
Thermostat Sensor
Pressure Differential Criteria and Control
(Hybrid Control (DP+DF))
Combines the pressure accuracy of the direct pressure differential
control and the stability of the flow tracking control. The offset value
is reset-able based on pressure differential reading. The reset
schedule is pre-determined, controller’s parameters are fixed
manually in field.

Room Room
SUPPLY Exhaust Total Exhaust
AIR Supply Hood Hood Air from Room
Valve Valve
Exhaust Exhaust

Total Supply
Air to Room
Flow Flow
DP Sensor Sensor
Sensor
DP
Hood
ROOM Valve &
Leakage
CONTROLLER Controller
Air

DS
Door Velocity Leakage
Switch Sensor Air

CORRIDOR CHEMICAL Fume or

T LAB Hood
Sash
Thermostat Sensor
Load Characteristic and Air Loop Selections
(For Energy Conservation and Performance)

Cleanroom often requires higher airflow rate to dilute room

contaminated air in order to lower particle concentration, so its
“airflow rate over cooling load” ratio is typically higher, or
much higher than a normal ratio range for commercial spaces
(CFM/Ton=300-500, or L/s/Ton=150-250).
Mismatch design (higher airflow rate to a relative smaller cooling
load) could cause a cooling coil to have a sensible cooling only
without latent heat removal which may result poor humidity
control inside cleanrooms.
For ISO Class 6 or cleaner cleanrooms, the flow rate/cooling
ratio may be beyond the reach of a single AHU unit can handle to
avoid mismatch, multiple air-handing systems (loops) are often
utilized to ensure performance and save energy.
 HVAC Schematic and Diagram
(Primary Loop Alone Air-Handling System)

For ISO Class 7, 8, 9 (FS-209 Class 10,000, 100,000)

Typical Application:
CFM/Ton ratio: 300-500 (L/s/Ton ratio: 150-250)

AHU Unit

SA OA+RA OA

FILTER
C H
C C
Makeup
Air
Efficiency Ea
Co

Efficiency Eb

Space Impurity
Cs
Concentration
SA RA

HEPA
Space
Supply Return
Air Air Cs
Particle Generation
Q G EA

Leakage Deposition Exhaust

Air D Air
Cs Ce
 HVAC Schematic and Diagram
(Primary-Secondary Loops Air-Handling Systems)

For ISO Class 4, 5, 6, 7 (FS-209 Class 10, 100, 1,000, 10,000)

Typical Application:
CFM/Ton ratio: 800-5,000 (L/s/Ton ratio: 400-2,500)
Primary flow/Secondary flow ratio: 2-10

Primary Fan Unit Secondary Makeup Unit

SA OA+RA OA OA

FILTER

FILTER
C H
C C
Treated Makeup
Makeup Air
Efficiency Eb Efficiency Ea
Air Co
C1

Efficiency Ec

Space Impurity
Cs
Concentration
SA RA

HEPA
Space
Supply Return
Air Air Cs
Particle Generation
Q G EA

Leakage Deposition Exhaust

Air D Air
Cs Ce
 HVAC Schematic and Diagram
(Primary-Secondary-Tertiary Loops Air-Handling Systems)
For ISO Class 1, 2, 3, 4 (FS-209 Class 1, 10)
Typical Application:
CFM/Ton ratio: 2,500-25,000 (L/s/Ton ratio: 1,250-12,500)
Primary flow/Secondary flow ratio: 2-10
Secondary flow/Tertiary flow ratio: 2-5

Primary Fan Unit Secondary AHU Unit Tertiary Makeup Unit

SA OA+RA OA+RA2 OA OA

FILTER

FILTER
C H C H
C C C C
Treated Treated Makeup
Makeup Makeup Air
Efficiency Eb Efficiency Ea Efficiency Ea
Air Air Co
C1 C1

RA1 RA2
Efficiency Ec

Space Impurity
Cs
Concentration
SA RA
HEPA

Space
Supply Return
Air Air Cs
Particle Generation
Q G EA

Leakage Deposition Exhaust

Air D Air
Cs Ce
 Demand Flow Control
to Conserve Fan Energy

Staged Flow Control

ACH Rate

VFD Flow Control

Room Particle (or Microbial) Generation Rate G

The strategy is to adjust or modulate the supply air rates to

maintain the same or acceptable cleanliness based on
continuous particle (microbial) sensing during both occupied and
unoccupied modes, which are about 24% and 76% respectively
of total hours during a typical week.
Manual Airflow Adjustment
 Automatic Airflow Modulation
(Example: Continuous Particle and/or Microbial Sensors or
Multiplex sensing for Feedback Control)
 Process and Building Systems

