CM 100 120 Mechanics

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1 Introduction
2 Cleaning
2.1 Cleaning equipment and materials...................................................... 2-1
2.1.1 Instruments .......................................................................................... 2-1
2.1.2 Consumables ....................................................................................... 2-2
2.1.3 Chemicals ............................................................................................ 2-2
2.1.4 Danger Classification and Safety advice.............................................. 2-3
2.2 Cleaning process ................................................................................ 2-4
2.3 Emission Chamber And Gun Insulator................................................ 2-8
2.4 Wehnelt cylinder and anode................................................................ 2-9
2.5 Gun airlock ........................................................................................ 2-10
2.6 Objective lens pole pieces ................................................................ 2-10
2.7 Goniometer Stage .............................................................................. 2-11
2.7.1 CS CompuStage .................................................................................2-11
2.7.1 Right-hand ear ....................................................................................2-11
2.7.2 Left-hand ear.......................................................................................2-11
2.7.3 Frequency of cleaning.........................................................................2-11
2.8 Anti-contamination device ................................................................. 2-12
2.9 Vacuum lining tube (upper lens section) ........................................... 2-12
2.10 Vacuum lining tube (lower lens section) ............................................ 2-12
2.11 Camera airlock .................................................................................. 2-13
2.12 Fixed diaphragms.............................................................................. 2-13
2.13 Adjustable diaphragms...................................................................... 2-14
2.13.1 Condenser lens diaphragms .............................................................. 2-14
2.13.2 Objective lens diaphragms................................................................. 2-14
2.13.3 S.A. Diaphragms ................................................................................ 2-14
2.13.4 Diaphragm cleaning methods ............................................................ 2-14
2.14 Diaphragm holders............................................................................ 2-15
2.15 Projection chamber viewing windows ............................................... 2-15
2.16 Lens housings and desk ................................................................... 2-15
2.17 Exposure measurement system........................................................ 2-16
2.17.1 The SCA board .................................................................................. 2-16
2.17.2 The vacuum feed-through .................................................................. 2-16
2.17.3 Fluorescent screens........................................................................... 2-17
2.18 Penning gauge .................................................................................. 2-17
3 Preventive maintenance
3.1 Preventive maintenance for users....................................................... 3-1
3.1.1 Changing filaments .............................................................................. 3-1
3.1.2 Treatment of the specimen holder and goniometer airlock .................. 3-1
3.1.3 Camera systems and fluorescent screens ........................................... 3-2
3.2 6-Monthly maintenance....................................................................... 3-2
3.2.1 Emission chamber and gun.................................................................. 3-2
3.2.2 Diaphragms and liner tubes ................................................................. 3-3
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3.2.3 Vacuum system ....................................................................................3-3
3.2.4 Pneumatics ...........................................................................................3-4
3.2.5 Water circuit ..........................................................................................3-4
3.2.6 Electronics ............................................................................................3-4
3.2.7 CS CompuStage ...................................................................................3-4
3.2.8 Goniometer stage .................................................................................3-5
3.3 Annual maintenance ............................................................................ 3-5
4 Performance check/fault finding

4.1 Checking the pumping speed .............................................................. 4-1
4.2 Checking the airlock pumping times .................................................... 4-1
4.3 Tracing vacuum leaks in the column ................................................... 4-2
4.3.1 Checking the vacuum tightness without opening the column ...............4-2
4.3.1.1 Check the UHV valve seating..........................................................4-2
4.3.1.2 Check the leak rate of the projection chamber ................................4-3
4.3.1.3 Check the leak rate of the column and IGP.....................................4-3
4.3.1.4 Check the leak rate of the emission chamber (not for CM100) .......4-3
4.3.2 Checking the vacuum tightness by opening the column.......................4-3
4.4 Stability of the electron beam (all HT settings) .................................... 4-4
4.5 Detecting dirt or grease in the column ................................................. 4-5
4.6 Focusing stability ................................................................................. 4-6
4.7 Image contrast ..................................................................................... 4-6
4.8 Image sharpness ................................................................................. 4-7
4.9 Image drift (For CompuStage) ............................................................. 4-8
4.10 Objective lens astigmatism .................................................................. 4-9
4.11 Filament life ....................................................................................... 4-10
4.12 Measurement of contamination rate .................................................. 4-11
4.12.1 Introduction ......................................................................................... 4-11
4.12.2 General ............................................................................................... 4-11
4.12.3 Procedure ........................................................................................... 4-11
4.12.4 Baking out device ...............................................................................4-12
4.12.4.1 Introduction....................................................................................4-12
4.12.4.2 Bake out procedure .......................................................................4-12
4.13 Checking the performance of the goniometer.................................... 4-14
4.13.1 General ...............................................................................................4-14
4.13.1.1 Description of the left-hand ear movement (X)..............................4-14
4.13.1.2 Description of the right-hand ear movement: Y, Z and tilt..............4-14
4.13.1.3 Tilt ..................................................................................................4-14
4.13.2 Specifications......................................................................................4-17
4.13.2.1 Overall ...........................................................................................4-17
4.13.2.2 Left-hand specimen translation mechanism ..................................4-18
4.13.2.3 Objective diaphragm......................................................................4-19
4.13.3 Trouble shooting .................................................................................4-19
4.13.3.1 Trouble shooting kit .......................................................................4-19
4.13.3.2 Trouble shooting procedure...........................................................4-19
4.13.3.3 Trouble shooting list.......................................................................4-21
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4.13.3.4 Left-hand ear, possible causes ..................................................... 4-21
4.13.3.5 Right-hand ear, possible causes ................................................... 4-22
4.13.3.6 Vacuum leak testing of right-hand ear........................................... 4-23
4.13 CS Checking the performance of the goniometer ............................. 4-23
4.13.1 CS Introduction .................................................................................. 4-23
4.13.2 CS Global description of the CompuStage......................................... 4-24
4.13.2.1 Tilt axis .......................................................................................... 4-24
4.13.2.2 Z (height) movement ..................................................................... 4-24
4.13.2.3 Y movement .................................................................................. 4-24
4.13.2.4 X movement .................................................................................. 4-25
4.13.3 CS Calibration procedure................................................................... 4-27
4.13.4 CS Special extraction procedure........................................................ 4-29
4.13.5 CS Holder safe entry lock .................................................................. 4-30
4.13.6 CS Trouble shooting........................................................................... 4-31
4.13.7 CS Trouble shooting list ..................................................................... 4-32
4.13.8 CS Vacuum leak testing of CompuStage ........................................... 4-36
4.14 CS adjustments................................................................................. 4-38
4.14.1 CS V groove assembly adjustment .................................................... 4-38
4.14.2 CS Adjustment of the X and Y motors on their gear-wheels.............. 4-39
4.14.3 CS Adjustment of the airlock stop ...................................................... 4-39
4.14.4 CS Alpha tilt limit stops ...................................................................... 4-40
4.14.5 CS Z limit stops .................................................................................. 4-40
4.14.6 CS Y limit adjustments ....................................................................... 4-41
4.14.7 CS X limit adjustments ....................................................................... 4-42
4.14.8 CS The front plate 138 ....................................................................... 4-42
4.14.9 CS X-drive hinge bush lift adjustment ................................................ 4-43
4.14.10 CS Adjustment of the tilt motor drive.................................................. 4-43
4.14.11 CS Adjustment of the clamping blocks............................................... 4-43
4.14.12 CS Goniometer height adjustments ................................................... 4-44
4.14.12.1 Coarse height adjustment ............................................................. 4-44
4.14.12.2 Eucentric height and tilt axis adjustment (all microscopes)........... 4-44
4.15 CS overview of specifications ........................................................... 4-45
4.15.1 CS Test procedure ............................................................................. 4-46
4.15.1.1 X-Y Movements............................................................................. 4-46
4.15.1.2 Z Movement .................................................................................. 4-47
4.15.1.3 Alpha Tilt ....................................................................................... 4-47
4.15.1.4 Vacuum leak during airlock cycle .................................................. 4-48
4.15.2 Objective diaphragm mechanism....................................................... 4-48
4.15.2.1 Diaphragm height adjustment for TWIN and SuperTWIN ............. 4-48
4.15.2.2 Diaphragm coarse centring ........................................................... 4-48
4.16 High Resolution................................................................................. 4-49
4.16.1 Procedure for 0.34 nm lattice resolution using graphitized carbon .... 4-49
4.16.2 Procedure for 0.34 nm (0.50 nm) point-to-point resolution ................ 4-50
4.16.3 Procedure for 0.23 nm Au line resolution........................................... 4-51
4.16.3.1 Test requirements.......................................................................... 4-51
4.16.3.2 Procedure ..................................................................................... 4-51
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4.16.4 Procedure for 0.204 nm, 0.14 nm and 0.10 nm line resolution...........4-52
4.16.5 STEM high resolution on TWIN and SuperTWIN ...............................4-54
4.16.6 Procedure for STEM resolution ..........................................................4-55
4.16.7 Hints and tips if High Resolution cannot be resolved .........................4-55
4.16.8 Standard apertures mounted ..............................................................4-56
5 Dismantling and assembling the column

5.1 General procedures when opening the column ................................... 5-1
5.1.1 X-Ray safety .........................................................................................5-1
5.1.2 Opening the column..............................................................................5-2
5.2 Admitting N2 to the column.................................................................. 5-2
5.3 Draining water from the column........................................................... 5-2
5.3.1 Procedure .............................................................................................5-2
5.3.2 Procedure .............................................................................................5-3
5.4 Location and replacement of indium seals .......................................... 5-4
5.4.1 Positions of indium seals ......................................................................5-4
5.4.2 Replacing an indium seal......................................................................5-4
5.4.2.1 Tool C ..............................................................................................5-4
5.4.2.2 Tools A and B ..................................................................................5-5
5.4.2.3 Tools D and E ..................................................................................5-5
5.4.2.4 Tool F...............................................................................................5-5
5.5 Removal and assembly of the cable plug ............................................ 5-5
5.6 Removal & assembly of the porcelain insulator................................... 5-6
5.7 Emission chamber: removal, assembly & alignment ........................... 5-6
5.7.1 Removal and assembly ........................................................................5-6
5.7.2 Adjustment of upper column section with respect to lower column
section ..................................................................................................5-7
5.8 Removing, dismantling & remounting of the gun airlock valve, gun
centring coil or the x-ray diaphragm .................................................... 5-8
5.8.1 Dismantle the valve ..............................................................................5-8
5.8.1.1 Valve piston (not for CM100) ...........................................................5-8
5.8.1.2 Valve seating assembly (not for CM100) .........................................5-8
5.8.1.3 Membrane assemblies ....................................................................5-9
5.9 Removing & dismantling of condenser & diffraction diaphragms ...... 5-10
5.10 Opening & closing the column above the specimen stage to gain
access to the specimen chamber ...................................................... 5-10
5.11 Removing & replacing the upper objective pole piece & the fixed
diaphragms in the upper lens section ................................................ 5-11
5.11.1 The upper objective pole piece........................................................... 5-11
5.11.2 Diaphragms in the upper lining tube ................................................... 5-11
5.12 Dismantling & assembling the complete upper lens section.............. 5-12
5.12.1 Dismantle the lens ..............................................................................5-13
5.12.1.1 Removing condenser 1 coil ...........................................................5-13
5.12.1.2 Remounting condenser 1 coil ........................................................5-13
5.12.1.3 Removing condenser 2 coil ...........................................................5-14
5.12.1.4 Remounting condenser 2 coil ........................................................5-14
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5.13 Removing & remounting the complete goniometer stage ................. 5-15
5.13 CS Removing & remounting the complete goniometer stage ........... 5-16
5.14 CS removal & assembly of the compustage ..................................... 5-16
5.14.1 CS Removal of the CompuStage ....................................................... 5-17
5.14.2 CS Removal of the hemispherical bearing scale ............................... 5-18
5.15 CS Dismantling & assembly of the compustage ............................... 5-19
5.15.1 CS Dismantling the airlock ................................................................. 5-19
5.15.2 CS Removal of the X measuring system ........................................... 5-19
5.15.3 CS Removal of the Y measuring system ........................................... 5-20
5.15.4 CS Removal of the X motor assembly ............................................... 5-21
5.15.5 CS Removal of the Y motor assembly ............................................... 5-21
5.15.6 CS Removal and assembly of the Z motor assembly ........................ 5-22
5.15.7 CS Removal of the Z lever ................................................................. 5-23
5.15.8 CS Removal and assembly of the floating rod assembly................... 5-23
5.15.9 CS Further dismantling & assembly of the floating rod assembly...... 5-24
5.15.10 CS Dismantling & assembly of X motor support ................................ 5-26
5.15.11 CS Removal of the tilt motor assembly .............................................. 5-27
5.15.12 CS Removal of the pressure bearing ................................................. 5-27
5.15.13 CS Dismantling & assembly of the joypad ......................................... 5-28
5.15 Dismantling & assembly of the right-hand ear .................................. 5-29
5.15.1 Dismantling procedure ....................................................................... 5-29
5.15.1.1 Dismantling the specimen airlock.................................................. 5-29
5.15.1.2 Further dismantling of the right-hand ear ...................................... 5-29
5.15.2 Assembly procedure .......................................................................... 5-30
5.15.2.1 Assembling the specimen airlock.................................................. 5-30
5.15.2.2 Further assembly of the right-hand ear ......................................... 5-30
5.15.3 Adjustments ....................................................................................... 5-33
5.15.3.1 Goniometer height adjustment (not for CM100)............................ 5-33
5.15.3.2 Eucentric height and tilt axis ......................................................... 5-33
5.15.3.3 Drive adjustments ......................................................................... 5-34
5.16 Dismantling & assembly of the left-hand ear..................................... 5-35
5.16.3 Adjustments ....................................................................................... 5-36
5.16.3.1 Adjustment of levers 8, 39............................................................. 5-36
5.16.3.2 Adjustment of the head of the ear ................................................. 5-36
5.16.3.3 Micrometer adjustment.................................................................. 5-36
5.16.3.4 Adjustment of the grid to mid-position........................................... 5-36
5.16.3.5 Left-hand ear centring procedure.................................................. 5-37
5.17 Removing, dismantling & assembly of the objective diaphragm ....... 5-38
5.17.3 Adjustments ....................................................................................... 5-39
5.17.3.1 Diaphragm height adjustment ....................................................... 5-39
5.17.3.2 CM100 BioTWIN Objective diaphragm height adjustment............ 5-39
5.17.3.3 CM120 BioTWIN Objective diaphragm height adjustment............ 5-40
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5.17.3.4 Diaphragm coarse centring ...........................................................5-40
5.18 Removal, dismantling & assembly of the anti-contamination
device & pre-vacuum valve................................................................ 5-41
5.18A Removal & remounting of the sandwich cryo blades......................... 5-41
5.18B Removal and remounting of the Biotwin Cryo Blades ....................... 5-44
5.19 Removing & remounting of the vacuum connection .......................... 5-44
5.20 Backscattered & secondary electron detector ................................... 5-44
5.20.1 Backscattered electron detector .........................................................5-44
5.20.1.1 Removal ........................................................................................5-44
5.20.1.2 Exchanging the detector tip ...........................................................5-44
5.20.1.3 Mounting........................................................................................5-45
5.20.2 Secondary electron detector...............................................................5-45
5.20.2.1 Removal ........................................................................................5-45
5.20.2.2 Mounting........................................................................................5-46
5.21 EDAX ................................................................................................. 5-46
5.22 Opening & closing the column underneath the specimen stage........ 5-46
5.23 Removing & replacing the lower objective pole piece & the fixed
diaphragms of the lower lens section ................................................ 5-47
5.23.1 The lower objective pole piece ...........................................................5-47
5.23.2 The fixed diaphragms .........................................................................5-48
5.23.3 The differential and projector diaphragms ..........................................5-48
5.24 Dismantling & remounting the complete lower lens section .............. 5-49
5.25 Dismantling & reassembling the camera airlock valve ...................... 5-52
5.25.1 Dismantling procedure........................................................................5-52
5.25.2 Reassembly procedure.......................................................................5-53
5.26 Removal & assembly of the beam stop assembly ............................. 5-53
5.27 Removal & replacement of the ion getter pump ................................ 5-54
5.28 Removal of the ion getter pump feed-through ................................... 5-55
5.29 Projection chamber............................................................................ 5-56
5.29.1 Dismantling procedure........................................................................5-56
5.29.2 Removal & assembly of the small & large viewing screen
mechanisms........................................................................................5-56
5.29.2.1 Small screen..................................................................................5-56
5.29.2.2 Main screen ...................................................................................5-57
5.29.3 Removal & assembly of the screen current feed-through...................5-57
5.29.4 Removal & assembly of the plate numbering unit ..............................5-58
5.29.5 Adjustments ........................................................................................5-59
5.29.6 Further dismantling of the projection chamber ...................................5-59
5.30 Plate camera...................................................................................... 5-60
5.30.1 Working principle ................................................................................5-60
5.30.2 Removal and assembly of the plate camera.......................................5-60
5.30.3 Adjustments ........................................................................................5-61
5.31 Cooling water circuit .......................................................................... 5-62
5.31.1 Circuit description ...............................................................................5-62
5.31.1.1 The ODP pump..............................................................................5-62
5.31.1.2 The column....................................................................................5-62
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5.31.2 Cooling water adjustments................................................................. 5-63
5.31.3 Circuit description............................................................................... 5-63
5.32 Levelling system................................................................................ 5-64
5.32.1 Barry mount levelling system ............................................................. 5-64
5.32.1.1 Adjusting the air damper height .................................................... 5-64
5.32.1.2 Changing the Barry mount ............................................................ 5-64
5.32.2 Membrane levelling system................................................................ 5-64
5.32.2.1 Adjusting the air damper height .................................................... 5-65
5.32.2.2 Changing the membrane............................................................... 5-65
5.33 BF/DF Detector up to May 1996 ....................................................... 5-66
5.33.1 Removal of the dark field detector chip.............................................. 5-66
5.33.2 Replacement of the photomultiplier tube............................................ 5-66
5.33.3 Further dismantling ............................................................................ 5-67
5.34 Near Axis System (NAS)................................................................... 5-67
5.34.1 Dismantling and assembling procedure ............................................. 5-67
5.34.1.1 Dismantling the DF detector.......................................................... 5-67
5.34.1.2 Removing the prism ...................................................................... 5-68
5.34.1.3 Removing the pmt from the BF detector ....................................... 5-68
5.34.1.4 Removing the scintillator with fluorescent screen ......................... 5-68
5.34.A 35MM Camera film transport mechanism ......................................... 5-69
5.34A.1 Mounting ............................................................................................ 5-69
5.34A.2 Dismantling and assembly ................................................................. 5-69
5.35 BioFilter ............................................................................................. 5-70
5.35.1 Removal of the GATAN CCD camera ................................................ 5-70
5.35.2 Removal of the TV rate camera ......................................................... 5-71
6 Pumping system (Mechanical)

6.1 Summary of maintenance activities .................................................... 6-1
6.2 Dismantling, assembly and maintenance............................................ 6-2
6.2.1 Admitting air into the pumping system ................................................. 6-2
6.2.2 The rotary pre-vacuum pump............................................................... 6-2
6.2.2.1 General description ......................................................................... 6-2
6.2.2.2 Using the gas ballast device ........................................................... 6-2
6.2.2.3 Removal from the microscope ........................................................ 6-2
6.2.2.4 Oil changing .................................................................................... 6-2
6.2.2.5 Exhaust filter ................................................................................... 6-3
6.2.2.6 Specification .................................................................................... 6-3
6.2.3 High vacuum pump unit ....................................................................... 6-3
6.2.3.1 Removing the high vacuum pump unit from the desk ..................... 6-3
6.2.3.2 Oil diffusion pump ........................................................................... 6-4
6.2.3.3 Dismantling ..................................................................................... 6-5
6.2.3.4 Cleaning and inspection.................................................................. 6-5
6.2.3.5 Reassembly .................................................................................... 6-6
6.2.3.6 Renewing the heater element ......................................................... 6-6
6.2.3.7 Radiation Shield .............................................................................. 6-7
6.2.3.8 Technical data and specification: .................................................... 6-7
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6.2.3.9 Fault finding .....................................................................................6-8
6.2.3.10 Pneumatic cylinder for High Vacuum Valve V3#..............................6-8
6.2.4 Penning gauge .....................................................................................6-9
6.2.4.1 Working principle .............................................................................6-9
6.2.4.2 Maintenance ....................................................................................6-9
6.2.4.3 Dismantling......................................................................................6-9
6.2.4.4 Cleaning ........................................................................................6-10
6.2.4.5 Assembly .......................................................................................6-10
6.2.4.6 Technical data and specification: ...................................................6-10
6.2.5 Pre-vacuum valves V1 and V2 ...........................................................6-10
6.2.5.1 Working principle ...........................................................................6-10
6.2.5.2 Maintenance .................................................................................. 6-11
6.2.5.3 Data and specification: .................................................................. 6-11
6.2.6 Pirani gauges......................................................................................6-12
6.2.6.1 Description.....................................................................................6-12
6.2.6.2 Maintenance ..................................................................................6-12
6.2.6.3 Data and Specification:..................................................................6-12
6.2.7 Ion getter pump ..................................................................................6-12
6.2.7.1 General description .......................................................................6-13
6.2.7.3 Cleaning ........................................................................................6-15
6.2.7.4 Data and specification: ..................................................................6-15
6.2.7.5 Fault finding ...................................................................................6-16
6.2.8 Valves V5 and V6 ...............................................................................6-16
6.2.8.2 Maintenance ..................................................................................6-17
6.2.8.3 Data and specification: ..................................................................6-18
6.2.9 Valves V8, V10, V11 and V12 .............................................................6-18
6.3 Performance check/fault finding ........................................................ 6-18
6.3.1 Checking the leak rate of the pumping system...................................6-18
6.3.2 Checking the pumping speed of the OD pump...................................6-19
6.3.3 Manual operation of the vacuum system ............................................6-19
7 List of O-rings
7.1 Special O-rings and miscellaneous vacuum parts ............................... 7-4
7.2 Manufacturers of em accessories........................................................ 7-5
8 Mechanical drawings
9 Spare parts
9.1 Abbreviations ....................................................................................... 9-1
9.2 Miscellaneous spare parts ................................................................... 9-1
9.3 Cross section of microscope column ................................................... 9-2
9.4 Rear view............................................................................................. 9-2
9.5 Cross section of base plate (CM10) .................................................... 9-3
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9.6 Cross section of base plate CM10(0)/CM12(0)................................... 9-4
9.7 Emission chamber + lifting mechanism............................................... 9-5
9.8 Valve V7 .............................................................................................. 9-6
9.9 Upper lens section .............................................................................. 9-7
9.10 Goniometer stage (manual stage)....................................................... 9-8
9.11 Goniometer stage (compustage)........................................................ 9-11
9.12 Goniometer stage (CS CM100/120/200)........................................... 9-13
9.13 Right-hand Ear .................................................................................. 9-17
9.14 Exploded view of CS, CM100/120/200 ............................................. 9-18
9.15 Covers for compustage, CM100/120/200 ......................................... 9-25
9.16 Compustage joypad, CM100/120/200............................................... 9-26
9.17 Left-hand ear..................................................................................... 9-26
9.18 Lower lens section ............................................................................ 9-27
9.19 Camera airlock .................................................................................. 9-28
9.20 Projection chamber & plate camera, drive+ numbering .................... 9-29
9.21 Interface block................................................................................... 9-32
9.22 Plate numbering unit ......................................................................... 9-32
9.23 Exchange unit plate film & plate film cassette................................... 9-33
9.24 Water and air connections, circuit diagram ....................................... 9-34
9.25 Water and air connections, circuit diagram ....................................... 9-35
9.26 Water and air connections mechanical ............................................. 9-36
9.29 Pneumatic circuit diagram................................................................. 9-39
9.30 General Tools .................................................................................... 9-40
9.31 OD Pump + Pre-vacuum Valves ....................................................... 9-44
9.32 OD Pump + Pre-vacuum Valves ....................................................... 9-46
9.33 UHV valve + tubing ........................................................................... 9-48
9.34 35 mm Film Transport Mechanism.................................................... 9-49
9.35 35 mm Film Holder 9432 065 28001................................................. 9-50
9.36 STEM Detectors................................................................................ 9-50
9.36.1 BF/DF Detector .................................................................................. 9-50
9.36.2 SED Detector (PW6433/00) ............................................................... 9-51
9.36.3 BSD detector (PW6431/00)................................................................ 9-51
9.37 Near axis system............................................................................... 9-52
9.38 Bright Field Detector ......................................................................... 9-52
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2 Cleaning
2-1 Cleaning process (phases 1 & 2)............................................................... 2-5
2-2 Cleaning process (phases 3, 4 & 5)........................................................... 2-6
2-3 Cleaning long parts, e.g. Liner tube ........................................................... 2-7
2-4 Drying electron optical items with IR lamps ............................................... 2-7
2-5 Vacuum feedthrough................................................................................ 2-16
4 Performance check/fault finding

4-1 Simplified goniometer cross section ........................................................ 4-15
4-2 Tilt axis misalignment............................................................................... 4-15
4-3 Height misalignment ................................................................................ 4-16
4-4 Combination of tilt axis and height misalignments ................................... 4-17
4-5 Cross sectional view of CompuStage (simplified).................................... 4-25
4-6 Tilt axis and height misalignments ........................................................... 4-26
4-7 Principle of calibration.............................................................................. 4-28
4-8 Safe entry system .................................................................................... 4-30
4-9 Errors during calibration........................................................................... 4-34
4-10 Errors after calibration.............................................................................. 4-35
4-11 Symbolic drawing of situation with airlock closed .................................... 4-36
4-12 XY motor, exploded view ......................................................................... 4-39
4-13 0.23 nm line resolution............................................................................. 4-52
4-14 0.204 nm, 014 nm and 0.10 nm line resolution........................................ 4-53
5 Dismantling and assembling the column

5-1 Indium tool set............................................................................................ 5-4
5-2 Compustage measuring system .............................................................. 5-20
5-3 Detail of mating conical slots ................................................................... 5-25
5-4 Detail of spring supports in their recesses ............................................... 5-26
5-5 Position of levers and floating tube in right-hand ear............................... 5-31
5-6 View of motor drive .................................................................................. 5-34
5-7 Left-hand ear centring tool ....................................................................... 5-37
5-8 BioTWIN pole piece dimensions .............................................................. 5-39
5-9 BioTWIN alignment of the cryoshields and obj. diaphragm holder .......... 5-40
5-10 Sandwich Cryo blades ............................................................................. 5-43
5-11 Tool for removal of IGP feed-through ...................................................... 5-55
6 Pumping system (Mechanical)

6-1 Pumping mechanism in the diode ion getter pump.................................. 6-14
8 Mechanical drawings
801 Cross section of the microscope column ................................................... 8-1
802 Rear view ................................................................................................... 8-2
802A Rear view for CM120 BioFilter only ........................................................... 8-3
803A Cross setion baseplate (CM10) ................................................................. 8-4
803B Cross section baseplate (CM10(0)/CM12(0), from April 1992 onwards .... 8-5
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List of Illustrations (cont’d) H
Fig. Title Page

804 Emission chamber + lifting mechanism ...................................................... 8-6
805 Valve V7 ..................................................................................................... 8-7
806 Upper lens section...................................................................................... 8-8
807 Goniometer stage (manual stage) .............................................................. 8-9
807A Goniometer stage (Compustage) ............................................................. 8-10
807B Goniometer stage (CS CM100/120/200) .................................................. 8-11
808 Right hand ear .......................................................................................... 8-12
808A Exploded view of CS (CM100/120/200) ................................................... 8-13
808B Cross section of CS (CM100/120/200)..................................................... 8-14
808C Covers for Compustage CM100/120/200 ................................................. 8-15
808D Compustage joypad (CM100/120/200)..................................................... 8-16
809 Left hand ear ............................................................................................ 8-17
810 Lower lens section.................................................................................... 8-18
811 Camera airlock ......................................................................................... 8-19
812A Projection chamber and plate camera drive + numbering........................ 8-20
812-1A Interface block CM100/120 from May 1996 onwards ............................... 8-21
812B Plate numbering unit................................................................................. 8-22
813 Exchange unit plate film and plate film cassette....................................... 8-23
814A Water and air connections, circuit diagram (up to Oct 1998) ................... 8-24
814B Water and air connections, circuit diagram (up to Oct 1998) ................... 8-25
814C Electrical, pneumatic and water connections, CM120 Biofilter................. 8-26
814D Water connections CM120 Biofilter .......................................................... 8-27
814E Compressed air connection CM120 Biofilter ............................................ 8-28
815A Water and air connections, mechanical (upto Oct. 1988)......................... 8-29
815B Water and air connections from Oct 88 to Apr92 ..................................... 8-30
815C Water and air connections from Apr92 ..................................................... 8-31
816 Pneumatic circuit diagram ........................................................................ 8-32
817 Microscope column wiring ........................................................................ 8-33
818 General tools ............................................................................................ 8-34
819 Vacuum system block diagram................................................................. 8-35
820A ODP and pre vacuum valves (from June 90 onwards)............................. 8-36
820B ODP and pre vacuum valves (from 1994 onwards).................................. 8-37
821 UHV valve + tubing................................................................................... 8-38
822 35mm film transport mechanism .............................................................. 8-39
823 35mm film holder ...................................................................................... 8-40
824 STEM detectors (BF, DF, SED)................................................................ 8-41
825 Near axis system ...................................................................................... 8-42
826 Bright field detector................................................................................... 8-43
827 Central dark field detector ........................................................................ 8-44
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1 Introduction H
This volume of the CM100/120 Electron Microscope Handbook describes the

maintenance activities to be carried out on the microscope column and vacuum
system. The subjects covered are cleaning, fault-finding, dismantling and
assembly, plus summaries of half-yearly and annual routine inspections.
The complete CM100/120 Microscope Handbook comprises 5 volumes

entitled:
• Pre-installation Instructions
• Installation Instructions
• Operating Instructions
• Electronics, Volume 1, 2 and 3
• Mechanics
Section numbering conventions used in this manual
The following section numbering convention is used throughout this manual.

Section numbers containing only digits are common to all types of microscopes
(e.g. 2.2; 3.1.1, etc.). If a section number also contains letters (e.g. 4.1CS), that
section deals with a specific type of microscope. The various types of
microscopes are indicated by the following letter combinations:
Microscope Letter(s) Section no. example

CM120 CompuStage CS 5.15CS
NOTE: To find a particular item, first look it up in the contents list, then find
the page number given.
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2 Cleaning H
Regular checks are essential to maintain the best performance.

It is stressed that cleaning is more successful if carried out before heavy
deposits of contamination have been allowed to build up.
Moreover, charge effects on parts that have become heavily contaminated by
the electron beam eventually cause instability of the image or illumination.
The goal is to clean the microscope parts with maximum efficiency during
corrective or preventive maintenance, using a minimum of instruments,
consumables and chemicals. The topics described in the text following are:
• Cleaning equipment and materials required
• Warnings, danger classification and safety-advice
• Code of practice
• Five-phase cleaning flow chart
• Explanation of the chart
• Summary
This is a five-phase cleaning procedure, highly effective, using a minimum of
equipment and materials, and producing good results when the instructions are
strictly followed.
NOTE: The instructions given here supersede all previous cleaning

instructions. Ignoring these, or only carrying them out in part will
result in poor performance of the microscope and will necessitate
recleaning.
2.1 Cleaning equipment and materials
2.1.1 Instruments
The following instruments are required:
• Ultrasonic cleaner
• Ultrasonic vapour degreaser (if available)
• Storage bottles (1 litre size)
• Beakers, EM liner tube size and smaller
• Petri dishes
• Stereo light microscope (magn. 5x to 50x)
• Tweezers
• IR heating lamps
• EM special tools (removal of liner tube and diaphragms)
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2.1.2 Consumables H
The following consumables are required:
• Rubber gloves
• Safety goggles
• Lint-free clothes
• Lint-free gloves
• Dust-free tissue paper
• Grease-free cotton wool
• Wooden spills
• Aluminium foil
• “Gas Jet Duster” spray can
2.1.3 Chemicals
The following chemicals are required:
• De-ionized or distilled water
• Ethanol - C2H5OH
• Ethanol Pro-Analysis (99.8% pure) - C2H5OH
• KOH (Potassium Hydroxide) or NaOH (Sodium Hydroxide)
• EXTRAN - MA02 (neutral cleaning fluid)
• CIF
D A NG E R ! Always refer to the Material Safety Data Sheets

before using chemicals.
Only use recommended solvents.
The following products are supplied by E. MERCK, Darmstadt, W. Germany:

• Ethanol (PA)
• KOH
• NaOH
• EXTRAN MA02
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2.1.4 Danger Classification and Safety advice H

Explanation of Danger Classification and Safety advice used
Danger Classification:
R11 : Highly inflammable
R35 : Causes severe burns
Safety advice:
S2 : Keep out of reach of children
S7 : Keep stored under sealed conditions
S16 : Keep away from igniters
Do not smoke
S26 : On contact with the eyes, rinse profusely with water
S37/39 : Wear protective gloves and facial protection devices
D A N G E R! As cleaning solvent Ethanol is highly

inflammable, do not use open flames, or
smoke while cleaning. KOH and NaOH are
corrosive solvents, prevent skin contact.
Ventilate the room properly.
Code of practice
• Do not open the column unless it is really necessary, but check the
performance regularly; see 4 “Performance check/fault finding”.
• Always work in a clean and ventilated room
• Use a clean working table with good illumination
• Wear lint-free clothes
• Always wear clean gloves when handling “vacuum” parts
• Always use CLEAN solvents
• Before mounting, inspect parts under a light microscope
• Be sure that special tools are clean before use and packed after use in
aluminium foil
• Do not mix materials of different compositions in the cleaning baths
• Strip the assemblies as far as possible
• Pack items in aluminium foil after cleaning
• Collect all cleaning items and have them on site before opening column
• Vacuum parts that can not be remounted immediately should be wrapped
in aluminium foil and kept under an infrared lamp.
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2.2 Cleaning process H

Figure 2-1 and Figure 2-2
Phase 1:
Heavily polluted metal parts:
Rub cleaning must be done using “CIF”, a household fine abrasive. Rinse in
water.
Pole pieces, Wehnelt and Anode:

Ultrasonically cleaned for 30 min. in a 6% dilution of NaOH or KOH in distilled
water at 20°C, rinsed in water.
The KOH and NaOH dilutions are corrosive solvents, prevent skin contact. Use
a fume cupboard. Raising the water temperature increases the cleaning effect.
Phase 2:
Less polluted metal parts and parts coming from phase 1:
Ultrasonically cleaned for 5 min. in a 5% dilution of “EXTRAN MO2” in water.
Raising the temperature increases the effect. This soap solution binds the dirt
and removes it from the surface of the part. Rinsing is done in distilled water;
raising the water temperature increases the effect.
Phase 3:
O-rings, synthetic materials and assemblies (which cannot be stripped
down in the field) start their cleaning sequence from this point.
Ultrasonic cleaning in Ethanol for 5 min. at 20°C, to remove the water.
Rinse in a new clean bath of Ethanol for 2 min.
Ethanol is highly flammable, do not use open flames, or smoke while cleaning.
Phase 4:
This phase must be skipped for O-rings and synthetic materials.
Ultrasonic cleaning in Ethanol - pro analysis (99.8% pure), to be sure all water
and traces left by Ethanol in phase 3 are removed.
Rinse for 2 min. in a new bath with Ethanol p/a.
If available, an ultrasonic vapour degreaser can be used.
Phase 5:
The parts must be dried with the aid of two 150W Infra Red lamps
(INFRAPHIL). To reach a temperature of 80°C, heating by the IR lamps must
be maintained for a minimum of 15 min., or, for heavy items and the emission
chamber, for 2 hours or more. If available, a vacuum oven can be used and set
to 80°C.
When mounted in the microscope and external heating is applied, the
temperature must kept under 100°C, otherwise damage to encapsulated items
will occur.
O-rings must not become warmer than 70 °C and can best be dried in air.
Parts should only be handled after they have cooled down below 50°C.
Spray the part with a gas jet duster, to remove any dust particles or fibres
before inspection.
After inspection under a light microscope, mount the parts directly in the
Electron Microscope and spray with the gas jet duster again before closing the
microscope.
If parts are not mounted but stored, pack them in aluminium foil
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. H
“Field Cleaning” of Electron Optical Instruments.

for parts that are in contact with the electron beam
and are in vacuum.
Phase 1 Phase 2
Start for not

highly polluted
metal parts
Start for O-rings
Synthetic materials &
Rub Rinsing Assemblies
cleaning in tap water
1)
Cif
Pole pieces
Wehnelt Ultrasonic Rinsing Ultrasonic Rinsing
Anode cleaning in tap water cleaning
30 min. 5 min. 5 min.
2) Distilled water
NaOH 6% dilution in distilled water Extran: 5% dilution
3)
or KOH 6% dilution in distilled water in distilled water 4)
1)
Cif: household fine abrasive
2)
NaOH: Sodium Hydroxide
3)
KOH: Potassium Hydroxide
2) 3)
R: 35 S: 2-26-37/39
4)
Extran: Industrial soap (neutral) for cleaning instruments
- Extran MA02 - (non reactive cleaning fluid)
- Raised water temperature increases the effect
EM9612
Fig. 2-1 Cleaning process (phases 1 & 2)

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Phase 3 Phase 4 Phase 5
O-rings & Synthetic Materials Drying

in air
Ultrasonic Mounting
Ultrasonic Rinsing Rinsing Drying Inspection
cleaning in
cleaning
microscope
5 min. 2 min. 2 min. 2 min. 15 min. - 2 hr; Under light microscope
Ethanol 5) Ethanol p/a Ethanol p/a
Ethanol 5) IR lamps
Ultrasonic
cleaning Vapour
2 min. 1 min.
Ethanol p/a Ethanol p/a
Ultrasonic vapour degreaser

(if available)
5) Ethanol p/a: C H OH
Ethanol: C H OH 2 5
2 5
R: 11 S: 7-16 R: 11 S: 7-16
EM9612
Fig. 2-2 Cleaning process (phases 3, 4 & 5)

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Beaker
Liner tube
+ 300mm
_
Water/soap for
optimal Ultrasonic
transmission Cleaning fluid
Ultrasonic cleaning unit EM8851
Fig. 2-3 Cleaning long parts, e.g. Liner tube
Infraphil
IR lamps
EM8852
Fig. 2-4 Drying electron optical items with IR lamps

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2.3 Emission Chamber And Gun Insulator H

(Figure 804)
CAUTION! Never touch with bare hands any parts of the emission
chamber/gun that are located in UHV areas.
NOTE: The brown discolouration of the acceleration unit is produced by

X-rays during normal use of the instrument and does not affect HT
stability. If desired, the discolouration may be removed by
subjecting the affected surface to ultra-violet radiation.
a. The emission chamber works under ultra-high vacuum, therefore it must be

completely free of dust.
If, e.g., after exchanging a filament the dark current or micro-
discharges are too high, the gun and filament must be cleaned using a
small vacuum cleaner to remove all the dust particles.
If the dark current is still too high after removing all the dust particles
check if the oil in the plugs on the HT tank and emission chamber is
clean and dry. If the oil is good, or if changing the oil makes no
difference to the dark current, carry out the procedure following.
b. If cleaning of the porcelain is necessary because it shows traces of oil con-
tamination (e.g. due to having been touched with bare hands), proceed as
follows:
– Remove the porcelain insulator (see 5.6 “Removal & assembly of the
porcelain insulator”.);
– Pour the oil out of the insulator and wash the inside a few times in
cyclohexane. Plug the top of the insulator, e.g. with a rubber bung);
– Clean the insulator using household cleaning fluid such as Soft scrub,
Jif, or soap and water;
– Wash thoroughly under hot running water;
– Suspend the insulator in distilled water (preferably deionized), so that
no water enters the inside, and boil for approx. 5 minutes.
Make sure that the rubber bung keeps the top sealed, thus preventing
oil mixing with the water. Dry thoroughly under an infra-red lamp;
– Clean using ultrasonic cleaner and cyclohexane; refresh cyclohexane
until it remains clear;
– Dry insulator in oven (max. temp. 100 oC) or under infra-red lamp;
– Clean metal parts as necessary using fine-grain polishing paste or
household cleaning fluid;
– Wash parts in cyclohexane and then clean for 3 minutes in an
ultrasonic cleaner using cyclohexane;
– Dry parts thoroughly using oven (100 oC max.) or infra-red lamp;
– Put on clean nylon gloves, reassemble the insulator and remove the
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cable plug; fill with 20 ml of pre-dried Santovac 5 *. H
NOTE: Pre-drying of Santovac 5 should be done as follows:

- Pour 20 ml into a glass beaker;
- Heat oil to about 80 oC;
- Put beaker in a vacuum jar for about 15 min;
- Fill insulator as soon as possible with the hot oil.
If cleaning of the emission chamber is necessary, proceed as follows:

• Remove the emission chamber, see
5.7 “Emission chamber: removal, assembly & alignment”;
• With a cloth, scour off the contamination using household cleaning fluid Jif;
• Wash thoroughly using ultrasonic cleaner and hot water; refresh water until
it remains clear;
• Dry, then wash using an ultrasonic cleaner and cyclohexane;
• Dry thoroughly using oven (max. temp. 100 °C) or infra-red lamp;
• Remount the emission chamber as hot as possible to speed up degassing.
2.4 Wehnelt cylinder and anode

(Figure 804)
CAUTION! The Wehnelt cap 125, 126 (and anode 175) must be
absolutely free of scratches to avoid HT instability.
Clean using the following procedure:

• Clean insert caps 89, 94, 95, anode 134, and cap 90 (remove phosphor-
bronze spring ring 88) for approx. 30 minutes using ultrasonic cleaner and
a 10% solution of KOH (potassium hydroxide) in alcohol.
If necessary rub with cotton wool wrapped on a wooden spill;
• Rinse parts thoroughly using first tap water, then distilled water. Dry under
infra-red lamp;
• Clean parts for 3 minutes using ultrasonic cleaner and cyclohexane;
• Dry parts in an oven (max. temp. 100 °C) or under an infra-red lamp.
NOTE: If no KOH-alcohol solution is available the parts can be mounted

on a lathe and cleaned by polishing with household cleaning fluid,
e.g. Soft scrub or Jif.
Afterwards, clean using ultrasonic cleaner and hot water (until
water remains clear); dry thoroughly and proceed as in the last
two steps just described.
Frequency of cleaning:
• Insert cap 89: whenever a new filament is fitted;
• Wehnelt cap and anode: check cleanliness whenever a new filament is
fitted and clean as necessary, but clean at least once every five new
filaments.
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2.5 Gun airlock H

(Figure 805)
NOTE: Not applicable for the CM100
O-rings 46 and 58, the operation shaft 39 and the interior of the air cylinder 64
should be cleaned when the airlock movement becomes stiff. Check for
damage and clean using a tissue dipped in cyclohexane.
Lightly grease O-rings 58, 48 and 46 with Fomblin RT15 Grease.
Check operation every year (see 4.2 “Checking the airlock pumping times” and
4.3 “Tracing vacuum leaks in the column”), clean as necessary.
NOTE: For dismantling of the gun airlock see 5.8 “Removing, dismantling
& remounting of the gun airlock valve, gun centring coil or the x-
ray diaphragm”.
2.6 Objective lens pole pieces

(Figure 807)
The pole pieces need cleaning when the residual astigmatism exceeds the
permissible level. Failure to do this will also increase high order astigmatism,
which cannot be compensated and will, therefore, impose a severe limitation
on the resolving power.
Check the pole pieces astigmatism with the objective stigmator switched off
(see 4.10 “Objective lens astigmatism”).
Clean as follows:
CAUTION! Do not use KOH in alcohol.
• Remove the pole pieces;

• Clean the pole pieces by rubbing with cotton wool wrapped on a wooden
spill and dipped in Jif or Soft scrub;
• Rinse the pole piece thoroughly using first tap water then distilled water. Dry
thoroughly in an oven (max. 100 °C) or under an infra-red lamp;
• Clean pole pieces for 3 minutes using ultrasonic cleaner and cyclohexane;
• Dry thoroughly using oven (max. temp. 100 °C) or infra-red lamp;
• Check the cleanliness using a light microscope.
Check residual astigmatism (see 4.10 “Objective lens astigmatism”) every six
months and clean as necessary.
Clean pole pieces as necessary.
NOTE: For removal of the pole pieces see 5.11.1 “The upper objective
pole piece” and 5.23.1 “The lower objective pole piece”.
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2.7 Goniometer Stage H

(Figure 807)
2.7.1 CS CompuStage
The specimen airlock can become contaminated due to dust and dirt particles
floating in during airlock operation, therefore check that the final vacuum
without the holder is equal to the vacuum with the holder.
If not, remove the CompuStage, open and dismantle the airlock; see
5.15.1 “CS Dismantling the airlock”.
Clean O-Ring 154, Figure 808A and lightly grease it with Fomblin RT 15.
If the vacuum improves with the airlock closed, check the O-Ring on the holder.
Clean it thoroughly and grease lightly with Fomblin RT 15.
2.7.1 Right-hand ear

• The specimen airlock can become contaminated due to dirt and dust
particles floating in during airlock operation, therefore check that the final
vacuum without holder is equal to the vacuum with holder.
If not, remove right-hand ear and open and dismantle the airlock; see
5.15 “Dismantling & assembly of the right-hand ear”.
Clean O-ring 15, Figure 808 and lightly grease it with Fomblin RT15.
• If the vacuum improves with the airlock closed, check O-ring 318,
Figure 808 on the holder. Clean it thoroughly and grease lightly with
Fomblin RT15.
During specimen exchange, grease may be deposited on the sapphire on
top of the specimen holder. Remove the grease from the sapphire with a
chamois leather or lens paper dipped in cyclohexane or acetone.
Clean the tip of the holder by rubbing with cotton wool wrapped on a
wooden spill and dipped in cyclohexane or trichloroethylene.
The use of a fine abrasive is permitted to remove stubborn deposits.
Clean for 3 minutes using an ultrasonic cleaner and cyclohexane.
Dry thoroughly in an oven (max. 100 °C) or under an infra-red lamp.
Check for cleanliness of the tip under a light microscope.
2.7.2 Left-hand ear

Grease on the sapphire of the specimen holder will also contaminate the
sapphire on the floating rod; this can be cleaned as follows:
• Remove complete left-hand ear (see 5.16 “Dismantling & assembly of the
left-hand ear”.
• Clean the sapphire with a chamois leather or lens paper dipped in
cyclohexane.
2.7.3 Frequency of cleaning

Check cleanliness before inserting a specimen. Clean as necessary.
After cleaning check under a light microscope that the specimen grid is
Contents
correctly clamped by its fixing ring.

