Module 3 PDF
Module 3 PDF
Module 3 PDF
TECHNOLOGIES
1. Microsystem Products
2. Microfabrication Processes
Microsensors
Microactuators
Microstructures and microcomponents
Microsystems and micro-instruments
• One main criterion of MEMS is that there are at least some elements
that have mechanical functionality, whether or not they can move
Components
Microelectronics:
• “brain” that receives, processes, and makes decisions
• data comes from microsensors
Microsensors:
• constantly gather data from environment
• pass data to microelectronics for processing
• can monitor mechanical, thermal, biological, chemical optical, and
magnetic readings
Microactuator:
• acts as trigger to activate external device
• microelectronics will tell microactuator to activate device
Microstructures:
• extremely small structures built onto surface of chip
• built right into silicon of MEMS
Why Micro machine?
Step 1:
-Deposition of Adhesion
-Seed layer
Step 2:
-resist coating
Step 3:
-expose the PMMA resist
Step 4:
-development of the exposed resist
Step 6:
-removal of the remaining resist