Building Systems Cleanroom HVAC&R Cleanroom Process

City water & gas Make-up system Gas detection
services Recirculation system Static control
Cold/hot water Return air system RO and DI waters
distributions Temperature & Process chilled water
Gas distributions humidity controls Chemical gases and
Storm, sanitary & Room pressure storages
vent control Solvent drain and
Fire pump & Airlock collection
automatic Noise and vibration Solvent gas exhaust
sprinkler systems control Process vacuum
Emergency power Hydronic heating
generator Scrubbed exhaust
Comfort chilled water House vacuum
HVAC & Indoor
comfort Cooling tower water Acid drain and waste
Building Particle counting neutralization
management Clean dry air
Instrumentation air &
control
Typical Cleanroom Construction Materials

Classification FS Class FS Class FS Class FS Class FS Class FS Class

1 10 100 1,000 10,000 100,000
ISO Class ISO Class ISO Class ISO Class ISO Class ISO Class
1, 2 & 3 4 5 6 7 8&9
Wall System Aluminum Component Aluminum Component or Metal Stud

Wall Panel Honeycomb Aluminum Conductive Finish Aluminum Polystyrene Core or Vinyl or Epoxy
Epoxy Coated Steel Laminated Coated
over Drywall Drywall
Paint Epoxy Epoxy / Latex Latex

Ceiling Grid 2” Aluminum Gel Seal Ceiling System 1½” Steel Gasketed

Grid Support All thread with Strut & Turn buckles 12 ga wire to grid, 10 ga wire to filter @ Corner of
Grid Intersection Only
Floor Raised Floor with Perforated / Grated Access Concrete Covered with Epoxy
Solids or Sheet Vinyl
Air Return Floor Low Sidewall Low Sidewall
or Ceiling
ISO Construction Cleaning Procedures (1)

Stage Purpose Responsible party Method Standard

Stage 1 — Clean during Preventing unnecessary dust Contractor. If the construction Vacuum clean upon completion. Visual-clean.
demolition or preliminary concentration in places that will be contractor has no relevant
construction such as difficult to reach during later experience in cleanroom cleaning,
framing for wall construction. it is advisable to hire a professional
installation. cleaning contractor specializing in
cleanroom cleaning.
Stage 2 — Clean during Removing local contaminants caused Installation engineer. Vacuum clean; wipe-down piping Visual-clean.
utility installation. by installing electricity, gas, water, etc. and fixtures with moistened wipers
upon completion. The use of
vacuum cleaning and/or other
cleaning materials is necessary.
Stage 3 — Clean during Cleaning all visible contamination from Cleaning contractor. Vacuum clean; wipe-down piping Visual-clean.
early construction. ceilings, walls, floors, (filter mountings), and fixtures with moistened wipers.
etc. after completion of construction and Application of protective floor
installation activities. sealants is generally a particle
generating activity. If this is
necessary, it should be applied at
this time.
Stage 4 — Prepare for Cleaning any dust from ductwork Installation engineer and cleaning Vacuum clean; wipe down with Wiper-clean.
air conditioning ductwork sections before installing using a contractor. moistened wipers.
installation. vacuum cleaner and wipers. Meanwhile,
a positive pressure should be
introduced to the cleanroom.
Stage 5 — Clean before Removing deposited or settled dust, or Cleaning contractor. Wipe down with moistened wipers. Wiper-clean.
mounting all air filters both, from ceilings, walls, and floors.
into the system.
Stage 6 — Mount the Removing possible contamination Cleanroom HVAC filter engineer/ Clean all surface edges on all Wiper-clean.
(HEPA/ULPA) filters into caused by the mounting operation. technician. sides.
the air systems
Stage 7 — Adjust the air Removing suspended dust from the Cleanroom HVAC filter engineer/ Air conditioning air flushing Wiper-clean.
conditioning equipment. airflow and creating overpressure technician. operation.
installation, including the filters.
Stage 8 — Upgrade the Removing all deposited and clinging A professional cleanroom cleaning Wipe down with moistened wipers. Wiper-clean.
room into prescribed dust from every surface (in order: by personnel specially instructed
 cleaning materials is necessary.
Stage 3 — Clean during Cleaning all visible contamination from Cleaning contractor. Vacuum clean; wipe-down piping Visual-clean.
early construction. ceilings, walls, floors, (filter mountings), and fixtures with moistened wipers.