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2.8 Anti-contamination device H

(Figure 807)
The cold trap 229 must be cleaned whenever the objective lens pole pieces are
cleaned.
Clean as follows:
• Remove the cold trap (see 5.18 “Removal, dismantling & assembly of the
anti-contamination device & pre-vacuum valve”);
• Clean the cold trap by rubbing with cotton wool wrapped on a wooden spill
and dipped in trichloroethylene or cyclohexane;
• Clean the cold trap for 3 minutes using an ultrasonic cleaner and
cyclohexane;
• Dry thoroughly using an oven (max. 70 °C) or infra-red lamp.
Whenever the objective pole pieces are cleaned.
2.9 Vacuum lining tube (upper lens section)

(Figure 806)
• Remove the lining tube (see 5.12 “Dismantling & assembling the complete
upper lens section”) and remove the fixed diaphragms;
• Rub the inside of the tube, using cotton wool wrapped on a wooden spill
• Clean in an ultrasonic cleaner with cyclohexane. Make sure that no
particles remain in the bore;
• Dry thoroughly in an oven (max. temp. 100 °C) and remount as hot as possible.
When the contamination and/or the astigmatism (especially in STEM mode) is
too high.
2.10 Vacuum lining tube (lower lens section)

(Figure 810)
• Remove the lining tube (see 5.24 “Dismantling & remounting the complete
lower lens section”);
• Rub the inside of the tube, using cotton wool wrapped on a wooden spill
• Clean in an ultrasonic cleaner with cyclohexane. Make sure that no
particles remain in the bore;
• Dry thoroughly in an oven (max. 100 °C) and remount.
When visible charging effects are detected underneath the specimen that are
not caused by the fixed or adjustable diaphragms.
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2.11 Camera airlock H

(Figure 811)
Rubber seals 14, 18, 25, 27, the operating shaft 39 and the interior of air
cylinder 3 should be cleaned when the airlock movement becomes stiff. Check
for damage and clean using a tissue dipped in cyclohexane.
Lightly grease seals 14, 18, 25, 27 and the interior of air cylinder 3 with
Fomblin. See 5.25 “Dismantling & reassembling the camera airlock valve” for
dismantling details.
Check the airlock every six months for smooth operation - clean if necessary.
2.12 Fixed diaphragms

Remove the diaphragms as follows:
Diaphragms which are situated in the upper lens section, see 5.11 “Removing
& replacing the upper objective pole piece & the fixed diaphragms in the upper
lens section”.
Diaphragms which are situated in the lower lens section, see 5.23 “Removing &
replacing the lower objective pole piece & the fixed diaphragms of the lower
lens section”.
Clean as follows:
• Rub with cotton wool wrapped on a wooden spill and dipped in
cyclohexane or trichloroethylene;
• If this is not successful use fine grain polishing paste or household cleaning
fluid e.g. Soft scrub or Jif;
• Wash thoroughly under hot running water;
• Clean in ultrasonic cleaner for 3 minutes using cyclohexane;
• Dry thoroughly in oven (max. 100 °C) or under infra-red lamp;
• Check cleanliness and sharpness of aperture using a light microscope;
• Remount (see 5.11 “Removing & replacing the upper objective pole piece
& the fixed diaphragms in the upper lens section” and 5.23 “Removing &
replacing the lower objective pole piece & the fixed diaphragms of the
lower lens section”.).
NOTE: The differential and fixed C1 diaphragms cannot be cleaned but

must be replaced when too contaminated.
• Diaphragms in upper objective pole piece: at the same time as the
objective lens pole pieces are cleaned;
• Other fixed diaphragms in lining tubes: according to result of visual
inspection.
See also 3.2.2 “Diaphragms and liner tubes”.
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2.13 Adjustable diaphragms H
2.13.1 Condenser lens diaphragms

Cleaning is necessary when the image of the aperture becomes ragged, or
when the astigmatism of the spot is increased, so that the image of the
aperture can no longer be made round, or when static charge effects are
noticed.
2.13.2 Objective lens diaphragms

Cleaning is necessary when the astigmatism introduced by the aperture
exceeds 0.2 micron.
The use of thin film (French) diaphragms is recommended as these require no
cleaning.
2.13.3 S.A. Diaphragms
NOTE: Not applicable for CM100.
Cleaning of the diaphragms used for selected area diffraction work is

necessary when the image of the aperture becomes ragged, or when static
charge effects are noticed.
2.13.4 Diaphragm cleaning methods

Use one of the following recommended cleaning methods:
Method 1: Heat each diaphragm (held in the special tweezers with platinum
points) in a clean gas flame until white hot.
Take care that the diaphragms are not melted or stick to the
tweezers.
Method 2: Connect a V-shaped (approx. 2 cm long) platinum foil boat across

the low-voltage secondary winding of a transformer (e.g. vacuum
coating-unit) and heat until white hot. Place the diaphragms on the
white-hot foil for a few seconds: take care that the diaphragms are
not melted or stick to the foil.
Method 3: Place the diaphragms on edge in a V-shaped (approx. 2 cm long)

platinum foil boat and, using the special platinum tipped tweezers,
hold the boat in a clean gas flame until the diaphragms are heated
to a white colour. Maintain colour for 15-30 seconds.
Method 4: Place the diaphragms on a V-shaped piece of molybdenum foil and

heat to approx. 1300 °C (orange-yellow colour) in a vacuum
coating unit with a vacuum of 1.3x10-2 Pa to 1.3 x 10-3 Pa.
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2.14 Diaphragm holders H

Clean holders as follows:
• Clean tip of holder by rubbing with cotton wool wrapped on a wooden spill
and dipped in cyclohexane or trichloroethylene.
The use of a fine abrasive is permitted to remove stubborn particles.
CAUTION! Do not bend the tip as it is liable to break off.
• Clean for 3 minutes using ultrasonic cleaner and cyclohexane;

• Dry thoroughly in oven (max. temp. 100 °C) or under infra-red lamp;
• Check the cleanliness of the tip under a light microscope.
Whenever the diaphragms are cleaned or replaced.
2.15 Projection chamber viewing windows

The viewing windows are coated with a conductive layer on one side, and
should be fitted so that the conductive side is inward facing to prevent
electrostatic charging.
The conductive side can be cleaned with a soft tissue dipped in alcohol or with
lens paper.
CAUTION! Never use abrasives.
2.16 Lens housings and desk

The insides of the lens housings, and all nickel-chromium parts of the column
outside the vacuum are coated with an anti-corrosive preparation to prevent
oxidation*.
Apply a new coating in the event of a water leak or condensation or whenever
the lens section is dismantled.
* A suitable anti-corrosion preparation can be supplied from stock under order
number 5322 390 80041.
The outside of the lens housings and the desk are cleaned as follows:
Contaminant Cleaning aids
Dust Soft brush or damp cloth
Mineral oils Pure or commercial ethyl alcohol

Caution! Never use methyl alcohol
Dust + perspiration,
Coffee, tea, etc. Water and standard detergents
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2.17 Exposure measurement system H

The exposure measurement system comprises the SCA board with its shield,
the vacuum feed-through (Figure 812A) into the projection chamber and the
connections of the large and small screen in the projection chamber.
NOTE: To identify which item is causing the problem see Vol. 2, Sect.
3.5.2.
When the meter for the exposure time already gives a value when the high
tension is still switched off, or when the measured values of the large screen
and the small screen are not within specification.
2.17.1 The SCA board

Grease and solder resin on the SCA board can cause very small leakage
currents in the circuit that can influence the measured value of the exposure
time readout.
Clean as follows:
• Unscrew the shielding of the SCA board from the microscope.
• Remove the batteries from the holders (check if the batteries have the
correct voltage).
• Unsolder the input wires on the SCA board, X8 and X12 and remove
connectors X9 and X11.
• Unscrew the SCA board from its shielding.
• Clean the board with a soft brush and alcohol on both sides.
• Reassemble and remount the unit.
2.17.2 The vacuum feed-through

Grease (e.g. fingerprints) on the teflon insulator (see 1, Figure 2-5) or solder
resin on the insulation of the inner wires that are soldered on the feed-through
(2, Figure 2-5) can cause small leakage currents that can influence the value of
the exposure time readout on the main data screen.
3 1 2
soldered
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Fig. 2-5 Vacuum feedthrough

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Clean as follows: H
• Remove the feed-through from the projection chamber.
• Unsolder the cable on the SCA board (X8 and X12).
• Dismantle the unit.
• Unsolder the wires on the feed-through.
• Clean all the parts of the unit in alcohol (not in an ultrasonic cleaner!).
• Reassemble the unit.
Be sure that:
• the mantle of the coaxial cables is removed from the inner wire for approx.
5 mm.
• the rubber sleeve is clean and mounted according to Figure 2-5.
• after soldering there is no solder resin left on the insulation of the inner
wires.
• the wire that is marked brown is connected to the large screen.
• the wire that is marked red is connected to the small screen.
2.17.3 Fluorescent screens

Grease (e.g. finger prints) on one of the insulators of the mounting of the
screens can cause a significant difference in the measured values of the
exposure time for the small screen and the large screen.
Clean as follows:
• Carefully remove the screens.
• Clean the teflon insulators in alcohol.
• Carefully remount the screens.
2.18 Penning gauge

See Section Figure 6.2.4.
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3 Preventive maintenance H
3.1 Preventive maintenance for users
3.1.1 Changing filaments

When changing a filament, attention should be paid to the following points:
• Gloves (preferably heat-resistant and not fluffy) must be worn if for some
reason parts in the emission chamber must be touched.
Care should be taken to ensure that the gloves are not used when touching
parts which are not in the high vacuum section of the microscope, such as
the lifting mechanism, fixing screws and control knobs or buttons.
• Filaments, centring keys and spare Wehnelt cups should be kept in a dust-
free, clean environment, such as a closed glass container.
• Before a filament exchange, clean the outside gun area with a towel.
• Removal of the Wehnelt cylinder using tissue paper reduces the chance of
accidental use of dirty gloves.
• If no spare Wehnelt cylinder for direct mounting is available, the emission
chamber should be closed during replacement of the filament.
• It is advisable to replace the Wehnelt cup every three filaments.
• Before closing the emission chamber, it should be carefully checked for the
presence of any dust particles. Check for this also on the insulator, Wehnelt
cylinder or sealing O-ring.
Dust particles can best be removed by a vacuum cleaner with a hard-
wearing nozzle (nylon).
• If the acceleration chamber is vented with dry nitrogen, care should be
taken to ensure that the acceleration chamber is not opened too early.
• When the emission chamber is open, the nitrogen supply should not be
shut-off, since the outgoing stream of gas prevents floating dust particles
from entering the chamber.
3.1.2 Treatment of the specimen holder and goniometer airlock

• To prevent dust and other contaminants from being trapped in the airlock,
the holder (when outside the microscope) should be stored in a dust-free
cabinet. Good dust-free storage is also assured by the use of a test tube
that fits over the front part of the holder.
The wooden box as such is not a dust-free storing place.
When the holder is not in the microscope, contamination of the airlock
space in the goniometer can be prevented by sealing off the inlet with a
rubber plug.
• A good vacuum-tight sealing of the specimen holder is guaranteed by
regularly checking the O-ring on the holder for dust or damage.
• Drift is prevented by slightly greasing the O-ring on the specimen holder
with FOMBLIN and by keeping the tip grease-free with lens paper.
• When the red light is extinguished, the specimen holder must immediately
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be put through the lock. H

For several reasons, the user is well-advised to keep the holder in the
working position or entirely outside the microscope.
3.1.3 Camera systems and fluorescent screens

• If the microscope does not remain switched on during the night or the
weekend, it is suggested that film material which has not been properly
pre-dried be removed from the microscope.
• When bringing in photographic material, dust and other contamination
should be removed with a clean finger tip from the seal on the camera
housing and from the area where the ring is used.
• The storage container of the plate camera should always be kept vertical to
ensure that the plate holders do not topple over, thus avoiding jamming.
• During the gun alignment procedures the lower emission positions should
preferably be used to prevent electron overload of the flu-screens.
3.2 6-Monthly maintenance

This takes 2 days. See also 2 “Cleaning”, 4 “Performance check/fault finding”
and 6 “Pumping system (Mechanical)”.
3.2.1 Emission chamber and gun

• Check insulator for contamination and arc traces.
A home detergent on a water and soap basis, e.g. Soft scrub or Jif, should
be used to clean the insulator.
CAUTION! Under no circumstances must Wenol or any other

abrasive paste be used.
Colour change to brown is caused by X-rays, this does not affect the quality
of the insulator. See also 2.3 “Emission Chamber And Gun Insulator”.
• Clean the anode 175, Figure 804 and the X-ray diaphragm 9 on top of the
upper membrane assembly 4-11, Figure 805.
Discolouration of the anode is mostly not caused by contamination but by
heating.
• The 20 ml of Santovac oil for the insulator should be heated and pre-dried
before use.
• Check level of oil in HT plug of the HT generator. It should fully surround
the plastic body of the HT cable.
NOTE: The X-ray diaphragm may be made visible using the gun shift
controls.
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3.2.2 Diaphragms and liner tubes H

• Check the fixed and adjustable diaphragms for purity at the lowest kV
position.
• Method for imaging fixed diaphragms:
– Specific values for the free lens control to image a fixed diaphragm will
be issued later.
3.2.3 Vacuum system

• Remove the penning tube and clean the anode and cathodes; see
6.2.4 “Penning gauge”.
• Check the vacuum cycles for correct performance and pumping time.
The sealing of the respective valve seats can be checked using the
following cycles:
CM100:
– Select vacuum page and press “col air” softkey: If P3 increases, V3 is
leaky;
CM120:
– Select vacuum page and press “gun air” softkey: If IGP increases, V7
or V5 are leaky. If P3 increases, V6 is leaky.
CM100/CM120:
– Select vacuum page and press “cam air” softkey: If IGP increases, V4
or V6 are leaky;
– IGP should have the same value with and without the holder present;
– During specimen removal IGP should not increase by more than 20
units.
• Check colour and level of oil in OD pump. If oil is discoloured brown, the
pump must be cleaned and filled with new oil (60 ml Santovac 5);
• If a service visit or call is paid to a customer who uses large quantities of
photographic material, he should be advised to use the gas ballast of the
pre-vacuum pump for 2/3 days.
If, in spite of this measure, the right pressure is not reached, the pre-
vacuum pump oil should be replaced;
• Monitor the variation of P3 when the buffer pressure is rising.
When using a hot pump, the P3 pressure should not increase when the
buffer pressure rises from 13.3 Pa to 46.7 Pa (use T exposure time to
attain this level);
• Monitor the variation of P3 when using cameras and flu-screens;
• Check pumping times (see 4 “Performance check/fault finding”);
• Check leak rate (see Sect. 4.2 “Checking the airlock pumping times”);
• Check ultimate vacuum (see 4.1 “Checking the pumping speed”).
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3.2.4 Pneumatics H
• Check pneumatic control valves for hissing sound;
• Check blow-off line for presence of water;
• Lubricate gun valve V7 with 1 drop of pneumatic oil;
• If present, check switching pressures of the compressor unit;
• Drain water from compressor-buffer vessel.
3.2.5 Water circuit

• Clean water filter, Watts regulators and flow meters;
• Check column for rust;
• Check for water leaks, water fittings and polyflo tubes;
• Check the water flow rate.
3.2.6 Electronics
• Check stabilities electrically or by an electron-optical method (diffraction
point and focus drift);
• Check condenser systems;
• Check magnifications, camera lengths and focus system optically;
• Check beam tilt/deflection system;
• Check all coil currents (display page);
• Check exposure meter modes, camera ratios, emulsion factor, camera and
numbering system (camera page);
• Check display monitor;
• Check pushbuttons, lamps and shaft encoders.
• Check batteries of Ram Combi Board.
3.2.7 CS CompuStage
• Clean the conical part of the specimen holders with chamois leather or lens
paper;
• Replace O-Ring on specimen holder and grease lightly with FOMBLIN;
• Clean or renew airlock seals of CompuStage and pre-vacuum valve if IGP
vacuum tests are unsatisfactory;
• Check the proper working of the pole hit protection;
• Ensure that the specimen is not in mid-position;
• Insert stop 505, Figure 808A (as a dummy holder);
• Short this stop to ground, check that the beep signal is activated, and that
the specimen is moved for about a second towards mid-position;
• Check that the Alpha, Z, X and Y, end stops work properly.
NOTE: This can best be done during a homing procedure while checking
the LED’s on the GDB board.
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• Check if all specimen axes can be moved over their full range without any H
obstruction;
• Check if the vacuum with and without holder is the same;
• Check all specifications as given in Section 4.15CS;
• Release the drive rod and manually check if the Y movement has no stiff
points; if so lightly grease the balls 231, Figure 808A.
3.2.8 Goniometer stage

• Clean sapphire of left-hand ear via BSD port;
• Clean tips of specimen holders with chamois leather or lens paper;
• Replace O-ring on specimen holder and grease slightly with FOMBLIN;
• Clean or renew airlock seals of goniometer right-hand ear and pre-vacuum
valve if IGP vacuum tests are unsatisfactory;
• Check movements.
3.3 Annual maintenance

This takes 2 days.
• Recharge pre-vacuum pump with pre-vacuum oil, grade A15;
• Carry out 6-monthly maintenance.
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4 Performance check/fault finding H
4.1 Checking the pumping speed

NOTE: Before checking the pumping speed remove all photographic
material from the projection chamber.
The pumping times given below are only valid for microscopes
which are in regular use. These times may be greatly extended
after installation or repair.
Procedure:
• Start the vacuum system (cold start);
• Select vacuum page;
• Normal pre-vacuum cycle will be performed;
• After about 30 min. the HV valve opens;
• At a P3 reading of approx. 62, V4 opens and IGP is switched on;
• One minute later valve V6 will close;
• Ten hours after the cold start the ultimate IGP indication must be less than
27 (approx. 7 x 10-5 Pa);
When using the anti-contamination device, the ultimate pressure is approx.
2.6 x 10-5 Pa (= IGP indication of 15).
NOTE: 1. The pumping times given below are only valid for microscopes
2. The pumping times given below are only valid for microscopes
3. To overcome heating up of an older IGP at its starting vacuum,
ensure that the IGP is switched on when the P3 pressure is
about 40 scale divisions.
4.2 Checking the airlock pumping times

These are measured from the start of the airlock pumping cycle till the PV
pump stops and are as follows:
• Specimen airlock cycle : ≤ 10 sec.
CM120:
• Gun air cycle : ≤ 3 min.
CM100:
• Column airlock cycle : ≤ 3 min.
CM100/CM120:
• Cam air cycle (no photo material) : ≤ 3 min.
• Cam air cycle (with photo material) :5 to 7 min.*
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*This time depends strongly on how well the plates and the plate container
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have been dried. H

• After specimen change approx. 3/4 hour* is required to restore starting
vacuum.
* This time depends very strongly on:
– Cleanliness of specimen holder and specimen.
– Ambient humidity.
– Ultimate vacuum obtained.
– Whether the cooling device is cooled down: if so this will reduce the
pumping time.
4.3 Tracing vacuum leaks in the column
4.3.1 Checking the vacuum tightness without opening the

column
NOTE: 1. First remove all photographic material.

2. Opening and closing of separate valves can only be done when
the service key is present in the System Definition Board (SDB)
and the manual vacuum page is selected.
3. Start the vacuum system and wait until all valves are open and
the P3 indication is less than 45 (1.3 x 10-3 Pa).
4.3.1.1 Check the UHV valve seating
NOTE: This check must be carried out before any vacuum leak test,
because the valves form an integral part of the vacuum test.
• Connect an analogue voltmeter, range 0-10 V, between X6 (ground) and

X8 (IGP) of the High Vacuum Gauge (HVG) board.
Press the “gun air” softkey (note that this test cannot be done on a CM100).
The voltmeter readings should not increase by more than 0.1 V, otherwise
V5 or V7 is causing a leak.
Press “gun air” softkey again;
• Press the “cam air” softkey. The voltmeter reading should not increase by
more than 0.1 V, otherwise V4 or V6 is leaky.
Press the “cam air” softkey again;
• Now connect the voltmeter (range 0-10 V) between X6 (ground) and X11
(penning) of the HVG board.
Press the “gun air” softkey (“col. air” for CM100). The meter reading should
not increase, otherwise V6 is leaky;
• After V5, V6 and V7 are checked as indicated above, press the softkey
“cam air”. If P1 increases more rapidly than before, V3 is leaky;
• To help locate a very small leak in the lower part of the column, proceed as
follows:
After the pumping sequence is completed and valve V6 is closed, close
valve V4 manually. If the IGP indication increases (vacuum worse), O-ring
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70, Figure 810 at the bottom of the lining tube is leaking. H
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4.3.1.2 Check the leak rate of the projection chamber H

• Close V4 and V6;
• Close V3 and monitor the voltmeter still connected between X6 and X11 of
the HVG board. If after one minute the reading is more than 3 V, a leak is
present in the projection chamber/plate camera area, the pneumatic
cylinder or the vacuum pipe to the UHV block, or humid air is present.
4.3.1.3 Check the leak rate of the column and IGP

Two methods can be followed depending on the leak rate:
• Measuring with the IGP pump reading (small leak):
– Connect an analogue voltmeter between X6 and X8 of the HVG, range
0-10 V;
– Close V4 and V6 (open V5 and V7 if present) and switch off the IGP for
3 minutes.
The voltmeter reading should not increase by more than 0.3 V.
• Measuring with the penning reading (large leak):
– Connect the analogue voltmeter between X6 and X11 of the HVG,
range 0-1 V;
– Close V4. Switch off the IGP and close V6 for 3 min. Open V5 and V7 if
present).
After opening V6, the voltmeter reading should not increase by more
than 3 V.
4.3.1.4 Check the leak rate of the emission chamber (not for CM100)
NOTE: The leak test for column and IGP can also be carried out for the
emission chamber. However, V5 and V7 must then be closed.
4.3.2 Checking the vacuum tightness by opening the column

If the previous test (4.3.1) is unsatisfactory, the column should be dismantled
and tested using vacuum test pieces.
NOTE: For vacuum test pieces, see Figure 818.
• Start the vacuum system and wait until the column is evacuated. Note the
final reading of the IGP.
– Admit air into the column and lift the upper part of the column.
– Close the holes on top of the objective stage and the UHV valve block
using test pieces 37 and 61, Figure 818.
– Start pumping again.
– If the IGP reading is now better, the leak is in the upper part of the
column.
If the reading remains the same, the leak is in the IGP, the specimen
stage or the lower column.
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Now remove the specimen stage from the column and close the hole in the H
getter pump using a test piece (not delivered) and the top of the UHV valve
block using test piece 61, Figure 818.
The IGP can now be tested alone as described in test 4.3.2.a.
• If it is found that the upper column section is leaking, the following tests
may help to locate the appropriate section:
– Remove the four screws fixing the emission chamber to the column to
reduce the pressure on the upper membrane.
If the vacuum reading decreases (i.e. vacuum better), the upper
membrane is leaking;
– Open the column between the upper lens section and the emission
chamber;
– Place a rubber stop on top of membrane 11, Figure 805.
– Close the hole on the top of the UHV valve block using test piece 61,
Figure 818;
– Start the pumping system;
– If IGP reading is now better the leak is in the emission chamber or the
indium sealing on top of the upper membrane;
– If no change in IGP reading, switch off the IGP (remove the plug IGP
X8);
– Partially slacken the four fixing screws of the membrane block.
If P3 reading increases (vacuum worse), the lower indium seal on
valve block V7 is leaking and must be renewed.
• If P3 reading decreases (vacuum better), the lower membrane of the valve
is probably leaking; reducing the pressure on the membrane reduces the
leak.
Some tips to help locate very small leaks:
After the pumping sequence is completed and valve V6 is closed, close valve
V4 manually. If the IGP indication increases (vacuum worse), O-ring 70,
Figure 810 at the bottom of the lining tube is leaking.
4.4 Stability of the electron beam (all HT settings)

The stability of the electron beam can be checked by observing the image of
the back-focal point of the objective lens (the so-called diffraction point) which
is very sensitive to fluctuations of HT and lens current.
A back focal image is obtained as follows:
• Select the required HT;
• Remove specimen from the beam by putting the holder in park position;
• Fully overfocus C2;
• Select D mode and a camera length of approx. 6 metre;
• Underfocus the diffraction pattern to obtain a crossover image with a dark
spot in the middle surrounded by a bright ring.
Before checking the stability of the electron beam, the microscope must have
been switched on for at least 60 minutes with all covers fitted.
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HT fluctuations – fast (micro-discharges) H

After switching on the HT at 120 kV (100 kV for CM100), fast fluctuations
(micro-discharges) may occur during the first 10 minutes. After that time there
may be 1 or 2 micro-discharges per half- hour, but the HT must not switch off.
Check over a period of one hour.
Also check the dark current (cold emission). This test must be performed with
Wehnelt cylinder present and filament removed. The dark current may not
exceed:
1 µA at maximum high tension.
If the dark current or rate of micro-discharges is too high, the emission chamber
and gun must be cleaned; these should be completely free of dust and dirt. The
dust may best be removed using a vacuum cleaner with a clean nozzle. Also
check that the oil in the gun is dry and clean.
HT fluctuation – slow (breathing)

There must not be any slow fluctuations (breathing) of the back focal image at
all.
If there are slow fluctuations:

• and the amplitude does not change at lower kV settings - the fluctuations
are probably caused by an undersaturated filament, an unstable reference
voltage or measuring resistor, or fluctuations of the diffraction or C2 lens
current(s) (see Electronics manual);
• and the amplitude increases and frequency decreases at lower kV settings
- dirt or grease in the emission chamber is the most probable cause.
4.5 Detecting dirt or grease in the column

The effect caused by the charging and discharging of particles in the column is
characterized by a slow drift in one direction (charging) followed by a rapid
return in the opposite direction (discharging).
This effect becomes accentuated as the HT is reduced and alters in frequency
when the beam intensity is changed.
Dirt or grease in the column can be detected and approximately located using
the following procedure:
• Select a low HT voltage;
• Use the condenser lens to alter the beam intensity;
– If this has the effect of changing the appearance of image distortion
due to the presence of dirt, and /or altering the frequency of the image
instability, the dirt is underneath the condenser diaphragm.
• Move the beam by means of the deflection controls;
– If the dirt moves in the same ratio as the beam, the dirt is above the
deflection controls;
– If the frequency of image instability, or the appearance of the image
distortion changes, the dirt is underneath the deflection coils.
• Now select a magnification in the SA-range and insert the diffraction
diaphragm.
– Move the electron beam with the deflection controls. If the image on
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the screen does not move, the presence of dirt above the diaphragm is H
indicated. If the image remained stationary, but moved when the
diaphragm is withdrawn, the presence of dirt underneath the
diaphragm is indicated;
– Repeat the objective and condenser adjustable diaphragms.
– Reverse in turn the diffraction, intermediate, projector 1 and projector 2
lens currents. If the dirt is above the lens with reversed current, there
will be a displacement; if not, the dirt is underneath that lens.
4.6 Focusing stability

NOTE: Full compensation of astigmatism is not necessary. Before
checking the focusing stability, allow the microscope 60 minutes
and the HT (80 kV) 60 minutes to stabilize. All covers must be
fitted.
Ensure that:
• The specimen holder and specimen are clean;
• The column is correctly aligned;
• The objective diaphragm is out of the beam;
Select a spot size of 1 micron, and adjust the Intensity control to obtain correct
illumination.
Check the stability by observing Fresnel fringes at maximum magnification
using a perforated carbon film specimen.
Overfocus the edge of a hole.
The setting should be maintained for at least one minute; if not, check:
• HT stability (by observing the diffraction point - see 4.4 “Stability of the
electron beam (all HT settings)”);
• Objective lens current stability (see Electronics manual);
• That the filament is not saturated (this could cause slow fluctuations of the
HT and, therefore, focus instability).
4.7 Image contrast

The image contrast is checked using the following procedure:
• Select the lowest M magnification and select a HT of 100 kV.
• Insert an empty grid and select a grid bar.
• Bring in the small screen.
• Using the object translation controls, move the grid so that the image of
one of the grid bars falls on the shadow image of the small screen visible
on the main screen.
• The shadow of the small screen should not be visible against the
background of the bar.
• If not satisfactory, this may be caused by the use of wrong or misaligned
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objective diaphragm and/or incorrect height adjustment of the objective

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diaphragm. H
(See 5.17.3 “Adjustments”.
Factors affecting image sharpness (see 4.8 “Image sharpness”) may also
affect contrast.
4.8 Image sharpness

Before checking image sharpness ensure that the column is correctly aligned.
Check the image by observing Fresnel fringes at maximum magnification using
a perforated carbon film specimen.
Select spot size 3, max. HT and adjust the Intensity control to obtain correct
illumination.
The fringes should display the same sharpness and general appearance in all
directions. Changing from overfocus to underfocus should be visible to within 3
or 4 steps of 200 Å.
Unsatisfactory results may be caused by one (or more) of the following:

• Objective diaphragm contaminated, not round, or misaligned. Examine the
image with the diaphragm removed from the beam;
• Specimen holder not clean, or the specimen is not properly clamped on the
holder;
• Specimen or specimen grid dirty: use another specimen;
• Excessive objective lens astigmatism (see 4.10 “Objective lens
astigmatism”);
• Misaligned microscope column: check the alignment;
• High tension not stable: check the diffraction point (see 4.4 “Stability of the
electron beam (all HT settings)”.);
• Objective lens current not stable: check the stability;
• Condenser diaphragms too large: the diameter of the apertures in second
condenser lens diaphragm should be < 100 µm for CM120, or 200 µm for
CM100
• Excessive mechanical vibrations (external or via cooling water);
• Excessive magnetic stray-fields;
• Beam tilt device switched on;
• One or more of the fixed diaphragms not clean, not round, or not properly
fitted;
• Cooling block of anti-contamination device touches specimen stage.
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4.9 Image drift (For CompuStage) H

See 4.15.1 “CS Test procedure”
Drift measurement should be done as follows:
Specimen: 1500 mesh silver grid no 1014; obtainable from Ernest Fulham.
NOTE: The general state of the microscope should be as required for

high resolution purposes, namely:
• Instrument should be switched on for at least 12 hours (max. HT,
spot size 3);
• Specimen (silver-grid) must be in the goniometer/CompuStage for
12 hours;
• The cooling device must be cooled down with liquid N2 for at least 2
hours
• Magnification switch to maximum for at least 1 hour;
• HT switched on for at least 1 hour;
• Intensity close to focus.
Bring an easily identifiable detail to the centre of the screen.

Mechanical stresses must have been neutralized by alternating displacements
with diminishing amplitudes.
Now start measuring the drift:
From 5-10 min. drift should be less than 100 Å/min.

From 10-20 min. drift should be less than 30 Å/min.
After 20 min. drift should be less than 10 Å/min.
Image drift is usually caused by the specimen itself, or by insufficient thermal

contact between the specimen grid and holder.
However, the effects of build-up of contamination (see 4.12 “Measurement of
contamination rate”), poor specimen stage movements (see 4.13.3 “Trouble
shooting”), and/or cooling block touching any other part can produce the same
effect.
The following tests can be used to ascertain the cause of specimen drift:
• Allow 60 minutes for the microscope and 5 minutes for the HT to stabilize;
• Insert an empty single tilt holder that has been properly cleaned;
• Focus the edge of the hole in the specimen holder on the screen; the
image must remain stationary;
If the edge of the hole exhibits a constant drift in one direction the cause is
either contamination build-up or drift caused by the stage movement.
Observation of the diametrically opposite side of the hole will confirm which
phenomenon is present.
In the case of contamination build-up, the direction of apparent drift will
reverse. However, if the cause is stage movement, it will be in the same
direction.
If the image does, in fact, remain stationary, image drift can be attributed to the
specimen. Check this by observing the bar of an empty grid.
Specimen drift is influenced by the following:
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• Overheating of the specimen;

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• Supporting film too thick, or broken; H

• Supporting film not properly fixed to grid;
• Cold trap touches specimen stage;
• Excessive temperature changes of the cooling water (spec. is 20 °C ±0.1 °C/min. or
0.005°C/sec.);
• Excessive changes of the room temperature (spec. is ∆t < 0.5°C/hour or
0.05°C/min.);
• Poor thermal contact between grid and holder. The grid should be placed in
the circular well of the specimen holder and clamped between the flat part
and the clamping ring.
When the lever is down, the ring clamping the specimen should secure the
specimen.
To make sure that the spring ring is correctly adjusted, the following test is
suggested:
• Place an empty grid on the specimen holder and try to move it with the aid
of a needle;
• While observing the holder under a light microscope it can be easily
checked whether the grid is sufficiently tightly clamped.
Additionally, the specimen holder must be perfectly clean. Check this by
imaging the periphery of the 2 mm hole in the holder on the screen.
4.10 Objective lens astigmatism

The objective lens astigmatism should be checked when the astigmatism
cannot be corrected with the OBJ. STIGM sensitivity in position 3.
One may switch the sensitivity to position 4 or even 5 to complete the work in
hand, but the fact that this is necessary is an indication that some components
are contaminated and must be cleaned. When astigmatism exceeds the
permissible value, the resolving power of the microscope is severely reduced.
Astigmatism occurring in the objective lens can be measured as follows:
• Remove the objective stigmator plug from DCB-8, plug X5;
• Remove the objective diaphragm from the beam;
• Select max HT;
• Insert a perforated carbon film specimen (ensure that specimen and holder
are clean);
• Select spot size 3;
• Select a magnification of 200,000x or higher, and focus the image;
• Adjust the Intensity control as far as is consistent with good visibility of the
Fresnel fringes;
• Select a very small hole. This should be of such a size that it is visible in its
entirety through the binocular on the focusing screen at the magnification
used;
• Adjust the objective lens current so that the edge of the hole in one direction is in
focus and the edge rotated by 90° is overfocused. Press the Reset Defocus
softkey;
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• Adjust focus until the overfocused part of the hole is in focus (the rest of the
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hole is now underfocused). Read the defocus value on the data display H
monitor. and check that it is:
< 1.50 µm (CM120), or < 2.00 µm (CM100).
The astigmatism of a microscope that is in operation may not exceed twice the
inherent astigmatism value of clean pole pieces. If this level is exceeded, the
pole pieces require cleaning.
NOTE: 1. The pole pieces of the objective lens have an inherent astigmatism
of less than 0.75 µm (CM100 BioTWIN, CM120, CM120 BioTWIN),
or 1.00 µm (CM100).
2. Apart from the objective lens pole pieces, the following
components may give rise to astigmatism:
The objective diaphragm, its holder, the specimen, the
specimen holder and the fixed diaphragm in the objective lens.
3. If the astigmatism increases substantially above its original
value, one or more of the above components will need to be
cleaned.
Use the following procedure to determine which part needs to be cleaned:

• If the astigmatism changes when a properly centred obj. diaphragm* is
removed from the beam, this diaphragm and/or its holder is contaminated.
The maximum allowable change in the astigmatism may not exceed
0.2 µm
• If the astigmatism changes when the specimen is moved from one end of
the grid to its centre, the specimen holder and/or specimen itself is
contaminated or magnetic and must be cleaned.
• If all these components are clean and the astigmatism is still greater than
its original value, the pole pieces and/or fixed diaphragms are probably
contaminated.
* The use of thin foil diaphragms as supplied by C.W. French is strongly
recommended.
4.11 Filament life

The life of a tungsten filament should be between 5 and 100 hours (400 to 700
hours for LaB6), depending on the emission current, which determines the
temperature of the filament.
If the filament life is too short, observe the following:
• Ensure that the filament height is set according to the details in the
Operating Instructions.
• Ensure that the filament is not overheated; the FILAMENT limit must not be
set beyond saturation.
• Do not admit air while the filament is hot; wait 10 seconds after switching
off the HT before admitting air into the emission chamber.
• Ensure that there is no vacuum leak in or near the emission chamber.
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4.12 Measurement of contamination rate H
4.12.1 Introduction
The rate of contamination is largely dependent on the use and initial
cleanliness of the microscope and specimen.
Before contamination measurements are made, ensure that there are no
vacuum leaks in the column (see 4.3.1 “Checking the vacuum tightness without
opening the column”).
If the column has been opened, especially in the vicinity of the specimen, it
must be pumped for at least one day* before proceeding, so as to reduce the
contamination rate to the previous level.
NOTE: The pumping time depends largely on the time during which the
column was open, and the ambient conditions (humidity, etc.) at
that time.
The contamination rate will gradually reduce to a lower level (≤
100 Å/min.) depending on the use of the microscope.
4.12.2 General
Use gold shadowed perforated carbon specimen 5322 397 60034.
• Initial settings:
– HT: max.
– Emission current: 10 µA (LaB6 and Tungsten)
– Spot size: 1
– Condenser diaphr.: max. or out of the beam
– Anti-cont. device: not cooled down
• Remove water vapour from the test location as
follows:
Select location 1 as indicated in the figure and allow 1
the beam to remove the water vapour for 10 2
minutes.
• Select spot size: 11 for CM100; the beam must be focused

8 for CM120; the beam must be focused
• Select C2 aperture: 100 µm
• Now measure the contamination at location 2 in the above figure, as
described in Sect. 4.12.3 following.
4.12.3 Procedure
• Select maximum magnification and focus image;
• Select a hole in the specimen that falls within the frame of the camera and
take a picture at 2 seconds exposure time. Focus the spot and during 1
minute, ensure that the spot centre is kept on the edge of the
contamination growth;
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• Take a second picture;

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• Enlarge the picture to a magnification of 2 x 106 (1 mm = 0.5 nm) and measure the H
contamination growth;
This may not exceed 20 mm/min (= 10 nm/min).
NOTE: 1. The rate of contamination largely depends on the cleanliness of the

microscope and specimen.
2. The column must be absolutely vacuum-tight.
3. Baking out the column may reduce the contamination level.
4. Ensure that there is no film material present in the camera.
4.12.4 Baking out device

(Figure 814A)
4.12.4.1 Introduction
Baking out the column can be a means to speed up the conditioning of the UHV
system. Baking out is only recommended when the column has been opened
for a long time, or large vacuum parts, such as the liner tube, have been
cleaned or replaced.
Possible result of a bake out action:

• IGP before bake out: 28 (8 x 10-5 Pa)
• IGP max. during bake out: 46 (4 x 10-4 Pa)
• IGP min. during bake out: 38 (2 x 10-4 Pa)
• IGP 4 hours after bake out: 23 (5 x 10-5 Pa)
4.12.4.2 Bake out procedure

• Remove the EDAX detector if present.
• Remove IGP interlock MC-X8
• Press “Bake-out” switch P/A13-S2;
• Check with an additional ammeter, (parameter current page is inactive
during bake-out), that the lens currents are approximately as follows:
Current (A)
Lens CM100/120
Cond. 1 1.46
Cond. 2 1.55
TWIN 0
Obj. 2.95
Diffr. 1.16
Int. 1.30
Proj. 1 1.19
Proj. 2 1.45
For water procedure from April 1992 onwards the following must also be
carried out (see Figure 814A):
Close valve V22 manually.
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CM 100/120 Mechanics 50129 060427 4-13
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The electrical control units MRU and PBH, and the ODP are still supplied with H
water.
NOTE: For the water systems from April 1992 onwards, do not forget to
open V22 after baking out.
During bake-out the bearing scale may deform causing uncontrolled

movements during tilt. This can be avoided by running the tilt motor
continuously during Bake-out. Also this procedure may help sometimes in
correcting uncontrollable movements caused by the deformed bearing scales.
Manual stage
To run the motor continuously proceed as follows:
• Adjust the specimen translation rods X and Y to mid-position
• Adjust the specimen to eucentric height
• Remove the specimen holder
• Remove the cover of the right-hand ear 130, Figure 808
• Remove the microswitch 120, Figure 808. Cover the opening of the
microswitch using tape to avoid losing the ball 36, Figure 808 and the
pressure pin 119, Figure 808
• Remove the tilt axis limitation screws 113, Figure 808
• Manually check that the goniometer can be tilted over 360° without
obstructions.
• Switch on the tilt motor and let it run clockwise at half the speed.
• Check that the motor runs properly over 360° and is not obstructed.
• Now proceed with the normal bake-out procedure.
• After bake-out
During cooling down of the column let the motor run counter-clockwise for
at least one hour.
• Do not forget to remount the EDAX detector and IGP interlock MC-X8.
CompuStage
During bake-out the bearing scale may deform causing uncontrolled
movements during tilt. Via HELP DESK a Remote Control program can be
obtained to assist in the bake-out. The function of this program is to run the tilt
motor in intervals during bake-out.
The use of the program will be described in the accompanying README file.
• After bake-out replace the EDAX detector and replace the IGP interlock
MC-X8.
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4.13 Checking the performance of the goniometer H
4.13.1 General
(Figure 4-1)
4.13.1.1 Description of the left-hand ear movement (X)

X movement is produced as follows:
Turning the X translation micrometer will give an axial movement via lever
R to rod P which is constrained to move only axially.
This movement is transferred to rod F and thus the specimen is moved in
and out.
4.13.1.2 Description of the right-hand ear movement: Y, Z and tilt

1. Y movement is provided as follows:
Turning the Y translation control rotates the threaded tube J causing
the threaded inner tube M to move axially and to operate pushing lever
L1. Tube T is sandwiched between pushing lever L1 and return lever
L2, so that every movement of L1 is transmitted to tube T and thus also
to the specimen holder axis. When the tilt angle is 0° the specimen
holder axis is moved sideways.
2. Z-movement is provided as follows:
Threaded thumbwheel L3 and its return spring L4 are positioned
perpendicular to levers L1 and L2.
Operating the thumbwheel causes the tube T, and therefore also the
specimen holder axis, to move along the electron optical axis at 0° tilt.
In this way the plane of current field of view is made coincident with the
intersection point of both the tilt axis and the electron optical axis.
4.13.1.3 Tilt
The tilt is the imaginary line which can be drawn between the centre of the
ball bearing G, the centre of the hemispherical ball bearing B, and when
the goniometer is aligned, the electron optical axis. Tilt can only be
adjusted during tilt axis alignment with Allen screw D.
Tilting is accomplished by applying a certain angular displacement to the

gear wheel E2. As the levers for the height-adjustment and the Y-
displacement are positioned on the gear wheel E2 they will suffer the same
angular displacement and therefore also the tube T and specimen holder
axis. The tube T will describe an orbit about the tilt axis depending on the Y
and Z movement and thus the specimen will be tilted about that point which
lies at the intersection of the tilt and electron optical axis. See also Fig.
4-2 “Tilt axis misalignment” During tilt the pushing lever L1 moves on the
bearing surface of the inner threaded tube M.
This bearing plane together with the plane of tube E2 is ideally

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perpendicular to the tilt axis so that during tilt the tube T and thus the
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CM 100/120 Mechanics 50129 060427 4-15
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specimen do not suffer any displacement in Y-direction. H
With the specimen tilted, Y movement takes place in the tilted plane and Z
movement takes place perpendicular to the tilted plane.
Y-MOVEMENT
(HEIGHT)
Fig. 4-1 Simplified goniometer cross section
A1, A2 are out of focus because of delta h;

T1 is the lateral displacement due to the misalignment between the tilt and
electron optical axes.
ELECTRON
OPTICAL AXIS
A NE
A1 PL
EN
IM
EC
∆h C1 SP
C
T1
A TIL
T AX
SP IS
C2 EC
∆h IM C1
AX E
IS N
A2 C
C2
A1 / A2
T1
EM1472
A
CENTRE OF THE MAIN SCREEN
Fig. 4-2 Tilt axis misalignment

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A1, A2 are out of focus because of delta h; H

T2 is the lateral displacement due to the misalignment between the tilt and
specimen axes (when tilted, delta h = T2).
ELECTRON
E
OPTICAL AXIS AN
PL
N
I ME
EC
SP
SP
EC
IM
∆h A2 EN
AX
C2 T2 IS
C1
T2 C
A1
C2
TILT A C1
XIS
A2
EM1473
T2
A
T2
A1
Fig. 4-3 Height misalignment
A1, A2 are out of focus because of delta h1 and delta h2;

R is the resultant of the height misalignment delta h and the tilt misalignment T;
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T3 is the resultant lateral displacement due to both misalignments. H

ELECTRON
OPTICAL AXIS NE
P LA
N
I ME
EC
SP
∆h1
A
C
A2 SP
E CIM
R EN
∆h2 ∆h T1 AX
C2 C1 IS
A1 C
C2
TILT C1
AX IS
T3
EM1475
T3
Fig. 4-4 Combination of tilt axis and height misalignments
4.13.2 Specifications
4.13.2.1 Overall
The stage movements are checked on the main screen at a magnification of
120,000x and at maximum High Tension.
NOTE: All specifications marked with an asterisk (*) are only valid for
goniometers with the single tilt holder included in the delivery.
1. The total possible displacement of the specimen both along the tilt axis (X)
and at right angles to the tilt axis (Y) amounts to 2.0 mm, i.e. the total
specimen traverse is 2.0 mm x 2.0 mm in the tilted plane.
NOTE: One scale division corresponds to a displacement of 0.05 mm for X

movement and 0.1 mm for Y movement.
2. If the specimen is moved to and fro over an arbitrary distance with one of
the specimen translation controls, the displacement at right angles to the
line of displacement should not exceed 4 cm when using the X movement
and 2 cm when using the Y movement.
3. If the specimen is moved to and fro over a distance of 8 cm with one of the
specimen translation controls and then over a distance of 8 cm with the
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other, the displacement in the direction corresponding to the first used

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specimen movement should not exceed 2 cm for X movement and 1 cm for H

the Y movement.
4. After the specimen is moved in an arbitrary direction the overrun should not
exceed 1 cm.
5. When the specimen movement is reversed using one of the specimen
translation controls the uncontrolled movement may not exceed 1cm.
6. *When tilting the specimen from + 45° to 0° and - 45° the displacement should not
exceed 16 cm.
When the R.H. movement is in mid-position the displacement should not
exceed 10 cm.
7. When reversing the tilt angle at - 45°, 0° or + 45° by means of the motor tilt drive,
the specimen movement should be less than 2 cm in the direction of the tilt axis
and 4 cm at right angles to the tilt axis.
8. The tilt axis can be aligned in such a way that it crosses the optical axis
within one micron, independent of the specimen position.
9. *When the instrument is at better than working vacuum (1.33 x 10-4 Pa),
exchange the specimen.
The vacuum should return to 1.33 x 10-4 Pa within 10 minutes without anti-
contamination device, and 1 min. with anti-contamination device cooled
down.
10. The drift should be:
• Less than 100 Å between 5 to 10 minutes after the start of the
measurement;
• Less than 30 Å between 10 and 20 minutes after the start of the
measurement;
• Less than 10 Å 20 minutes after the start of the measurement.
11. Coarse height adjustment: the total range amounts to 0.4 mm.
a Right-hand ear
The total height adjustment range measured at the thumbwheel adjuster 143,
Figure 808 should be 0.75 mm ± 0.1 mm.
The tilt speed should be: min. 0.1 °/sec. at a current of < 40 mA
max. 1 °/sec. at a current of < 60 mA
4.13.2.2 Left-hand specimen translation mechanism

(left-hand ear, Figure 809)
For all types of holders, the grid centre should coincide with the centre of the
screen to within 0.5 scale division of zero for the left-hand specimen
movement. This can be done with screw 7. Do not forget locking grubscrew 14.
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4.13.2.3 Objective diaphragm H

(Figure 807)
1. When the side movement spring assembly is moved to and fro, the
reproducibility determined by the adjustment knob 88 must be better than
5mm.
2. When the coarse knob is moved from one position to another and back the
reproducibility should be better than 10 µm.
3. The total displacement of the side movement spring assembly item 56
amounts to ± 2.5 mm.
4.13.3 Trouble shooting
4.13.3.1 Trouble shooting kit

(Figure 818)
To simplify trouble shooting, a goniometer service kit, ordering number 5322
695 14509, is available. The kit contains the following components:
42 Key to remove crown nut 129, Figure 808.
43 Key to adjust crown nut 25, Figure 808.
41 Glass plate, ring and O-ring to check goniometer movement
under vacuum conditions (only for EM300, 301).
44, 44A and 44B Clamping plate to fix the floating tube 29, Figure 808, to
housing 42, Figure 808.
45 Key to remove airlock nut 37, Figure 808.
46 Key to unscrew locking nut 6, Figure 808.
47 Tool to remove the bearing cup 5, Figure 808 from its seating.
48-49 Keys to unscrew nuts that fix the right-hand ear (only for
EM400 series).
50 Key to hold plate 126, Figure 808, when releasing screw 129
with tool 42 (not necessary when using clamping plate 44).
51 Cover for L.H. ear (only for Goniometers PW 6500).
52-53 Screws to adjust centre of L.H. ear with respect to the tilt axis
(only for Goniometers PW 6500).
54 Screw to take over L.H. ear movement (only for Goniometers
PW 6500).
55 Key to unscrew nut on the shaft of the pre-vacuum valve
(only for EM400 serial no. D601-D820).
56-57 Tools to remove and insert the bearing cup (only for
Goniometers PW 6500).
58 Tool to adjust the play in the micrometer spindle, 74,
Figure 809.
4.13.3.2 Trouble shooting procedure

(Figure 808)
Make sure that the microscope with goniometer stage is properly aligned as
alignment errors can influence the errors that occur in the goniometer.
Check which ear causes the uncontrolled displacement. This can be done as
follows:
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• Select a recognizable particle; H

• Fix the specimen holder to the pin on 126, by means of the Allen screw 320
in the holder, or use a “C”-shaped washer (2.5 mm thick) between the right-
hand ear and the holder;
• Withdraw the left-hand specimen movement;
• Readjust, if necessary, the height and tilt. See Sect. 5.15.3 “Adjustments”.
If the uncontrolled movement no longer exists, the error is caused by the
left ear.
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4.13.3.3 Trouble shooting list H
Possible causes
Symptom Left-hand ear Right-hand ear
(see Figure 809) (See Figure 808)
Displacement at right angles to the line of dis- 3 2
placement of the left-hand specimen move- 2
ment
Displacement at right angles to the line of dis- 5
placement of the right-hand specimen move-
ment
Displacement during tilting 1 1, 3
Displacement in the direction of the left-hand 5, 1, 2 2, 1
specimen movement during tilting
Displacement when reversing the tilt angle 1, 2, 6
Jumping image when tilting manually 1 1, 5, 2, 3
Scratching sound during motor drive tilt 4
Specimen translation mechanism slips before 4 4
the end positions are reached
Image drift O-ring on the holder 318, Figure 808 is too dry;
Specimen is not properly fixed to the grid;
Grid is not properly fixed to the specimen holder;
Cold trap touches the specimen or diaphragm
holder;
Broken floating rod sapphire or specimen holder
sapphire;
Grease or dirt on: floating rod sapphire, the
specimen holder sapphire, the hemispherical
ball, or their bearing surfaces;
Grease or dirt on; pole pieces, objective dia-
phragm, or specimen holder;
Right-hand ear not properly secured by tighten-
ing the four Allen screws 209, Figure 808.
Excessive cooling water temperature changes.
Excessive room temperature changes.
4.13.3.4 Left-hand ear, possible causes

Figure 809
Item Possible cause Action

1. Floating rod, 45 a.damaged sapphire Check sapphire and bearing cup with a
b.damaged bearing cup magnifying glass.
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Item Possible cause Action H
2. Pressure rod assy. a.damaged sapphire Check sapphire and bearing cup with a
55 b.damaged bearing cup magnifying glass.
3. Lever, 8 a. Pivots or bearings are damaged Readjust pivots See 5.16.3 “Adjustments”
or released
4.Specimen transla- a.Dirt or grease in the slip coupling See Sect. 5.16.3 “Adjustments”.
tion mechanism
5.Central axis of the a.The central axis of the left-hand Readjust each time the left-hand ear is
left-hand ear ear is not properly aligned w.r.t. the removed from the goniometer stage. See
tilt axis also 5.16.3 “Adjustments”.
4.13.3.5 Right-hand ear, possible causes

Figure 808
Item Possible cause Action

1. Hemispherical bear- a.Bearing cup is not fixed in the Check that the slot of the bearing cup
ing, 5 stage meets the pin and tighten nut 6.
b. Bearing cup or hemispherical ball Clean them using ultrasonic cleaner.
is greasy or dirty
c. Bearing cup is damaged Check hemispherical ball.
d. Hemispherical ball is not properly Tighten nut 37 using service tool 45,
fixed Figure 818.
2. Specimen holder a. Sapphire on top of the holder is Check also the sapphire of the floating
damaged rod.
b. Holder too loose on pin of 126 Readjust screw 320 on the holder.
3. Tilt ball bearing a. The bearing runs roughly, or Remove the holder and the end stops.
scratches Remove the microswitch and allow the tilt
motor to run continuously for 3 hours.
b. Bearing is eccentric or has play Mount new set of pressure bearings.
4. Motor drive tilt a. Dirt or metal particles between Clean the worm and the gear wheels.
the gear wheels
b. Motor jams during tilting Readjust motor tilt drive, Sect. 5.15.3.c
c. Gear wheels in the gearbox Take apart the gearbox, clean and
scratch remount the gear wheels.
Note:Never turn the output shaft by hand
5. Pulling and pushing a. Pivots or bearings are damaged Readjust the pivots, see 5.15.2 “Assembly
lever, 59, 195 or released procedure”b
b. Nylon studs are damaged Replace
6. Key 55 on gear a. Key has too much play in its slot Readjust the key width until it can be
wheel 50 moved smoothly but without play.
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4.13.3.6 Vacuum leak testing of right-hand ear H

Symptom Possible cause
Vacuum leak with holder out of Check O-ring 15, Figure 808.
the goniometer
Vacuum leak with holder in the Check the O-ring 318 on the holder.
goniometer Check the O-ring 8, Figure 808.
Vacuum leak with holder in and out Check O-rings 8, 9, Figure 808.
If the vacuum leak is less with Check pre-vacuum valve.

holder in while simultaneously
pumping the lines
4.13 CS Checking the performance of the goniometer
4.13.1 CS Introduction
The CompuStage consists of four basic elements:
• Hardware (called the goniometer including motors and measuring system);
• The objective stage;
• Control electronics GNCB, GDB and SCB;
• Software: present on the GNCB as a PROM (also called firmware);
present on the Memory Mother Board (MMB) as PROM (from version 10.0
onwards).
All axes on the goniometer are motor-driven. The motors are controlled by a
microcontroller located on the GoNiometer Controller Board (GNCB). Also on
this board is software to control the motors and to measure the actual
specimen position.
The X, Y and Z motors are controlled via a joystick. The alpha-tilt and beta-tilt
motors are driven via potentiometers on the Left-Hand Panel. To control the
beta-tilt motor, a foot switch must first be activated.
All items located on the goniometer are described in this manual.
The block diagram is explained in the Electronics manual, Volume 1, Chapter
11CS.
The control electronics are described in the Electronics, Volume 3, Chapter
3.28.
The software is not described, although the calibration procedure is described
in Sect. 4.13.3CS.
The error messages are described in the Electronics, Volume 1, Section
1.12.2.
If the goniometer has been serviced, or in the event of problems, test software
may be needed to locate the cause of the fault. This test software will be made
available during service training courses at the supply centre. For a description
of the test see also the CMxxx CompuStage Test and Diagnostic Software
manual, code no. 4822 870 15459.
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4.13.2 CS Global description of the CompuStage H

(See also Figure 4-5)
The CompuStage is constructed such that all specimen movements, Alpha
(tilt), Z (height), Y (lateral) and X (axial) are contained in one unit. This unit has
two important bearing centres, i.e.:
• The hemispherical bearing centre, 132, Figure 807A located in the
goniometer housing.
• The tilt axis bearing formed by the pressure bearing 18, Figure 807A in the
CompuStage.
Between these bearing centres an imaginary line can be drawn called the tilt
axis. The tilt axis bearing is mounted in a housing which can be adjusted both
laterally and vertically. This housing is adjusted laterally by screw 349,
Figure 808A until the tilt axis intersects the electron optical axis. The
goniometer can be moved vertically using the wedges 40, Figure 808B. This to
make sure that the tilt axis (and thus the specimen plane) is set to the optical
mid-position between the pole pieces.
4.13.2.1 Tilt axis

Tilt axis movement is accomplished as follows. The tilt motor drives a worm-
wheel 45, which in turn moves gear ring 5 over an angle of plus and minus 80
degrees. As all other axes are constructed on the tilted part, movement in these
axes takes place in the tilted plane. If the alpha motor 44 is moved, a shaft
encoder (mounted on the motor) outputs pulses which are used to control the
movement and keep track of the tilted angle.
4.13.2.2 Z (height) movement

The Z movement is the next movement on top of the tilt movement, this means
that the Z movement takes place in the tilted angle.
The motor 41 drives, via a 2 gear wheels 38, 39, a threaded spindle up and
down in a nut 37. This will result in a reversed movement on the Z support via
lever 36. The specimen height is properly adjusted if the specimen plane
intersects the tilt axis. In this case the viewed part of the specimen suffers no
displacement when tilting. See also Fig. 4-6 “Tilt axis and height
misalignments”.
In the same way as for the alpha motor, a shaft encoder 42 (mounted on the
motor) outputs pulses which are used to control the movement and to keep
track of the Z position.
The two anti backlash springs 33 ensure that there is no play between the lever
and the motor. The tension on these springs can be increased by means of
lever 279, Figure 808A. This is necessary for heavy specimen holders, e.g. the
cryo holder and is factory set in this position. The two backlash springs 30
ensure that there is no play between the x support and the height lever.
4.13.2.3 Y movement
The Y movement is the next movement on top of the Z movement, this means
that the Y movement takes place in the tilted plane and the actual height plane.
The Y motor 16 drives via a reduction a worm-wheel which in turn drives a
Contents
donator. The output of the donator is connected via a fixing block to a driving
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CM 100/120 Mechanics 50129 060427 4-25
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axle. The driving axle moves the X support and thus the specimen hence and H
forth. Two anti-backlash springs 34 ensure that the X support is always in
contact with its driving rod. On the other side of the X support is mounted a
measuring system 28 that senses (via a ruler illuminated by a led) all
movements in the Y direction. The measuring system controls the movement
and keeps track of the Y position.
4.13.2.4 X movement
The X movement is the next movement mounted on top of the Y movement,
this means that the X movement takes place in the tilted plane, the actual
height plane, and the given Y traverse.
Via a reduction, the X motor 18 drives a worm-wheel which in turn drives a
donator. The output of the donator is connected via a fixing block to a driving
rod 9. The driving axle moves the X lever 7, of which the other side controls via
two pins 6 the inner floating tube. Two backlash springs 8 ensure that the X
lever is always in contact with its driving rod. The movement is transferred via
the inner floating tube to the holder which rests in the intermediate bearing cup
48. To avoid the use of a dynamic O-Ring a bellows construction 47 has been
made. On the X lever a measuring system is mounted that senses (via a ruler
illuminated by a led) all movements in the X direction. The measuring system
controls the movement and keeps track of the X position.
7 8 9 10 16 17 18 19 20 24
4 56
X (axial)
13
25
26
14
15 Y (lateral)
29 28 27
36 30
37 34
38 35
39 33
α tilt
48 47 46 45 44 40
41
Z (height)
42
EM6576A
Fig. 4-5 Cross sectional view of CompuStage (simplified)
4 Back-to-back bearing 19 X fixing screw 37 Z spindle bush

5 Housing 20 X donator 38 Z spindle
6 X pressure pin 24 X measuring rod 39 Z gear wheel
7 X lever 25 X measuring board 40 Z gear wheel
8 Anti-backlash spring X 26 Y measuring rod anti-backlash spring 41 Z motor
9 X driving rod 27 Y measuring rod 42 Z motor shaft encoder
10 Y fixing screw 28 Y measuring ruler 44 Alpha tilt motor
13 X donator 29 Y measuring board 45 Alpha tilt worm wheel
14 Ball bearing 30 Z pulling spring (upper) 46 O-ring
15 V groove 33 Z pulling spring (lower) 47 Bellows
16 Y motor 34 Y anti-backlash spring 48 Support block
17 X motor reduction 35 Y driving rod
18 X motor 36 Z lever
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H
EO AXIS
C1 = CENTRE OF HEMISPHERE
CC = CENTRE OF TILT AXIS BEARING
SPECIMEN
PLANE
HEMISPHERE -X
C1
TILT AXIS BEARING
α1
CC
Ideal situation: No displacement
+X
α2
+Z (EPDEPD)
-X
+X (EPD)
NO DISPLACEMENT -Y
+Y (EPD) EM6572-1
-Z
EO AXIS
HC C1 = CENTRE OF HEMISPHERE
CC = CENTRE OF TILT AXIS BEARING
α2’ HC = HEIGHT PLANE CORRECT
∆h HF HF = HEIGHT PLANE FAULTY
α1’
HEMISPHERE
TILT AXIS BEARING
SPECIMEN
C1
PLANE
-Z CC HOLDER AXIS Height error: Equal displacement
-Y
TILT
-X
+X
+Z (EPD) in both directions
AXIS (EPD) α1
0×° TILT → α2’ -TILT

α2 ∆h
+Y (EPD)
α2’ + TILT → α1’ -TILT
α1’ -TILT → 0×° TILT EM6572-2
-Z
ADJUST HEIGHT TO C3
EO AXIS
C1 = CENTRE OF HEMISPHERE
α1’ CC = CENTRE CORRECT
SPECIMEN CF = CENTRE FAULT
∆t PLANE
α2’ HEMISPHERE TILT AXIS BEARING
C1 CC
∆t TILT / HOLDER AXIS
CF -X
+X (EPD)
+Z (EPD)
Tilt error: Equal displacement
ADJUST
TILT AXIS SCREW
α1
-Y onr direction
TO CC
0° TILT → α1’ -TILT ∆t

α1’ -TILT → 0° TILT
0° TILT → α2’ +TILT +Y (EPD)
α2’ +TILT → 0° TILT α2
EM6572-3
-Z
EO AXIS
HC C1 = CENTRE OF HEMISPHERE
CC = CENTRE CORRECT
α1’ ∆h HF CF = CENTRE FAULT
HC = HEIGHT PLANE CORRECT
HF = HEIGHT PLANE FAULTY
α2’
∆t
SPECIMEN
PLANE
HEMISPHERE TILT AXIS BEARING
C1 CC
HOLDER AXIS
∆t
-X Combined error: Unequal displacement
+X (EPD)
ADJUST
TILT AXIS
CF
-X +Z (EPD) in both directions
SCREW TO CC +X (EPD)
TILT AXIS ∆h
-Y
α1
0° TILT → α2’ - TILT C3
α2’ - TILT → α1’+ TILT ∆t
α1’+ TILT → 0° TILT

+Y (EPD) α2 EM6572-4
ADJUST HEIGHT TO C3
Fig. 4-6 Tilt axis and height misalignments

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4.13.3 CS Calibration procedure H
Each time the microscope is switched on, the goniometer performs a

calibration procedure. The reason for this is that the positions of the
movements can not be memorized after the microscope is switched off.
The software first checks if a holder is present in the goniometer. If this is the
case, the calibration procedure will not start until the holder is removed.
CAUTION! If a CompuStage double tilt holder is present it can only be removed

safely if the red airlock led is switched off. This means that the Beta
angle must be adjusted between + or - 4.5 degrees. If this is not
possible, proceed with the special extraction procedure. See also
4.13.4 “CS Special extraction procedure”. Do not leave the holder in
the CompuStage, once the message remove holder appears, as until
the calibration is finished the polehit protection is switched off.
The order in which the goniometer is calibrated is as follows:

• The red led is lit indicating that no specimen exchange is allowed;
• Movement along the Y axis occurs at high speed until a “near end of
stroke” detector (also called EPD or NEOS switch) is found. The motor now
starts moving at low speed until the axis movement reaches a factory-set
mechanical limit. After finding the End limit the Y movement is moved
100µm. towards mid-position.
• Now movement along the alpha and Z axes occur simultaneously. This
movement takes place at high speed until a near-end-of-stroke detector
(also called EPD or NEOS switch) is found. The check for tracking errors is
now normally activated.
• The motor now starts moving at low speed until the axis movement
reaches a factory-set mechanical limit. During this period the check on
tracking errors is switched off, so that a tracking error is interpreted as the
position of the final limit. From now on the position is known and the optical
encoders are made active to keep track of the position along the axis. Now
both alpha and Z are moved to their mechanical mid-positions.
• After completion of the alpha and Z movement tasks, the X and Y axes are
calibrated following the same procedure as that for alpha and Z. This
means that after calibration all movements are set to their mechanical mid-
positions.
After calibrating, the software end stop limits are set. These limits are a
fixed number of increments from mid-position and should lie just within the
mechanical end limits. This means that in normal use (after calibration) the
mechanical limits can no longer be reached. However, If the mechanical
limits are reached, an error message results and the end limit away from
the EPD must be readjusted. See also 4.14.4 “CS Alpha tilt limit stops” to
4.14.7 “CS X limit adjustments”.
• The red led is now dimmed, indicating that a holder can be inserted.
• On the goniometer is a switch with two positions, named SELECT and
NON-SELECT. When the switch is set to the non-select mode, the holder
page does not appear. To prevent insertion of non-allowed holders, the
safe entry lock blocks all these holder types.
Contents
• If a holder is inserted, and the switch is in the select position, this is

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signalled by a detector (EPD), so that a holder selection page is made H

visible on the Data display monitor. The red led lights again. After selection
of the holder the airlock cycle starts. At the end of the airlock cycle the led
is dimmed.
CAUTION! This safe entry switch does not work for holders with a sapphire
on the tip, or for third party holders. See also 4.13.5 “CS Holder
safe entry lock”, Safe entry lock.
NOTE: If a beta tilt holder is inserted, the holder will be automatically calibrated
while it is in the park position. During homing, the electrical zero-position
of the feedback potentiometer is read out and used as a reference for
mid-position of the holder. The holder should not be inserted if the red
led is lit.
For CM300 microscopes an extra EPD is mounted to detect if a holder is

present. This signal controls the lower gun Y deflection so that no beam is
present without a holder.
Pole hit protection

• Holder present and the position of the axis is not in mid-position:
When a pole hit appears the microscope responds with a beep and moves
the holder towards a safe position.
• No holder present:
When a pole hit appears the microscope responds with an error message
“unexpected end of stroke” and disables the CompuStage.
Optical Axis
Slow speed
Position at
start-up Full speed
Return to mid-position
SES SES
Adjustable end stops to coincide with

optical and mechanical mid-position
SES = Software end stop X and Y = 2 mm, Z = 0.75 mm, Alpha =160°
Note: If tracking errors appear during full speed these are interpreted as errors.
If tracking errors appear during slow speed these are interpreted as end stops
(7 measurements at 80% of the full current).
Fig. 4-7 Principle of calibration

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4.13.4 CS Special extraction procedure H

This procedure must be followed if there is a malfunction in the goniometer or
its driving circuits and the holder is in an unsafe position so that it cannot be
removed. This situation can also occur, e.g., if the cable plug is removed and
reconnected while the holder was still inserted or in the case of a bad contact.
In this case the software may lose track of the actual position. If this happens
proceed as follows:
From version 11.0 onwards, press the reset holder softkey, as this resets
the holder to its mechanical mid-position.
CAUTION! Never press the reset AB key as this will reset the holder to a
software calculated mid-position.
This procedure is only applicable to the Double tilt holder and must be followed
if the previous step was not successful.
• Press the Enabled softkey to disable the goniometer (If not yet done);
NOTE: This procedure is the same as when switching the microscope on and
off. See also 4.13.3 “Trouble shooting”.
• Press the Enabled softkey to enable the goniometer;

• Wait for the software to drive the double tilt holder to mechanical mid-
position. Now the red airlock LED must be switched off. If not proceed with
the next step;
• If possible, remove the cover in front of the GDB unit;
• Check if the pole hit protection is activated. This can be seen on the GDB
board: LED H11 is lit.
If not, proceed as follows:
Temporarily ground the holder and check if LED H11 lights. If so, the
pole hit protection works and can be used as a reference.
Slowly, and using extreme care remove the holder, constantly
checking the pole hit protection. If the LED lights, stop immediately,
otherwise proceed until the holder is fully retracted.
If the pole hit LED lit during the extraction, proceed as follows:
If possible, remove the holder cable X1;
Measure with an ohmmeter the resistance of the potentiometer (X1-6
and 7);
Connect a battery to the holder cable X1-4 and 5;
If the potentiometer resistance was lowest between points X1-1 and
the mid-contact, X1-7, connect the positive of the battery to X1-4
(minus to X1-5).
If the potentiometer resistance was lowest between points X1-6 and
the mid-contact, X1-7, connect the negative of the battery to X1-5
(plus to X1-4).
Keep the motor running until the holder safe sign is active (GDB H7 lit)
or if this LED is not visible, until the potentiometer is in mid-position.
• Now the holder can be removed safely.
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• Remount the cover in front of the GDB. H
NOTE: If the motor cannot be moved using the battery, e.g. because it is
mechanically obstructed, the column must be opened in order to safely
retract the holder.
4.13.5 CS Holder safe entry lock

Figure 4-8 shows the types of pole pieces, the holders and the corresponding
settings for the holder safe entry lock which operates opto-switch SIB2-X4.
Safe ENTRY system for CompuStage
CM100/120 BioTWIN
Lens type UltraTWIN SuperTWIN TWIN or High Contrast
Non- Non- Non- Non-

Position of Sel. Sel. Sel. Sel. Sel. Sel. Sel. Sel.
ENTRY lock
(front view)
Visible part
Safe ENTRY key of specimen holder (cross section) EM6585A
2 mm 1 x 4 mm 4.5 mm 7 mm
Double tilt UT Single Tilt Std. Single Tilt LB Bulk

Double Tilt Std. Cryo
Double Tilt LB Multiple Spec.
Rotation Refl. / Diffr.
Heating
Straining
Fig. 4-8 Safe entry system
As can be seen from Figure 4-8, the holder identification switch can be set as
follows:
SELECT
Select means that the operator has to select the holder each time from the list
on the Data monitor. Terminate the selection with the softkey “Ready”.
NON-SELECT
Non-select means that the operator does not need to select a holder. In
practice this means that only a single tilt holder will fit in both SuperTWIN and
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TWIN microscopes. H
NOTE: For UltraTWIN microscopes no holder can thus be fitted.
The safety switches do not prevent or detect any unwanted insertion of holders
with a sapphire on their tip, or of third party holders.
CAUTION! If these holders are inserted, the O-Ring on the holder must be
replaced by one of size 2 x 8.5 mm.
4.13.6 CS Trouble shooting

To simplify trouble shooting and to ensure safe working on the goniometer the
following tools are needed:
94, Figure 818 Fixing tool to clamp the upper Y support. The tool is needed,
e.g., when removing the CompuStage from the objective
stage. After clamping, Z and Y movement is no longer
possible.
95, Figure 818 Vacuum dummy. This tool can be used to check if there is a
leak in the goniometer. It can also be used during service
work on the CompuStage to ensure that the column vacuum
is maintained.
96, Figure 818 Support on which the goniometer must be mounted when
doing maintenance work on the CompuStage.
Note:It is strongly advised to support the floating rod once it is
removed from the hemispherical bearing cup, if it is
necessary to test any of the movements. This can best be
done using a soft polythene foam around the floating rod.
96B, Figure 818 Plastic ring to be mounted between the CompuStage block
16, Figure 808A and the supports on 96, Figure 818.
46, Figure 818 Key to remove the crown nut 121, Figure 807A.
Note:The key is delivered as a part of the goniometer tool kit
5322 695 14509.
47, Figure 818 Tool to remove the hemispherical bearing cup 132,
Figure 807B from the goniometer stage.
Note:The tool can be ordered under ordering code 5322 395
90197 or is also a part of the goniometer tool kit 5222 695
14509.
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4.13.7 CS Trouble shooting list H
Symptom Possible causes Figure 808A

Y displacements during X Screw 81, Figure 808A touches bush 199, Figure 808A. See
movements also 4.14.9 “CS X-drive hinge bush lift adjustment”.
Holder too tight in the V-groove. See also 4.14.1 “CS V groove
assembly adjustment”.
Bearings 75, 108, 110, 207, 218 defective.
Spring 149 damaged.
Cover plate 138 non properly centred.
Floating bearing pins 195, 215, Figure 808A not in position.
X displacements during Y V-groove adjustment too tight. See also 4.14.1 “CS V groove
movements assembly adjustment”.
Bearings 75, 108, 110, 207, 218 defective.
Smallest steps for X and Y not Donators possibly defective - Try interchanging the X and Y
possible donators.
Movements not perfectly smooth over the full range when man-
ually displaced.
Alpha tilt problems. Hemispherical ball bearing 150 damaged .
Displacement during tilt. Hemispherical bearing cup 132, Figure 807A damaged.
Displacements when reversing Y driving rod 300 too loose, or non flexible in X direction.
the tilt angle. O-Rings 119, 120, 125, Figure 807B too dry or not of the correct
Vacuum leaks during tilt. size. A set of O-rings has been made, (5322 695 15975) which
contains a set of factory selected O-rings.
Scratching noise during alpha Housing 328 not properly seated against housing 16. Readjust
tilt the alpha tilt drive see 4.14.10 “CS Adjustment of the tilt motor
drive” (not for first series).
Note:During Alpha wobble an increased scratching noise level
is allowed.
Image drift Check that the conical part of the holder and its counterpart 189,
Figure 808A are free of grease. See also section 4.9 “Image
drift (For CompuStage)”. Mount a special drift cover over the
holder. To be ordered via Help desk.
One of the movement controls is not in mid-position
Check ambient conditions:
Water temperature variations:
0.1°C / min.
0.005°C / sec.
Room temperature variations:
0.5°C / hour.
0.05°C / min.
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Alpha tracking error Check that the alpha EPD 10 is activated before a mechanical H
end stop is touched.
Check that the full tilt range is between + and – 80 degrees. See
also Section 4.14.4 “CS Alpha tilt limit stops”.
Readjust the alpha tilt drive see Section 4.14.10 “CS Adjust-
ment of the tilt motor drive” (not for first series).
Check that there is no mechanical obstruction, e.g.:
- from the covers or cover plates.
- from the ty-rap on the Z motor.
- from the front cap touching the encoders.
- upper or lower end stop jammed.
Temperature of MBG rack is too high. Leave front cover out.
Z tracking error Check that the Z opto coupler 284 is activated before a
mechanical end stop is touched, e.g.:
- lever touching the SIB 1 board;
- lever touching the opto coupler;
Check that the height range is between + 0.375 and –
0.375 mm. See also Section 4.14.5 “CS Z limit stops”
Gearwheels have too little play over their full range.
Upper or lower end stop (232 and 255) jammed, or passed the
lower end stop one turn.
Grubscrews to set the Y clamping block are too tight so that the
clamping block can not pivot.
Y tracking error Check that the Y EPD 298 is activated before a mechanical end
. stop is touched.
. Check that the full Y range is between + and – 1 mm. See also
. 4.14.6 “CS Y limit adjustments”
. Interchange the X and Y donators.
. Too much friction of the X support on the balls of the Z lever
. Measuring system is mechanically obstructed or electrically not
. working.
. Y driving rod not properly clamped.
. Front cover touches the measuring system.
. Braided wires form an obstruction.
Y travel errors Manual Double tilt, Rotation, Reflection Diffr holders need a
special tapered cover. (4022 185 40432).
X tracking error Check that the X EPD 59 is activated before a mechanical end
stop is touched.
Check that the full X range is between + and – 1 mm. See also
4.14.7 “CS X limit adjustments”.
Interchange the X and Y donators.
Measuring system is mechanically obstructed or electrically not
working.
X driving rod not properly clamped.
Braided wires form an obstruction.
Display value changes during Too much play on the balls 34, 37 Figure 808A.
an airlock cycle
Encoder error (alpha, beta, X, Check the wiring of the encoder that caused the error message.
Y, Z)
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High Resolution problems Hinged bearing 190, Figure 808A does not give sufficient pres- H
. sure. V groove not properly adjusted.
. X lever bearings 34, 36, Figure 808A have too much play.
At 60 degrees Holder not sufficiently clamped in the floating rod.
Anti back-lash springs 96, Figure 808A not strong enough.
Double tilt Holder moves errat- Error in software version 10.
ically Proceed with special extraction procedure. See section
4.13.3 “CS Calibration procedure”.
Pole hit error Move the failing axis around the point where the pole hit
appears. Check that at that moment the 2 volt is grounded. This
can safest be done by inserting the dummy holder 503,
Figure 808A.
Due to wear, the metal tip of the measuring system can cause a
pole hit. Order new sapphire tip via help desk.
Springs of the Y driving rod are connected to ground.
Braided wires are connected to ground.
Protection eccentric 314, Figure 808A is incorrectly adjusted.
Third party holders are connected to ground via external elec-
tronics.
When touching the CompuStage the pole hit appears. Com-
puStage is grounded due to charging of operator.
Vacuum leaks during speci- Re-adjust protection pin 314, Figure 808A. Manually keep pres-
men retraction sure on the cover 138, Figure 808A while retracting .
Vacuum leaks during air inlet Re-adjust the air inlet pressure to max 0.1 bar overpressure.
Optical Axis
Position at EPD
start-up Full speed
Mid-position
Adjustable end stops
Fig. 4-9 Errors during calibration
If during calibration the end stop is found before the EPD, the result will be the error
message “Tracking error”
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H
Errors after calibration
Optical Axis
Slow speed
Position at
start-up Full speed
SES SES
Mid-position
Fig. 4-10 Errors after calibration
As can be seen the SES (Software end stop) is outside the mechanical end
stop away from the EPD. If after calibration the specimen is moved towards this
end stop, the result will be the error message “Tracking error or Unexpected
end of stroke”.
Optical Axis
Position at
start-up Full speed
EPD
SES SES
Mid position
As can be seen the EPD is adjusted far away from the end stop. If after
calibration the specimen is moved near towards this end stop and a new
calibration is started from this position, the result will be the error message
“Tracking error”. This problem can be cured by manually moving the specimen
towards mid position and readjusting the EPD. (Often the Z EPD).
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4.13.8 CS Vacuum leak testing of CompuStage H
Vacuum leak with holder out of the goniometer Check O-Ring 54, Figure 808A. (or 6 in
(vacuum OK with holder inside) Figure 4-11. below)
Vacuum leak with holder in the goniometer (vac- Check the O-Ring on the holder (9 in Fig.
uum OK with holder retracted) below).
Check the O-Rings 2, 3, 4, 5, 11,12 in Fig.
below).
Check O-Rings 124, 226, 188, Figure 808A. (or
10, 7, 8 in Fig. below)
Vacuum leak with holder in and out Check O-Rings 125, 120, Figure 807A. (or 1, 2
in Fig. below)
If the vacuum leak is less with holder in while Check pre-vacuum valve and O-Ring 37,
simultaneously pumping the lines Figure 807A. (or 6 in Fig. below)
Airlock ball closed

12
11 V8
4
12
3
Bearing Cup
5
2
1
6
Airlock Ball
6
1
2
5
3
4
Inner Objective Block
O-rings that can cause a possible leak: 1, 3, 6

If the vacuum is improved when inserting the holder (the airlock ball still closed)
the O-rings 3, 6 are possibly leaking.
Fig. 4-11 Symbolic drawing of situation with airlock closed

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H
Airlock ball open
12
11 V8
4
12
3
Bearing Cup
5
2 Air In
1 8
6 Airlock Ball
9 Holder
6
8
1
2 10
5
3
4
O-rings that can cause a possible leak:1, 2, 3, 4, 5, 7, 8, 9, 10, 11, 12

If the vacuum improves while pumping the lines O-ring 11 in V8 is leaky.
Airlock tool mounted
12
11 V8
4
12
3
Bearing Cup
5
2
1
Airlock Tool
1
2
5
3
4
O-rings that can cause a possible leak: 1, 3,

NOTE: If O-rings 1 and 2 are removed the leak may be caused by O-rings: 3, 4,
5, 11,12 Ensure that the O-rings 1 and 2 are not damaged while
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removing.
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4.14 CS adjustments H
4.14.1 CS V groove assembly adjustment

Figure 808A
CAUTION! This adjustment should be carried out after dismantling the V-groove
assembly, or the airlock assembly. It is of vital importance that the
eccentric bush 98 and eccentric screw 78 turn simultaneously,
otherwise screw 78 may be damaged.
• Set the X, Y, Z movements to mid-position, and insert a holder loaded with

a specimen;
• Ensure that nut 99 is fixed;
• Retract the holder so that the airlock is closed;
• If not yet done remove plate 138;
• Gently remove the Y measuring system 185 releasing screws 179;
• Release the four grubscrews 85, 89;
• Adjust the eccentric screw 78 to set the V groove assembly in the lowest
position;
• Mount a small wedge between the surfaces of the XY support and the
pressure lever 77;
• Carefully insert the holder again into the beam;
NOTE: To facilitate the adjustment remove the knob from the single-tilt holder as
follows:
Remove the Allen key 14 and take out key 15;
Via the key hole push out the cap 8;
Remove the screw 10 and take out the complete cap.
• Readjust with the eccentric screw 78 the V groove assembly height. The
specimen holder will centre the V groove in the Y direction so take care that
the Allen key does not apply too much force in the Y direction. The
adjustment is optimal when the V groove lifts the holder 20 µ m. When this
is the case the loop error in the X direction will be a minimum.
NOTE: Ensure that the eccentric screw 78 is adjusted so that the indication lines
on the eccentric point towards the column (so as to avoid touching the
front cover 138 when mounted).
• Tighten the grubscrews crosswise in turn. If this cannot be done due to

obstruction by the holder knob, carefully retract the holder so that the
airlock is closed;
• Check that the V groove assembly rotates smoothly when moving the X
axis;
• Remount the Y measuring system 185 using screws 179.
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4.14.2 CS Adjustment of the X and Y motors on their gear- H

wheels
Refer to Figure 4-12.
If gearwheel 15 has been removed from the gearwheel 18, the following
adjustment must be made:
• Release the two screws 9 to release the motor and its gearwheel;
• Using a magnifying glass or a TV system, adjust the complete motor unit 8,
until the teeth of the motor gearwheel 15 can just move freely (+ and - 5
degrees) with respect to the big reduction gearwheel 18.
NOTE: Check that after the adjustment the grubscrew 6 does not touch the walls
of the recess.
8
7
6
5
4
9
10
14
15
16
17
18
19
20 EM6628
Fig. 4-12 XY motor, exploded view
4.14.3 CS Adjustment of the airlock stop

Adjust the Y movement to +950 µm;
Set the Z movement to +330 µm;
The airlock adjustment screw 314, Figure 808A must be set so that the pole hit
protection led (GDB-H11) just does not light.
Check that there is no pole hit when the specimen is moved over its full travel.
Also check that the IGP reading does not increase by more than 25 scale
divisions when retracting the specimen to its park position.
NOTE: Ensure that the cover cap 138, Figure 808A is pushed towards the
column while retracting the holder.
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4.14.4 CS Alpha tilt limit stops H

Adjust the positive alpha tilt limit stop as follows:
• Set the goniometer horizontal. This can best be done as follows:
– Insert a 500 µm diaphragm in the specimen holder;
– Set the magnification to about 100x;
– Move the diaphragm in + and – Y directions and check that both edges
of the diaphragm are in the same focus plane. If not, use the alpha tilt
until this is achieved;
– Note the alpha tilt value displayed;
• If the angle is positive:
– Using the alpha tilt, tilt towards the EPD (positive tilt) until the software
end limit is reached;
– Shift end limit stop 310 counter-clockwise to compensate the alpha tilt
value noted previously. This must be estimated by eye;
• If the angle is negative:
– Calculate the tilt angle required = 80° – the angle noted previously;
– Now tilt to this angle using the alpha tilt;
– Shift end limit stop 310 until it butts against pin 347;
NOTE: The adjustment of the limit stop 310 must be such that pin 347 strikes it
fully and cannot slip off and jam.
• Perform the calibrate procedure;

• Check that the diaphragm edges are now both in focus, otherwise repeat
the procedure described above until satisfactory.
Adjust the negative tilt limit stop as follows:
• Tilt towards the end stop away from the EPD until the display shows an
indication of -80 degrees.
• Using a screwdriver (only possible for second series goniometers) via the
opening in locking nut 345, turn the tilt axis worm wheel 339 until the tilt
axis limit stop 307 strikes the pin 346 fully and cannot slip off and jam.
4.14.5 CS Z limit stops