ISO Construction Cleaning Procedures

etc. after completion of construction and
installation activities.
Application of protective floor
sealants is generally a particle
generating activity. If this is
necessary, it should be applied at
(2)

this time.
Stage 4 — Prepare for Cleaning any dust from ductwork Installation engineer and cleaning Vacuum clean; wipe down with Wiper-clean.
air conditioning ductwork sections before installing using a contractor. moistened wipers.
installation. vacuum cleaner and wipers. Meanwhile,
a positive pressure should be
Stage Purpose
introduced to the cleanroom. Responsible party Method Standard
Stage
Stage 1 5—— Clean
Clean during
before Preventing unnecessary
Removing deposited dust dust, or
or settled Contractor. If the construction
Cleaning contractor. Vacuum clean
Wipe down withupon completion.
moistened wipers. Visual-clean.
Wiper-clean.
demolition
mounting all orair
preliminary
filters concentration in places
both, from ceilings, that
walls, willfloors.
and be contractor has no relevant
construction
into the system.such as difficult to reach during later experience in cleanroom cleaning,
framing
Stage 6 for— wall
Mount the construction.
Removing possible contamination itCleanroom
is advisable
HVACto hire a professional
filter engineer/ Clean all surface edges on all Wiper-clean.
installation.
(HEPA/ULPA) filters into caused by the mounting operation. cleaning
technician.contractor specializing in sides.
the air systems cleanroom cleaning.
Stage
Stage 2 7—— Clean
Adjust during
the air Removing
Removing local contaminants
suspended caused
dust from the Installation
Cleanroom engineer.
HVAC filter engineer/ Vacuum clean; wipe-down
Air conditioning air flushingpiping Visual-clean.
Wiper-clean.
utility installation.
conditioning equipment. by
airflow and creating overpressure etc.
installing electricity, gas, water, technician. and fixtures
operation. with moistened wipers
installation, including the filters. upon completion. The use of
vacuum cleaning and/or other
Stage 8 — Upgrade the Removing all deposited and clinging A professional cleanroom cleaning cleaning
Wipe down materials is necessary.
with moistened wipers. Wiper-clean.
room into prescribed dust from every surface (in order: by personnel specially instructed
Stage 3 — Clean during Cleaning all visible contamination from Cleaning contractor. Vacuum clean; wipe-down piping Visual-clean.
classification. ceilings, walls, equipment, floors). on regulations, routing and
early construction. ceilings, walls, floors, (filter mountings), and fixtures with moistened wipers.
behaviour.
etc. after completion of construction and Application of protective floor
Stage 9 — Approve installation
Verifying theactivities.
cleanroom to the Installation engineer and sealants is generally
Monitor airborne and asurface
particle Wiper-clean. Results
installation. prescribed design specifications. certification engineer. generating
particles, air velocities, is
activity. If this should conform to
Customer acceptance. necessary,
temperatureit and
should be applied at
humidity. agreed design criteria.
this time.
Stage 10 — Clean daily Maintaining the cleanroom in long-term Cleanroom manager/cleaning Listed in F.1 to F.8. A tailor-made cleaning
Stage 4 — Prepare for Cleaning any dust from ductwork Installation engineer and cleaning Vacuum clean; wipe down with Wiper-clean.
and periodically compliance with designed classification. contractor. programme for the
air conditioning ductwork sections before installing using a contractor. moistened wipers.
installation. Microbiological
vacuum cleanercleaning and Meanwhile,
and wipers. testing cleanroom, accounting
begins in biocleanrooms.
a positive pressure should be
for the specific
introduced to the cleanroom. demands of the
production process
Stage 5 — Clean before Removing deposited or settled dust, or Cleaning contractor. Wipe down with moistened wipers. Wiper-clean.
and the customer.
mounting all air filters both, from ceilings, walls, and floors. Routine testing of
into the system. critical operation
Stage 6 — Mount the Removing possible contamination Cleanroom HVAC filter engineer/ Clean all surface edges on all parameters.
Wiper-clean.
(HEPA/ULPA)
NOTE 1 Duringfilters
Stages into4 to caused by the mounting
10, all high-efficiency operation.
and technician. such as filters, ducts, etc.,sides.
ultra-high-purity components, should arrive on site protected by plastic or foil covers on
the
bothair systems
ends. Covers should only be removed when ready for use. NOTE 2 During Stages 6 to 10, all activities should be done wearing prescribed cleanroom clothing.
Stage 7 — Adjust the air Removing suspended dust from the Cleanroom HVAC filter engineer/ Air conditioning air flushing Wiper-clean.
conditioning equipment. airflow and creating overpressure technician. operation.
installation, including the filters.
Stage 8 — Upgrade the Removing all deposited and clinging A professional cleanroom cleaning Wipe down with moistened wipers. Wiper-clean.
room into prescribed dust from every surface (in order: by personnel specially instructed
classification. ceilings, walls, equipment, floors). on regulations, routing and
 Cleanroom Testing
Required Testing (ISO 14644-2)