• Make an image of a recognizable detail;
• Carry out the goniometer tilt and eucentric height adjustments. Set alpha
tilt to zero;
• Check that the Z display value is 0 ± 35 µm;
NOTE: The limit stop is only activated after completing a full turn (70 µm) of the
gearwheel 254. So that the eucentric position can only be adjusted (with
respect to calibrating position) in steps of 70 µm.
If not within the above limits, note the value and sign of the displayed value and
adjust the Z limit stops as follows:
• Calculate the number of Z movement revolutions required to bring the Z
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axis in line with the eucentric axis = display value noted divided by 70 µm, H
rounded off to a whole number of revolutions;
• Release grubscrew 263 and adjust pin 255 so as to create mechanical
clearance;
• Move the Z towards the opto-switch using the joystick until the display
reads the maximum possible negative value;
• Press softkey “Enabled”;
• Mark the position of gearwheel 259, and manually turn this gearwheel the
exact number of revolutions calculated above (negative number = turn
counter-clockwise; positive number = turn clockwise).
• Adjust pin 255 so that if gearwheel 259 is now turned further in the same
direction, pin 253 fully “stops” pin 255, but if gearwheel 259 is turned in the
reverse direction, pin 253 just “clears” pin 255.
• When the adjustment is satisfactory, tighten grubscrew 263 and carry out
the calibration procedure.
NOTE: After readjusting the end stop the EPD 284, Figure 808A will need
readjustment too.
4.14.6 CS Y limit adjustments
NOTE: This adjustment is only necessary when the complete goniometer has
been dismantled.
• Insert a single tilt holder in the goniometer. The holder must not contain a
specimen;
• Set the magnification to about 200x;
• Move the holder to its maximum negative limit using the joystick;
• Note the distance between the edge of the hole in the holder and the centre
of the screen;
• Move the holder to its maximum positive limit using the joystick;
of the screen;
• If present release grubscrew 317A and adjust grubscrew 317 until the
distances just noted are equal. See figure following.
NOTE: Each time the grubscrew is adjusted, the calibration procedure must be
carried out.
The position of the Y driving rod is not important as the system is
calibrated from the mechanical limit close to the EPD.
Screen Screen
Screen centre
Image of the hole centre centre
in the holder
-1000 µm +1000 µm -1000 µm +1000 µm -1000 µm +1000 µm
Incorrect: move stop Correct: overlap symmetrical Incorrect: move stop

EM7729-1 in +X direction with centre of screen in –X direction
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4.14.7 CS X limit adjustments H
NOTE: This adjustment is only necessary when the complete goniometer has
been dismantled.
• Insert a single tilt holder in the goniometer. The holder must not contain a
specimen;
• Set the magnification to about 200x;
• Move the holder to its maximum negative limit using the joystick;
of the screen;
• Move the holder to its maximum positive limit using the joystick;
of the screen;
• Release grubscrew 118 and adjust the end limit pin 124 until the distances
just noted are equal. See figure following.
NOTE: Each time the end limit pin is adjusted, the calibration procedure must
be carried out.
After readjusting the end stop the EPD 121, Figure 808A will need
readjusted too.
The position of the X driving rod is not important as the system is
calibrated from the mechanical limit close to the EPD.
+1000 µm +1000 µm +1000 µm

Screen
centre
Screen centre
Screen
centre Screen
Image of hole in centre
the holder
-1000 µm -1000 µm -1000 µm
Incorrect: move stop Correct: overlap symmetrical Incorrect: move stop

EM7729-2 in +Y direction with centre of screen in –Y direction
4.14.8 CS The front plate 138

Figure 808A
The hole in the ring 141, Figure 808A is only slightly larger than the diameter of
the holder, therefore each time the plate is removed an adjustment must be
made to ensure that the holder does not touch the ring 141.
For first series goniometers this can be done as follows:
• Retract the holder so that the airlock is closed;
• Release the four screws 137 and accurately centre the front plate around
the holder.
If the transport holder 503 has the following shape, it can be used as a pass
gauge:
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H
Added as a pass gauge
EM7730
• Release screw 506 and remove the transport holder 503 from its bracket
507;
• Insert the transport holder 503 in the goniometer;
• Release the four screws 137 and accurately centre the front plate around
the holder.
NOTE: After fixing the front plate check that the holder does not touch the ring,
using the X joypad movement.
4.14.9 CS X-drive hinge bush lift adjustment

Figure 808A
NOTE: This adjustment is only necessary when the X-movement has too much
displacement at right angles.
• Remove the X motor. See also 5.15.4 “CS Removal of the X motor
assembly”;
• Adjust grubscrew 81 until it just does not touch bush 199;
• Remount the X motor and check that the X movement does not suffer from
“lassoing”. See also 4.15.1 “CS Test procedure”.
4.14.10 CS Adjustment of the tilt motor drive

Figure 808A
NOTE: This adjustment is necessary when the alpha tilt causes tracking errors
but is not obstructed.
• Release grubscrew 348;

• Adjust grubscrew 341 until the worm-wheel 339 matches gearwheel ring
309 with minimum play but still moves smoothly.
• Tighten screw 346 to lock the adjustment.
4.14.11 CS Adjustment of the clamping blocks

63, 296 Figure 808A
Adjustment of the clamping blocks 63 and 296 must be done as follows:
• The three grubscrews 62 in the clamping rod must be adjusted so that the
clamping block forms an angle with respect to the driving rod. This can be
done by turning the grubscrews located furthest away from the driving rod
2 mm deeper in.
CAUTION! The grubscrews should just not touch the cover on top of the donator,
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so that the clamping block can turn freely around its axis.
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4.14.12 CS Goniometer height adjustments H
4.14.12.1 Coarse height adjustment

• Select alignment page;
• Select service calibrate page;
• Follow the goniometer height procedure;
NOTE: The following points must be observed:

With the 7-position diaphragm mechanism, the TWIN current must be set
to 1720 mA for TWIN, 1630 mA for SuperTWIN and 2000 mA for CM120
BioTWIN. The CM100 BioTWIN has a fixed TWIN current of 2030 mA.
Up to version 11.0 the C2 preset current in step 005 was not by default
correct. To overcome this, go to step 006 and back to 005. Do not use
the intensity knob to focus the beam but use the objective current.
Use the wedges 234, Figure 808A to focus the specimen.
Check of correct height adjustment for all microscopes:

• Select microprobe SA mode;
• Select spot 3, and focus the spot;
• Select D mode camera length e.g. 680 mm. Measue the size of the disk.
• Select Nanoprobe SA mode, focus the spot.
• Select D mode, same camera length. Measue the size of the disk. The
nanoprobe disk must be 3 to 5 x bigger than the microprobe disk.
4.14.12.2 Eucentric height and tilt axis adjustment (all microscopes)

Alignment errors will exist during initial set up of the CompuStage; these
misalignments are:
• Tilt axis does not intersect the optical axis;
• Specimen plane is not in the tilt axis, see Fig. 4-6 “Tilt axis and height
misalignments”.
NOTE: All height and tilt errors will generally cause displacements in the same
direction as when using the Y movement. Errors in the direction of the X
movement must be due to the O-rings 119, 120, 125 in the bearing cup
or in the Y drive rod (old type)
• Set the controls to obtain a low magnification image (M approx. 1,000x);

• Set the tilt angle to 0° using the Alpha drive;
• Select a recognizable feature and bring it to the centre of the screen using
the joypad;
• Tilt the specimen using the Alpha wobble. Note the movements of the
selected feature;
Adjust the Z joypad control until the movement of the previously selected
feature no longer occurs, or only occurs to one side of the centre of the screen.
If necessary, bring the feature back to the centre of the screen at 0° tilt using
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the X and Y joypad controls;

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• Tilt the specimen to +45°, 0°, -45° (or to the maximum allowed tilt angle for that H
pole piece configuration). Note the movement of the selected feature;
• Tilt again (or to the maximum allowed tilt angle for that pole piece
configuration). Bring the selected feature halfway back to the centre of the
screen with the tilt axis alignment screw, 350 Figure 808A;
• Bring the feature back to the centre of the screen using the X - Y joypad
controls;
• Repeat steps 3 to 8 until a minimal displacement occurs when tilting to +45° or -
45° (or to the maximum allowed tilt angle for that pole piece configuration) at a
magnification of 120,000x.
4.15 CS overview of specifications

X-Y Movements
Total travel : ≥ 2 mm
Maximum speed : ≥ 0.08 mm/sec. at zero alpha tilt
Step resolution : ≤ 2 nm
Reproducibility : ≤ 500 nm
Loop : ≤ 100 nm
Drift, 2 min. after positioning : ≤ 1 nm
Read out resolution on CRT : 0.01µm
Measurement resolution X : ≤ 20 nm
Measurement resolutionY : ≤ 14 nm
Z- Movement
Total travel : ≥ 0.75 mm
Step resolution : ≤ 36 nm
Maximum speed : ≥ 10 µm/sec.
Reproducibility : ≤ 0.5 µm
Read out resolution on CRT : 0.01 µm
Measurement resolution : ≤ 7 nm
Alpha Tilt Movements

Eucentricity : ≤ 1 µm
Displacement on reversal : ≤ 170 nm in X direction
≤ 300 nm in Y direction
Maximum speed : ≥ 10 degrees/sec.
Reproducibility : ≤ 0.5 degrees
Total travel : ≥ 160 degrees
Minimum step : ≤ 0.04 degrees/sec.
Read out resolution on CRT : 0.01 degrees
Measurement resolution : ≤ 0.0005 degrees
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4.15.1 CS Test procedure H
4.15.1.1 X-Y Movements

• Total travel:
Select lowest LM position.
Use the single tilt specimen holder, without specimen, as a reference. The
inner diameter of this holder is 2.2 mm.
Measure if the total travel for both X and Y directions on the data screen is:
2,000 µm.
If measured on the main screen: 2 mm x Magnification. See also Section
4.14.6 “CS Y limit adjustments” or 4.14.7 “CS X limit adjustments”.
• Maximum speed:
Select lowest LM position.
Move the specimen to an end position of the X (Y) movement, then move it
at maximum speed to the other end position. The total travel time must be
equal to or less than 25 seconds, so that the maximum speed is:
Distance / time = 2 mm/< 25 sec. = > 0.08 mm/sec.
• Step resolution:
This test can best be done using a TV system, or otherwise the highest
magnification must be chosen.
If using a TV system, select a magnification of about 500 kx.
If using a TV system, multiply the magnification of the microscope by the
magnification of the TV system (for a Gatan 622 model, this is 24 x).
The smallest possible positioning accuracy for both X and Y movements
must be within 2 nm, so that:
Smallest possible positioning accuracy measured on the main screen
(or on TV) / Total Magnification (incl. TV) = < 2 nm.
• Reproducibility (only possible when the 2D or 5D option is present):
Select a magnification of about 110 kx.
Find a recognizable detail on the specimen and STORE this as, e.g.,
position 1.
Find a second recognizable detail within 70 µm of detail 1 and store this as
position 2.
Move the second recognizable detail about 0.5 mm (use the X and Y
movement read-out) in an arbitrary direction.
RECALL via position 2 to position 1. In 75% of the tests, the recognizable
feature must be within 500 nm x actual magnification of the previous
position (measured on the main screen).
• Loop:
Move the specimen to and fro over a distance of 16 cm (full diameter of the
large screen) with X (Y) of the joystick movement. The displacement
measured on the main screen at right angles to the line of displacement
must be < 100 nm x actual magnification.
• Drift (For manual stage see 4.9 “Image drift (For CompuStage)”):Measuring
conditions
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– Ambient conditions: H
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• Air < 0.5 °C/hour, 0.05 °C/min. H

• Water < 0.1 °C/min, 0.005 °C/sec.
– HT switched on at the desired value for 12 hours;
– Specimen in the microscope for at least 40 minutes (max HT). The
maximum temperature difference between the holder (when inserted)
and the CompuStage may not exceed 2 °C;
– The magnification must be set to SA or HM for at least 40 minutes;
– Measure the drift of the specimen with respect to the interception
needle;
– The drift is to be measured at least two minutes after repositioning (100
µm max.) a recognizable detail and selecting the final magnification.
– The drift should be better than 1nm per minute (or 0.5 nm/min for UT) x
actual magnification This can be measured on the main screen. This
can also be done via the (calibrated) measuring function. The drift must
be compensated and recorded on paper every minute.
NOTE: For more diagnostic details see also 4.9 “Image drift (For CompuStage)”.
4.15.1.2 Z Movement
Travel:
Settings:Magnification about 50 kx.
Alpha tilt on 0 degrees and X and Y in mid-position.
Move the Z-movement to its maximum positive height and check that the
reading on the screen is +375 µm. Repeat this for the maximum negative
height; the reading must now be -375 µm.
Reproducibility (only possible when the 2D or 5D option is present):

• Select a magnification of about 15,000x;
• Select a recognizable detail and focus. Note the Z value;
• Store this as position 1;
• Move the specimen using the Z joypad to a position 150 nm away from that
just noted;
• Recall position 1. Press Reset focus and refocus the detail;
• Check that the detail is within 0.5 µm of the original Z position noted.
4.15.1.3 Alpha Tilt

Eucentricity:
Find a recognizable detail and centre it.
Tilt from -45 or (+45) degrees to +45 (-45) degrees (or less if the pole piece
configuration does not allow 45 degrees).
The position of the recognizable detail during tilting must stay within 1 µm x the
actual magnification (measured on the main screen) of the centre of the
screen.
The specimen displacement when reversing the tilt angle must be within 170
nm for the X direction and 300 nm for the Y direction x actual magnification
(measured on the main screen).
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4.15.1.4 Vacuum leak during airlock cycle H

• Starting condition: ultimate vacuum, e.g. 27 scale divisions.
• Remove the holder, and immediately reinsert.
• The vacuum must read 33 scale divisions within:
10 min with anti-contamination device not cooled down;
1 min with anti-contamination device cooled down.
4.15.2 Objective diaphragm mechanism

(Figure 807B)
4.15.2.1 Diaphragm height adjustment for TWIN and SuperTWIN
NOTE: For BioTWIN see 5.17.3 “Adjustments”b.
• Split the column between the objective lens and the condenser lens (see
5.10 “Opening & closing the column above the specimen stage to gain
access to the specimen chamber”);
• First remove the objective diaphragm holder 140, Figure 807A, then its
mechanism (see 5.17.1 “Dismantling procedure”);
• Set the fixing plate 155 as low as possible. (For SuperTWIN set plate 155
as high as possible);
• Remount the diaphragm mechanism and set it in the highest position using
the play in the screw holes;
• Place a piece of lens paper on the lower pole piece. Carefully remount the
diaphragm holder. Now shift the diaphragm mechanism downwards until
the lens paper is just not touched.
Remove the lens paper and check that for all four (three) diaphragm
positions the holder just does not touch the pole piece.
NOTE: The height difference between the first and last diaphragms should be
within 50 µm.
NOTE: As the 7-position diaphragm holder is nearer to the lower pole, the
position of the aperture cannot be used as a reference for the TWIN
current adjustment. Use as a reference in alignment step 014 a TWIN
current of 95% of its maximum. See also Section 4.14.2 “CS Adjustment
of the X and Y motors on their gear-wheels”.
4.15.2.2 Diaphragm coarse centring

• Introduce the second diaphragm into the beam and align it with the fine
lateral and axial displacement knobs, 60 and 88. Screw in grubscrew 78
until the diaphragm just moves, then release it one turn;
• Tighten grubscrew 69 and check that all 4 (three) diaphragms can be
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centred with the fine axial displacement knob. If not, replace grubscrew 69
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in one of the other holes and repeat the check until satisfactory; H
• Release the lateral displacement knob. Now check that all four diaphragms
can be centred. If not, unscrew grubscrew 78 a little and try again. Repeat
until satisfactory.
4.16 High Resolution

Specifications
TEM HMS STEM
Line resolution Point resolution BF/DF BSD SED
CM100 High Contrast 0.344 nm 0.424 nm n.a n.a n.a
CM100 BioTWIN 0.344 nm 0.480 nm n.a n.a n.a
CM120 TWIN 0.204 nm 0.349 nm 1.0 nm 4.0 nm 2.5 nm
CM120 SuperTWIN 0.144 nm 0.310 nm 1.0 nm - -
CM120 BioTWIN 0.344 nm 0.500 nm 5.0 nm 4.0 nm 2.5 nm
4.16.1 Procedure for 0.34 nm lattice resolution using graphitized

carbon
• Use test specimen 5322 397 60036 (0.34 nm lattice spacing, S140 Agar).
Condenser lens diaphragm: 100 µm.
Objective lens diaphragm: removed for axial illumination and 100 µm for
tilted illumination
• Diameter wehnelt aperture: 0.5 mm.
• Filament height: 0.15 mm.
• Emission current: 80-100 µA (Tungsten only), emission switch position 5 or
6.
• Accelerating voltage: max.; allow about 45 minutes to stabilize (filament
current minimum).
Anti-contamination device cooled down for at least 45 minutes and refilled
just before the test is started.
NOTE: For CM100 the anti-contamination device, PW6403, is not standard.
• Spot size 4, (CM100 spot size 3 to 6) Intensity slightly overfocus.

• Ensure that condenser astigmatism is properly corrected.
• Correct objective astigmatism on the grain structure of the specimen.
• Select M mode (magnification > 380 000). Focus image and introduce a
100 µm diffraction diaphragm. (not for CM100)
• Select D mode. Introduce a 100 µm objective lens diaphragm and centre
very accurately around the central beam.
• Press “Dark Field” and adjust with multifunction knobs so that the central
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beam lies on 1/4 from the edge of the objective diaphragm. H
NOTE: If requested select conical so that the central beam can be rotated over a
fixed angle for 360 degrees to find the optimum angle for visibility of
graphite fringes. For CM100 this is mostly at the 10 o’clock direction
• Press “D” again to return to the M or SA mode.

• Select a suitable thin carbon particle, containing a band of high contrast,
located close to a grid bar to avoid drift.
Increase magnification to maximum, where lattice spacings, if present in
the selected part of the specimen, should be visible through the binocular.
Adjust focus for optimum visibility of the graphite fringes, which occur at
approx. 50-75 nm underfocus.
• Adjust “INTENSITY” to give an exposure time of 2 seconds, and make an
exposure.
• Develop the plates/film and make enlargements with a final magnification
of two million.
4.16.2 Procedure for 0.34 nm (0.50 nm) point-to-point resolution
NOTE: For BioTWIN magnetic fields must be: horizontal < 185 nTesla
vertical < 440 nTesla
The conditions are the same as described above, but follow the procedure
below:
0.34 nm point-to-point
• Only axial illumination.
• Select normal M mode.
• Select a suitable thin carbon particle, containing a band of high contrast,
located close to a grid bar to avoid drift.
Increase magnification to maximum, where lattice spacings, if present in
Adjust the objective lens current for optimum visibility of the graphite
fringes, which occur at approx. 50-75 nm under-focus.
• Adjust "INTENSITY" to give an exposure time of 2 seconds, and make an
exposure.
of two million.
• Special attention should be paid to the rotation alignment accuracy.
If no beam tilt was necessary to achieve 0.34 nm lines in all directions, this
test can be considered as a valid point-to-point resolution test.
0.50 nm point-to-point
• Only axial illumination.
• Select normal M mode.
• Select a suitable thin carbon layer, close to a grid bar to avoid drift.
• Adjust "INTENSITY" to give an exposure time of 2 seconds.
• Increase magnification to maximum, Correct astigmatism. Adjust the
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objective lens current for minimum contrast, Select focus step 2 and make
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a through focus series of 5 pictures. H

of two million. Inspect the plates for particles that have a separation of 0.5
nm See also the Figure below.
0.5nm
0.5nm
EM6915
4.16.3 Procedure for 0.23 nm Au line resolution

(considered as 0.3 nm point-to-point resolution)
4.16.3.1 Test requirements

• For test specimen use heavily gold shadowed carbon spacing 5322 695
15003, S132 Agar.
• Condenser lens diaphragm: 50 µm aperture.
• Objective lens diaphragm: removed (or 70 µm for more contrast).
• Diameter of wehnelt aperture: 0.5 mm.
• Filament height: 0.15 mm.
• Emission current: 80-100 µA (Tungsten) 5-20 µA (LaB6)
• Acceleration voltage: max.; allow 45 minutes to stabilize (filament current
minimum).
• Anti-contamination device cooled down for at least 45 minutes and refilled
just before test is started.
• No beam tilting (axial illumination).
4.16.3.2 Procedure
• Spot size position 2, intensity slightly over-focus.
• Ensure that the condenser astigmatism is properly corrected.
• Correct objective astigmatism on the grain structure of the specimen.
Highly accurate correction is necessary for obtaining a good micrograph.
• Select a suitable particle.
• Increase the magnification to maximum where lattice spacings, if present in
• Adjust the objective lens for optimum visibility of the 0.23 nm Au lattice in
two directions. See Figure 4-13.
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4-52 50129 060427 CM 100/120 Mechanics
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Fig. 4-13 0.23 nm line resolution
4.16.4 Procedure for 0.204 nm, 0.14 nm and 0.10 nm line

resolution
- Test specimen : Oriented gold 5322 695 14199 Agar S135
- Select max. HT : 45 minutes stabilized
- Select C2 aperture : 50 µm or 100 µm
- Emission current : 10 to 20 µA
- Select a spot size : 1 or 2
- Anti-contamination device : Cooled down for at least 45 minutes
and refilled just before the test is started
- Exposure time : 2 to 3 seconds (emulsion setting 2 sec.)
(The combination of C2 and spot size must
give an exposure time of 2 to 3 seconds)
Procedure
• Ensure that the condenser astigmatism is properly corrected;
• Correct objective astigmatism on the grain structure of the specimen;
• Select M mode (magnification > 400,000x). Focus the image and introduce
a 100 µm diffraction aperture;
• Select D mode. Introduce a ≥ 100 µm objective aperture (depending on
desired resolution) and centre it accurately around the central beam;
• * Press the beam tilt button and adjust the multi-function knobs so that the
central beam and the deflected spot lie symmetrically in the objective
aperture see figure following:
• Move and slightly tilt (max. 3 degrees) the specimen so that the central
spot and the diffracted spot(s) are as bright as possible;
• Return to the imaging mode and remove the diffraction aperture;
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CM 100/120 Mechanics 50129 060427 4-53
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Figures
a’
H
For 0.1 nm
For
4 a 0.09 nm
1
For For
0.2 nm 0.14 nm
d’ d b b’
Central beam
3 c 2
c’ EM6347A
Oriented gold diffraction pattern

• Increase the magnification to maximum. Focus the image and adjust the
objective stigmator (full coincidence of images);
• Take micrographs. Keep exposure time short, e.g. one or two seconds;
• Inspect the plates with a magnifier.
NOTE: - The step marked with an asterisk should not be performed when
doing the 0.2 nm axial resolution test.
- When the sample is first bombarded by electrons, there will be
some disturbance caused by localized heating of the sample.
The beam should then be left on a particular area for a short
time to thermally stabilize the sample before micrographs are
taken.
- If 0.14 nm lines in a certain direction cannot be found, use a
diffraction spot opposite to the one used before. So, e.g. instead
of spot 1, use spot 3 (see also previous Figure), or instead of
using spot a’, use spot c’, etc.
CRYSTAL AXIS
CRYSTAL
AXIS
CRYSTAL
0.14 nm 0.14 nm
90°
90°
0.204 nm
(0.10 nm orientation 0.204 nm (0.10 nm orientation
in same direction) in same direction)
45°
45°
Position of lines w.r.t. crystal

EM6348
Fig. 4-14 0.204 nm, 014 nm and 0.10 nm line resolution

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4-54 50129 060427 CM 100/120 Mechanics
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4.16.5 STEM high resolution on TWIN and SuperTWIN H

(BF/DF detector only)
NOTE: For detectors above the specimen the gold layer should be facing
upwards.
Resolution is proved when the specified distance can be found between the
edges of two separated gold particles.
System setup for STEM resolution (BF/DF detector only) not for CM100
- Test specimen : Gold-shadowed latex balls, Agar S128B,
5322 695 14566
- Select 120 kV : 45 minutes stabilized.
- Select C2 Aperture : 50 µm
- Set emission to : Tungsten : 60 to 80 µA
LaB6 : 10 to 20 µA
- Anti-contamination device : Cooled down for at least 45 minutes and
refilled before the test is started.
- Select spot size : 6 to 7
NOTE: The microscope must be properly aligned before starting the resolution
procedure.
Also it is advised to check the specimen in the TEM mode to see if the
particles are near to each other. If not, select another part or heat the
specimen (Large C2 aperture, high emission current) to make the
particles “grow”.
Procedure
• Select a magnification of 200,000 x (130,000 on photo-monitor) and make
an SA image
Line time 10 ms and lines/frame 288 or 576.
• Focus the image and correct C2 astigmatism.
• Select Full frame mode . Select a line time of 55 ms. Select 1152 lines/
frame. Program these settings for EXP 1.
• Adjust BRIGHTNESS and CONTRAST to obtain a signal amplitude

between black and white on the videoscope or about 8 cm on the right-
hand monitor (when Waveform has been selected).
• Check again if the image is still focussed and press EXPOSURE 1.
• The exposed (polaroid) film should show details with a separation of 0.13
mm (130,000 x 1 nm).
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4.16.6 Procedure for STEM resolution H

(SED/BSD detector only) not for CM100
- Test specimen : Gold shadowed latex balls, Agar S128B,
5322 695 14566
- Select 120 kV : 45 minutes stabilized.
- Select C2 Aperture : 50 µm (position 3)
- Emission : 10 to 20 µA LaB6 and 60 to 80 µA for
Tungsten
- Anti-contamination device : Cooled down for at least 45 minutes and
refilled before the test is started.
- Select spot size : One position lower than the one that
indicates the high resolution specification
(2.5 nm for SED and 4 nm for BSD).
- Set SED extraction voltage : +150 V (SED only).
NOTE: The microscope must be properly aligned before starting the resolution
procedure.
Also it is advised to check the specimen in the TEM mode to see if the
particles are near to each other. If not, select another part or heat the
specimen (large C2 aperture, high emission current) to make the
particles “grow”.
Procedure
• Select a magnification of 75,000 x (50,000 on photo-monitor) and make an
SA image
Line time 10 ms and lines/frame 288 or 576.
• Focus the image and correct C2 astigmatism.
• Select Full frame mode .Select a line time of 55 ms. Select 1152 lines/
frame. Program these settings for EXP 1.
• Adjust BRIGHTNESS and CONTRAST to obtain a signal amplitude

between black and white on the videoscope or about 8 cm on the right-
hand monitor (when Waveform has been selected).
• Check again if the image is still focused and press EXPOSURE 1.
• The exposed (polaroid) film should show details with a separation of:
SED 0.125 mm = (50,000 x 2.5 nm)
BSD 0.200 mm = (50,000 x 4.0 nm).
4.16.7 Hints and tips if High Resolution cannot be resolved

• Check magnetic stray fields.
• Check if the vibration level is not too high in: the room, the water, the
acoustics.
• If the TEM high resolution cannot be achieved, check the following table of
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4-56 50129 060427 CM 100/120 Mechanics
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Figures
max. allowable horizontal vibration levels at the manual goniometer stage. H

f (Hz) Horizontal (µm/s)
SED axis BSD axis
2.0 6 15
3.0 5 3
4.0 3 3
5.0 5 40
6.0 8 40
8.0 10 40
10.0 20 40
20.0 30 40
• Check if the lenses, water temperature, High Tension and Room

temperature are stable.
• Check that the CompuStage is not drifting and is properly tightened.
• Check that the CompuStage cover plate is properly aligned. See also
Section 2.2.9.
• Check if the screws of the column are properly tightened.
• Check if the base plate is free from the column (CM120 enough air in the
air dampers). (CM100 base plate correctly adjusted. See also Section
2.2.7.
• Check if the levelling system if present is OK (not switching too often,
possible air leak in the dampers).
• Check if the ODP height is properly adjusted and is not causing vibrations
(boiling oil).
• Check that the elbow 193, Fig. 2-6 is properly adjusted.
• When the sample is first bombarded by electrons, there will be some
disturbance caused by localized heating of the sample. The beam should
be left on a particular area for a short time to thermally stabilize the sample
before micrographs are taken.
4.16.8 Standard apertures mounted

The following apertures are factory fitted:
Position number
Aperture
Type
1 2 3 4
C2 10 µm (Pt) 150 µm (Pt) 200 µm (Pt) 300 µm (Pt)
CM100 Obj. 15 µm (Pt) 30 µm (Pt) 70 µm (Pt) 100 µm (Au)
SA Not standard

CM100
BioTWIN Obj. 20 µm (Au) 40 µm (Au) 70 µm (Au) 100 µm (Au)
SA Not standard
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CM 100/120 Mechanics 50129 060427 4-57
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Position number H
Aperture
Type
1 2 3 4
CM120 Obj. 10 µm (Pt) 20 µm (Pt) 40 µm (Pt) 100 µm (Au)
SA 10 µm (Pt) 40 µm (Pt) 200 µm (Pt) 800 µm (Pt)

C2 100 µm (Pt) 150 µm (Pt) 200 µm (Pt) 100 µm (Au)
CM120
BioTWIN Obj. 20 µm (Pt) 40 µm (Pt) 70 µm (Pt) 150 µm (Pt)
SA 10 µm (Pt) 40 µm (Pt) 200 µm (Pt) 800 µm (Pt)

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CM 100/120 Mechanics 50129 060427 5-1
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5 Dismantling and assembling the column H
5.1 General procedures when opening the column

The following general procedures are important and must therefore be carefully
read and understood prior to opening the column. They are described in the
following Sections:
5.1.1 X-Ray safety
5.1.2 Opening the column
5.2 Admitting air to the column
5.3 Draining water from the column
5.4 Location and replacement of indium seals
5.1.1 X-Ray safety
WARNING! After dismantling and assembly of the column it is

mandatory to check for X-Ray leakage. The X-Ray
leak may never exceed < 1 µSv/h at 10 cm
distance. Measurements must be made by
qualified personnel. As a measuring instrument
use the Victoreen 190 X-ray meter with detector
RP1 and the Basics of Radiation Protection
manual, order number 4822 870 10412, obtainable
from:
Service Electron Optics Help Desk
5651 GG Eindhoven
The Netherlands
Under no circumstances is it allowed to switch on
the HT when using vacuum test flanges.
Test conditions:
beam current used
X-ray leakage = x permissible X-ray leakage
max. beam current
20 µA 1 µSv = 0.2 µSv
X-Ray leak LaB6 x
100 µA
• Emission: Tungsten, 100 µA; LaB6, 30 µA;
• Select maximum high tension;
• Select a C2 aperture of 150 µm;
• Select spot size 1 and 8;
• Create the worst operating conditions to generate X-rays.
This can be done as follows:
– Obstruct the beam (focussed and non-focussed) to create horizontal
back-scattered electrons (and thus also X-rays) in the direction of the
suspected weak spot.
– Move the focussed beam to create vertical X-Rays directed towards
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the suspected weak spot (e.g. a slit in the projection chamber bottom).
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5-2 50129 060427 CM 100/120 Mechanics
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5.1.2 Opening the column H

The column can be opened at any of the following points depending on the
maintenance requirements (See Figure 801):
A- Between camera airlock and lower lens section;

B- Between lower lens section and specimen stage;
C- Between specimen stage and upper lens section;
D- Between upper lens section and emission chamber. This will break the
indium seal 10, Figure 805.
5.2 Admitting N2 to the column

W AR N I N G ! Ensure that the N2 pressure is set to 0.1 Bar.
Air can be admitted to the whole of the microscope, or to selected sections, by

selecting on the vacuum page the following softkeys:
• Air to gun chamber - Press “gun air” (not for CM100)
• Air to emission chamber - Press “col. air” *
AND column
• Air to projection chamber - Press “cam air”
• Air to emission chamber - Press vacuum off and then “all air” *
AND column
AND projection chamber
NOTE: * The “gun air” key cannot be activated after performing these steps.
NOTE: From version 10.0 onwards a “gun air” and “col. air” can only be done by
pressing “vac func” first. This frees the “gun air” and “col air” softkeys.
5.3 Draining water from the column

(Figure 815A)
5.3.1 Procedure
(for microscopes according to Figure 815B)
• Remove the cover at rear of microscope to gain access to water blow-off
device;
• Remove the compressed air fast coupling 6 from its normal position. This
process opens microswitch contacts S37 to switch off the microscope.
CAUTION! Check that the compressed air pressure is higher than the water
pressure.
• Connect fast coupling 6 into the blow-off position 8.

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• Now open, in turn, valves V24, V25, to drain the water from each branch
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Figures
separately. Open valves V24 and V25 and now blow off the two branches H
together;
– Air will now flow into the column water hoses to blow off the cooling
water. This will take a few seconds. When there is a large amount of air
leaving the drain outlet (together with the water still flowing through the
pumping system), replace the air hose coupling in its normal position.
• Close non-return valve V26;
– Close valves V24, V25
– Reinsert the fast coupling 6 in its original position
• Carefully remove the appropriate water hoses ensuring that remaining
water cannot drip into any part of the microscope;
• If it is required to keep the pumping system switched on (not applicable for
CM100), proceed as follows:
– Switch on the microscope
– Operate the lifting mechanism in order to interrupt the lens supply (via
S34, lenses interlock);
– Press the bake-out switch P/A13-S2.
5.3.2 Procedure
(for microscopes according to Figure 815C)
• Remove the cover at the rear of the microscope to gain access to the water
blow-off device;
• Close valve V22;
• Check that the compressed air pressure is higher than the water pressure;
• Remove the air-hose coupling 8 from its normal position. This process
opens microswitch S37 to switch off the microscope;
• Connect fast coupling 8 into blow-off position 14. Compressed air will now
flow into the column water-hoses to blow-off the remaining cooling water.
This will take a few seconds. When there is a large amount of air leaving
the drain outlet, together with the water still flowing through the pumping
system, replace the air hose coupling in its normal position.
• close valve V21;
• Carefully remove the appropriate water hoses ensuring that remaining
water cannot drip into any part of the microscope;
If it is required to keep the pumping system of the microscope switched on, the microscope may
be switched on after blowing off the water. The following additional steps have to be taken:
• Interrupt the lens supply by disconnecting S34 (gun-lift switch);
• Switch on the microscope.
CAUTION! Do not forget to open valves V21 and V22 again after the draining
procedure.
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5-4 50129 060427 CM 100/120 Mechanics
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5.4 Location and replacement of indium seals H
NOTE: Any broken seals must be removed and replaced by new ones.
5.4.1 Positions of indium seals

• 10, Figure 805; 0.7 mm diameter, 36 mm length approx., is situated
underneath the emission chamber between the small lining tube and the
top of the gun airlock assembly;
• 34, Figure 805, 0.5 mm diameter, 11.5 mm length approx., is situated
between the top of the upper lining tube and the bottom of the gun airlock
assembly;
• 24, Figure 807 (27, Figure 807A); 0.7 mm diameter, 36 mm length approx.,
is situated between the bottom of the upper lining tube and the upper
objective pole piece;
• 134, Figure 807 (45, Figure 807A); 0.7 mm diameter, 36 mm length
approx., is situated between the top of the lower lining tube and the lower
objective pole piece;
• In the gun airlock valve - Figure 805:
– item 38 diameter 1 mm; length 75 mm approx.
5.4.2 Replacing an indium seal

(Figure 818)
To help in replacing indium seals, an indium tool set is delivered (see item 5).
UPPER AND LOWER LOWER SEAL

OBJ. POLE PIECE GUN AIRLOCK
UPPER SEAL GUN AIRLOCK Ø 0.5 mm
Ø 0.7 mm LENGTH APPRX. 36 mm LENGTH APPRX. 11.5 mm
EM4766
Fig. 5-1 Indium tool set
5.4.2.1 Tool C
Used to prepare indium seals. Indium wire of the correct thickness should be
wound around the appropriate part of the tool and cut with a scalpel or razor
blade with the blade in line with the forming tool (see Figure 5-1).
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CM 100/120 Mechanics 50129 060427 5-5
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5.4.2.2 Tools A and B H

Used for easy removal of old indium seals and for positioning newly prepared
indium seals;
5.4.2.3 Tools D and E

Protection inserts which should be placed in the appropriate holes of the gun
airlock to prevent waste indium falling into the inner space of the airlock when
old indium seals are being removed.
NOTE: Item D has two diameters and can also be used on top of the membrane
assy. 11, Figure 805.
5.4.2.4 Tool F
A guide bush to prevent damage to the objective pole pieces when using tool
B.
To replace an indium seal proceed as follows:

• Remove all traces of the old seal with the appropriate tool 5A or 5B;
CAUTION! To remove the indium from the upper and lower objective pieces, use
also guide bush 5F.
Take care that no small indium particles fall into the gun airlock; use
tools 5D or 5E; Do not use any sharp tools that may cause damage to
the seat of a seal.
• Using tool 5C cut a piece of indium wire of the correct length and diameter;
• Clean the wire in an ultrasonic cleaner;
• Handle the cleaned wire with gloves - or with fingers well washed with
cyclohexane - and place the wire into its correct seating. Gently press into
position with the appropriate tool 5A or 5B.
5.5 Removal and assembly of the cable plug

(Figure 804)
CAUTION! Do not touch nuts 85 (covered with rubber hoods). See also
5.7 “Emission chamber: removal, assembly & alignment”
• Remove the safety shaft 29 by releasing Allen screw 27;

• Release the three screws 98;
• Remove the C-shaped ring 94 and lead ring 89;
• The cable plug 75 can now be pulled out.
• Now the insulator can be filled with clean and pre-dried Santovac 5 oil (20
ml);
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• The lead shield 83 can be removed as follows:

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– Shift the shield upwards; H

– Remove ring 77 and remove the two C-shaped rings 78;
– The lead shield can now be slid off the cable plug.
• Assembly is done in the reversed order.
5.6 Removal & assembly of the porcelain insulator

(Figure 804)
• First carry out the procedure described in the previous section;
• Let air into the gun chamber. See 5.2 “Admitting N2 to the column”.;
• Release the three screws 90 and lift the gun using handle 14 as if to
exchange a filament;
• The porcelain insulator can now be carefully removed from the emission
chamber;
CAUTION! Take care that the porcelain does not touch the emission chamber as
this may cause HT instabilities.
NOTE: Gradually tighten the three screws 90 by equal amounts in turn. Ensure
that they are fully tightened.
5.7 Emission chamber: removal, assembly & alignment

(Figure 804)
5.7.1 Removal and assembly
CAUTION! No parts inside the vacuum or emission chamber should be touched

with bare hands; always use clean nylon gloves.
• First carry out the procedures described in the previous two sections;
• Remove the plug from the gun tilt coils (DCB X1, X2) and free the cable.
Also release the plug to S33 and the safety earth connections;
• Release the 4 screws 200. Now the complete emission chamber can be
lifted from the column to be dismantled on a clean working table as follows:
a. Remove the lead protection elbow 226 by releasing the four screws
189;
b. Release the 3 screws 192 and take away the vacuum tube 193
between the emission chamber and the U.H.V. valve block;
c. Remove the gun tilt/gun shift coil by releasing screw 206;
d. Remove the 3 screws 184 and take away the lead ring;
Contents
e. Remove the three screws 179 and lift the emission chamber from its
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housing 195. H
Reassembly and remounting is done in the reversed order, but take the
following notes into account:
– First fix the emission chamber back on top of the membrane block.
NOTE: Don't forget to remove the old indium seal 10, Figure 805 and
replace it by a new one, 0.7 mm dia., length 36 mm approx. Use
tools 5B, C and D, Figure 818.
• Remount the vacuum connection 193 and fix it to the emission chamber.
• Slacken the three screws 215;
• Adjust screws 225 until the play between the block 4, Figure 821 and the
ring 209 is minimal. Lock this position with the nuts 217;
• Now tighten the screws 215 to fix the O-ring 210;
• Mount the lead shields 226, 186. Take care that once these shields are
fitted the play between them is a minimum.
5.7.2 Adjustment of upper column section with respect to

lower column section
(Figure 804)
Parallel adjustment
CAUTION! This is a one-time factory adjustment, therefore nuts 85 are sealed. If

necessary, proceed as follows:
• Split the column between the objective and condenser lenses, see
5.2 “Admitting N2 to the column” and 5.10 “Opening & closing the column
above the specimen stage to gain access to the specimen chamber”.
• Lay 3 spacers, 18 mm 70, Figure 818 (not delivered), on the outer rim of
the objective stage and lower the condenser section until it is just above
the spacers;
• Adjust the 3 nuts 85 such that the bottom of the condenser lens is level with
the 3 spacers within 0.1 mm. Secure with the top nut 85 and perform the
same test again.
NOTE: If the rotation alignment cannot be done within the end controls, proceed
as follows:
- Release the screws 58, Figure 806;
- Release the screws 90, Figure 804 and proceed as if to lift the gun;
- Gently rock the upper part of the column w.r.t. the goniometer
stage;
- Lower the gun lifting device again and release screw 30;
- Tighten screws 58, Figure 806. Fasten screws 90 then screw
30.
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5-8 50129 060427 CM 100/120 Mechanics
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5.8 Removing, dismantling & remounting of the gun H

airlock valve, gun centring coil or the x-ray diaphragm
(Figure 804)
CAUTION! Before the column is opened check that screws 90, Figure 804 are
tight.
• Admit air to the gun chamber and column, see 5.2 “Admitting N2 to the
column”;
• Place the gun lifting arm 14, Figure 804 in the hole one position higher to
locate the lifted part of the column;
• Remove the 4 Allen screws 200, Figure 804. By turning the lifting
mechanism clockwise, raise the emission chamber until it is well clear of
the lead block 1. Replace the gun lifting arm 14, Figure 804 and swing out
the column.
CAUTION! Check that the cables and hoses going to the emission chamber are
not obstructed.
• Remove the X-ray diaphragm 9;

• Remove the connectors from DCB 1, 2;
• Remove the gun centring coil by releasing the 3 screws 134, Figure 804;
• Remove the lead shielding 1;
• Disconnect the electrical plug from S7 and the compressed air hose 55,
Figure 804.
• Remove the complete membrane block from the column by removing the
four screws 13, Figure 805.
• To dismantle the valve assembly proceed as follows:
NOTE: All item numbers refer to Figure 805.
5.8.1 Dismantle the valve
5.8.1.1 Valve piston (not for CM100)

– Remove the two screws 69 and remove microswitch 70 with its bracket
67;
– Remove the two screws 66 and take off the cover plate and the
cylinder housing 64;
– Remove circlip 63 and remove cylinder piston 58 from the rod of the
bellow assembly 41.
5.8.1.2 Valve seating assembly (not for CM100)

– Remove the two screws 53, circlip 56, flange 47, washer 44, spring 43
and lead plate 40;
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CM 100/120 Mechanics 50129 060427 5-9
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– Pull out the bellows assembly 41 and the attached seating assembly H
from valve block 14;
– If necessary, the valve seating assembly can be dismantled after
removing circlip 26. Take care not to lose the four balls 20.
5.8.1.3 Membrane assemblies

– Remove the four screws 6.
– The two membrane assemblies 3, 4, 5, 8, 11 and 33 to 37 can be
removed.
– Remove circlip 3 or 37, resp. Note the positions of the dished washers
5 or 35.
NOTE: Considerable force is required to compress dished washers 5, 35 when

refitting circlips 3, 37.
– Carefully remove membrane 11 or 32.

• Reassembly of the valve assembly is carried out in the reversed order.
However, the following points should be observed:
a. All traces of old indium seals should be carefully removed and new
seals fitted:
• Seals 12 and 30 are1 mm dia.; approx. 135 mm long.
• Seal 38 is1 mm dia.; approx. 75 mm long.
• Seal 10 is 0.7 mm dia.; approx. 36 mm long.
• Seal 34 is 0.5 mm dia.; approx. 11.5 mm long.
b. Balls 20 should be lubricated with Molycote powder 003.
c. O-rings 46, 48, 58 should be lightly greased with FOMBLIN RT15.
d. The holes in the flanges 8, 33 must be pointing in the direction of the
valve axis, so that leak testing is possible after assembly.
Adjustment of the elbow
• Remove the lead shields 186, 226;
• Slacken the three screws 215;
• Adjust screws 225 until the play between the block 4, Figure 821 and the
ring 209 is minimal. Lock this position with the nuts 217;
• Now tighten the screws 215 to fix the O-ring 210;
• Mount the lead shields 226, 186. Take care that once these shields are
fitted the play between them is a minimum.
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5.9 Removing & dismantling of condenser & diffraction H

diaphragms
(Figure 807)
NOTE: The diffraction diaphragm is not present in the CM100.
The condenser and diffraction diaphragm mechanisms are similar to that of the
objective diaphragm mechanism. Therefore, references in the text following are
made to the exploded view of Figure 807 showing the objective diaphragm
mechanism in detail.
• Remove the diaphragm holder 16, Figure 806 (for condenser diaphragm)
or 89, Figure 810 (for the diffraction diaphragm);
• Unscrew the three screws 15, Figure 806 (for condenser diaphragm) or 79,
Figure 810 (for the diffraction diaphragm). Now turn the complete
diaphragm mechanism counter-clockwise without pulling it.
NOTE: Take care not to lose the lead shielding 28, Figure 806 (for condenser
diaphragm) or 8, Figure 810 (for diffraction diaphragm).
• Turn the coarse knob 59 fully counterclockwise.

• Turn back the side adjustment screw 88, taking care not to lose the dished
washers 89.
• Remove nut 50 and washer 51, take out the spring 52 and washer 53. Now
the tube assembly 65 can be taken out. The ball bearing 66 is fixed with
loctite on tube 65.
• Remove the grubscrew 69 and now unscrew the fine adjustment knob 64
from the coarse knob 59.
• Remove the locating pin 70 and remove the coarse knob 59 from the
spring assembly 56.
• Release the two screws 54 and take out the complete side movement
spring assembly 56.
CAUTION! DO NOT DISMANTLE THIS ASSEMBLY FURTHER.
• Remove grubscrew 76 and take out the plunger rod limiter 74.
Reassemble in the reversed order.
5.10 Opening & closing the column above the specimen

stage to gain access to the specimen chamber
(Figure 807)
CAUTION! Before the column is opened check that screws 90, 200 Figure 804
are tight, and enure that the SED has been removed (see Section
5.20.2 “Secondary electron detector”).
• Admit air to the column, see 5.2 “Admitting N2 to the column”.

• Release the 4 Allen screws 58, Figure 806.
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• Place the gun lifting arm 14, Figure 804 in the upper position. Turn the
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lifting mechanism clockwise and raise the column until the pole piece is H
well clear of the goniometer. Remove the gun lifting arm 14, Figure 804,
then swing out the column.
CAUTION! Check that the air/water hoses and cables to the column are not
obstructed. If the pneumatic hose to V7 is too short, press the “gun
air” softkey and release the hose.
• For closing the column, use the reversed procedure.
5.11 Removing & replacing the upper objective pole piece

& the fixed diaphragms in the upper lens section
(Figure 807)
5.11.1 The upper objective pole piece

• First open the column as described in the previous section.
• Remove the adjustable condenser diaphragm 16, Figure 806.
• Turn the three screws 57, Figure 806 completely in.
• Loosen the three screws 18 slightly (approx. 2 mm).
NOTE: This frees the indium in the pole piece from the vacuum lining tube.
• Remove O-ring 27 and unscrew fixing nut 26 using tool 6, Figure 818: pole
piece 25 can now be removed;
• If a back-scatter detector is present, the diaphragm assembly 23 can now
be removed from the pole piece 25 using tool 62, Figure 818
Remount in the reversed order. Do not forget diaphragms 22, and the indium
seal 24, dia 0.7 mm, length 36 mm approx. See also Sect. 5.4 “Location and
replacement of indium seals”.
NOTE: Before fixing the pole piece 25, mount tool 28, Figure 818 underneath
the cover 10, Figure 806. Slide pin 29 into the hole of the pole piece and
tighten the pole piece.
The pole piece is now aligned to accept the SED.
5.11.2 Diaphragms in the upper lining tube

(Figure 806)
• Push the grip and insert tool 4, Figure 818 as far as possible into the upper
lining tube 27. Release the grip and remove the lower fixed C2 diaphragm
30.
• Insert the tool 4A, Figure 818 as far as possible, turn it clockwise and pull
out the upper fixed C2 diaphragm 34.
• Push the grip and insert tool 4, Figure 818 as far as possible into the upper
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lining tube 27. Release the grip and remove the fixed C1 diaphragm 36. H
NOTE: Place the diaphragms in a clean closed glass container. Inspect them
and clean if necessary.
• To fit the diaphragms follow the reversed procedure and do not forget the
indium seal in the pole piece: dia. 0.7 mm 24, Figure 807, length 36 mm
approx. See also 5.4 “Location and replacement of indium seals”.
5.12 Dismantling & assembling the complete upper lens

section
(Figure 806)
• Open the column above the specimen stage (see 5.10 “Opening & closing
the column above the specimen stage to gain access to the specimen
chamber”).
NOTE: Do not forget to drain the water from the column (see 5.3 “Draining
water from the column”).
• Remove the adjustable condenser diaphragm 16.

• Screw the three screws 57 completely in.
Loosen the three allen screws 18, Figure 807 slightly (approx. 2 mm).
NOTE: This frees the indium in the pole piece from the vacuum lining tube.
• Remove O-ring 27, Figure 807 and unscrew the pole piece fixing nut 22,
Figure 807 using the tool 6, Figure 818. Take care that the diaphragm 22
does not drop.
• Remove the water hoses, water pillars and lens current plugs, MC-X1, X2,
X3.
Remove the alignment coil plugs X5 of DCB-3, 4, 5;
• Release the three screws 18, Figure 807 until the lens section rests on the
three screws 57.
• Release the three screws 57 while manually supporting the upper lens
section (about 5 kg).
CAUTION! When remounting the upper objective lens housing, great care must
be taken not to damage the fragile supports 42. These supports are
present in instruments delivered from Oct. 1990 onwards.
Further dismantling is achieved as follows:

– Remove the deflection coils 246 Figure 807 (screws 248, Figure 807).
– Remove the lens coil 19 Figure 807(screws 13, Figure 807).
CAUTION! Never release centring plate 15, Figure 807 as this is factory
aligned.
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• Unscrew the three screws 15. Now turn the complete diaphragm H
mechanism counterclockwise without pulling it.
NOTE: Take care not to lose the lead shielding 28.
• Remove the two screws 38 and plate 39. Now pull out the vacuum liner
tube 27 with its fixed diaphragms.
• To remove the C1/C2 lens assembly proceed as follows:
– Close the column and open it again between the emission chamber
and V7 (screws 200, Figure 804) - see also 5.8 “Removing,
dismantling & remounting of the gun airlock valve, gun centring coil or
the x-ray diaphragm”.
– Remove the lead shield 1, Figure 805.
– Now remove the four cheese-headed screws 13, Figure 805.
– Disconnect the electrical plug from S7 and the compressed air hose
55. Now the complete valve V7 can be removed. For dismantling of V7
see 5.8 “Removing, dismantling & remounting of the gun airlock valve,
gun centring coil or the x-ray diaphragm”.
• Remove the three locking plates 5. Screw the two knurled screws 7, Figure 818
into two of the four holes of pole piece 8 and remove the C1/C2 lens assembly.
CAUTION! When reassembling the upper column half, the lining tube must
always be fixed and centred first at the upper objective pole piece
with V7 not yet mounted, otherwise the lining tube may be seriously
damaged.
Dismantle the lens assembly only if absolutely necessary. Proceed as follows:
5.12.1 Dismantle the lens
5.12.1.1 Removing condenser 1 coil

• Mark the position of the pole piece 8 w.r.t. mantle 12.
• Remove the four screws 75 and lift the pole piece 8 together with C1 lens
coil 9.
Take care not to damage the pole piece 17.
• If C1 lens coil 9 has to be removed, unscrew the three screws 6; coil 9 can
then be removed from pole piece 8.
5.12.1.2 Remounting condenser 1 coil

When remounting the coil 9, care should be taken that the coil does not make
any contact either with the housing 12 or with the pole piece 17.
Proceed as follows:
• Place the coil 9 in the housing 12; note the position of water and electrical
connections.
• Introduce a slip of paper between the coil and the pole piece and another
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between the coil and the housing. H

• Place plate 8 in position on top of the housing 12.
• Refit the three screws 6 but do not tighten.
• Refit and tighten the four screws 75.
• Now tighten firmly the three screws 6.
• Remove the four screws 75 again and lift pole piece 8 with the coil.
• Remove the spacers.
• Check that the waterpipes fit without touching the mantle.
• Refit the pole piece 8 with coil and screw it firmly into position.
5.12.1.3 Removing condenser 2 coil

• Remove the four screws 75 and take out the pole piece 8 with C1 coil 9
attached.
• Remove the C2 coil 21 after unscrewing the three screws 60.
If necessary the pole piece assembly 17 may be removed after unscrewing the
four screws 20 and ring 18.
CAUTION! This pole piece assembly 17 is precisely factory aligned, do not

dismantle, drop, or mishandle in any way.
5.12.1.4 Remounting condenser 2 coil

• Refit the pole piece assembly in position using the ring 18 and the four
screws 20. The screws should be equally firmly tightened.
• Place the coil 21 in the housing 12 note the position of the water hoses and
the electrical connections.
• Make sure that the coil is not making contact with the housing or the pole
piece by introducing paper spacers.
• Refit and firmly tighten the three screws 60 and remove the spacers.
• Check that the waterpipes fit without touching the mantle.
• Refit the pole piece 8 with the coil and screw it firmly into position.
• Further assembly is carried out in the reverse order.
NOTE: Ensure that ring 13 is clean.
• Equally tighten the three locking plates 5.

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5.13 Removing & remounting the complete goniometer H

stage
(Figure 807)
NOTE: Check that screws 90, 200, Figure 804, and 58 Figure 806 are fully
tightened.
• Admit air to the column, see 5.2 “Admitting N2 to the column”;

• Remove clamp 33, that fixes the ion getter pump to the objective vacuum
flange.
• Remove vacuum seal 35.
• Free the specimen translation rods (unscrew grubscrew 203).
• Free the cable VDB-X12 and the cable between right-hand and left-hand
ears, X1.
• Release the screws 78, Figure 810.
CAUTION! Remove the SED before splitting the column (For TWIN only).
• Using the lifting mechanism lift the goniometer stage until it is just free of
the pole piece (about 15 mm).
obstructed.
If the pneumatic hose to V7 is too short press “gun air” softkey and release the
hose.
• Lay three spacers (70, Figure 818, not delivered) on the outer mantle and
lower the column again.
• Release screws 58, Figure 806, lift the upper lens section and swing it out;
• The complete goniometer stage can now be removed (weight approx. 25
kg) and if necessary dismantled on a clean workbench.
NOTE: Take care not to damage the pole piece.
To remount the complete goniometer stage proceed as follows:

• First lay three spacers 70, Figure 818 (not delivered) on the outer mantle:
– Mount the complete stage on the spacers.
– Lower the column and fix the goniometer stage to the upper column
section using screws 58, Figure 806. See also5.11.1 “The upper
objective pole piece”.
– Lift the column again, remove the spacers, lower the column and fix the
goniometer to the lower lens section with screw 78, Figure 810. See
also 5.23.1 “The lower objective pole piece”.
• Further assembly is carried out in the reversed order.
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5.13 CS Removing & remounting the complete goniometer H

stage
(Figure 807B)
• Admit air to the column (see 5.2 “Admitting N2 to the column”);
• Remove clamp 211, Figure 807B that fixes the ion getter pump to the
objective vacuum flange;
• Remove vacuum seal 212;
• Free the three cables from the GDB X7, X8, X9.
CAUTION! Remove the SED before splitting the column (For TWIN only).
• Release the screws 58, Figure 806; lift the upper lens section and swing it
out;
NOTE: Check that the air/water hoses and cables to the column are not
obstructed.
• Lay three spacers (70 Figure 818, not delivered) on the outer mantle 100,
Figure 810 and lower the column again.
• Release screws 58, Figure 806, lift the upper lens section and swing it out;
• The complete goniometer stage can now be removed (weight approx. 25
kg) and if necessary dismantled on a clean workbench.
NOTE: Take care not to damage the pole piece.
To remount the complete goniometer stage proceed as follows:

• First lay three spacers 70, Figure 806, on the outer mantle 100, Figure 810:
– Mount the complete stage on the spacers.
– Lower the column and fix the goniometer stage to the upper column
section using screws 58, Figure 806. See also 5.11.1 “The upper
objective pole piece”
– Lift the column again, remove the spacers, lower the column and fix the
goniometer to the lower lens section with screw 78, Figure 810. See
also 5.23.1 “The lower objective pole piece”
• Further assembly is carried out in the reversed order.
5.14 CS removal & assembly of the compustage

Figure 807B
CAUTION! The X and Y levers must never be moved manually with their driving
rods 56, 300 Figure 808A fixed. This is only allowed with the driving
rods released.
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5.14.1 CS Removal of the CompuStage H

Figure 808A
• Release the three screws 10, Figure 808C and remove the front cover 9,
Figure 808C from the CompuStage;
• Set the Z-movement to maximum negative;
• Tilt the goniometer to plus 80° (clockwise);
• Gently remove cover 7, Figure 808C, taking care not to damage the wiring;
NOTE: If the motors can not be moved, proceed as follows:

Release screw 336 and just release the tilt axis driving mechanism. This
must be done via the hole in cover 7, Figure 808C. Now manually tilt to
80°. Gently remove cover 7, Figure 808C, taking care not to damage
the wiring;
• Remove the small front plate 138 by releasing the 4 screws 137.
NOTE: Take care not to lose the actual current holder identification slot 91, 92 or
93, Figure 808A.
• Remove X4 from the SIB2 board;

• Set the X and Y movements to mid-position;
NOTE: If this is not possible proceed as follows:

Release the driving rods for the X and (Y) movements. This can best
done by loosening grubscrews 65 (294) then loosening the driving rod
fixing screws 67 (297) by exactly two turns. When retightening the fixing
screws, screw them in by exactly two turns, or apply a force of 17 N,
using a torque meter. Retighten grubscrews 65 (294).
• Select the Vacuum page and press the softkey “Column Air”.
NOTE: From version 10.0 onwards a “gun air” and “col air” can only be done by
The pressure of the Nitrogen when letting air into the column should
never be higher than 0.1 bar overpressure.
CAUTION! If service work has to be done on the CompuStage, either remove the
cables from the GDB or disable the GNCB via the CompuStage
control page, to prevent unwanted movement of the motor.
• Remove the rear cover 113. Figure 808B, using screws 112, Figure 807B;
• Release the screws 44, Figure 807B and remove the bracket 118.
Figure 807B;
• Mount the special tool 94, CompuStage tools (Figure 818), to fix the X, Y
and Z movements. The four screws 94a fix the tool to the X support 35, and
the 4 screws 94b are used to clamp the total assembly to the Z bracket
244;
• Release the Allen screw 126, Figure 807B of the upper wedge 40,
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Figure 807B two turns; H
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• Release the Allen screw 350 several turns (releasing the pressure on the H
spring 15). Release screw 14 two turns; Figure 808A
• Remove the cable guide 61, Figure 807B from its support 49, Figure 807B;
• Remove the 4 screws 115, Figure 807B fixing the CompuStage. Note the
position of the washers 116;
• Carefully remove the complete Computage and mount it on the support
delivered 96, CompuStage tools (Figure 818). Fix the CompuStage with the
screws 115. In order to prevent damage to the specially treated surface on
the CompuStage an extra synthetic ring must be added between the
screws 96A and the CompuStage.
5.14.2 CS Removal of the hemispherical bearing scale

Figure 807B
• Remove the complete CompuStage (see also 5.14.1 “CS Removal of the
CompuStage”);
• Remove the fixing screw 121 using a crown key (28/32) or 47, Figure 818,
delivered with the goniometer tool kit;
• Using special tool 47, General tools (Figure 818) remove the hemispherical
bearing scale;
• Now the outer O-Rings 131, 133 can be checked, cleaned and if necessary
replaced.
NOTE: The inner O-Rings 119, 120, 125 in the hemispherical bearing scale can
now best be removed and greased, as otherwise the hemispherical
bearing scale can be easily contaminated.
O-Ring 119, Figure 807B has been replaced with a special O-Ring that
no longer has the manufacturing marks on the sealing surface. When
replacing one of the O-Rings 119, 120 or 125, O-Ring kit 5322 695
15975 can best be ordered. This kit contains specially selected O-Rings
119, 120 and 125.
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5.15 CS Dismantling & assembly of the compustage H
5.15.1 CS Dismantling the airlock

Figure 808B
• Remove the lead segments 42, 141 by releasing the two screws 41, 142,
Figure 807B.
• Remove the four screws 225 and gently pull the hemispherical bearing 150
away from the floating tube 176;
• Remove the airlock assembly 159 from the conducting bush 165;
• Carefully withdraw the sliding bush 156 from the airlock assembly 159;
NOTE: When assembling, slide the bush 156 over the airlock assembly,
ensuring that pin 158 slides in the groove;
Mount the O-Ring carrier 155 and airlock O-Ring 154 on top of the
airlock assembly 159.
Check that the airlock ball 157 can rotate smoothly over 90 degrees
when closing the airlock and that the O-Ring is just lifted up when the
airlock is fully closed.
If this is not correct, the nut 160 must be readjusted until the O-Ring 154
is just lifted up, but at the same time the pins of the airlock ball 158 can
move freely over the full range in the groove of sliding bush 156.
Lightly grease the airlock O-Ring 154, prior to assembling.
Completely tighten the four screws 225 when the airlock is fully open.
5.15.2 CS Removal of the X measuring system

Figure 808A
• Remove the counterweight 2 using the screws 1;
• Remove the connector GMBX-X1 from the X measuring system and take
out the two ground wires (red and black). Now the pole hit protection is no
longer active;
• Release screw 65 and remove EPD connector X1 on SIB1;
• Remove the two screws 117, 120 and take out the complete measuring
system 118 to 128;
• For further dismantling, remove the screws 119 and remove the complete X
support bracket.
NOTE: The decoding rod 4, Figure 5-2 of the measuring system must move
freely in its support. After moving the rod it must return smoothly.
Potentiometer 9, Figure 5-2, on the measuring system is factory adjusted
and should not be touched.
• Led 16, Figure 5-2 can be replaced but care must be taken that only the top
screws 15, Figure 5-2 are removed.
CAUTION! Screws 5, Figure 5-2, should never be removed as they are factory
aligned and there is no field alignment procedure.
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• Carefully unscrew measuring tip 4, Figure 5-2, from the ruler axle and shift H
out the ruler axle so that it can be cleaned.
15 16
4
5
14
6
7
11
8
10
9
EM6587
57581
Fig. 5-2 Compustage measuring system
5.15.3 CS Removal of the Y measuring system

Figure 808A
• Remove the connector GMB2-X1 from the Y measuring system;
• Remove the screws 179 and take out the complete measuring system 177,
to 187;
• For further dismantling, remove the screws 177 and remove the complete
Y-support 178;
NOTE: The decoding rod 4, Figure 5-2 of the measuring system must move
freely in its support. After moving the rod it must return smoothly.
The potentiometer 9, Figure 5-2 on the measuring system is a factory
adjustment and should not be touched.
Led 16, Figure 5-2 can be replaced but care must be taken that only the
top screws 15, Figure 5-2 are removed.
CAUTION! The screws 14, Figure 5-2 should never be removed as they are
factory aligned and there is no field alignment procedure.
Carefully unscrew measuring tip 4, Figure 5-2 from the ruler axis and shift out
the ruler axis so that it can be cleaned.
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5.15.4 CS Removal of the X motor assembly H

Figure 808A
• Disconnect the plug from the X-motor. For the first series unsolder the
wires from the X motor. Note the plus (white) and minus sides.
NOTE: If the motor is defective, it is advised to remove the motor only and to
leave the gearwheel reduction in position. Otherwise, adjustment of the
motor worm and the gearwheel of the donator must be remade.
• Unscrew the motor 68 from its reduction gearbox 69;

• Release grubscrew 64. Keep the X lever 28 manually in position and
release the clamping screw 67 exactly two turns. Gently release the X
lever. Now the X driving rod can be moved carefully.
CAUTION! Do not attempt to manually move the driving rod 56 when it is still
fixed, as otherwise the rod 56 or its clamp 63 will be damaged.
NOTE: Turn the pressure screw 67 exactly two turns again when tightening or
apply a force of 17 N using a torque meter. Fix the grubscrew 65.
• Remove the X EPD from connector SIB1-X1;

• Remove the two screws 66 and remove the complete motor unit.
NOTE: Do not attempt to open the donator as it needs special factory

adjustment.
The adjustments of the motors to their worm-wheels is described in Section

4.14.2CS.
5.15.5 CS Removal of the Y motor assembly

Figure 808A
• Remove the screws 285 and remove bracket 286;
• Disconnect the plug from the Y-motor. For the first series unsolder the
wires from the Y-motor. Note the plus (green) and minus sides.
NOTE: If the motor is defective it is advised to remove the motor only and to
leave the gearwheel reduction in position. Otherwise adjustment of the
motor worm and the gearwheel of the donator must be remade.
• Unscrew the motor 304 from its reduction 305;

• Release the grubscrew 294 and release the clamping screw 297 exactly
two turns: now the Y- driving rod 300 can be moved carefully.
CAUTION! Do not attempt to move the driving rod 300 by hand while it is still
fixed, as otherwise the rod 300 or its clamp 296 will be damaged.
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NOTE: Turn the pressure screw 297 exactly two turns again when tightening or H
apply a force of 17 N using a torque meter. Fix the grubscrew 294.
• Remove the Y EPD connector SIB1-X2

• Remove the three screws 287, 289 and remove the complete motor unit.
NOTE: Do not attempt to open the donator as it needs special factory

adjustment.
The adjustments of the motors to their worm-wheels is described in
Section 4.14.2CS.
5.15.6 CS Removal and assembly of the Z motor assembly

Figure 808A
NOTE: This assembly can best be removed and mounted when the goniometer
is still attached to the stage. If this is not the case, and the Z motor must
be dismantled with the X and Y motors still present, take care not to
damage the balls 32.
Do not turn the screw ring on the decoder, and ensure that the dot on the
ring is always opposite to the double dot on the housing.
From January 1995 the CompuStages are delivered with the holder
height adjustment bracket 279 in the heavy holder position.
• Remove the two springs 239;

• Disconnect the plug from the Z motor encoder;
• Disconnect the plug from the Z-motor. For the first series unsolder the
wires from the Z-motor. Note the plus (grey) and minus sides;
• Release screw 267: now the complete motor 276 can be removed;
• Remove the four screws 274;
NOTE: The screws M4 x 16 must be remounted in the rear holes so that they do
not touch the gearwheel 259.
• Release the grubscrew 275 to remove the gearwheel 278 from the motor
276;
• Release the two springs 239;
• Unscrew the four screws 277 and remove the complete Z-motor assembly
241;
NOTE: Be careful to manually support the floating rod assembly as at this point
it is no longer supported.
• Remove the SIB1 board using screws 272, 273. Take care not to lose the
spacers 266, 269;
• Remove the SIB2 board using screws 248, 249. Take care not to lose the
spacers 246, 250;
• Remove the bracket 244 using the four screws 245, 251, 265;
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• If desired, the spring adjustment bracket 279 can now be removed. H

Assembly is done in the reversed order. However, to adjust the gearwheels
proceed as follows:
• Hand-tighten the four screws 274;
• Slide the motor fully into position in its clamp, then pull back slightly so that
it does not butt against its stop;
• Note the difference in height between the upper surfaces of gearwheels
278 and 259;
• The height of gearwheel 278 must now be adjusted on the motor shaft so
that gearwheels 278 and 259 are at the same height when the motor is
remounted in the position just mentioned.
• Fix the motor using screw 267;
• Temporarily lock gearwheel 278 in place using, e.g., a screwdriver, and
adjust plate 264 until gearwheels 278 and 259 have minimum play and still
move smoothly. Fully tighten screws 274.
5.15.7 CS Removal of the Z lever

Figure 808A
• Remove the complete Z motor assembly. See also 5.15.6 “CS Removal
and assembly of the Z motor assembly”;
• Take away the two anti-backlash springs 96;
• Release the four grubscrews 230;
• Remove the Allen screws 228, 236 and take out the pivots 229, 235;
• The Z-lever can now be removed;
NOTE: The screws 228, 236 must be tightened until the play of the Z-lever is
such that the lever just does not drop under its own weight.
5.15.8 CS Removal and assembly of the floating rod assembly

Figure 808A
NOTE: The floating rod can only be removed when the goniometer is removed
from the column. Further it is assumed that the X, Y, driving axles are
completely removed (see also Sections 5.15.4 “CS Removal of the X
motor assembly”. to 5.15.5 “CS Removal of the Y motor
assembly”).
• Remove (if mounted) the fixing tool 94, CompuStage tools (Figure 818)
from the floating rod assembly;
• Remove the braided (Litz) wires using the four screws 168;
NOTE: When assembling, the braided wires must be free from ground (2V) as
otherwise the pole hit protection is always active.
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• Remove the airlock obstruction stop 314; H

NOTE: For the adjustment of the stop see also 4.14.3 “CS Adjustment of the
airlock stop”.
When assembling, take care that the obstruction stop 314 is free of
ground as otherwise the pole hit protection does not work properly;
• Remove the screws 50 and remove the airlock EPD from connector SIB2-
X2, take care not to damage the spring 47;
• Now carefully remove the complete floating assembly;
5.15.9 CS Further dismantling & assembly of the floating rod

assembly
NOTE: It is assumed that all steps of Section 5.15.8CS have been carried out.
• Remove the screws 50 and remove the EPD 48. If still connected remove it
from SIB2-X2;
• Remove the Y axis driving rod 300, this can best be done as follows:
– Pull the Y driving rod (with teflon ring to isolate it from ground) away
from its bearing position and tilt it 90 degrees to release the spring
pressure;
– Remove the two springs 303: the two pins 86, 88 will now fall out;
NOTE: When assembling, first insert the springs 303 in their recesses, then
insert the pins 86, 88 in the holes. Ensure that the cut out edge of the
EPD actuator 302 is as indicated in the exploded view (Figure 808A).
• If not yet done, remove the X measuring system guiding plate 115 with
screws 116;
• Remove the X axis driving rod 56, this can best be done as follows:
– Pull the X axis driving rod away from its bearing position and tilt it 90
degrees to release the spring pressure;
– Remove the two springs 57, the two pins 40 will now fall out.
NOTE: When assembling, first insert the springs 57 in the recesses, then insert
the pins 40.
• Remove the springs 197, 214, and remove the protection clip 196, 210.
Carefully remove the two pressure pins 195, 215;
NOTE: When assembling take care that the pins are clean, not damaged and
that they fit correctly in their mating conical slots as shown below.
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EM6577 (detail)
Fig. 5-3 Detail of mating conical slots
• Remove spring 204;

• Take out circlips 100 and remove pin 104;
• Remove the screws 45, 76 and remove the X motor support 35 together
with its X lever 28.
NOTE: For dismantling and assembly of the X-motor support, see Section
5.15.10 “CS Dismantling & assembly of X motor support”.
• Release the spring supports 198, 209, as otherwise the inner floating tube
194 can not be removed;
• Remove the four screws 166 and take out the C-shaped isolation plates
167. Gently bend the braided wires away and remove plates 170;
• Carefully slide tube 200 away from the inner floating tube.
NOTE: The tube must slide out in parallel with its outer mantle as otherwise the
phosphor bronze bearing assembly 190 and the small bearings 207, 218
may be damaged.
• Check that all the bearings turn smoothly;

• Remove screw 220. This screw holds the braided copper wire 175 (for
thermal stability);
CAUTION! Prior to removing the bellow, a marker line must be made (if not yet
factory done).
• Insert a small screwdriver between the rim of the inner floating tube 194
and the outer mantle. When just open, gently pull the floating inner tube
194 out of its mantle 176;
NOTE: When assembling take care that the angle between the two marker lines
is as accurate as possible. The final check for the accuracy of the
adjustment of the inner floating tube 194 and its mantle 176 is done after
mounting the tube 200. The two spring supports 198, 209 must then fit in
the middle of their recesses in tube 200, as shown below.
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EM6580 (detail)
Fig. 5-4 Detail of spring supports in their recesses
• To remove the pressure lever 77, proceed as follows:

– Push the pins 79, 87 out;
– Remove the pressure lever and take care not to lose the springs 84;
– Push out pin 74 and remove the bearing 75.
• To remove the V groove holder support bearing proceed as follows:
– Remove the nut 99 and release the grubscrews 85, 89 several turns.
CAUTION! PUSH OUT the eccentric screw 78 and eccentric bush 98. Now the
V-shaped bearing will come out.
• Remove the four screws 106, 114 and remove the bearing supports 107.
CAUTION! The V-shaped bearing needs critical adjustment after dismantling,

see also Section 4.14.1CS.
5.15.10 CS Dismantling & assembly of X motor support

Figure 808A
• Release the four adjustment (grub)screws 36, 39 several turns. Now the
bushes 30, 44 can be shifted out via the recess at the inner side.
NOTE: Take care not to lose spring 38 and balls 34, 37.
When assembling ensure that the marker lines of bushes 30, 44 and the
X motor support 35 correspond.
- Set lever 28 in the middle of the recess in the X support 35
(accuracy within 0.1 mm);
- First secure the bush 30 using the grubscrews 36, secondly
secure the long bush 44 using the grubscrews 39.
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CM 100/120 Mechanics 50129 060427 5-27
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5.15.11 CS Removal of the tilt motor assembly H

Figure 808A
CAUTION! Do not turn the screw ring on the decoder and ensure that the dot on
the ring is always opposite to the double dot on the housing.
• Remove the connector TSI-X2 of the tilt motor EPD switch;

• Release the fixing screw 336 of the tilt motor and manually tilt to about +90
degrees;
• Turn the tilt axis driving mechanism towards the Z motor position to remove
the complete mechanism;
NOTE: When assembling, take care that the tilt assembly is mounted rigidly
against its recess, so that the tilt axis assembly does not move during tilt.
• To remove the motor proceed as follows:

– Remove the two grubscrews 329: now the motor can be separated
from the worm wheel;
– Unscrew the three screws 320 and take out adapter bush 319;
– Release the two grubscrews 324 and take out the coupling 325.
• For further dismantling of the worm wheel assembly proceed as follows:
– Unscrew the fixing nut 345 and push out the complete worm wheel
339;
– Now both bearings 344 and 338 can be taken out and replaced if
necessary.
NOTE: When assembling, take care that the shoulders of the worm wheel axle
339 butt up against the inside surfaces of the bearings 338, 344.
The adjustment of the tilt motor drive is described in Section 4.14.10CS.
5.15.12 CS Removal of the pressure bearing

Figure 808A
NOTE: The pressure bearing can only be removed when the goniometer is
removed from the column. Further it is assumed that all three goniometer
driving axes X, Y, Z are completely removed and that the floating rod has
been removed. See also Sections 5.15.2CS to 5.15.8CS.
• Remove screws 4 and remove the cableform 6 with the two tyraps 5;
• Remove the three screws 3 and take out the three spacers 8;
• Remove the three screws 306 and take out the C-shaped gearwheel 309;
• Remove the two screws 134 and take out the bracket 136;
• Remove the six screws 20 and take out pressure plate 19;
NOTE: When assembling fix the screws 20 evenly.

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• If not yet done, remove the alpha EPD connector from the TSI board; H
• Heat the housing 16 using heating lamps. If necessary also cool down
bearing 18 using liquid nitrogen. Now the X, Y, Z support 24 together with
pressure bearings 18 can be removed;
• Remove pressure ring 17 using a crown key 59/62 mm (not supplied)
• Heat the pressure bearings 18 using heating lamps. If necessary also cool
down the housing 24 using liquid nitrogen. Now the pressure bearings 18
can be removed from the X, Y, Z support 24;
NOTE: Using a marker pen, mark the back-to-back sides of the pressure
bearing 18.
5.15.13 CS Dismantling & assembly of the joypad

Figure 808D
• Unscrew the joypad Z axis ball 6;
• Remove the three screws 45;
• Remove the cover 7;
Joystick controller 15:
• Remove the four screws 10 and take out the complete controller unit;
• Remove the four screws 9 and take out the fixing plate;
• Release the ball 4 while holding the axle between pliers;
NOTE: When releasing the ball take care not to lose the two spacers 5.
Z axis potentiometer 46:

• Remove the two grubscrews 37 and release nut 40;
• Now take out the potentiometer 46;
NOTE: When remounting the potentiometer ensure that the potentiometer is in

its Ohmic mid-position (5 kΩ for the end positions w.r.t. the wiper). See
also Electronics Manual Volume 3, Section 3.28.5.
• To remove the driving levers proceed as follows:

– Remove the grubscrew 24;
– Remove the circlip 29 and push out shaft 30;
– Release the two springs 26 and take out the complete lever assembly;
– Remove the circlips 17, 34 and remove lever 35.
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5.15 Dismantling & assembly of the right-hand ear H

(Figure 808)
5.15.1 Dismantling procedure
NOTE: To remove the right-hand ear from the goniometer, see 5.14.1 “CS
Removal of the CompuStage”.
• Set the Y specimen translation control to mid-position.

• The floating rod 29, should first be fixed with respect to the housing 42
using service tools 44 and 44b, Figure 818.
5.15.1.1 Dismantling the specimen airlock

• Unscrew nut 37 using service tool 45, Figure 818. The airlock can now be
completely dismantled according to Figure 808.
CAUTION! To prevent damage to the delicate internal mechanism of the

goniometer, it is essential when loosening nut 37 that floating rod 29
does not rotate. Use of special tool 44 is therefore recommended.
• Screw 25 can be removed by applying sufficient force to the airlock

conducting bush, 24, to pull it over the dimple (which is factory made to
retain screw 25).
NOTE: To assemble the specimen airlock, see Sect. 5.15.2 “CS Removal of
the X measuring system”.
5.15.1.2 Further dismantling of the right-hand ear

• Remove cover 130 by releasing 2 screws 134;
• Unscrew the spring retaining screw 117 of the height adjustment, take care
that spring 116 does not jump out;
• Adjust the height thumbwheel 145 such that the pushing lever 139 no
longer pushes plate 126;
• Release microswitch 120. Take care not to lose the pressure rod 119;
• Carefully release locking ring 129 with service tool 42, Figure 818 and take
out the trapezium-shaped plate 126. Make sure that ball 36 does not drop:
this can be done by sticking a piece of tape over lever 35;
• Release the screws 96, 100 and remove the complete specimen motor
drive.
• Remove the holding plate 114 by unscrewing three screws 118 and 6
screws 135;
• Remove the complete specimen translation rod 166 with gearwheel 156 by
releasing the two screws 159;
• Unscrew the four screws 216 and remove the housing 109;
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• Remove the two springs 63 and take out gearwheel 110. H
NOTE: The complete floating rod airlock assembly can now be removed from
the tilt mechanism together with the service tool 44,Figure 818.
Take care that locking pin 31 passes through the slot.
• The pushing and pulling lever 59, 195 can be removed after releasing
locking screws 65-190 and unscrewing the pivots 70, 196;
• If necessary the ball bearing 66 can be pushed from the housing with an
Allen key through the central hole;
• Release the three springs 208 threaded bush 50 and threaded ring 47;
• Remove the screws 199. Pull out bush 198. Now release the crown nut 205
and remove the special pressure ball bearing 204.
CAUTION! Note the position of both bearing halves with respect to each other as
it is a back-to-back type of bearing.
5.15.2 Assembly procedure
5.15.2.1 Assembling the specimen airlock

• Before assembly, thoroughly clean the airlock, 16 to 27, in an ultrasonic
cleaner and lightly grease O-ring 15 with Fomblin RT15;
• Slide the airlock conducting bush 24 on the airlock housing 20, ensuring
that conducting pin 19 slides through the groove of the airlock conducting
bush 24;
• Adjust nut 25 with service tool 43, Figure 818, such that when closing the
assembled airlock the airlock ball 17 rotates smoothly over 90° and in its first
(closing) position just touches the O-ring 15, but does not touch the brass ring 16.
• Take care that when the airlock is closed the grooves in 20 and 27 are
aligned. Tighten nut 37 firmly on the hemispherical ball using service tools
44, 44b, 45, Figure 818;
• The assembly of the complete specimen airlock in the right-hand ear is
described in Sect. 5.15.2.b.
NOTE: Take care not to damage pin 19, or the groove in the airlock conducting
bush 24.Punch dimple on the airlock conducting bush 24 such that the
screw 25 is kept in place.
5.15.2.2 Further assembly of the right-hand ear

• Clean pressure ball bearing 204, mount back-to-back, then shift as far as
possible on bush 198;
• Firmly fix crown nut 205, mount ring 200 and fix it equally with screws 199;
• Clean ring 46 thoroughly and slightly grease the part that is in contact with
threaded ring 47 with molycote and refit it;
• If necessary thoroughly clean the threaded ring 47 and threaded bush 50
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and apply an oil with a viscosity that ensures minimum play between the H
threads but allows them to run smoothly,
• If necessary clean housing 42 thoroughly and apply a grease with a
viscosity such that the play is a minimum between the housing 42 and bush
50 but allows smooth upward and downward movement,
• Mount the threaded ring 47 with threaded bush 50 and check that key 55
fits without play in the keyway. If not, the key can be splayed out such that
it fits with no play. Fasten the three springs 208;
• Mount the levers 59 and 195 such that when the three holes on the bush
198 form an isosceles triangle with the APEX pointing downwards, the
pulling or contra lever is at the left-hand side and the pushing lever is at the
right-hand side. See Figure 5-5.
Fig. 5-5 Position of levers and floating tube in right-hand ear
• Adjust the pivots 70-196 until the levers 59 and 195 are free of play and
lock them with the locking screws 65-190;
• Insert the airlock assembly in the right-hand-ear. Ensure that pin 31 passes
through the slot, and that after fitting it is in the direction of the pulling or
contra lever 195. Make sure that the whole airlock assembly is under
spring pressure. Fix the airlock assembly with respect to housing 42, using
service tool 44, 44b, Figure 818;
• Mount the ball 36 (2.5 mm dia.) behind lever 35;
• If necessary clean the gear ring 110 with, e.g. a brush (dirt would result in
vibrations during tilting);
Position the gear ring such that the length of spring 63 when mounted is
equal, and check that the holes in the holding plate 114 are in line with the
3 holes in the rotating part and the 6 holes in the gear ring;
NOTE: Take care that the bearing shoes 57, 61 are correctly positioned. Secure
them by turning threaded ring 47 so that the threaded bush 50 is moved
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outwards until it holds the pads.