Schedule of Tests to Demonstrate Continuing Compliance

Test Parameter Class Maximum Time Interval Test Procedure

<= ISO 5 6 Months

Particle Count Test ISO 14644-1 Annex A
> ISO 5 12 Months
Air Pressure Difference All Classes 12 Months ISO 14644-1 Annex B5
Airflow All Classes 12 Months ISO 14644-1 Annex B4

Optional Testing (ISO 14644-2)

Schedule of Additional Optional Tests

Test Parameter Class Maximum Time Interval Test Procedure

Installed Filter Leakage All Classes 24 Months ISO 14644-3 Annex B6

Containment Leakage All Classes 24 Months ISO 14644-3 Annex B4
Recovery All Classes 24 Months ISO 14644-3 Annex B13
Airflow Visualization All Classes 24 Months ISO 14644-3 Annex B7
 Selective Cleanroom Design Ideas (1)

ISO-5 raised-floor large ballroom design Perforated concrete floor allows return air
to meet processing requirements down to sub-floor area below.

Sub-floor area (below cleanroom) houses large Critical process located in a mini-environment
process/utility equipment, ducts and piping. (ISO-5) which is in an ISO-7 large cleanroom
 Selective Cleanroom Design Ideas (2)

Return air floor panels’ arrangement to Shared return air chase could house some
accommodate equipment footprints (ISO-7) process piping and small equipment.

Small pass-through on door allows small items Sliding doors have shorter cycle than swing
transport while minimize door operations. doors to reduce contamination from corridor.
 Selective Cleanroom Design Ideas (3)

CFD analysis of “velocity vector” around a CFD to visualize particle migration from
moving door (second door of an airlock) gowning room to airlock and to cleanroom

Solar panels on roof to supplement Roof storm drains collected for

electricity usage irrigation of landscaping
 Selective Cleanroom Design Ideas (4)

Unidirectional flow inside RAB Mixed flow in Room

Lower concentration inside RAB, higher Higher concentration near face

concentration near person due to recirculation air
By K. Khankari 2013
Selective Cleanroom Renovation Ideas (1)

Before After

Retrofits

Changed from open ballroom to multiple narrower rooms to improve

airstream parallelism.
Used exhaust canopies to remove high-concentration particles generated
from process equipment. Room ACH reduced from 385 to 280.
Selective Cleanroom Renovation Ideas (2)

Before After

Retrofits

Changed from general-purpose chemical lab to ISO Class-3 Nano research

lab in various aspects: Airflow rate, 100% HEPA ceiling with FFUs, tear-
drop lighting, and raised floor, etc.
Selective Cleanroom Renovation Ideas (3)

Before After

Retrofits

ISO-4 cleanroom (358 ACH) converted to ISO-3 cleanroom (400 ACH) with
lighting-integrated ceiling (yellow light area after filtered spectrum).
Replaced “primary-alone” AHU with “primary-secondary” AHU systems,
reduced energy consumption about 65%.
Selective Cleanroom Renovation Ideas (4)

Before After

Retrofits

Retrofitted a 22-ft height shop/storage area into a high-bay ISO-3 cleanroom

for aerodynamic research.
The cleanroom (280 ACH) has 2-ft wide return air chases on both sides, and
3-ft raised floor.
End of Session 2
 Questions?

Wei Sun, P.E.

Email: [email protected]