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CM 100/120 Mechanics 50129 060427 5-31

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• Mount the housing 109 and fix it with four screws 216; H
• Fit the holding plate 114 with the 9 screws 3x118 + 6x135;
• Mount the locking plate 126 and tighten the crown nut 129 with service tool
42, Figure 818. Check that the fixing tools 44, 44b, Figure 818 keep the
floating rod in position. See Caution! of Sect. 5.15.1 “CS Dismantling the
airlock”.a;
• Remount the spring 116 and screw 117 and set the height adjustment to
mid-position;
• Mount pressure rod 119 to operate microswitch 120. Fix and adjust
microswitch 120 and check that it is operated when the holder is
introduced;
• Fit the specimen translation movement in such a way that the gearwheel
156 smoothly engages the threaded ring 47 with minimum play.
CAUTION! As long as the special tool 44 Figure 818 is present the right-hand
ear movement is blocked
The slip coupling 167, 168 should be without grease and should be
adjusted such that there is no play and that the coupling only slips in the
end positions;
• Refit the tilt motor drive 175-186 and adjust the eccentric bushes 97-104
until both gearwheels match. At the end stops the gearwheel should
automatically be lifted to prevent the cable from becoming twisted;
• Now the complete R.H. ear can be mounted on the stage. But first check
that bearing shell 5 and hemispherical bearing 14 are not scratched and
are absolutely clean, that the shell 5 is properly tightened in the stage with
locking nut 6, and that both O-rings 8, 9 are clean and lightly greased with
Fomblin RT15. See also 5.14.2 “CS Removal of the hemispherical bearing
scale”.
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CM 100/120 Mechanics 50129 060427 5-33
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5.15.3 Adjustments H
5.15.3.1 Goniometer height adjustment (not for CM100)

• Select alignment page;
• Select service calibrate page;
• Follow the goniometer height procedure;
In step 006, “Adjust goniometer height” means using the wedges 234,
Figure 807 to focus the specimen.
The following points must be observed:

For the 7-position diaphragm mechanism, the TWIN current
must be set to 1720 mA for TWIN and 1630 mA for SuperTWIN.
The BioTWIN has a fixed TWIN current of 2000 mA.
NOTE: Up to version 11.0 the C2 preset current in step 005 was not by default
correct. To overcome this, go to step 006 and back to 005. Do not use
the intensity knob to focus the beam but use the objective current.
Use the wedges 234 Figure 808A to focus the specimen.
5.15.3.2 Eucentric height and tilt axis

Alignment errors will exist during initial set up of the stage; these misalignments
are:
• Tilt axis does not intersect the optical axis;
• Specimen plane is not in the tilt axis, see Figure 4-2 to Figure 4-4.
NOTE: All height and tilt errors will generally cause displacements in the same
direction as when using the Y translation movement. Errors in the
direction of the X translation movement must be compensated by
centring the left-hand ear w.r.t. the right-hand ear; see
5.16.3 “Adjustments”.e.
• Set the controls to obtain a low magnification image (M approx. 1000x);

• Disengage the motor tilt drive 1 of Figure 5-6: the tilt angle should be 0°;
• Select a recognizable feature and bring it to the centre of the screen using
the specimen translation control knobs;
• Tilt the specimen between +20°, 0°, -20°. Note the movement of the selected
feature;
• Tilt again to the angle that gave the smallest displacement with respect to
the centre of the screen.
Adjust the height control knob 145, Figure 808 until the previously selected
feature is back in the centre of the screen.
Repeat steps 4 and 5 until the displacement only occurs to one side of the
centre of the screen. Bring the feature if necessary back to the centre of the
screen at 0° tilt using the specimen translation control knobs;
• Tilt the specimen to +20°, 0°, -20°. Note the movement of the selected feature;
• Tilt again to +20° or -20°. Bring the selected feature halfway back to the centre of
the screen with the tilt axis alignment screw 140, Figure 807;
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• Bring the feature back to the centre of the screen using the specimen H
translation control knobs;
• Repeat steps 3 to 8 until a minimal displacement occurs when tilting between the
end stops, at a magnification of 120.000x.
5.15.3.3 Drive adjustments

• Adjust the specimen translation rod, 166, in such a way that gearwheel 156
engages threaded ring 47 smoothly with minimum play;
• Worm 94 must be adjusted with grubscrew 87 until it runs smoothly without
play.
To adjust the two eccentric bushes 97, 104 and the stop screw 108 proceed as
follows:
• Engage the drive mechanism and adjust the stop screw until the
gearwheels mesh;
• Adjust the eccentric bushes until the teeth do not bind;
• Repeat the two foregoing steps until the play between the worm and the
gear wheel is minimal and the motor runs smoothly;
• Check that when the tilt is at the end stops, the gear wheel is automatically
lifted to prevent the cable from becoming twisted.
On delivery, the stops in the goniometer are set for TWIN to +45° and -45°, or for
SuperTWIN +10° and -10°, thus limiting the tilt angle. These stops can be reset to
obtain the following max. tilt angles: 5°, 10°, 25°, 35°, 45° and 60°.
Resetting is done by removing the stops from their original positions and
refitting them in the appropriate stop holes 113.
Negative tilt angles are set similarly on the opposite side of the casing.
2 2
1 1
DRIVE ENGAGED DRIVE DISENGAGED

EM375B
Fig. 5-6 View of motor drive

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5.16 Dismantling & assembly of the left-hand ear H

(Figure 809)
NOTE: Before removing the left-hand ear, allow for the fact that it is centred with
respect to the right-hand ear and that centring may take some time.
• First remove lamp assembly 66 by removing screw 69;

• Remove cap 5 by releasing screws 2;
• Remove the micrometer assembly as follows:
– Release grubscrew 17, and remove the pressure parts 15, 16;
– Release grubscrew 27. The whole micrometer assembly can now be
taken apart;
– Release screw 85 and unscrew rod 75, this should be done using a
small Allen key;
• Release two of the three grubscrews 53 exactly one turn using special tool
14, Figure 818;
• Remove the 4 screws 30 using special tool 8, Figure 818. Now the left-
hand ear can be removed from the goniometer after releasing cable X1;
• Take out ring 46 by releasing 8 screws 44.
• The floating rod assembly 45 can now be separated, and the jewels can be
inspected;
• Unscrew screws 56 and remove the two springs 37.
• Now the complete head assembly with bellows 44 to 55 can be removed.
NOTE: This can best be done by lifting up lever 39 and at the same time pushing
down lever 8 so that maximum clearance is present to shift the ball of
bellows 55 through the slot in lever 39.
• Remove the pressure rod assembly 55 from bush 50.
CAUTION! Take care not to damage the jewel bearing.
• The pressure lever can be removed as follows:

– Release the two grubscrews 35, 57;
– Release the two screws 60;
– Remove pivots 36, 58 and their retainers 40;
– Take out the pressure levers 8 and 39;
– The two pressure levers 8 and 39 can be separated by releasing either
screws 20 (2x) or 24 (2x).
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5.16.2 Assembly procedure H
NOTE: Before reassembly thoroughly clean all items normally located in the
ultra-high vacuum side of the ear.
Reassembly is achieved by carrying out steps 7 to 1 of 5.16.1, remounting all

components.
NOTE: When mounting the left-hand ear, push it towards the upper left side.
5.16.3 Adjustments
5.16.3.1 Adjustment of levers 8, 39

• Levers 8 and 39 should be moved with grubscrews 35, 57 until they are in
mid-position.
• The grubscrews should be adjusted such that the lever has no play.
5.16.3.2 Adjustment of the head of the ear

• The two screws 56 should be tightened equally until the min. distance is
45.8 mm (see cross section in the drawing). Do not touch the screws once
they are adjusted, as otherwise a vacuum leak may occur.
5.16.3.3 Micrometer adjustment

• Take care that the micrometer scale is visible when the left-hand ear is
mounted to the goniometer stage. This can be done by releasing
grubscrew 27;
• Adjustment of the scale range is done as follows. Set the micrometer to 20
scale divisions. Now push ring 16 with ball 15 until they both reach their
end positions, and fasten grubscrew 17;
• The slip coupling should be adjusted such that the end couplings slip only
when the micrometer reaches the end positions (0 or 20).
5.16.3.4 Adjustment of the grid to mid-position

• Remove cap. 5;
• Adjust screw 7 until the centre of the grid coincides with the centre of the
screen when both specimen translation movements are in their mid-
positions (i.e. micrometers set to right = 0, left = 10 mm). This can best be
done using a specimen grid having a centre of grid mark.
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5.16.3.5 Left-hand ear centring procedure H

• Check the goniometer height adjustment (see Figure 807 and 5.15.3 “CS
Removal of the Y measuring system”.a);
• Check eucentric height and tilt axis alignment (see 5.15.3 “CS Removal of
the Y measuring system”);
• Check specimen displacement during tilt; if within specification no further
alignment is necessary, otherwise proceed as follows:
– Fix the specimen holder to the right-hand ear with Allen screws 320,
Figure 808, or insert a C-shaped washer between the holder and the
right-hand ear;
– Turn the left-hand specimen translation rod until the holder is
completely free from the left-hand ear floating rod 45;
– Check the specimen displacement when tilting the specimen;
– If the specimen displacement improves compared to the previous
check, the error is in the left-hand ear and may be compensated by
aligning the left-hand ear. If still the same, the error is in the right-hand
ear;
– Release the holder, or remove the C-shaped ring in the right-hand ear;
– Diagonally remove two screws 30 and replace them by two M4
threaded rods, length 11 cm. Use a nut M4, washers dia. 10 mm and
two dished washers:
EM4759
Fig. 5-7 Left-hand ear centring tool
• Turn the nuts until the dished washers are half compressed. Release the
other 2 screws 30;
• Before starting centring adjustment, check that the L.H. ear is positioned
towards the upper left-hand side.
• The right-hand top screw 53 will influence mostly the tilt error in the
direction of the right-hand movement. However, it will also have a small
influence on the tilt error in the direction of the left-hand movement.
• The bottom-left screw 53 will influence mostly the tilt error in the direction of
the left-hand movement. However, it will also have a small influence on the
tilt error in the direction of the right-hand movement.
• The top left-hand screw must only be used if the previous adjustments
were insufficient.
• Tighten all three screws once the adjustment has been completed.
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5.17 Removing, dismantling & assembly of the objective H

diaphragm
(Figure 807)

• Remove the diaphragm holder 82 from the diaphragm mechanism by
rotating knob 79 counter-clockwise;
• Rotate the coarse knob fully counter-clockwise (4 steps);
• Remove the screws 58. Now the complete diaphragm mechanism can be
carefully pulled out about 1.5 cm.
To release the mechanism the complete assembly can be rotated counter-
clockwise until it is freed from the bellows;
• Remove the fine side adjustment screw 88: do not lose the dished washers (9x);
• Remove fixing plate 48 with screws 100;
• Take away lead shielding 47, and remove bellows 46;
• Remove nut 50 and washer 51, take out the spring 52 and washer 53. Now
the tube can be taken out.
Ball bearing 66 is glued with loctite on tube 65;
• Remove grubscrew 69, then unscrew the fine adjustment knob 60 from the
coarse knob 59;
• Remove locating pin 70 and remove the coarse knob from the spring
assembly 56;
• Release the two screws 54 and take out the complete side movement
spring assembly 56.
NOTE: Do not touch the sealed screws.
• Remove grubscrew 76 and take out plunger rod limiter 74. Now the plunger
bearing can be removed with screw 75.
5.17.2 Assembly procedure

The assembly procedure for the objective diaphragm is the reversed sequence
of the dismantling procedure.
NOTE: All moving parts outside the vacuum should be greased with Alvania 2
(not delivered) except ball bearing 66; this should be greased with Tellus
27.
When remounting check that plate 48 is as far down as possible (upwards for
SuperTWIN pole pieces).
Also check that the diaphragm holder is just above the pole piece (0.1 mm
higher).
NOTE: For the SuperTWIN, a thinner diaphragm holder tip 86 is supplied. Also,
the three diaphragm holder tip must be mounted when an EDAX is used.
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5.17.3.1 Diaphragm height adjustment

access to the specimen chamber”;
• First remove the objective diaphragm holder 82, then its mechanism (see
5.17.1 “Dismantling procedure”);
• Set the fixing plate 48 as low as possible. (For SuperTWIN set plate 48 as
high as possible);
• Remount the diaphragm mechanism and set it in the highest position using
the play in the screw holes;
• Place a piece of lens paper on the lower pole piece. Carefully remount the
diaphragm holder. Now shift the diaphragm mechanism downwards until
the lens paper is just not touched.
Remove the lens paper and check that for all four (three) diaphragm
positions the holder just does not touch the pole piece.
NOTE: The height difference between the first and last diaphragms should be
within 50 µm.
• For CM100: the top of the objective holder must be set 74.2 +0.005 mm
lower than the upper rim of the goniometer.
5.17.3.2 CM100 BioTWIN Objective diaphragm height adjustment

Measure with a “shift mate” the distance frome the top of the apperture to the
lover pole point. The distance must be 5.015mm as indicated on figure below.
25.64
30° Objective diaphragm holder
10
10 5.015
28.4
Note: All measurements in mm
Fig. 5-8 BioTWIN pole piece dimensions

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5.17.3.3 CM120 BioTWIN Objective diaphragm height adjustment H

(see figure following)
access to the specimen chamber”);
• Remove the objective diaphragm holder and remove the tip;
• Remount the objective diaphragm holder;
• Mount the special tool 4;
• Insert the pin 5 in hole 1, adjust the upper shield until both holes are in line;
• Insert the pin 5 in hole 2, check that both shields are in parallel;
• Insert the pin 5 in hole 3, adjust the height of the objective diaphragm
holder, until it matches its marker line;
NOTE: If the alignment tool becomes too warm it will not fit in the CompuStage;
• Remove the objective diaphragm holder and remount the holder tip;
• Remount the objective diaphragm holder.
Measuring pin
4
Test flange 2 1 2
5
28.43 mm
41.83 mm
6
41.83 mm
Cryo shields
28.43 mm
7
8
Objective diaphragm holder

Lower pole piece without tip!
1. Centring of the hole in the cryo shields.

2. Parallel adjustment of cryo shields.
3. Height adjustment for Obj. diaphragm holder.
2 1 2
Direction of Direction of Anti-
BSD port contamination device
Top view of test flange
Fig. 5-9 BioTWIN alignment of the cryoshields and obj. diaphragm holder
5.17.3.4 Diaphragm coarse centring

• Introduce the second diaphragm into the beam and align it with the fine
lateral and axial displacement knobs, 60 and 88. Screw in grubscrew 78
until the diaphragm just moves, then release it one turn;
• Tighten grubscrew 69 and check that all 4 (three) diaphragms can be
centred with the fine axial displacement knob. If not, replace grubscrew 69
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in one of the other holes and repeat the check until satisfactory;
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Figures
• Release the lateral displacement knob. Now check that all four diaphragms H
can be centred. If not, unscrew grubscrew 78 a little and try again. Repeat
until satisfactory.
5.18 Removal, dismantling & assembly of the anti-

contamination device & pre-vacuum valve
(Figure 807)
• Split the column between the upper lens section and the goniometer stage;
see also 5.10 “Opening & closing the column above the specimen stage to
gain access to the specimen chamber”;
• Remove the diaphragm holder, 82 the specimen holder 319, Figure 808
and if an EDAX is mounted retract it as far as possible;
• Release the four screws 220;
• Now using tweezers hold the cold trap 229 in position and carefully retract
the complete anti-contamination device, 215-225 inc.;
• Take care not to lose the lead shield 503;
• Mark the position of the vacuum feed-through 227 with respect to the
goniometer stage and remove it;
• The electrical pre-vacuum valve is removed as follows:
– Release the coupling 210 and the pre-vacuum hose 211;
– Release the nut 213 and remove the coil 205;
– Unscrew valve 206 and if necessary completely dismantle it.
• For assembly and remounting follow the reversed procedure. The following
points should be observed:
– Take care that O-ring 150 is clean and that the vacuum feed-through
227 is in the same position as before dismantling, as otherwise a leak
may occur on O-ring 150;
– Do not forget small O-ring 212;
– Check that the cooling finger is horizontal and that at room temperature
it is positioned as shown below w.r.t. the centre of the pole pieces
(viewed from above):
Centre of cooling finger Centre of pole pieces
x x
1mm Axis of cooling finger
5.18A Removal & remounting of the sandwich cryo blades

PW 6405
Refer also to Figure 5-10 following.
NOTE: This option is not compatible with the presence of the SuperTWIN, SED
or EDAX.
• Open the column above the goniometer stage; see also 5.10 “Opening &
closing the column above the specimen stage to gain access to the
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specimen chamber”;
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• Remove the EDAX plug; H

• Mount the cryo bellows assembly 10, together with O-ring 11, (1.78 x
26.60) in adapter bush 12;
• Mount the adapter bush 12, together with O-ring 13, (1.78 x 34.65) in the
EDAX port. Now mount flange 14, ensuring that the mark is vertical. Mount
flange 15, ensuring that the mark is vertical, and fix the entire assembly to
the column using Allen screws (M4 x 8).
NOTE: The height of flange 15, must be adjusted so that it is in the middle of the
octagonal housing.
• Mount the complete cryo diaphragm mechanism 1, and secure with the
three Allen screws 2, (M4 x 30);
• Insert the Cryo diaphragm holder 4, in the Cryo diaphragm mechanism.
Use the diaphragm coarse movement to withdraw the holder as far as
possible from the optical axis;
• Remove the existing cold trap and carefully mount the newly delivered cryo
cold trap 5. Screw the cooling strip 7, to the sandwich cryo shields 8, and
hand-tighten the screw item 9, (M2 x 3). Now carefully insert the sandwich
cryo shields 8, and mount them on the insulated cryo diaphragm holder 4.
Use the cryo diaphragm coarse movement to insert the holder as far as
possible. Adjust the sandwich cryo shields so that they are in parallel with
the lower objective pole piece. The sandwich cryo shields must be as near
to optical axis as possible. Now the sandwich cryo shields 8, must be
secured with screw 9, (M2 x 3).
NOTE: The cold trap 5 is 1 mm concentric w.r.t. the lower pole piece.
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Cooling Device
EM6289
Fig. 5-10 Sandwich Cryo blades
• Now fix the cooling strip 7. This is the connection between the sandwich
cryo shields 8 and cold trap 5. The cooling strip must be fixed to the newly
delivered cold trap 5, with screw 6.
(M2.5 x 4);
• Centre the largest hole with respect to the hole in the lower pole piece
using the fine lateral and axial adjustment knobs of the cryo diaphragm
mechanism;
• Use the eccentric and the objective diaphragm coarse movement, to insert
the holder as far as possible;
• Move the cryo diaphragm holder using the coarse knob fully over its axial
range and check that there is no mechanical obstruction;
• Move the cryo diaphragm holder using the fine adjustment and check that
there is no obstruction;
• Close the column and make an image;
• Check that both holes in the sandwich cryo shields can be centred when
both cooled and not cooled.
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5.18B Removal and remounting of the Biotwin Cryo Blades H

For the BioTwin cryo blades see 5.17.3 “Adjustments”.b.
5.19 Removing & remounting of the vacuum connection

(Figure 807)
NOTE: Only possible if the goniometer stage is removed from the column. See
5.13 “Removing & remounting the complete goniometer stage”
• Unscrew the four screws 36 and pull out the complete vacuum pipe 30 with
lead shield 29;
• Remount in the reversed order.
5.20 Backscattered & secondary electron detector

(Figure 807 and Figure 824)
5.20.1 Backscattered electron detector

(see Figure 807/Figure 807A & Figure 824)
This detector is delivered with the PW 6431.
For complete dismantling and assembly instructions see the PW6431 service
manual.
5.20.1.1 Removal
• Admit air to the column; see 5.2 “Admitting N2 to the column”.
• Remove the two screws 363. Now the lead shield 516 can be removed.
• Remove the two screws 361 and the distance pieces 367. Now remove the
complete detector assembly 360 from the objective stage.
NOTE: Take care not to lose the four insulating bushes 366;
5.20.1.2 Exchanging the detector tip

(Figure 825)
• Carefully desolder the wires from the detector tip 212, please note the
location of the wires;
• Release the two screws 211;
• Now the detector tip can be replaced;
• Tighten the two screws 211;
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• Carefully solder the wires back in their original locations;

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Figures
5.20.1.3 Mounting H
• Remount in the reversed order but observe the following points:
– An extra spacer may be added behind the O-ring 359 to ensure proper
centring;
– Check by measuring the resistance, between the backscatter 360 and
the column earth, that the detector is free from the column earth and
not touching the upper pole piece;
– Switch on the HT and make an image of the hole in the backscatter
detector assembly (low magnification). The hole must be
approximately in the centre of the screen: if not, small adjustments can
be made by releasing or fixing screws 361, and distance pieces 367.
5.20.2 Secondary electron detector

(see Figure 807/Figure 807A & Figure 824)
This detector is delivered with the PW 6433.
For complete dismantling and assembly instructions see the PW6433 service
manual.
CAUTION! Take great care, the detector glass rod 134 (Figure 824) can
easily be damaged!
5.20.2.1 Removal
1. Admit air to the column. See 5.2 “Admitting N2 to the column”
2. Remove the four screws 303 (Figure 807). Now remove the complete
assembly 300 (Figure 807) from the objective stage.
If a CompuStage is present, proceed with the next two steps (See
Figure 807A):
• Mark the position of the eccentric 313 with respect to the objective housing;
• Remove the eccentric 313 and take out O-Ring 314.
Further dismantling of the SED (Figure 824
• Remove the 4 screws 140, retract the complete assembly 118 to 144;
• Remove the two screws 113; take out the plastic block 144 and lead bush
118;
• Release the three screws 139 so that O-Ring 124 no longer secures the
glass rod;
• Release the three screws 137 and carefully retract the teflon insulator bush
129 together with the complete glass rod.
• Unscrew the metal tip 136 and taking extreme care, pull away the glass rod
from the teflon insulator bush 129;
• Remove the 4 screws fixing the HT feed-through 125 and pull out the
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complete feed-through;
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Assembly H
• Assembly is done in the reversed order. However the following points must
be observed:
The glass rod must be mounted fully in its metal bush 130, so that the 10
kV is conducted to the scintillator.
The glass rod must be adjusted such that it is within the level with the
plastic block 144. Once adjusted, tighten the three screws 139 so that the
glass rod is secured.
5.20.2.2 Mounting
1. Before mounting the SED assembly, be sure that the pole pieces 25
(Figure 807) are correctly mounted. If not, See 5.11.1 “The upper objective
pole piece”.
2. Mount the eccentric 313 in the same position as found;
3. Carefully insert the detector in the hole in the pole piece. Equally tighten
the four screws 303 (Figure 807);
4. Mount the lead shields 510, 512 using screws 513;
5. Check the resolution as described in Sect. 4.16.6 (Only for TWIN).
5.21 EDAX
(Figure 807)
• Admit air to the column, see 5.2 “Admitting N2 to the column”;
• Set the microscope magnification to LM mode;

• Remove on the EDAX the plugs for the HT and the preamplifier;
• Retract the EDAX to its outermost position;
• Release the 4 nuts 401 and withdraw the complete EDAX unit.
• Do not forget to remount the lead shield 402.
NOTE: For a Supertwin with the EDAX mounted, the objective diaphragm holder
tip, item 86 with three diaphragms, must be present. This limitation is not
present for the 7-position objective diaphragm holder.
5.22 Opening & closing the column underneath the

specimen stage
(Figure 807)
NOTE: Before the column is opened check that screws 90-200, Figure 804 and
58, Figure 806 are tight.
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• Admit air to the column. See 5.2 “Admitting N2 to the column”. H
Remove clamp 33, that fixes the ion getter pump to the objective vacuum
flange;
Remove vacuum seal 35.
• For CM100: Release the knurled knob 108, Figure 810 and remove the
fixing rods 105, 106, 107, Figure 810 and cover plate 104, Figure 810.
• Free the cable VDB-X12 and the cable between right and left-hand ears,
X1.
• Release screws 78, Figure 810.
lifting mechanism clockwise to raise the column until the pole piece is well
clear of the goniometer stage, then remove the gun lifting arm and swing
out the column.
obstructed.If the pneumatic hose to V7 is too short press “gun air”
softkey and release the hose.
• To close the column proceed in the reversed order.

For CompuStage remove cables GDB-X7, X8 and X9.
5.23 Removing & replacing the lower objective pole piece

& the fixed diaphragms of the lower lens section
(Figure 807)
5.23.1 The lower objective pole piece

• Follow the procedure described in the previous section;
• Remove the SA diaphragm holder 89, Figure 810 (not for CM100);
• Release the three screws 119, approx. 2 mm. Screw the three knurled
screws 7, Figure 818 in the other three threaded holes of the same
diameter.
NOTE: The pole piece is now freed from the lower lining tube.
• Remove the O-ring 137 and unscrew ring 136 using tool 6, Figure 818.
Pole piece 135 can now be removed.
Remount in the reversed order. Do not forget the indium seal 0.7 mm dia.,
length 36 mm approx. See also 5.4 “Location and replacement of indium
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seals”.
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5.23.2 The fixed diaphragms H

(Figure 810)
• Remove the fixed lower objective diaphragm 1.
NOTE: This cannot be done with tool 4, Figure 818.
• Push the grip and insert tool 4, Figure 818 as far as possible.
• Release the grip and remove the fixed diffraction diaphragm 3.
• Push the grip and insert tool 4, Figure 818 as far as possible. Release the
grip and remove the long fixed intermediate diaphragm 5 (not for CM100).
NOTE: Place the diaphragms in a clean, closed glass container. Inspect them
and clean if necessary.
• To replace the diaphragms follow the reversed procedure. Do not forget to

renew the indium seal in the pole piece 0.7 mm dia., length 36 mm approx.;
see also 5.4 “Location and replacement of indium seals”.
5.23.3 The differential and projector diaphragms

(Figure 810)
• Let air into the column and plate camera chamber. See also 5.2 “Admitting
N2 to the column”.
• Remove the Instrument key, insert the service key, select the manual page
and open V4;
• Take out the front window 227, Fig. 812, the side window 250, Fig. 812 and
raise both screens;
• Remove the beam stop needle out of the beam.
CAUTION! If a TV system is mounted, cover the opening in the projection

chamber.
• Use tool 3, Figure 818 (the side with the long pin) together with extender
3A, Figure 818 to unscrew the complete differential and projector
diaphragms. If only diaphragm 71 is released, reverse the tool so that the
short pin faces upwards, once the tool mates, turn it through 90° and pull
out diaphragm 74.
Now diaphragm 72 can be unscrewed from diaphragm 71
NOTE: O-ring 70 can only be removed after the lower lining tube is pulled out via
the diffraction lens - see next section.
Place the diaphragms in a clean, closed glass container.
Inspect them and clean if necessary.
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• To replace the diaphragms proceed in the reversed order.

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5.24 Dismantling & remounting the complete lower lens H

section
(Figure 810)
Admit air to the column and projection chamber, e.g. by pressing softkey “all
air” on the vacuum page, see 5.2 “Admitting N2 to the column”., and do not
forget to drain the water from the column, see 5.3 “Draining water from the
column”.
• Open the column underneath the specimen stage; see 5.22 “Opening &
closing the column underneath the specimen stage”.;
• Remove hose pillars 32, 35, the lens current plugs MC-X4, X5, X6 and the
alignment coil plugs CSP-X2, X3, X4 and DCB8-X5;
• Remove the three screws 119, Figure 807 approx. 2 mm. Screw the three
knurled screws 7, Figure 818 in the other three threaded holes of the same
diameter;
• Remove O-ring 137, Figure 807 and unscrew ring 136, Figure 807 using
tool 6, Figure 818. Pole piece 135, Figure 807 can now be removed;
• Completely release screws 119, Figure 807. Now the complete lower
objective lens section can be removed from the column for further
dismantling:
CAUTION! When remounting the lower objective lens housing, great care must
be taken not to damage the fragile supports 113. These supports are
present in instruments delivered from Oct. 1990 onwards.
– Remove the alignment/stigmator coil (screws 116, Figure 807);

– Remove the lower objective lens coil (screws 107, Figure 807);
• Remove the diffraction diaphragm holder 89 (not for CM100). Unscrew the
three screws 79. Now turn the complete diaphragm mechanism
counterclockwise without pulling it.
NOTE: Take care not to lose the lead shielding 8.
• Remove the two screws 49. Take out block 47. Now pull out the vacuum
liner tube 7 with fixed diaphragms 1 to 5. Now spring 6 can be pushed back
when all diaphragms are removed;
• Remove the centring ring 15 (screws 14);
• Remove the diffraction/intermediate lens assembly using the two knurled
knobs 7 Figure 818.
NOTE: when dismantling the D&I lens assembly take care not to lose the teflon
bush 62.
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Diffraction and Intermediate lens dismantling and assembly H
CAUTION! Dismantle the lens assembly only if absolutely necessary. Proceed as

follows:
– Remove the four screws 28 and take out the intermediate lower lens
pole piece plate 26 with the intermediate lens coil 25 attached;
– If the intermediate lens coil has to be removed, unscrew the three
screws 27;
– To reach the diffraction lens coil 18, remove the four screws 17 and the
pole piece plate 16. Mark the correct position of the pole piece plate;
– To remove the coil 18, first remove the three screws 31;
– The pole piece assembly may be removed after unscrewing the four
screws 23 and removing ring 24.
CAUTION! Do not dismantle the pole piece assembly 21 further.
When remounting the coils, care should be taken that they do not make any
contact with either the housing 20 or the pole piece 21.
Remount the assembly as follows:

– Refit the pole piece assembly 21 in position using the ring 24 and the
four fixing screws 23
The screws should be tightened equally firmly;
– Place the coil 18 in the housing 20. Note the position of the water and
electrical connections;
– Make sure that the coil is not making contact with either the housing or
the pole piece by introducing paper spacers between the pole piece 21
the lens coil 18 and the mantle 20;
– Refit and firmly tighten the three screws 31 and remove the spacers.
– Remount the pole piece plate 16 in the correct position using the four
screws 17 but do not tighten at this stage;
– Centre the pole piece 16 with respect to the pole assembly 21 by
means of the copper spacing bush 19;
– The eccentricity may not exceed 0.005 mm. Tighten the four screws
17;
– Place the coil 25 in the housing 20. Note the position of water and
– Introduce paper spacers between the coil and housing and between
the coil and pole piece;
– Place the pole piece plate 26 in position on top of the housing 20;
– Refit the three screws 27 but do not tighten;
– Refit and tighten the four screws 28;
– Now tighten firmly the three screws 27;
– Remove the four screws 28, remove the pole piece plate 26 with the
coil 25 remove the paper spacers and refit the pole piece;
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– Check that the lens plug and waterpipes fit without any mechanical
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obstruction. H
• Remove the shutter coil 50. Feed the cable and the attached plug through
the hole.
Remove the ring 54;
• Remove the 2 lens plugs MC-X7, X8 and remove the four hose pillars 117;
• Lower the column until the goniometer fits the outer mantle 100;
• Fit the 4 screws 78. Remove the 5 screws 374, Fig. 812 and lift the
complete column;
• Release the two screws 72, Figure 811;
• Pull out the complete beamstop assembly;
• Unscrew the four screws 64, Figure 811;
• Release the compressed air hose 5, Figure 811 and the 4 screws 64,
Figure 811.
CAUTION! Take care not to drop the complete valve assembly.
• Lower the column again until the lower lens section fits the projection
chamber;
• Release the 4 screws 78 and lift the column with the goniometer stage
again;
• Use the two knurled knobs 7 Figure 818 and lift out the projector lenses.
Projector 1 and 2 lenses dismantling and assembly
CAUTION! Dismantle the lens assembly only if absolutely necessary - proceed

as follows:
– Remove the four screws 110 and the pole piece carrier 67.
– Remove the four screws 60; this separates the pole piece carrier 56
(with coil 57) from the pole piece carrier 59;
– The proj. 1 coil 57 can now be removed from the pole piece carrier by
removing the three screws 55. Take care not to drop the lead shield 61;
– The proj. 2 coil can now be removed from the pole piece 59 by
removing the three screws 58.
When remounting the coils, care should be taken that the coils do not touch
either the housing or the pole assembly. Proceed as follows:
– Remount lead shield 61. Place the coil 57 in the pole piece carrier 56,
note the position of water and electrical connections;
– Introduce a slip of paper (0.15 mm) between the coil and the pole piece
and another between the coil and the housing;
Fix the coil 57 to the pole piece plate 56 using screws 55 and remove
the spacers.
– Place the coil 64 in the housing 67, note the position of water and
NOTE: Make sure that the coil is not making contact with either the housing or
the pole piece by introducing paper spacers;
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– Place the pole piece 59 on top of the coil 64; H

– Refit and firmly tighten the three screws 58 and then remove the
housing 67 and the paper spacers;
– Remount the pole piece 59 with the coil 64 on the pole piece carrier 56
using the four screws 60. Do not tighten at this moment;
– Using the centring (tool 17 - Figure 818), centre the pole piece carrier
56 with respect to pole piece 59. Now tighten the four screws 60;
– Remount the pole piece 67 on the assembly and screw it firmly into
position with the four screws 40 and washers 114;
• The outer mantle can now be removed after removing the screws 156, Fig.
812.
5.25 Dismantling & reassembling the camera airlock valve

(Figure 811)
NOTE: Check that screws 90-200, Figure 806 and 78 Figure 810 are fully
tightened.
• Admit air to the column and projection chamber (see 5.2 “Admitting N2 to
the column”)
Remove clamp 33, that fixes the ion getter pump to the objective vacuum
flange. Remove the vacuum seal 35.
• For CM100: Release the knurled knob 108, Figure 810; remove the fixing
rods 105, 106, 107, Figure 810 and the covers 104, Figure 810;
• Release the 5 screws 196, Fig. 812.
lifting mechanism clockwise until the projection chamber and the valve
block are well clear, then swing out the column.
obstructed.
If the pneumatic hose to V7 is too short press “gun air” softkey and
release the hose (CM120 only).
• Remove the 4 screws 64 and take out the complete V4 valve assembly;
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• Disconnect the compressed air hose 5; Remove the 3 screws 4 and the H
cylinder housing 3;
• Remove nut 8 and cylinder piston 13.
• Remove the two screws 20, the flange assembly 24 including O-rings 18
and 25, bushes 17, 26 and O-ring 27;
• Remove circlip 15; remove washer 16 and bush 17, remove and check O-
ring 18;
• Release shaft 45 from the notch in bracket of plate 47;
• The shaft assembly 37, 39 with valve seating assembly 29 and spring
assembly 30 can now be removed;
• The valve seating can be dismantled if necessary after removing circlip 59.
Take care not to lose any of the small items, especially balls 38 (4 mm).
5.25.2 Reassembly procedure

Reassemble as follows:
• Prior to reassembling the valve seating, grease balls 38 with molycote
powder;
• Remount the shaft assembly. 37, 39 complete with valve seating 29 and
spring assembly 30;
• Replace the shaft 45 in position;
• Lightly grease O-rings 18, 25 with Fomblin RT 15;
• Remount O-rings 18, 25, bushes 17, ring 16 and circlip 15, in flange 24.
Mount the flange together with O-ring 27, and fix them with screws 20;
• Grease mu-shaped cuffs 14 with Fomblin RT 15 and locate piston 13 on
shaft 39 using nut 8;
• Remount the piston housing 3. Refit and tighten 3 screws 4. Reconnect the
compressed air hose 5.
5.26 Removal & assembly of the beam stop assembly

(Figure 811)
NOTE: Optional for CM100.
The beam stop assembly 65 to 79 inc. can be removed from valve V4 body by
pulling out the assembly after loosening the fixing screws 72.
To fit a new needle, insert it in bush 67. Mount the spring ring 68.
The beam stop should be adjusted to intercept the central part of the electron
beam; consequently the shadow image of the needle should be in the centre of
the screen. The axial position can be adjusted by screwing knob 77 in or out on
shaft 70, and the lateral position can be adjusted by rotating bush 76 after
loosening screws 72.
NOTE: A bent needle can be straightened by rolling it under, e.g., a ruler on a

flat surface.
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5.27 Removal & replacement of the ion getter pump H

(Figure 821)
• Admit air into the column and projection chamber, see 5.2 “Admitting N2 to
the column”;
• Remove the high tension cable plug 207 from the getter pump 101, the
earth lead, and safety plug X8.
• Remove clamp 147;
• Remove clamp 33, Figure 807 that fixes the ion getter pump to the objective
vacuum flange.
Remove the vacuum seal 35,Figure 807.
• Remove the two screws 4 and two screws 7, Figure 801, and remove the
IGP.
Each replacement ion getter pump is shipped sealed under vacuum. To admit
air into the pump, the metal tube seal on one of the flanges has to be carefully
cut using shears, NOT a saw blade, otherwise metal particles will enter the
pump.
To remount the ion getter pump proceed as follows:

• Place the pump in position using the 2 supports and tighten 2 screws 4 and
7, Figure 802.
NOTE: All water and air hoses should be at the left-hand side of the pump
(looking from the rear of the microscope). The pump should be
positioned so that the two flanges to fit to the goniometer and valve V5
(not for CM100) are correctly aligned.
• Insert the vacuum seal 35, Figure 807; Fix clamp 33, Figure 807 that fixes
the ion getter pump to the objective vacuum flange.
• Remount and tighten clamp 147;
• Due to mechanical pump tolerances, it may be necessary to readjust the
height of the ion getter pump. If so, slacken screws 5, 6, Figure 802 until
the surfaces of the valve V5 (CM120) or elbow (CM100) and the IGP mate
properly.
The connection to the goniometer will always fit because of its bellows
construction.
• Reconnect the HT plug 207 to the ion getter pump socket. Do not forget to
fit the interlock plug X8;
• Reconnect the earth lead.
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5.28 Removal of the ion getter pump feed-through H

(Figure 821)
Titanium flakes may fall down into the HT feed-through of the pump.
This can cause instability or even a full short-circuit of the pump.
Remove the feed-through as follows:

• Admit air into the column, see 5.2 “Admitting N2 to the column”;
• •Unscrew the ring 205, fixing the HT feed-through and carefully remove the
feed-through, 204, from the IGP 101.
NOTE: Using a tool (shown in figure following) makes removal of the feed-
through much easier. This tool is not supplied as standard and must be
produced locally when necessary.
3.5 (8x)
x) (2
45°
30
10 (2x)
Ø 22
Ø 34
x) (8
45°
=
240
ALL DIMENSIONS
IN mm
40 6
EM2581
MATERIAL: MILD STEEL
Fig. 5-11 Tool for removal of IGP feed-through

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5.29 Projection chamber H

(Figure 812A)

• The projection chamber is dismantled according to Figure 812A. This is
only necessary under abnormal conditions (e.g. in the event of a vacuum
leak).
• Viewing windows 227 and 250 are coated with a conductive layer on one
side. These windows should be fitted with the conductive side facing
inward to prevent the windows gaining an electrostatic charge. The
electrical resistance of the conductive layer is several thousand ohms and
can be checked with the aid of an ohmmeter. The rim of the plastic edging
should face outwards.
• The binocular viewer should be so adjusted that the fluorescent powder on
the small screen is sharply visible when the focusing rings of the binocular
are set to the middle position. This is done by moving the binocular viewer
up or down. First loosen nuts 222 and tighten them after adjustment.
• Both viewing screens are factory centred with respect to the electron
optical axis of the microscope column. Readjustment is only necessary if
for some reason the screen carriers have been dismantled, and is carried
out as follows:
– Switch off all lenses and deflection coils by opening microswitch S34.
This is done by turning the lifting mechanism clockwise, as when lifting
the column, until the microswitch operates;
– Switch on the HT. Be careful not to damage the screen;
– Adjustment of main screen:
The bright spot should be within the small circle in the centre of the
large screen; if not, loosen the 3 screws 316, 324 and reposition the
screen;
– Adjustment of small screen:
Loosen screw 246. Block assembly 248 can now be displaced axially
along shaft 86, and the angle can also be varied. Note that the height
of the screen should not be changed, otherwise it will be impossible to
readjust the position of the binocular viewer.
5.29.2 Removal & assembly of the small & large viewing screen
mechanisms
(Figure 812A)
• Remove the two screws 53 and 54.
• Now remove levers 66 and 115 by unscrewing 55 and 57, respectively.
• Remove cover 87.
5.29.2.1 Small screen

• Unscrew nut 113 and release the wire;
• Release screw 246 and take out the small screen with its arm 245;
• Release the two screws 74 and take out the complete feed-through 77;
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• Remove circlip 85 and take out O-ring 80; take care not to drop ball 59.
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5.29.2.2 Main screen H

• Release the three screws 327 to separate the main screen from the feed-
through;
• Release the two screws supporting pcb 124;
• Release the three screws 127 and take out the complete feed-through 136;
• Remove circlip 144 and take out O-ring 139; take care not to drop ball 130.
• Remount in the reversed order. Take care that O-rings 80 and 139 are
slightly greased with Fomblin RT15;
• Spring 117 should be tensioned so that lever 115 is always brought into the
rest position when released;
• The electrical connection from the screen should be fed through the spring
111 that keeps the wire out of contact with the projection chamber housing;
• Screen 307 has three positions: horizontal, intermediate (at 30°), and out of
beam (at 85°).
The screen is maintained in one of these positions by the spring- loaded
retaining ball 130. The force of the spring 134 can be adjusted by turning
screw 146 which is factory Loctited.
Adjustment of the screen centres is described in Sect. 5.29.1.
5.29.3 Removal & assembly of the screen current feed-through

(Figure 812A)
• Remove nuts 113 and release the wires to the main and small screens;
• Remove circlip 88, release screws 89, and remove bracket 94;
• Remove the two screws 96, now the complete feed-through 106 can be
taken out;
• Remove the two screws 98 to separate teflon feed-through 106 from block
99;
• Release nuts 100, and pull out threaded rods 109, inspect the O-rings 108;
NOTE: Grease (e.g. fingerprints) on the teflon insulator 106 or solder resin on
the insulation of the threaded rods 109 can cause small leakage currents
– these can influence the values of the exposure time readout on the
data screen. Therefore all parts of the feed-through must be thoroughly
cleaned in alcohol (not in an ultrasonic cleaner). See also Sect. 2.17.2.

Check that approx. 5 mm of the mantle of the coaxial cables is removed
from the threaded rod 109.
Check that on the SCA side of the cable the rubber sleeve is clean and
properly mounted over the insulating part of the wires.
Check that after soldering there is no soldering resin left on the insulation of
the threaded rods 109.
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5.29.4 Removal & assembly of the plate numbering unit H

(Figure 812A)
• Release the two screws 284 and remove the plate numbering unit 294;
• Remove screws 288, and take out bracket 280;
• Remove screws 260, and take out the complete lens assembly 256 to 277
and remove O-ring 256.
• Release screw 266 and remove mirror 269. O-rings 270, 274, and ring 276
can now be reached.
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Check the position and sharpness of the displayed information as follows:
• Make the film display continuous by selecting the alignment page, pressing
softkey “service calibration” and pressing “segm disp” softkey;
• Move the plate to the working position by interchanging the pneumatic
hoses Y20-1 and Y20-0.
NOTE: If the projection chamber is not under vacuum the housing 277 must be
pushed towards the projection chamber.
The test pattern is reversed with respect to a normal film display. If the
four lines for the film text editor are not needed the film text pattern can
be shifted more outwards, to obscure less film.
• If the numbering is not in the right place, shift the image by adjusting screw
289. If the image is not sharp, release nuts 306 and shift the display until
the image is sharp.
NOTE: The brightness adjustment of the film display is done on the “cam init”
page with softkey “data int”.
Do not forget to reconnect the hoses to Y20-1 and Y20-0.
5.29.6 Further dismantling of the projection chamber

(Figure 812A)
• Remove the small screen feed-through, see 5.29.2 “Removal & assembly
of the small & large viewing screen mechanisms”;
• Remove the main screen feed-through, see5.29.2 “Removal & assembly of
the small & large viewing screen mechanisms”;
• Remove the screen current feed-through, see 5.29.3 “Removal & assembly
of the screen current feed-through”;
• Remove the plate numbering unit, see5.29.4 “Removal & assembly of the
plate numbering unit”;
• Release the four screws 181 and remove the plate 185;
• Release if present:
The BF/DF detector see 5.33.1 “Removal of the dark field detector
chip”;
The TV system
The EELS spectrometer
The Near Axis System
• Release screws 347;
CAUTION! Do not drop plate 385 (weight 35 kg).

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5.30 Plate camera H

(Figure 813)
5.30.1 Working principle

The unexposed plate films are loaded in the upper magazine (E), Figure 802.
Magazine (E) is fixed to the exchange mechanism (F) and film magazine for
exposed plates (G). For transport, the magazine can be closed using the plate
covers 17, 60.
When the plate camera assembly is introduced into the microscope, the head
of the actuating piston shaft 27, Figure 812A engages in the slide clip of the
exchange mechanism 46, releasing locking spring 16.
The unexposed plates rest on the slide rails 25, 26.
When the camera is operated, piston 27, Figure 812A pushes transport slide
46 into the projection chamber. Plate 185, Figure 812A guides transport slide
46 via the slots on plate 44.
Spring-loaded wedge clips 36 shift in one plate at a time. At the start of and
during transport, the plates rest at one side on the bracket 30 and at the other
side on the slide rails 25, 26.
Just before the end of transport, the rear of the plate falls on the guide plate
185, Figure 812A.
When the transport slide 28 to 46 is in the end position, pin 189, Figure 812A
presses against rod 40, which in turn presses on the brackets 30, releasing the
front of the plate.
The plate now rests horizontally on platform 185, Figure 812A and can be
exposed after a delay of 5 s. (8 s. for SuperTWIN).
After exposure, transport slide 46 retracts the plate over guiding platform 185,
Figure 812A and the exposed plate falls into magazine (G), Figure 802.
5.30.2 Removal and assembly of the plate camera

(Figure 812A)
NOTE: If the plate camera is ordered as an option and is being installed for the
first time, the following additional steps must be carried out:
• Remove the flange that is in place of the plate exchange holder 163;
• Remove the cover in place of the plate container;
• Insert the SDD unit in position MBCR X5;
• Remove the flange in place of the film display and mount the complete film
display with the three screws 260;
• Mount the flat cable between SDD X5 and the film display;
• Insert the jumper on the SDB MBCL X15 A2.
NOTE: Do not forget to switch off and on again to read the new options into the
system.
• Mount the pneumatic valves Y20.1 and Y20.0 and connect the electrical
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wiring and pneumatic hoses according to Figure 816, Figure 817 and 422
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(Electronics). H
Dismantling and assembly procedure:
• Let air into the projection chamber. See 5.2 “Admitting N2 to the column”;
• If present, remove the film container;
• Remove the side window 250 and remove the plate 185 (screws 181);
• Remove the table top by releasing the 6 screws fitting in the spacers 27,
Figure 802A;
• Remove the left-hand panel;
• Remove the support 178, Figure 807 for the left-hand specimen
movement;
• Remove the 4 screws 233, cover plate 231 and lead plate 232 and 182;
• Release the two nuts 7 fixing the thin threaded rods 26 and remove the
complete plate camera drive 2 to 45. Dismantling is carried out according
to Figure 812A;
Remove the lead shielding 46, 47 by removing the two screws 162;
• Remove the plate exchange holder 163 by releasing the two screws 161,
165;
• Assembly is carried out in the reverse order.
Ensure that the plate 185 is positioned correctly; this can be checked by
manually transporting the first plate.
5.30.3 Adjustments
Check that the distance between the flange 39 and the piston 27 is 23.5 ± 0.1
mm when the piston is in the neutral position. However, the thickness of the
camera house 163, is 18 ± 0.2 mm. This can be subtracted from the 23.5 ± 0.1
mm to check the size without removing the pneumatic drive. If these
dimensions are incorrect, the piston can be adjusted by screw 4, Figure 812A
(sealed with Loctite). See also cross section of plate camera drive.
Adjust the magnetic switch 41 so that the distance between the switch 41, and
the flange is 13.5 mm. See also cross section of plate camera drive.
Check the height of the two pins 164. Their height with respect to the surface in
which they are pressed must be 10.45 mm. These pins together with guiding
pins 157, will determine the position of the magazine in the camera housing
163. If they are not pressed down completely they can be tapped in carefully.
Check if the guiding pins 157 are also pressed down completely into the
camera housing. The part of the pin on which the magazine rests, must also be
10.45 mm above the surface in which it is pressed. This ensures that the
magazine is perfectly horizontal, and properly locked in the camera housing. If
they are not pressed down completely they can be carefully tapped in.
Check if the (empty) magazine can be inserted into and removed from the
camera housing without any noticeable force. If some force is still necessary,
the slide 46, Figure 813 has to be adjusted with respect to its frame, so that the
brass part on the rear of the slide can lock easily on the transport piston. This
can be done by turning both grubscrews 45, Figure 813 counterclockwise
equally until the magazine can be inserted into the camera housing without
force.
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Check if slide 46, Figure 813, can run freely in the frame. If not, mechanically H
adjust slide rails 25 and 26, Figure 813. Do not use any grease.
Press 40, Figure 813 to check if the plate release brackets 30 function without
any obstruction.
NOTE: These brackets are not of the same dimensions as the ones for the 36
plates magazine.
Remove the exposed film magazine, and the top of the unexposed film
magazine.
Put the empty frame into the camera housing. The frame must rest on pins 164
and on the spring load of spring 16, Figure 813. The spring 16, Figure 813 is
lifted by 39 to release the slide. If this is not working properly, the spring will
scratch the piston 27 and become deformed. The spring force can be
increased, if necessary, by loosening screws 14, Figure 813, and tilting the
plastic block against the spring force. The force on both sides of the spring
must be equal, so the spring is horizontal with respect to the frame.
Check if the film holders are transported into the projection chamber without
any obstruction.
If not, readjust plate 185 to the correct height.
Check the plate camera operation with a full magazine, taking both single
exposures and a series of exposures.
5.31 Cooling water circuit

(fig. 814)
5.31.1 Circuit description

(Figure 814B); from Oct. ’88 up - April ’92
The cooling water circuit works as follows. The incoming water goes via a water
filter to:
5.31.1.1 The ODP pump

In this branch the water flow is controlled to nominal 0.7 l/min by a Watts
regulator 24 together with a diaphragm.
The water flow is independent of switching on or off.
5.31.1.2 The column

The water flows via manual valve V22 (that is off when the microscope is off) to
the electrical bake-out valve V23
In the normal position the water flows via two branches through the column.
One branch flows via tap V25, Watts regulator 14 and the upper part of the
column, the lower column part goes via tap V24 and Watts regulator 4. Once
the bake-out valve is closed, no more water flows through the column. The
electrical control units (MRU and PBH) will still be supplied via the third branch
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of the three way valve V23. In the bake-out position the remaining water can be H
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removed from the column using the compressed air connection S37. After H
blowing off the water, manual valve V26 must be closed. See also Sections
4.12.4 “Baking out device” and 5.3 “Draining water from the column”.
NOTE: Up until 1988 only one water branch was used for the column.
5.31.2 Cooling water adjustments

(Figure 814B)
CAUTION! The flow in the water branches can only be correctly adjusted when
using as many flow meters as there are branches. This is because
the adjustment of the Watts regulator of one branch influences the
flow in all the other branches.
Switch off the microscope and drain the water from the column (see
5.3 “Draining water from the column”).
Connect as many flow meters as there are branches and adjust the Watts
regulators of each branch until each branch has 42 l/hr (0.7 l/min.).
NOTE: For a CM100/120 with only a water branch to the column (up to 1988),
the flow in this branch must be adjusted to 60 l/hr (1.0 l/min.).
5.31.3 Circuit description

(Figure 814B), from April ’92 onwards
The cooling water system has one water filter and is then divided into different
branches:
• The ODP pump has its own branch in which the water flow is controlled to
nominal 0.7 l/min. by a Watts regulator together with an aperture.
The water flow in this branch is independent of the mains power to the
microscope unless the microscope switches the water cooler unit on or off
directly.
• The MRU and the PBH together have their own branch in which the water
flow is controlled to 0.7 l/min. Also the water flow in this branch is always
present, independent of the state of the microscope.
• The column is the third main water branch. This branch can be separated
from the supply by valves V22 and V21. To ensure that the water flow
through the column has a maximum stability, this branch is divided into two
additional branches. For each of these two branches the water flow is
adjusted to 0.7 l/min, and the branches are divided over the lenses in such
a way that the power is spread equally.
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5.32 Levelling system H

(fig. 802)
5.32.1 Barry mount levelling system

(not for CM100)
5.32.1.1 Adjusting the air damper height

Turn on the main valve V30 in the pneumatic air system to the Barry mounts.
Now open the individual valves V31.1/V32.1 and V33.1 slightly one by one,
letting air into the Barry mounts. Do not touch the column during this procedure
until the base plate is properly adjusted in height. Check that after filling, the
base plate is free from the console, and that the projection chamber rim does
not touch the table top. If not, readjust the compressed air levellers 18
(Figure 803A). Close valves V31.1/V32.1 and V33.1. Afterwards, close main
valve V30.
5.32.1.2 Changing the Barry mount

(Figure 803A)
CAUTION! Removing one of the Barry mounts may cause toppling over of the
column/ base plate, therefore the base plate must be supported.
• Remove screw 8 and ring 9;

• Remove screw 10;
• If possible pump up the defective Barry mount as high as possible by
pushing the corresponding leveller 18 to maximum height;
• Place a strong metal block/object underneath the base plate;
• Now close the corresponding air valve (V31.1, V32.1 or V33.1) and
disconnect the compressed air hose from the Barry mount letting the air
out;
• Remove the screws securing the Barry mount;
• Replace the Barry mount;
• Assembly is done in reversed order;
Afterwards check the height.
5.32.2 Membrane levelling system

(Fig. 803C; not for CM100)
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5.32.2.1 Adjusting the air damper height H

• Open the main valve V30 as to fill the air dampers V31, V32 and V33.
• Check that after filling the base plate is free from the console;
• Check that the projection chamber rim is not touching the table top.
• If not, readjust the compressed air levellers 40, or adjust the overall height
of the damper assembly. Release the air from the damper and adjust the
two nuts 49 until the ring 48 is 1 mm lower than the aluminium flange 13.
See also cross section of damper Fig. 803C.
5.32.2.2 Changing the membrane

(Fig. 803C)
• Close valve V30;
• Let the compressed air out of the dampers by releasing screw 30 Fig. 802
using a small screwdriver;
• Remove screws 21;
• Remove screw 12;
• Take off the aluminium flange 13;
• Remove the eight screws 46 and take away the metal ring 48;
• Replace the membrane 17;
Assembly is done in the reversed order.
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5.33 BF/DF Detector up to May 1996 H

(Figure 824)
This detector assembly is delivered as standard with the STEM part.
It can be mounted in two positions:
position 1 is “in the axis” of the central beam. That is where flange 351
(Figure 812A) is shown. This position is preferred.
position 2 is in the “off-axis” position. That is where flange 334 (Figure 812A)
is shown. This position must be used when an EELS or TV system must also
be fitted. However, it must be noted that the performance of the detector has
some restrictions compared with position 1.
POSITION 1 POSITION 2
A
2
2
3
5
4
3
6
4
7
EM6141A EM5355
5.33.1 Removal of the dark field detector chip

• Unsolder the two wires to the detector chip;
• Remove the two nuts 32 and remove the complete chip 28;
• Replace the chip with a new one and secure the two nuts;
• Re-solder the wires using soldering without flux. The black wire (signal)
should be connected to the small soldering area. The green wire (earth)
should be connected to the big soldering area.
5.33.2 Replacement of the photomultiplier tube

• Remove the screws 51, and remove the complete assembly with the tube
44, now the tube can be replaced.
• remount in the reverse order.
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5.33.3 Further dismantling H

(only in the event of vacuum leaks)
• Unscrew the screws 35 and separate the two detector halves;
• The long scintillator glass rod 34, can be removed by releasing the screws
15;
• Remove the dark field detector, see 5.31.1 “Circuit description”.
• Remove screws 30, remove flange 29, and take out O-ring 31.
• Unsolder the two wires from the feed-through 25;
• To take out the O-ring 26, unscrew the nuts 27. Now the feed-through itself
can be removed.
5.34 Near Axis System (NAS)

May 1996 onwards
From May 1996 onwards CM100/120 instruments were delivered with a bottom
plate as those for CM200/300 instruments and new interface block, see
Figure 812A-1. This interface block can be removed in order to place the NAS,
PW6437/00, see Figure 825.With this unit it is possible to simultaneously
mount the following detectors:
• BF/DF detector in the Off Axis position;
• EELS or PEELS detector (Gatan) or TV (Gatan) in the Axial position;
• CCD TV system (Gatan) in the Off Axis position;
• DF detector in the Axial position (Optional);
• Faraday cage (Optional).
5.34.1 Dismantling and assembling procedure
5.34.1.1 Dismantling the DF detector

(Figure 825)
• Let air into the projection chamber see 5.2 “Admitting N2 to the column”.
Wait until the projection chamber is completely vented;
• Remove the cables to DF-X1 to DF-X6 and the earth connection;
• If an EELS, PEELS or TV detector is fitted, it should be removed first;
• Remove the NAS by unscrewing the three screws 85;
• Unsolder the wires from the supports 5;
• Unscrew the supports then remove bracket 7;
• Remove the screw 6 and take out the plate 18;
• Unsolder the wires 9, 14 from the DF detector chip 25;
• Remove the screws 19 and replace the detector.
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5.34.1.2 Removing the prism H

(Figure 825)
• Remove the BF detector unit using the screws 37, Figure 827;
• Pull out the stops 48. Take care not to lose them. The BF detector will not
operate correctly without them, because light leaks in;
• Remove the screws 49;
• Gently pull out block 56;
• Now gently remove the prism 58 together with lead bush 66 (glued) from
the interface block 89.
5.34.1.3 Removing the pmt from the BF detector

(Figure 826)
• Disconnect the cables. Be careful with the high tension cable X1;
• Remove the BF detector using the screws 37;
• Remove screw 17 and take out cover 18 together with the tube connection
21 and the photomultiplier 22;
• Replace the photomultiplier tube.
5.34.1.4 Removing the scintillator with fluorescent screen

(Figure 826)
• Unsolder the wires from the supports 5;
• Unscrew the supports and the remove bracket 7;
• Remove the screw 6 and take out the plate 18;
• Remove screws 37, Figure 826 and put the BF detector aside on a
temporary support (the cables are too short to put the BF detector on the
floor);
• Remove screws 26;
• Remove clamping bush 28;
• Gently remove scintillator with flu-screen 29.
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Assembly H
NOTE: Take great care mounting the scintillator. Prism 58 should not touch the
fluorescent screen. The distance from the bottom of the scintillator to the
metal ring 34 should be approx. 30 mm.
• Mount the ring 34 and O-ring 35 from the bottom up;

• Mount the scintillator;
• Carefully mount the clamping bush 28;
5.34.A 35MM Camera film transport mechanism

(9432 063 04511) (OPTIONAL)
The 35mm camera film transport mechanism is located on top of the projection
chamber.
5.34A.1 Mounting
• Remove cover 204, Figure 812A and mount the transport mechanism in its
place;
• Connect the plug to the socket on the MS panel X9;
• Loading of the camera, and its operation, are described in the microscope
Operating Instructions.
NOTE: When the 35mm camera is mounted, be sure that jumper A3 is placed
on the System Definition Board. The SDB is mounted in position MBCL-
X15, see Electronics, Sect. 3.10.6.
5.34A.2 Dismantling and assembly

(see Figure 822)
During reassembly, special attention should be paid to the following:
• Ensure that shaft 61 is clean and free of damage, especially on the vacuum
surface. Lightly grease O-ring 43 with Fomblin RT 15;
• Adjust screw 2 such that points 11-14 and MS X9 are short-circuited when
knob 62 is pulled out a few millimetres;
• Ensure that pins 16 actuate microswitch 4 when gearwheel 17 is turned;
The position of pins 16 can be adjusted when the two screws 49 are
loosened. If after this adjustment the microswitch does not switch properly,
readjust the position of the fixing bracket 7 by loosening screws 5.
• The force required to push in knob 62 is adjusted to between 1600 and
2000 grams weight by screw 30.
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5.35 BioFilter H
NOTE: For the BioFilter Gatan has made a CDROM especially for Service. This
CDROM is called BioFilter Service, currently Revision 1. This CDROM is
intended for service engineers only and will be handed out on trainings
only. The CDROM comprises the mechanical and electrical drawings of
the Filter. Also the installation instructions for the Filter are located here.
The files are in Adobe PDF (Portable Document Format), which can be
read using the Adobe Acrobat reader on multiple platforms (reader files
are located on the CDROM).
5.35.1 Removal of the GATAN CCD camera

• Switch the cooler to the “off” position on the CCD controller.
NOTE: Switching the cooler to heating will reduce the waiting time. Make sure
the temperature of the peltier element is above 10 °C before letting air
into the projection chamber. Normal minumum waiting time is 30
minutes. This can be checked using the GetTemperature script in the
custom menu item of the Digital MicroGraph software on the MacIntosh
computer.
• Switch off the CCD controller.

• Remove the cable as indicated in the Figure below.
1 1
1
EM7728
• Remove the water connections from the CCD camera.
NOTE: The water does not have to be switched off. The connections are made
via fast couplings.
• Remove the cover of the CCD camera by loosening the 4 screws M2.5.
NOTE: Before the camera is let up to air, make sure that the compressed air
connections are removed from the gate valve (See Figure 814E). Now
the gate valve stays in the opened position.
• Let air into the projection chamber.

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• Remove the 3 screws 1, M2.5. Now the CCD camera can be removed. H
CAUTION! Do not blow on, or brush the phosphor, because it is very sensitive.
• If the phosphor screen has to be removed, loosen the two Philips screws
and remove the clamping fork. Take care that the grounding wire does not
scratch the phosphor.
– Carefully slide the screen away. Clean the surface with Alcohol.
– Put a drop of immmersion oil (the bottle is marked MSC to SCINT)on
the scintillator surface.
NOTE: Make sure that there are no air bubles visible in oil.
– Replace the phosphor screen and retighten the two Philips screws.
• Mounting is done in the reversed order.
NOTE: Cooling down the camera takes also approx. 30 minutes. This can be
checked using the GetTemperature script in the custom menu item of the
Digital MicroGraph software on the MacIntosh computer.
NOTE: Do not forget to reconnect the gate valve compressed air hoses.
5.35.2 Removal of the TV rate camera

• Remove the compressed air line from the camera. Tie a knot in it to prevent
it from continuously blowing out air.
NOTE: Before the camera is let up to air, make sure that the compressed air
connections are removed from the gate valve (See Figure 814E). Now
the gate valve stays in the opened position.
• Let air into the projection chamber.

• Remove the two screws M2.5 from the top.
• Now carefully retract the camera. Make sure that this is done straight up; if
not the scintillator can be damaged.
• Mounting is done in the reversed order.
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6 Pumping system (Mechanical) H
NOTE: For the vacuum sequence and electrical operation see Electronics
Manual, Volume 1, Sect. 1.8.
6.1 Summary of maintenance activities

Maintenance frequency should be determined by service experience, but the
following operations are recommended at least once a year
Rotary pump - Change oil once a year (see6.2.2 “The rotary pre-
vacuum pump”.d, oil changing);
Exhaust filter p.v. pump - Drain oil, as determined by experience (see
6.2.2 “The rotary pre-vacuum pump”.e, Exhaust
filter);
Oil diffusion pump - Check pumping speed once a year (see
6.3.2 “Checking the pumping speed of the OD
pump”). Replace oil if discoloured or charred (see
6.2.3 “High vacuum pump unit”.b, Fluid changing);
Penning gauge - Check the operation every 6 months.
Clean if necessary (see 6.2.4 “Penning gauge”);
Pirani gauge - Check the operation every 6 months. Clean if
necessary (see6.2.6 “Pirani gauges”);
Pneumatic valve - Check operation once a year. Change the seals
every two years (see 6.2.5 “Pre-vacuum valves V1
and V2”), lubricate with “Fomblin RT15”;
Electromagnetic valves - Check operation every 6 months (see 6.2.9 “Valves
V8, V10, V11 and V12”). These valves should not
be lubricated but kept clean;
Ion Getter Pump - Check performance (see microscope column, Sect.
4.1 “Checking the pumping speed”.). See also
Sect. 6.2.7 “Ion getter pump”.e, Fault finding.
In addition to the pumping speed and pumping time checks for the different
airlock operations, it is necessary to ensure that the UHV valves (V4, V5, V6,
and V7) are good enough to prevent inter-vacuum leaks. If the seating of these
valves are inadequate, the pumping cycle can be disturbed during an airlock
cycle if IGP pressure increases above 2.6 x 10-2 Pa (IGP = 65).
On operating one of the airlock systems the change in vacuum reading due to
leakage may not exceed +1 unit as shown on the P3 display, or +3 units as
shown on the IGP display.
If the change in vacuum reading is greater than allowed, the valve should be
dismantled and cleaned.
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6.2 Dismantling, assembly and maintenance H
6.2.1 Admitting air into the pumping system

Before air is let into the pumping system the OD pump should be allowed to
cool down for at least 1 hour after being switched off (either by switching off the
microscope or by removal of the OD pump fuse). Air should first be admitted
into the projection chamber (operating the “cam air” softkey), then let air into
the buffer tank and the diffusion pump by very slowly and carefully loosening
the dipstick 217 to 219, Figs. 820.
Air is let into the pre-vacuum lines by opening valve V1 using the service key
and the manual page. Air can also be admitted into the pre-vacuum lines by
removing Pirani P2.
6.2.2 The rotary pre-vacuum pump

(Figs. 820)
6.2.2.1 General description

The vacuum pump is the basic evacuation unit for the production of sub-
atmospheric pressures; it operates by trapping a quantity of gas/vapour mixture
from the vacuum system, which it then compresses and ejects into the
atmosphere.
The pump incorporates a gas ballast device which allows most condensed
vapours to be pumped directly into the atmosphere whilst still remaining in the
vapour state. This largely avoids contamination of the pump interior.
6.2.2.2 Using the gas ballast device

After a pump has been filled with new oil it is advisable to run the pump on full
gas ballast for 3 to 12 hours (i.e. control knob turned fully counter-clockwise).
This purges the oil and improves the ultimate vacuum. The gas ballast valve is
normally closed (control knob in fully clockwise position).
6.2.2.3 Removal from the microscope

Switch off the microscope. Disconnect the supply cable from MS-X7.
Disconnect the rubber vacuum hose by first loosening screw 294 and clamp
295 on top of the p.v.p. At the outlet of the pump, disconnect the polyflo hose to
the T-coupling.
6.2.2.4 Oil changing

It is advisable to change the oil once a year. Remove the p.v.p. (see 6.2.2 “The
rotary pre-vacuum pump”.c) and place it on a table near the supply unit. Place
a suitable container (approx. 2 litres) beneath the gravity drain plug and remove
plug. Allow the oil to drain out completely. Reconnect the p.v.p. supply plug to
MS.X7, switch on the microscope to start the pump. Pour a small quantity of oil
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down the vacuum inlet for flushing purposes. H

Switch off the microscope and replace the p.v.p. drain plug; remove the oil filter
plug and refill the pump to a level which is visible within the sight glass range
and is above the minimum oil level (approx. 1.6 litres).
Replace the filter plug, and replace and reconnect the pump.
NOTE: When the pump is functioning correctly, the level of oil in the sight glass
will drop when the pump is switched on. During normal operation, the oil
level must always be visible in the sight glass.
6.2.2.5 Exhaust filter

The separated oil must be drained periodically, when the oil is visible in the
exhaust hose.
If the collected oil is clean it may be returned to the pump for re-usage.
Contaminated or dirty oil must not be reused.
NOTE: See also Edwards documentation MO4628 concerning OMF series Oil
Mist Filters model OOMF 12.
6.2.2.6 Specification
Edwards Leybold
Type : E2M8 Trivac D8B
Ultimate vacuum : 2.6 x 10 Pa without gas ballast; 1.066 x 10-2 Pa
-2
2.6 Pa with gas ballast 5.33 x 10-1 Pa with gas ballast

Speed of rotation : 1425 (50 Hz) / 1725 (60 Hz) 1500 rpm 50 Hz; 1800 rpm 60 Hz
Max. ambient temp. : 40 °C 40 °C
Oil capacity : 0.55 l. No 15 min. 0.30 l; max. 0.90 l
Voltage : 220 V -5% +10% 220 V (208 V - 230 V)
Phase : Single 50 Hz/60 Hz Single 50 Hz/60 Hz
Power : 0.37 kW (1 hp) 0.559 kW (1.5 hp)
Weight (with motor) : 22.8 kg 29.5 kg
6.2.3 High vacuum pump unit

(Figure 820A and Figure 820B)
6.2.3.1 Removing the high vacuum pump unit from the desk
• Admit air into the pumping system as described in 6.2.1. and switch off the
microscope;
• Remove connectors from PVG X5, X6, VDB X8-X10 and MS X7;
• Ensure that the pump is cold;
• Close the water inlet and disconnect the water hoses 187, 192 to the OD
pump inlet and outlet;
• Remove the PVP from the desk (see 6.2.2 “The rotary pre-vacuum
pump”.c). Also remove the hose 330 between manifold 320 and block 334
and disconnect the polyflo hose 370 from manifold 320;
• Close the compressed air valve and disconnect the compressed air hoses
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from the pneumatic valve block 17;

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• Remove clamp 155 between the backing outlet 145 and the buffer tank at H
the ODP end;
• Put a support under the ODP and unscrew the eight nuts 186 fixing the
pump assembly to the column;
• Move the vacuum system out of the desk.
NOTE: Reassembly of the vacuum unit can be carried out in the reversed order.
Check that seals 128, 129,Figure 820B (or for older systems seal 185,
Figure 820A) are clean.
6.2.3.2 Oil diffusion pump

Introduction
The oil diffusion pump also contains a water cooled baffle and a high vacuum valve.
The air pumping speed just above the high vacuum valve is 120 l/sec. and the ultimate
vacuum is ≤ 2.67 x 10-6 Pa. A combined drain tube and filling spout (complete with
dipstick) is fitted to provide a means of draining or checking and replenishing the pump
fluid without removal of the pump from the system. The high vacuum valve is opened
by means of a pneumatically operated cylinder and is closed by springs and/or
pneumatic pressure.
Working principle
The pump fluid in the boiler is heated to the boiling point to generate a suitable
pressure within the jet system. The resultant vapour passes upwards through
the jet stages and emerges from the jet nozzles as high velocity vapour
streams to impinge and condense on the cooled pump body, and subsequently
drain to the boiler. Under normal operation, a portion of any gas arriving at the
pump inlet (top jet) is trapped, compressed and transferred to the next stage.
This process is repeated through the pump jet stages, until the gas is removed
via the backing tube.
Fluid changing
If the pump ceases to give a satisfactory ultimate pressure in a clean leak-tight
system, the fluid must be inspected by removing dipstick 218. If the oil is badly
charred or discoloured, the pump must be dismantled and cleaned. The pump
is filled as follows:
• Let air into the high vacuum pump unit, see Sect. 6.2.1 “Admitting air into
the pumping system”;
• Switch on the pump heater for 5 minutes to assist draining;
• Unscrew the drain connection 225, 226 at the base of the pump and drain
off the fluid;
• Screw home the drain connection then pour 60 ml fluid into a clean
measuring container;
• Unscrew and remove the knurled nut 217 on the filler connection then
remove dipstick 218 and O-ring seal 219. Using a suitably sized funnel, fill
the pump with fluid to the correct level and check with the dipstick. Replace
the dipstick and the O-ring seal then screw home the nut on the filler
connection.
NOTE: Due to the high viscosity of Santovac 5, the fluid should be warmed prior
to filling. Due to the high temperature of the pump it is strongly advised to
use Kalrez O-rings (219, 224, Figure 820B) on the dipstick.
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6.2.3.3 Dismantling H
• Warm the fluid for a few minutes to assist draining;
• Switch off the pump heater and disconnect plug MS X7;
• Remove the high vacuum pump unit from the desk as described in 6.2.3.a;
• Remove Co-seal 128, 129 (or for older systems 185, Figure 820A) and, if
necessary, remove screws 135 and take out O-ring 134. For older systems
remove screw 133 and O-ring 135, Figure 820A.
• Remove V3 pneumatic valve driver assy. This should be done as follows:
– Remove the circlips 47, 55;
– Remove plate 48, release Allen screw 44, remove lever 40;
– Unscrew Allen screws 36;
• Unscrew the valve seating 130 from the high vacuum valve shaft 127,
releasing screws 126;
• Remove the high vacuum valve shaft from the pump;
• Release the Allen screw 125; strip 124 and baffle cap 118 can now be
removed from the pump interior;
• Remove the spring 119;
• Insert the extractor tool 117 in the M5 extraction hole located in the first
stage jet cap 120, then carefully withdraw the complete interior jet
assembly from the pump body.
6.2.3.4 Cleaning and inspection
W A R NI NG ! Ensure there is adequate ventilation in the

cleaning area and observe normal precautions
when using volatile solvents for cleaning
purposes.
NOTE: All O-rings should be removed prior to cleaning components.
• Wash the pump interior, the backing tube/ condenser and the jet assembly
in “GENKLENE” or other suitable solvent (trichloroethylene);
• Remove all traces of solvent by washing the components with acetone
then remove the acetone by baking to 75 °C or passing warm, dry air over
the components;
• Examine the valve seal 131 (or for older systems 130, Figure 820A) and
the O-ring seals 128, 129 (or for older systems 185, Figure 820A) on the
valve spindle and renew these if they show signs of wear, damage, or
deterioration. Lightly coat replacement seals with Fomblin RT15 grade oil
during assembly.
NOTE: Co-seals 128, 129 (or for older systems 185, Figure 820A) must never
be cleaned with solvent, use a dry (lint-free) cloth or paper tissue. If
removal of solvent from an elastomer is necessary, light baking under
rough vacuum is advised.
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6.2.3.5 Reassembly H
(Figure 820B)
• Insert the jet assembly into the pump body and position it on the base,
aligning the jet with the backing tube and the slot in the base of the jet
assembly with the pin in the base. Position the spring 119 on the top of the
jet assembly;
• Insert the baffle cap into the pump, easing it through the valve bore.
Assemble the baffle cap 118 and the retainer strip 124 and secure the strip
with the retaining screw 125;
• Refill the pump with clean pump fluid (see fluid changing, 6.2.3 “High
vacuum pump unit”.b);
• Remount the HV valve shaft 127 in the pump;
• Mount the HV valve seating 130 on its shaft 127 using allen screws 126;
• Remount the pneumatic valve driver assembly as follows:
– Fix Allen screws 36;
– Remount plate 58, lever 40, plate 48 and fix circlips 47, 55;
• Mount co-seals 128, 129 (or for older systems 185, Figure 820A);
• Remount the high-vacuum unit under the desk as follows:
– tighten nuts 186 so that the OD pump is supported;
– switch on pumping system and pump down to a P1 readout of 30;
– retighten nuts 186, but ensure that rings 183, 185 can just be moved.
• Reconnect the buffer tank at point H with clamp 155 and screw 156.
See also Sect.6.2.3 “High vacuum pump unit”.a;
• Reconnect the cooling water and compressed air hoses;
• Remake the electrical connections.
6.2.3.6 Renewing the heater element

• Isolate the pump from the mains supply (remove plug MS X8);
• Remove the retaining screws 174 then detach the terminal box cover 169;
• Disconnect the electrical wires from the terminal block;
• Unfasten the securing nut 207 from the underside of the pump then
carefully remove the bottom cover assembly and heater clamp;
• Disconnect the electrical connections from the heater assembly 202 and
remove it. Fit the replacement heater;
• Position the heater clamp and cover assembly 205 so that the terminal box
is correctly located relative to the backing spout. Coat the threads of the
cover securing stud with anti-seize compound then fit the cover assembly
securing nut 207 and fully tighten;
• Reconnect the terminal block earth leads to the screw provided on the
terminal box. Fit the terminal box cover 169.
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6.2.3.7 Radiation Shield H

It is desirable that the radiation shield surrounding the pump boiler be kept
clean to maintain pump thermal efficiency.
6.2.3.8 Technical data and specification:

Pump model/code no. : Diffstak 63-PH2/B624-24-00
Pumping speed (for air) : 115 litres/sec
Ultimate vacuum : Better than 10-5 Pa
Critical backing pressure : 60 Pa
(using Santovac 5 fluid)
Backing pump : Displacement : 9.5 m3/h 50 Hz or 11.4 m3/h (60 Hz)
Model : Edwards E2M8
Recommended pump fluid : Santovac 5
Fluid charge : 60 ml
Heater rating : 0.45 kW
Electrical supply : 220 V, 1-phase
Minimum cooling water flow : 42 l/h
Cooling water connections : 6 mm coupling
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6.2.3.9 Fault finding H
Fault Probable cause Action

Poor ultimate pressure 1. Leak in system, virtual or real Locate and rectify.
Check O-rings on drain
2. System dirty Clean system
3. Contaminated pump fluid Examine and renew.
4. Low heat input Check voltage. Check for continu-
ity, burned out element or poor
thermal contact.
5. Inadequate cooling Check tubing for obstruction and
back pressure.
6. High Backing Pressure Check for leak in backing line;
breakdown of pump-fluid.
Low speed (prolonged cycle) 1. Low heat input Check heater.
Top up fluid.
2. Low fluid level
Check and rectify.
3. Malfunctioning pump assembly;
improperly located jets; dam-
aged jet system.
Inlet pressure surges 1. Incorrect heater input Check and correct.
2. Fluid outgassing Condition fluid.
3. Leak in system ahead of pump Check and correct.
inlet
4. Trapped volume in system Check and correct.
5. Excessively lubricated O-ring Check and correct.
seals
High chamber contamination 1. High backing pressure Check for leaks in backing line,
poor mechanical pump perfor-
mance or breakdown of pump
fluid.
6.2.3.10 Pneumatic cylinder for High Vacuum Valve V3#

(Figure 820B)
To dismantle the cylinder proceed as follows:
• Switch off the vacuum system;
• Remove the two pressure hoses 66 and 79. Disconnect the wire on Y3.1,
so that hose 79 is no longer kept under pressure;
• Remove the complete V3 pneumatic valve driver assy. This should be done
as follows:
– Remove the circlips 47, 55;
– Remove plate 48; release Allen screw 44; remove lever 40;
– Unscrew Allen screws 36.
• Loosen nuts 116 to dismantle the cylinder and then remove the shaft and
piston from the cylinder housing. The mu-shaped cuffs 95, 97 can now be
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removed by pulling them out of their seats. H
NOTE: Further dismantling is not advised as all threads are secured with Loctite.
• When reassembling the cylinder, all O-rings must be lightly lubricated with
Fomblin RT 15.
NOTE: If seals must be replaced, please order the spare part kit for the
pneumatic cylinder (see parts list). For mechanical defects the complete
cylinder should be replaced. Take care that after assembly the
microswitch is activated.
6.2.4 Penning gauge

(Figure 821)
6.2.4.1 Working principle

The Penning gauge head is of a cylindrically symmetrical design. The centrally
mounted stainless steel anode 188 is supported in the body, and insulated from
it, by a teflon insulator. Surrounding the anode are two stainless steel cathode
cup assemblies 184, 185 through which the anode passes. A third cup 180 also
of stainless steel acts as a baffle. A stainless steel compression spring 186
separates the cathode assy. from the PTFE anode holder 188. The cylindrical
magnet and cover 179 complete the gauge head.
The anode is sealed in its holder by means of an O-ring 187 and held in place
by a brass thumb nut 189.
An O-ring seal is positioned between the anode holder and the gauge body, the
two components being held together by a large retaining nut. Connection to the
vacuum system is made by a clamping ring 176 with a co-seal 171, 174, 175.
6.2.4.2 Maintenance
The gauge head normally requires regular maintenance, e.g. twice per year. To
do this, or if the penning gauge reading is unstable or if it is suspected that the
gauge head is not functioning correctly, remove and dismantle the head for
inspection.
6.2.4.3 Dismantling
W A R NI NG ! First remove plug LHT X1 as the penning gauge

is always at a potential of 2 kV.
• Admit air into the pumping system, see Sect. 6.2.1 “Admitting air into the
pumping system”;
• Release the clamping ring 176 and remove the gauge head;
• While holding the gauge in the vertical plane with the electrical connection
end uppermost, unscrew the knurled nut 189 to remove the end cap and
cable 190;
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• Carefully lift out the PTFE insulator 188 and O-ring 187; H
• Invert the gauge head to remove the compression spring 186, cathode
electrodes 180, 184, 185 and baffle;
• The anode assembly may be dismantled by unscrewing the brass thumb
nut 189 and withdrawing the anode and O-ring 187 from the vacuum side
of the teflon insulator.
6.2.4.4 Cleaning
Contamination may be removed by cleaning in KOH solution. Stubborn
deposits on the steel anode pin and the cathode cups (including the peripheries
of the holes) should be removed with fine emery paper. However, if the anode
surface becomes rough, e.g. after cleaning, it is advised to order a new one.
Finally, wash the cleaned items three or four times with cyclohexane and dry.
NOTE: It is important that the anode pin should not be distorted during this
process. Make sure that the central hole in each cathode cup through
which the anode pin is positioned has no encrustation, as this produces
instability.
6.2.4.5 Assembly
• Replace the baffle, cathode cups and spring;
• Insert the anode with the unlubricated O-ring into the PTFE insulator and
tighten the thumb nut just sufficiently to compress the O-ring;
• Visually check the axial alignment of the anode and adjust if necessary;
• Locate the PTFE insulator and the unlubricated O-ring in the body and
replace the end cap and nut;
• Position the gauge on its mounting block 99 and fix it with coupling 176.
6.2.4.6 Technical data and specification:

Model : Edwards CP25 K
Range : 1.33 Pa to 1.33x10-5 Pa
Electrode voltage : 2300 V at 0.7 mA max.
Volume added to system : 36 ml
Nett weight including lead : 0.8 kg
Length of gauge : 117 mm
Overall diameter : 63 mm
6.2.5 Pre-vacuum valves V1 and V2

(Figs. 820)

The valve is pneumatically actuated to open against spring pressure and
interruption of the air supply will close the valve. The valve mechanism consists
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of a pneumatically actuated piston and valve shaft to which an O-ring sealed

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valve pad is attached. The spring loaded shaft operates in anti-friction (“Oilite”) H
bushes housed in the pneumatic cylinder and in the bearing assembly. Shaft
sealing is by means of double O-ring seals fitted in the bearing assembly and
the inter-seal space is vented to atmosphere. The cylinder body is also
separately sealed by means of O-rings. A bracket fitted to the top face of the
cylinder body is provided for mounting the microswitch.
6.2.5.2 Maintenance
The valves have been designed for long term trouble-free life and the valve
actuating mechanism incorporates self-lubricating, anti-wear materials, hence
maintenance requirements are minimal.
NOTE: Elastomer O-ring seals have proved reliable for a service life greater
than 100.000 cycles under vacuum conditions. However, for optimum,
leak-free service and to conform with “planned maintenance
requirements”, it is recommended that the O-rings are changed at
25.000 cycles or every two years, as convenient.
1. To renew the valve pad O-ring:

Disconnect the air supply to the valve. Remove the four Allen screws 249
from the cylinder body then remove the body complete with the valve
mechanism and bearing assembly. Detach the O-ring seal 306 from the
valve pad.
NOTE: All O-rings must be lightly lubricated with Fomblin RT15 prior to
assembly.
2. To renew the cylinder body (upper and lower) O-ring seals 254-284:
Insert a 2.5 mm dia. steel pin in the hole provided in the valve shaft to
prevent rotation. Using a suitable peg spanner, carefully unscrew the valve
pad* 305 from the shaft 280. Remove the spring 288 and then withdraw the
bearing housing 285 and the piston assembly 280 from the cylinder body.
To gain access to the O-ring seals in the bearing housing and in the
cylinder body, first remove the bearings 252, 284. The upper and lower
body O-rings 254-287 may now be removed and replacement O-rings
fitted.
CAUTION! Do not exert excessive force when screwing home the valve on the
shaft as distortion of the shaft may occur.
6.2.5.3 Data and specification:

Model : Edwards PV10P
Actuating pressure
-recommended range : 2.8 x 105 Pa to 4.2 x 105 Pa
-minimum : 2.1 x 105 Pa
-maximum : 7.0 x 105 Pa
Baking temperature : up to 70 °C
Leak rate : better than 1.33 x 10-7 Pa.l/s
Weight : 260 g
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6.2.6 Pirani gauges H

The Pirani gauges P1 and P2 are mounted in different parts of the pumping
system, i.e.:
P2 - directly to the lines;
P1 - to the buffer tank.
6.2.6.1 Description
The gauge head has a single 12 micron tungsten filament mounted on a teflon
plug inserted into a stainless steel body tube to form a vacuum seal. This
filament is connected to the vacuum system and its temperature (= resistance)
is a measure of the pressure. A second filament on the outside of the gauge
head envelope is exposed to normal air and compensates for ambient
temperature fluctuations so as to ensure accuracy of measurement. Further
details are found in Sect. 3.11.
6.2.6.2 Maintenance
Considerable care has been taken in the design and manufacture of the
filament assembly to provide a robust structure capable of long reliable
performance. However, since the filament is of quite fine wire only 12 micron in
diameter, damage can occur if it is subjected to excessive mechanical shock or
vibration. Drift of the operating characteristics of the gauge head may occur if it
is operated in an atmosphere that causes contamination of the tungsten
filament. Since such contamination usually results from oil or grease vapours, it
can generally be removed by washing out with acetone (i.e. fill with solvent and
shake; do not damage the filament). After cleaning, wash with cyclohexane and
dry.
NOTE: When remounted, check the full scale adjustment (see Sect. 3.11.6 of
Electronics manual, Vol. 3).
6.2.6.3 Data and Specification:

Model : Edwards PRCT-10-K (D021-52-000)
Pressure range : 1.33 x 104 Pa to 0.13 Pa
Accuracy of measurement : ±10% in the range 1.33Pa to 1.33 x 104 Pa
Response time : 50 milliseconds
Filament operating temperature : 160 °C, approximately
Gauge head operating temperature: 0° to 50 °C range
Gauge head max. baking temp. : 70 °C
Volume added to system : Approximately 6.5 ml
Nett weight incl. lead and plug : Approximately 175 g
6.2.7 Ion getter pump

(Figure 821)
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6.2.7.1 General description H

The ion getter pump Model EP100 is suitable for operation in the range 0.13 Pa
to below 1.33 x 10-6 Pa, and has an intrinsic peak pumping speed for dry air of
100 l/s. The single electrode structure provides pumping into the ultra high
vacuum region via two separate pumping ports. The pumping speed varies for
the type of gas being pumped. The life of the pump depends on the operating
pressure but is greater than 20.000 hours at 1.33 x 10-4 Pa.
The electrode geometry and magnetic field strength are chosen to provide a
high discharge intensity continuing to low pressures in order to ensure a well
maintained pumping speed into the ultra-high vacuum region.

The ion getter pump utilizes the pumping action of an electrical discharge,
combined with the getter action of a clean surface of titanium metal.
The electrodes of the pump consist of a pair of parallel titanium cathode plates
with an open cellular anode, equispaced between them.
The cathodes are at earth potential and the anode is at a high positive
potential. The discharge is initiated by the fortuitous production of an electron
within the electrode assembly which will accelerate towards the anode.
The path length of the initiating electron is artificially lengthened by the open
cellular construction of the anode, since the electron oscillates before it is
finally captured and is also under the influence of the magnetic field; thus its
path is an oscillatory helix. The path length of the electron, thus artificially
lengthened, increases collision probability and hence ionization probability.
Electrons released in the ionization process act in the same manner as the
initiating electron, but the positive ions are accelerated towards the cathode.
Positive ions, colliding with the cathode, dislodge material from the cathode
and this process is called sputtering. The sputtered material, being electrically
neutral, tends to travel in straight lines building up a film of sputtered material
over the anode, pump body and opposite cathode.
Material landing on the opposite cathode will be differentially sputtered with
very little sputtering taking place from those parts of the cathode opposite the
solid lattice of the anode and enhanced sputtering taking place from those parts
of the cathode opposite the open parts of the anode. Thus, there is a net build
up of sputtered deposit on parts of the cathodes, the anode and the pump body.
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Magnetic field
a b c d e f
Titanium
cathode
Stainless
steel
anode
Titanium
cathode
Region of cathode Region of build up of cathode

errosion by sputtering material by collection of
away titanium. sputtered titanium. EM2001
Fig. 6-1 Pumping mechanism in the diode ion getter pump
a. Typical path of an electron liberated by field emission.

b. Electron path closer to the anode after having undergone an ionizing
collision. Secondary electron generated by ionizing collision is not
shown.
c. Titanium sputtered from the cathode by positive ion bombardment with
regions of net loss and gain of cathode material indicated.
d. An active gas molecule trapped by chemical combination with sput-
tered titanium on the anode.
e. An inert gas ion buried in the cathode by positive ion and subsequently
covered over.
f. Light gas ions buried in the cathode by positive ion bombardment and
diffusion into the cathode bulk.
The first pumping action to be considered is chemical, i.e. between the titanium
of the cathode and sputtered deposit and active gases.
Titanium forms stable oxides and nitrides which may be sputtered from the
cathode without breaking down. The second action is mechanical, i.e. the burial
of inert and active gas in the sputtered deposit, particularly in the areas of the
cathode where there is a new build up of sputtered deposit. Both these actions
account for pumping of active gas, while the second action also results in the
pumping of inert gases.
Hydrogen may be pumped by diffusion into the cathodes. The majority of
hydrogen atoms are pumped by the solution of hydrogen in the cathode.
As hydrogen builds up on the surface of the cathode, concentration gradients
are set up, forcing the hydrogen to diffuse further into the cathodes. A certain
amount of helium may also be pumped in this manner.
Titanium films tend to react with water vapour, forming the oxide and releasing
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hydrogen. This hydrogen is not readily adsorbed through the film of oxide, thus H
large quantities of water present should be pumped out before using the ion
getter pump. Similarly, organic substances in the system in any large quantity,
e.g. freon gas, may poison the cathode surface. The method of dealing with
this is to enhance the sputtering rate by pumping argon for a short time, thus
exposing a clean titanium surface.
6.2.7.3 Cleaning
The performance of the ion getter pump is intrinsic in its design provided the
internal components of the pump remain clean. However, oil vapours may
accidentally arrive inside the pump from other parts of the system. Also, after
many months of operation, titanium films may build up inside the pump to an
extent which affects the ultimate vacuum, due to increased outgassing. If
essential, cleaning of the pump interior can be undertaken locally but, if known
to be contaminated, the pump should be replaced. When installing a new pump
ensure that it is not open to the atmosphere for any longer than is absolutely
necessary. Also check the cleanliness of the HT feed-through, as titanium
flakes may fall down into this area, causing instability and possible short-circuit
of the pump. Two procedures for improving the internal cleanliness of the pump
are outlined below (to be carried out only if unavoidable):
• Argon discharge cleaning
This procedure is recommended for improving the performance which has
been impaired by the occurrence of poisoned areas on the cathode
surfaces. To achieve this leak argon into the ion getter pump to a pressure
of about 0.13 Pa and run the pump under these conditions for a few
minutes. Due to the high sputtering rate of titanium for argon, a fresh
titanium layer is exposed and the performance improved.
• Chemical cleaning
Flakes of sputtered titanium and hydrocarbon contamination may be
removed by washing the interior of the pump thoroughly using a non-ionic
detergent. This must be followed by a tap water rinse then a deionized
water rinse. Gentle baking to about 100 °C in air will be sufficient to dry the
pump.
6.2.7.4 Data and specification:

Model/Code no. :
Edwards EP100/B036-06-00
Type :
Diode
Intrinsic pumping speed :
100 l/s
Ultimate vacuum below 1.33 x 10-6 Pa
:
Maximum working pressure :
0.133 Pa
Operation Voltage/Imax :
7 kV/100 mA
Dimensions :
Height (overall) 600 mm
Weight :
35 kg (estimated)
Maximum bake out temperature (when pump is mounted: 150 °C)
Contents
Figures
CM 100/120 Mechanics 50129 060427 6-15

6-16 50129 060427 CM 100/120 Mechanics
Contents
Figures
6.2.7.5 Fault finding H
Fault Probable cause Action
Slow starting which causes 1. Leak in system Trace leak and rectify
difficult starting and limits ulti- 2. Cathode surfaces are contami- Send to Eindhoven for replace-
mate pressure to above nated by organic material. ment.
1.33x10-4 Pa.
3. Insufficient inert gas by the oil Check tripping point (see 3.11).
4. Ion getter pump has been left Prolong the roughing cycle and
open to atmospheric pressure for use argon discharge cleaning if
an excessive time in humid atmo- necessary (see Cleaning).
sphere and a large quantity of
water vapour has been absorbed
in the cathodes.
Pressure Bursts Occur Flaking of sputtered deposits occurs. Clean pump as described under
“Cleaning”.
Leakage currents result in Field emission or resistive leakage Apply 10-14 kV a.c. at 20 to 30
accuracy of pump as a pres- due to whiskers. mA to burn off whiskers
sure indicating device to be - if this fails, clean the pump as
impaired described in “Cleaning”.
Instability Titanium flakes falling on the HT Clean HT feed-through

feed-through.
Short-circuit Titanium flakes in HT feed-through, Check HT plug and socket.
or build up of whiskers in pump itself. The leakage current of the HT
plug is less than 10-7A at 7 kV.
Clean if necessary. If the short-
circuit is in the pump body,
remove the pump from the sys-
tem and replace pump.
Pump reading zero Fuse P/A13 F13 open Reset fuse by pressing button in.
6.2.8 Valves V5 and V6

(Figure 821)
NOTE: From March 1993 onwards, air pressure is only used for opening the
valve. So only one air pressure hose will be connected to each valve.
The magnetic valves Y5.0 and Y6.0 on the column support will be
removed.
Valve V5 = PV40PK (not for CM10), valve V6 = PV25PK.

NOTE: These pneumatically operated valves are mounted on valve blocks. V5,
V6 are mounted to block 4 and block 99, respectively.

Valves V5 and V6 are pneumatically actuated to open against pressure
induced by a bellows, and interruption of the air supply will induce closure of
the valve. The bellows assembly consists of a stainless steel bellows, the upper
Contents
end being vacuum brazed to a stainless steel disk and the lower end to the
Figures
6-16 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 6-17
Contents
Figures
stainless steel valve pad into which the stainless steel valve shaft is screwed. H
The O-ring sealed, pneumatic piston is swaged to the shaft stem which
operates in anti-friction (“Oilite”) bushes inserted in the air cylinder body and in
the bearing housing. The air cylinder is separately sealed by O-rings which are
retained by the bushes. A bracket is provided (but not used) for mounting the
microswitch which can be actuated by the tapered valve shaft for remote
indication of “valve open/closed” position.
6.2.8.2 Maintenance
The valves have been designed for long term trouble-free life and the valve
actuating mechanism incorporates self-lubricating, anti-wear materials, hence
maintenance requirements are minimal.
NOTE: Elastomer O-ring seals have proved reliable for a service life greater
than 100,000 cycles under vacuum conditions. However, for optimum
leak-free service and to conform with “planned maintenance”
requirements, it is recommended that O-rings are changed at 25,000
cycles or every two years, as convenient. If the bellows assembly is
damaged, or if the seating is scored or defective, the complete valve
should be replaced.
In the following text, the numbers given refer to V6, while numbers in brackets
refer to V5.
i) To renew the valve pad O-rings 84 (149):
1. Disconnect the air supply to the valve. Remove the four socket screws 16
(170) from the cylinder body 14 (163) then detach the body. Withdraw the
valve actuating mechanism 12 (160) complete with bearing housing and
bellows assembly from the valve block 86 (57)
2. Detach the O-ring seal 84 (149) from the valve pad.
3. Examine the cylinder body and the pneumatic piston O-rings 11 (161) and
renew if damaged or deteriorated.
NOTE: With the exception of the pad seal 84 (149) and O-ring seal 85 (144), all
O-rings must be lightly lubricated with Fomblin RT15 prior to assembly.
ii) To dismantle the bellows assembly:

Carry out the dismantling procedure as in i) above. Insert a 2.5 mm dia. steel
pin in the hole provided in the valve shaft to prevent rotation. Using a suitable
peg spanner, carefully unscrew the bellows assembly 80 (150) from the shaft.
Remove the spring 79 (154). Access to the O-ring seals 19, 77 (156, 168) in
the bearing housing can be obtained by withdrawing the valve shaft from the
housing and removing the bearings 17, 78 (155, 169).
CAUTION! Do not exert excessive force when screwing home the bellows
assembly on the shaft as distortion of the shaft may occur.
Contents
Figures
CM 100/120 Mechanics 50129 060427 6-17

6-18 50129 060427 CM 100/120 Mechanics
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Figures
6.2.8.3 Data and specification: H

Model/Code no. : Edwards PV25K(V6) and PV40K(V5)
Operating pressure range : 3.2 x 10-5 Pa to 6 x 10-5 Pa
Leaking range : Across seat – better than 1.33x10-7Pa.litres/sec
Across body – better than 1.33x10-7Pa.litres/sec
Nominal actuating pressure : 3.5 x 105 Pa (3.5 kg/cm2)
Minimum actuating pressure : 2.8 x 105 Pa (2.8 kg/cm2)
Maximum actuating pressure : 7 x 105 Pa (7 kg/cm2)
Air line connections : M5 screw coupling
6.2.9 Valves V8, V10, V11 and V12

These electrically operated valves are mounted on top of the emission
chamber (see Figure 821) and are identical.
Exploded views of V10 and V11 can be seen in Figure 821.
Technical data:
Type : Herion 0246 9202051
Function : 2/2 solenoid valve closed when de-energized
Voltage : 24 V (-10% to +15%); 7 W
6.3 Performance check/fault finding

NOTE: Valid for microscopes which are in regular use. After installation or repair
the pumping times quoted may be greatly extended.
6.3.1 Checking the leak rate of the pumping system

To check the leak rate, proceed as follows:
• Select the manual page (see also 6.3.3 “Manual operation of the vacuum
system”) and monitor P2;
• Switch off the ODP heater using the softkey “ODP”;
• Start the p.v. pump using the softkey “PVP”;
• When the pre-vacuum lines have been evacuated to below 13.3 Pa, open
valve V1 to the buffer tank by pressing softkey “V1”;
• When the reading is nearly zero, close valve V1, and switch off the p.v.
pump;
• After 15 minutes the P1 reading should still indicate the same value;
• If not, repeat steps (3) and (4) to eliminate degassing. If this does not help,
the system is leaky.
Contents
Figures
6-18 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 6-19
Contents
Figures
6.3.2 Checking the pumping speed of the OD pump H

• Start the vacuum system (cold start);
• After approx. 30 minutes (with plate camera removed), P3 reading should indicate
a pressure of 9 x 10-3 Pa (display of “58”). If this condition is not met, the vacuum
system is defective because:
– Pirani/penning switching levels are incorrect;
– Cooling water temperature too high and/or water flow too low;
– OD pump defective (heater defective or oil contaminated);
– Pumping system leaks;
– Thermal switch on the ODP is defective or remains too cold.
• When the thermal switch temperature is reached and the backing pressure
is < 13.3 Pa, the HV valve is opened.
If the HV PV timer is lapsed, the column is again pre-pumped.
NOTE: See also 4.1 “Checking the pumping speed” for Ion getter pump
performance and airlock recovery times.
Important: For fault finding see also 6.2.3 “High vacuum pump unit”.i.
6.3.3 Manual operation of the vacuum system
NOTE: The vacuum system can only be operated in the manual mode when the
service key is present.
• Remove the customer key and replace it by the service key;

• Select the vacuum page and press softkey “manual”. The vacuum system
will now be switched off;
• All functions may now be selected manually. However, take care not to
select faulty pumping cycles;
• To exit from manual mode, press the “vacuum on” switch;
• Remove the system definition key and replace it with the service key.
Contents
Figures
CM 100/120 Mechanics 50129 060427 6-19

CM 100/120 Mechanics 50129 060427 7-1
Contents
Figures
7 List of O-rings H
This section contains a list of the O-rings which the user of the microscope is
advised to keep on stock.
It is advisable to replenish the stock of O-rings in good time to avoid
unnecessary delays when such parts have to be replaced.
The hardness is 60 shore.
A number of each of the listed O-rings is supplied with every microscope.

When ordering O-rings for the first time, it is suggested to first check which
rings have been included in the delivery of the instrument.
Note should also be taken of the following:
National Seal Division O-ring packaging
Each replacement O-ring is packed and sealed in an envelope which carries

information relating to the exact type of ring.
An example of such information is given below for Viton rings.
CAUTION! Buna O-rings should no longer be used as they cause contamination

at higher temperatures, e.g. during baking out. All Buna O-rings must
therefore be replaced by Viton rings during maintenance activities.
It is important to know the difference between Buna and Viton rings, as the
characteristics of these two types are very different and one should not be
substituted for the other.
If an O-ring has been removed from a package and its type is not known, this
can easily be determined by the fact that a Buna ring floats in cyclohexane,
whereas a Viton ring will sink.
NOTE: Contact of rings with cyclohexane should be for as short a time as

possible.
Viton package Definition

1 Ea. O-ring One piece O-ring
NAS1593-151 Type of O-ring - ISO number NAS1593 always indicates
a VITON O-ring.
Mil-R-25897 Military spec.
Cure date 4th Qtr. 74 Date of manufacture.
National Seal Div. Manufacturer
Compound V14 Kind of material.
V14 always indicates a VITON O-ring.
Amer. Inv. Int’l Address
P.O. 3921
Definition of diameters d and D
as used in the tables following.
d
D
Contents
EM4267
Figures
CM 100/120 Mechanics 50129 060427 7-1

7-2 50129 060427 CM 100/120 Mechanics
Contents
Figures
Ordering no. d in mm Recomm.

Viton O-rings D in mm
Qty.
Special 5322 530 51051 1.27 1.07 3
004 5322 530 54026 1.78 1.78 3
006 5322 530 54028 1.78 2.90 3
007 5322 530 54029 1.78 3.68 3
008 5322 530 54031 1.78 4.47 3
009 5322 530 54032 1.78 5.28 3
010 5322 530 54033 1.78 6.07 3
Special 5322 695 14688 1.78 8.73 3
012 5322 530 54413 1.78 9.25 3
015 5322 530 54036 1.78 14.00 3
016 5322 530 54228 1.78 15.60 3
017 5322 530 54283 1.78 17.17 3
018 5322 530 54414 1.78 18.77 3
019 5322 530 54037 1.78 20.35 3
020 5322 530 54391 1.78 21.95 5
021 5322 530 54415 1.78 23.52 3
022 5322 530 54514 1.78 25.12 3
023 5322 530 54038 1.78 26.70 3
024 5322 530 54392 1.78 28.20 3
025 5322 530 51198 1.78 29.87 3
026 5322 530 54041 1.78 31.47 3
028 5322 530 54393 1.78 34.65 3
029 5322 530 30111 1.78 37.82 3
031 5322 530 54416 1.78 44.17 3
033 5322 530 50853 1.78 50.52 3
039 5322 530 51211 1.78 69.57 3
Special 5322 530 54473 2.00 8.00 2
Special 5322 695 14824 2.00 10.00 2
Special 5322 695 14823 2.00 16.00 2
104 5322 530 54394 2.62 2.84 3
109 5322 530 54332 2.62 7.59 3
VIT4A 5322 530 54353 2.62 7.92 3
111 5322 530 54352 2.62 10.77 3
112 5322 530 54042 2.62 12.37 3
113 5322 530 54043 2.62 13.94 5
114 5322 530 54224 2.62 15.54 3
Special 5322 530 51024 2.62 15.88 3
Contents
Figures
7-2 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 7-3
Contents
Figures
Ordering no. d in mm Recomm. H

Viton O-rings D in mm
Qty.
115 5322 530 54044 2.62 17.12 3
117 5322 530 54395 2.62 20.23 3
119 5322 530 54046 2.62 23.47 3
120 5322 530 54417 2.62 25.07 3
125 5322 530 51316 2.62 32.99 3
128 5322 530 54047 2.62 37.77 3
130 5322 530 51212 2.62 40.94 3
131 5322 530 51021 2.62 42.52 3
133 5322 530 51213 2.62 45.69 3
137 5322 530 50621 2.62 52.07 3
149 5322 530 50895 2.62 71.12 3
156 5322 530 51201 2.62 107.62 3
157 5322 530 51216 2.62 113.97 3
202 5322 530 51315 3.53 5.94 3
210 5322 530 54418 3.53 18.64 3
215 5322 530 54221 3.53 26.57 3
225 5322 530 54635 3.53 47.22 3
226 5322 530 54068 3.53 50.39 3
228 5322 530 54422 3.53 56.74 3
Special 5322 530 50885 3.53 60.33 3
236 5322 530 54459 3.53 82.14 3
242 5322 530 50654 3.53 101.19 3
245 5322 530 54504 3.53 110.72 3
246 5322 530 54058 3.53 113.89 3
254 5322 530 54462 3.53 139.29 3
255 5322 530 54463 3.53 142.47 3
267 5322 530 50632 3.53 209.14 3
268 5322 530 54637 3.53 215.49 3
326 5322 530 50887 5.33 40.64 3
328 5322 530 50638 5.33 46.99 3
330 5322 530 54424 5.33 53.34 3
335 5322 530 54506 5.33 69.22 3
349 5322 530 50581 5.33 113.66 3
Contents
Figures
CM 100/120 Mechanics 50129 060427 7-3

7-4 50129 060427 CM 100/120 Mechanics
Contents
Figures
7.1 Special O-rings and miscellaneous vacuum parts H
Description Order code Recomm.

Remarks
Qty.
FPM 70° Sh.A 5 x 115 5322 530 51236 1 Eriks
O-ring special 1.27 x 1.07 5322 530 51051 3
O-ring special 1.78 x 8.73 5322 530 14688 3
Lipseal DE 150100 5322 530 50858 3
DOWTY seal PP 45-3 5322 532 40069 3
Mu-shaped cuff 5322 530 50857 3
Mu-shaped cuff 5322 321 40088 3
Membrane 5322 695 15511 1
Gaco R112 5322 530 54262 3
Gaco seal 0993-57 5322 530 50703 3
Gaco seal RM 0271-16 5322 530 54615 3
Gaco seal RM 1943-57 5322 530 50704 3
Quadring mini 4010 5322 530 54351 3
Quadring mini 4011 5322 532 54423 3
O-ring Eriks 901 5322 530 50856 5
O-ring Herion 2 x 9 5322 530 50889 5
O-ring Herion 2 x 13 5322 530 50891 5
O-ring special 2.00 x 8.00 5322 530 54473 2
O-ring special 2.00 x 10.00 5322 695 14824 2
O-ring special 2.00 x 16.00 5322 695 14823 2
O-ring Edwards 2.4 x 5.3 5322 530 51165 3 Kalrez
O-ring Edwards 2.62 x 15.88 5322 530 51024 3 H021-26-121
O-ring special 3.53 x 60.33 5322 530 50885 3
O-ring Edwards 5 x 15 NW10 5322 530 50881 3 H021-24-032
O-ring Edwards 5 x 28 5322 530 50894 3 H021-24-033
O-ring Buna 5.7 x 47.2 5322 530 51189 3
O-ring carrier KF10 5322 530 50879 3
O-ring carrier KF25 5322 256 90981 3
Rubber sleeve SC10 Edwards 5322 695 14258 1
Rubber seal 5322 321 40088 1
Co-seal NW25 Edwards 5322 528 20466 3 B271-58-448
Co-seal NW40 Edwards 5322 528 20467 3 B271-58-453
Co-seal Viton Edwards 5322 530 54494 3
Indium wire 0.5 mm Ø 5322 695 14817 1
Indium wire 0.7 mm Ø 5322 695 14818 1
Indium wire 1.0 mm Ø 5322 695 14819 1
Contents
Figures
7-4 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 7-5
Contents
Figures
7.2 Manufacturers of em accessories H

1. AGAR AIDS for electron microscopy
66a Cambridge road
Stanstead
Essex
CM24 8DA
England
Telephone: Bishop’s Stortford 0279-81 35 19
Telex: 81 667
2. Balzers Union A.G.
Elektronenmikroskopie
Postfach 75
FL-9496 Balzers
Liechtenstein
Telephone 075-41 922
Telex: 77 983
3. Accessories for Microscopy
Ernest F. Fullam Inc.
P.O. Box 444
Schenectady, New York 12301 USA
Telephone: Colonie-New York 518-785-5533
Telex: Fullam Latm 710-444-4966
4. Ladd Research Industries Inc.
P.O. Box 901
Burlington, Vermount 05401 USA
Telephone: 802-658-4961
Telex 95 46 44
5. SPI Supplies; a Division of STRUCTURE PROBE Inc.
P.O. Box 342
West Chester, PA 19380 USA
Telephone: 215-436-5400
Telex: 83 3 67
6. Ted Pella Inc.
P.O. Box 510
Tustin-Cal 92680 USA
Telephone: 714-557-9434
Telex: PELCO TUSTIN
Trade mark for Electron Microscopy Acc.: PELCO
7. Polaron Equipment Limited
21 Greenhill Crescent-Holywell Ind. Est.
Watford WD1 8XC England
Telephone: 0923 37 144
Telex: 92 20 80
8. Polysciences Inc.
Paul Valley Ind. Park
Warrington PA 18976 USA
Telephone: 215-343-6484
Telex: 510-665-8542
Contents
Figures
CM 100/120 Mechanics 50129 060427 7-5

7-6 50129 060427 CM 100/120 Mechanics
Contents
Figures
9. EBTEC Corporation H
120 Shoemaker Lane
P.O. Box 465
AGAWAM Mass 01001 USA
Telephone: 413-786-0393
Telex: 95-5343
10. Materials Science North/West Ltd.
North West House, Beverly Avenue
Poulton-le-Fylde,
Lancashire
England
Telephone: 0253-88 40 38
Contents
Figures
7-6 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 8-1
Contents
Figures
8 Mechanical drawings H
Spare parts
Contents
Fig. 801 Cross section of the microscope column

Figures
CM 100/120 Mechanics 50129 060427 8-1

8-2 50129 060427 CM 100/120 Mechanics
Contents
Figures
H
Spare parts
Contents
Fig. 802 Rear view

Figures
8-2 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 8-3
Contents
Figures
Spare parts
V30
*
BioFilter
* Note : The dimensions given are

without lead shielding
84 mm
Off axis gap
Photo multiplier
Screw
(4 x)
The small slots are from

the BF/DF interface
flange.
Top view of Filter

Scintilator cartridge
EM7454
Fig. 802A Rear view for CM120 BioFilter only

Contents
Figures
CM 100/120 Mechanics 50129 060427 8-3

Contents 8-4 50129 060427 CM 100/120 Mechanics
Figures
H
Spare parts
H
Contents
Figures
Fig. 803A Cross setion baseplate (CM10)

Contents CM 100/120 Mechanics 50129 060427 8-5
Figures
H
Spare parts
H
Contents
Figures
Cross section baseplate (CM10(0)/CM12(0), from April 1992 onwards Fig. 803B
Figures
H
Spare parts 27
28
99 100
101
103 184
29
104
98 180
11
12 30 97 179
94 105
31
13 33 90 178
89 106
177 186
107 187
88 188
108 189 190
32 192
87 193
108
86
34 85 110
176
35 84
114
175
36
115
174
37
26 83 116
38 172
80
3 117
25 39
226
40 118 194
4 41 A
119 169
120 168 A
5 42 79
225
6 43 78 167 C
1 0 9 8 224
2 C
7
121
77 166 A C C 195 219
122 165 218
123 164 A
45 76 217
7 24 160
8 159 216
124
46 215
9 158
157 214
75 125 156
48 B 210
155
154 B
126 209
145
10 49 127
74 B 200 208
FOR TRANSPORT 144 B
23
ONLY 22 143 203 EM4608C
21 S34 142
20 141
19 68 69
50 140
67 139
18 66 70
17 64 138
65
51 59
58 60
14 16 56 137
57
15 204
205
135 206
134
130 207
129
H
Contents
Figures
Emission chamber + lifting mechanism Fig. 804

Figures
H
3
Spare parts
4
6 NOT FOR FEG

7
8
ITEM 9 NOT 9
FOR CM200/300
10
11
1
109*
105*
106* 40
110*
107*
108*
13 ONLY FOR CM 100/120
12
3 14
ONLY FOR CM 200 40
4 100
5 42 40A
ONLY FOR
15 ONLY FOR CM 200
16
CM 300
6 17
7 104
18
8 19
9 48 54
20 55
10 38
11 13 39
12 23 41
14 24
40
25 61 62
26 43
27 44 73
45 46 72 70 71
ONLY 28
47
FOR 29
49
50
30 53
CM100 30 56
57
32 32 ONLY FOR CM 200 58
59
6063
33 64
33
65
34 34 66
ONLY FOR CM 200
35
35
ONLY FOR CM 300 67 68 69
NOTE: ITEMS SHOWN WITH * ARE
36 36 FOR CM200FEG AND CM300 FEG ONLY EM4609C
37 37
H
Contents
Figures
Valve V7 Fig. 805

Figures
H
ONLY CM200FEG 103
Spare parts ONLY CM200 1

2
3
4 75
5 74
6
70
7
69
8
68
9 67
ONLY CM200FEG
10 66
65
ONLY CM200FEG 116 64
63
115 62 ONLY CM200
114 11 60 31
110 61 172.5
109 12 59
106107108 58 CM200
105 13 57
11 56
SEE ALSO GONIOMETER 55
STAGE 14 81.5
15 54
66.5
SEE ALSO 50
118 17 49
FIG.805 48
118 22 18
19
20 47
119
46
45
16 44
21 41
42
1
24 2
FROM OCT 1990
3
43
25 4
5
6
9X ONWARDS
7
8 172.5
9
33 CM100/120
26
37
27 81.5
40 66.5
39
28
38
36
35
31 ONLY CM200
34
30 EM4610G
29
H
Contents
Figures
Upper lens section Fig. 806

CM 100/120 Mechanics 50129 060427 8-9
Contents
Figures
H
Spare parts
Contents
Fig. 807 Goniometer stage (manual stage)

Figures
CM 100/120 Mechanics 50129 060427 8-9

8-10 50129 060427 CM 100/120 Mechanics
Contents
Figures
H
FOR UPPER LENS: ALIGNMENT MARK 7 6 5 4 3
FACING DOWNWARDS
8 97 401
96
ALIGNMENT MARK 97
Spare parts 94
90
9 10
89 403
14 88 402
15 400
12 16 87
11 17 86
85
FOR STANDARD 18
19
24 20 A B
79 78 77
A B
A B
80
25
76
75
74
26
27
28
FOR FOR UT
STANDARD 29
30
34
31
Note: FOR DETAILS OF ALL PORTS
SEE FIG. 807B
CM200 ONLY
311 312 35 73
510 32
300 313 314
304
358
303 72 359
360
513 71
512
103 361
CM200 ONLY 104 36 365 CM100/120 ONLY
105 37 366
301 302 367
106 38
107 315
NOT FOR CM300 109 108 39
110 363
40 ALIGNMENT MARK
41
115 113 44
64 65 66 67 68 69 70
121
122 114 45
516
116 CM200 ONLY
124 117118 FOR LOWER LENS: ALIGNMENT MARK
125 120 123 FACING UPWARDS
126
129 NOT FOR UT 14 X 2
127
130 46 60
128
132131 47
62
48
133 61
144
134 49
135 50 FOR
136 54 STANDARD
137 55
138 56
139 57
140
143
NOTE: FOR FIXING THE DIAPHRAGM TO THE 58
OBJECTIVE STAGE SEE FIG. 807B
59 EM6814
Fig. 807A Goniometer stage (Compustage)

Contents
Figures
8-10 50129 060427 CM 100/120 Mechanics

Figures
H
218
Spare parts 212 217 CM120 BIO TWIN
216
38B 38A 38C
25A
211 CM100 ONLY
CM200 ONLY 10 11 12 13
215 9
8 24
18 15 14
214 7
210 CM120/200 16
209 6
19
208 25 17
5 29 28 27 26
207
206 33 14A
4 35
197
219 36 14C 14B
196 38
198 199 49
200
51 68
204 61 67
34 69
205 53 81 73 71
37 47 52 60
54 64 66
48 73A
46 56 59 71A
195 * = NOT FOR CM100 70
39 40 44 45 55 58 72
* 41 81A
190 189 188 187 186 185 48A 65
194 57
48B
*
CM100 ONLY 42
43 74
(4x) 75
*
CM200UT ONLY
76
CM200 ONLY 129 128 126 77
* 125 141 78
127 124 120 142
130 119 79
184 118
117
180 135 80
147 136 116
179 84
178 115 114 86
137 133 108
131 110 P 85
177 151
148 132 123
176 149 122 90
138 121 109
172 152 94 87 92
150
175 139 95 91
154 88
153 140 112 113A 113 96
CM200UT ONLY 174 155
156 97
171 89
170 144 CM200 ONLY
161 105 104
169
162 145 107
106 101 100 99 98
157 View on Arrow P
220 224 225
146
158 163 Detail of special O-Ring 120, Fig. 807B EM6575B
168 Z sensor
166 CM120 BIO TWIN
159
167 CM200 ONLY Manufacturing ridge
(greatly exaggerated)
CM200UT ONLY
160
165 164
Hemispherical bearing
H
Contents
Figures
Goniometer stage (CS CM100/120/200) Fig. 807B

Figures
H
Spare parts
H
Contents
Figures
Right hand ear Fig. 808

Figures
H
Spare parts Motor unit X axis
62 63A
DETAIL A A
35
X support
121 131
125 132 128
M 133
122
127 Transport holder

N
47 Lead plates
126
E
New EPD spring (1st series)
Measuring
M System X
141
SEE
DETAIL P
D connector
A X1 for holder
A D
L 142
K N
B
D
F G
H
P
F
C
F
Q
317A
Q Measuring
System Y
299
298
292
G
312
293 K
301 X1 = EPD Xray prot (only CM300) (54) L

(1st series) X2 = EPD Airlock (48)
H
X3 = GDB - X8
SEE SIB2
TSI DETAIL X4 = Opto switch holder identification (140)
(1st series) E
B
296A C
D
Motor unit
Y axis D
EM6580C
DETAIL B
X1 = EPD X motor (59)

X2 = EPD Ymotor (298)
X3 = GDB - X8
SIB1
X4 = Opto switch Z motor (284)
354
355
356
TOP VIEW OF Y-DRIVING AXLE UP TO 1994

357 clamping block flat surface
Y-axle
296 300
H
Contents
Figures
Exploded view of CS (CM100/120/200) Fig. 808A

Figures
H
Cross section on A-A
EM6577
Spare parts
H
Contents
Figures
Cross section of CS (CM100/120/200) Fig. 808B

Figures
H
Spare parts 4 5 6 7 8
9 10
16 15 14
EM6566A
17
H
Contents
Figures
Covers for Compustage CM100/120/200 Fig. 808C

8-16 50129 060427 CM 100/120 Mechanics
Contents
Figures
H
Spare parts 4
5
6
10
14
15
16 28
19
26
25 20
18 46
29
30 44
45
34 35 36 38 37 39 40 EM6899
Contents
Fig. 808D Compustage joypad (CM100/120/200)

Figures
8-16 50129 060427 CM 100/120 Mechanics

Figures
H
Spare parts
H
Contents
Figures
Left hand ear Fig. 809

8-18 50129 060427 CM 100/120 Mechanics
Contents
Figures
H
Spare parts ONLY CM200
140
141
1
126
2
3 50
CM120/200 4 ONLY 120
5
6 54
7
8
55
46
49
CM100 49A
dia 4.1 x 6 x 31
52 56
125
52A
ONLY 48
dia 4.1 x 6 x 27 119 118
CM200 45 61 120
9 47 124
10 51 57
14 117
62
53 58 116
15 59 115
60
16
17 64 1 111
2
3
4
5
6
9X 112
7
8
9
137
18 66
136 138 139 113
67
CM120 68
69
68 70
69 114
19 44 74
70 110
40 ONLY
74 75 CM100/120
20 71 76
ONLY
dia 4.1 x 6 x 30 72 109 77
CM200
39 73
21 38
37
36 108
23 134
35
135
24 34
33
106 CM100
32
107
131 105
78
31 104
25 132
100
130
133 99
CM200 ONLY 92 ONLY
26 CM200 CM200
30
91
29
95 96
27 90
CM100
28
79 89
84
80
SEE ALSO GONIOMETER STAGE 85

NOT FOR CM100 86 EM4613D
87
88
Contents
Figures
Lower lens section Fig. 810 H
8-18 50129 060427 CM 100/120 Mechanics

Figures
H
Spare parts 28
29
30 40
43
44
45
46
47
34
35
48
79
78
49 77
36
37 50 76
38 75
53 74
39 54
55 52 73
72
56
(FROM MARCH 1989
5 ONWARDS) 25
24
19 70
18
69 ONLY FOR CM120
6 11
7
9 67 68
66
65 76
4
64
ONLY FOR CM100
63
27
16 25 59 60
14 20 62
10 58
17 61 (ONLY FOR CM200) EM4614C
15 57
13
8
3
H
Contents
Figures
Camera airlock Fig. 811

Figures
H
Spare parts
H
Contents
Figures
Projection chamber and plate camera drive + numbering Fig. 812A

CM 100/120 Mechanics 50129 060427 8-21
Contents
Figures
1 18 (2x)
Spare parts
17
16
10
11
12
13
14
EM7731
199 58751
15
Contents
Fig. 812-1A Interface block CM100/120 from May 1996 onwards

Figures
CM 100/120 Mechanics 50129 060427 8-21

Figures
H
Spare parts
38
10
37 24
25
17 26
1 18
ONLY
2 19
FOR CM300
3 14
16
4
15
5
6 28
29
7
14
31
32
33
20
A
36
27
(Ø 48 h7)
30
20.85
35
34
39
EM6517A
(199 38421)
FOCUS PLANE ONLY FOR CM300 ONLY FOR CM300
H
Contents
Figures
Plate numbering unit Fig. 812B

Figures
H
Spare parts
39 38 36 35 34 2
3
100 4
44 43 40 37
33 30 5
101
6
7
102
29 28
103
8
45 25
46
26 9
49
C
10 11 14
50 24
AB
51
C
52 23
57
58 20
59 19 18 A
B
60
15
53 16
54
17
55
EM2750B
56
H
Contents
Figures
Exchange unit plate film and plate film cassette Fig. 813
Figures
H
H
Contents
Figures
Spare parts
Water and air connections, circuit diagram (up to Oct 1998) Fig. 814A
CM 100/120 Mechanics 50129 060427 8-25
Contents
Figures
H
Spare parts +24V
VDB
R3
COLUMN
X9-14
C1
C2 S34
COLUMN
OBJ. 1
SEPARATION
X9-15
OBJ. 2
DIFF
X81 VDB
INT
X32 X82
P1
P2 MS-X5-5 X17-9
0.7 l/min.
0.7 l/min.
0.7 l/min.
S39 X78
** X10-5
0.7 l/min.
S40 P/A13
6 6 MAINS
10
** PANEL
3 1
BAKE OUT
S37
compr. air 2
X10-4
X17-26
X77
blow - off MS-X5-4 X33
V21
5 9 X11-1
V22
6 LNSOFF
X203-13
0.7 l.
X202-1 RHP
0.7 l.
MRU PBH
MBCL-X34
LPR 7021
6 314 V7
*
113
0.7 l.
ODP 0.7 l.
4 CUROFF
SUPPLY
FAST COUPLING
310 REF-X14
COUPLING
DRAIN EM5107C
* FROM JUNE 1996 ONWARDS.
** FOR CM20, THE FLOW MUST BE SET TO 0.5 l/min.

IN CASE OF WATER TURBULANCES.
Fig. 814B Water and air connections, circuit diagram (up to Oct 1998)
Contents
Figures
CM 100/120 Mechanics 50129 060427 8-25

8-26 50129 060427 CM 100/120 Mechanics
Contents
Figures
H
1 No number
2 678.06050.2, Pressure on red line
means gate is closed.
3 Make sure the lens 2 cable is
connected to the filter before
mounting to the microscope as
afterwards it is very difficult.
4 Location of plugs can be swapped.
Spare parts
4
to GIB, slit GIB, magnet
GIB, VSM lower
to GIB, lens 3
GIB, focus 4
to camera control
unit, camera
transparent hose
to camera control,
camera air
(transparent)
(female)
GIB, slit (white label)
(male)
ODP 3-0 (red label) 1
(male)
ODP 3-1 (black label) 2
GIB, lens 2 3
Blue GIB, lens 1
label
To water out
(Water)
Green
Blue
Blue label Black To GIB, AN/SOL
label
(Green label) Blue Red
APERTURE
SELECTOR
GIF multiscan
flow camera unit
meter (679.07070.0)
10 - 15 l/h
to water in
(transparent)
EM7455
Fig. 814C Electrical, pneumatic and water connections, CM120 Biofilter

Contents
Figures
8-26 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 8-27
Contents
Figures
H
TO MICROSCOPE
WATER OUT
Length appr. 90 cm
Blue label
FROM FILTER (Female)
COOLING WATER
Green label
(Male) Filter
Blue label Blue label

(Male)
TO FILTER
COOLING WATER
Length appr. 120 cm

25
20
15
10
2
5
20 C
l/h
TO MICROSCOPE
WATER SUPPLY
10 - 15 l/hour
Length appr. 110 cm
EM7457
Fig. 814D Water connections CM120 Biofilter

Contents
Figures
CM 100/120 Mechanics 50129 060427 8-27

8-28 50129 060427 CM 100/120 Mechanics
Contents
Figures
Gate valve open

(Black)
Coming
from CM
V3-1
(Black)
Open
V3 valve
Diffusion
pump
Camera
To Gate valve chamber
From CM
(Red) V3-0
Close
To compressed
air system
(Red)
Gate valve closed
To TV camera
controller (Black)
(Black)
(Transparent)
(Transparent) (Transparent)
To GIB slit To AN/SOL GIB
(White)
To slit To slit GIB
EM7456
Contents
Fig. 814E Compressed air connection CM120 Biofilter

Figures
8-28 50129 060427 CM 100/120 Mechanics

Figures
H
4
Spare parts ONLY FOR CM12
8 9 10 14
WATER WATER
A INLET OUTLET
5
6
V26
S37
7 15 16
RETURN
FROM
COLUMN
V23
R 17 - 18 - 19
29 28 27 20
S32 TO
COLUMN
P A
A
ODP TO ELECTRICAL V22
UNITS
P
RETURN
EL. UNITS
RETURN
ODP
A A
EM4617A
PRESSED
AIR
A
26 25 TO ODP 24
H
Contents
Figures
Water and air connections, mechanical (upto Oct. 1988) Fig. 815A
Figures
H
H
Contents
Figures
Water and air connections from Oct 88 to Apr92 Fig. 815B

Figures
H
Spare parts OBJ. 1 OBJ. 2
A 68 69
DRAWN ROTATED
67
V23 V24
MCR
LEVEL
CM200UT V30
VIEW A 54 COND. 1
160 & CM300 160
150 150 60 60 60 60
P 7
ONLY
50 50 50 50
DIFF.
50 49
100 100 40 40 40 40
61 62 5
30 30 30 30
63 64 65 66 V34 S37 8
50 50 20 20 20 20
INT.
10 10
B 10 10
COND. 2
20 20
10 15
5 5 5 5
PROJ. 2 9
55 56 57 58 59 60 FROM
AIR SUPPLY BLOCK
36
AIR
SUPPLY DIFF. 14
N2 GAS BLOCK V21
15 BLOW OFF
TO ZEM FROM ZEM

ODP
48 INT.
PROJ. 2
17
47 PBH
WTR. OUT CCD CAMERA

OBJ. 1 OBJ. 2 COND. 1 COND. 2 PROJ. 1
PROJ. 1
For exact water connections for various microscope types, see Figs. 814D and 814E
CCD CAMERA
20
VIEW B V22
46 TO BLOW OFF
40 CM200UT 26
& CM300
ONLY ODP
71
TO WALL WATER
72
FROM ZEM 28
VIEW P 35
ODP
TO ZEM
73 WATER IN
FROM WALL WATER
34 CM200UT
& CM300 29 - 30 - 33
74 ONLY
FROM COMPRESSED AIR

SUPPLY BLOCK
72
75 TO LEVELLING SYSTEM
EM6489B
(From April 1992 onwards)

H
Contents
Figures
Water and air connections from Apr92 Fig. 815C

Figures
H
Spare parts N2
SUPPLY
EMISSION Y5.0 * **
CHAMBER V11 Y11
3 AIR DAMPER
V33.2 V33.1
V5
UHV VALVE *
*
Y5.1 * Removed from March 1993
onwards
V10
V7 S7
GUN VALVE * Y10 *
Y7 *
**
2 AIR DAMPER
V32.2 V32.1
IGP
Y6.0
HV
VALVE V6
GONIOMETER
SPECIMEN Y8
V9 HOLDER Y6.1
M3 **
V8 1 AIR DAMPER
V4 V31.2 V31.1
PROJECTOR VALVE
Y4
V34
PROJ. V30*
CHAMBER
V20 S20
Y20.1
PL. CAMERA
Y12 SUPPLY BLOCK
V12 Y20.0
COMPRESSED
HV AIR SUPPLY
V3 S3 S3’
VALVE
Y3.0
BUFFER S32
Adjust
M1 to 4 bar
ODP Added from
March 1993 Y3.1
onwards
NOTE: .0 = REST POSITION
PV BUFFER V1 S1 S37 .1 = WORK POSITION
VALVE = NOT FOR CM100
Y1 *
* * = UNTIL AUG. 1989
BLOW OFF
V2 S2
PV VALVE EM4618B
M2 M PVP PROJ. Y2
CHAMBER
H
Contents
Figures
Pneumatic circuit diagram Fig. 816

CM 100/120 Mechanics 50129 060427 8-33
Contents
Figures
gun lift
Gun up X1 S7 only for

S7 S33 P82 P83
GUN ALIGNMENT DCB1 X5 X VDB X7 X
Gun lo X2
DCB2 X5 X M3
PENNING LHT/P X1 X
MC X1
+ 1 5
C1 4
2 PBH A1 X1 X
MC X2
+ 1 2 column
C2 3 separation
2
BEAM DEFL. lo X3 S34
FBDR X5 option for STEM VDB X9 X
DCB3 X5 X
up X4
DCB4 X5 X
BEAM DEFL. UNIT TWIN X5 IGP
DCB5 X5 X PV valve
Y10
VDB X20 X
air inlet gun
X8
Y11 VDB X21 X
COND. STIGM. X7
DCB7 X5 X
X3 IGP SUPPLY
MC X3
1
OBJ. 1 5
+ 2 PBH A2 X1 X
MC X4
2
OBJ. 2 4 SPECIMEN VDB X12 X
+ 1 PV valve AIRLOCK
Y8
DIF. STIGM. X11

CSP X4 X GONIOMETER
STAGE
OBJ. STIGM. X8
DCB8 X5 X holder
IMAGE DEFL. UNIT
tilt
CSP X3 X
IMAGE
CSP X2 X
DEFL.
MC X5
1 4
DIFF.
2 + 5 PBH A3 X1 X
MC X6
2 3
INT.
1 + 2
SCA MC X7
1 + 5
PROJ. 1 4
2 PBH A4 X1 X
MC X8
1 + 2
PROJ. 2 3
2
= Y6.0 and Y5.0 removed

VDB X13 X from March 1993 onwards.
X9 X11 SHUTTER COIL

35mm CAM. HV valve gun
Y6.0
MS X9 X HV valve gun
OPTS option for CM10 Y6.1
proj. valve VDB X9 X
SMALL SCREEN
Y4
VDB X14 X
OPTS LARGE SCREEN 400mm HV valve not for CM10
Y5.0
400mm HV valve not for CM10

SDD X5 X
Y5.1
option for CM10
gun valve not for CM10
plate numb.
Y7
LHP PLATE CAM. pl. cam. neutr. option for CM10 VDB X7 X
plate cam. switches
X302 X301 Y20.0
X1
pl. cam. work option for CM10
S20 Y20.1
Added from March ‘93
thermo onwards.
odp oil HV valve
Y3.1
S31 S3 S3’
odp water HV valve
X RHP X204/404 VDB X10 X
Y3.0
ODP S30 S2 PV valve buffer

P1 PVG X6 X Y1
PV valve cam.
SEE ALSO FIG. 560-1
Y12 S1 Y2
SEE ALSO FIG. 440
blow off VDB X8 X
X SEE ALSO FIG. 440 water
status valve
SEE ALSO FIG. 595-8 pneumatcs water circ.
S32 S37 Y22
BUFFER
cable 0.382
cable 0.912 bake out VDB X24/25 X
Y23 not for CM10
PVG X5 X
P2
PVP MS X7 X
footh switch VDB X22/23 X

S36
MS X8 X EM4601B (060 3010)
Contents
Figures
Microscope column wiring Fig. 817 H
CM 100/120 Mechanics 50129 060427 8-33

Figures
H
6
9
15
31
A B 12 71
3A C
4A
73
D E F 11 72
3 7 8
10
Spare parts 4 5
16 16A 32
28
13 14
73A
29
23
19A
17 18
30
25 26 27 33 34 35 36
19B 20 21 22 24 51
48
37 49 55 56
61
42 43 45 46 68
50
60 38 74 75 76
54
52 53
39
64 69
41 47A 57 58
40 77
59
44 44A
47 65
84 83 82 81 70 92 (3x) 93
63 90
62 78
96F 66
79 80
94A
44B 91
96E 96G 96D 85 67
94 95 92A
96B SF6
NOTE: ITEMS ARE NOT DRAWN TO SCALE 107
96A 96C HT TANK or
94B 106 EMISSION
CHAMBER
TOOLS FOR UT
N2
105
94D 109
98 99 100 108
SPECIAL TOOLS FOR 101 104
94C EM4619E
COMPUSTAGE PVP
96E 102 103
96G
H
Contents
Figures
Fig. 818 General tools

Figures
H
V11 V10
Spare parts NITROGEN / AIR INLET +24V
FOR GUN AIRLOCK OR
COLUMN + IGP
+24V
MC
V7
GUN AIRLOCK
S7 V5
NOT FOR CM10
NOT FOR CM10
V6
S35 V9 ION GETTER PUMP
HV GAUGE V12
PROJECTION CHAMBER
V8 P4 NITROGEN / AIR INLET
SPECIMEN
HOLDER DIFFERENTIAL DIAPHRAGM
+24V +24V
200 µ
PENNING
GAUGE
V4 P3
CAMERA AIRLOCK
HIGH VACUUM VALVE PENNING

GAUGE
V3
P1
S3 CLIXON (60 °C)
S30
OVERHEAT PROT. BUFFER
TANK
± 25 l
CLIXON (70 °C)
ODP
S31 V1 V2
OIL TEMP. PV VALVE BUFFER PV VALVE COLUMN
EXHAUST ROTARY
FILTER PV PUMP 220V
650W
S1 S2
EM4517A
PIRANI
GAUGE
P2
H
Contents
Figures
Vacuum system block diagram Fig. 819

Figures
H
Spare parts
H
Contents
Figures
ODP and pre vacuum valves (from June 90 onwards) Fig. 820A
Figures
H
Spare parts
H
Contents
Figures
ODP and pre vacuum valves (from 1994 onwards) Fig. 820B
Figures
H
Spare parts
H
Contents
Figures
UHV valve + tubing Fig. 821

Figures
H
Spare parts
H
Contents
Figures
35mm film transport mechanism Fig. 822

Figures
H
Spare parts
H
Contents
Figures
Fig. 823 35mm film holder

CM 100/120 Mechanics 50129 060427 8-41
Contents
Figures
Spare parts
Fig. 824 STEM detectors (BF, DF, SED)

Contents
Figures
CM 100/120 Mechanics 50129 060427 8-41

Figures
H
Spare parts DETAIL A
X - RAY PROTECTION
GLUED
0 TOGETHER
-0.2
55
4.6
DETAIL B 8 YW
4
118 TOP VIEW
5 BK
OR
9
6 17
RD
7 16 GN
117 14
18 BN
116 15
20
115
19
106 107 108 109
114 25
SEE DETAIL B
26
D 27 DETAIL C
64 59 28
58 57 56 29
55 54
49 34
30
89 35
98 96 94
105 104 99 97 65 48 36
95 88 37
87
38
66
86 67 SEE DETAIL A 47
85
39
46
84
79 VIEW D
78 68 45
BD/DF BD/DF FARADAY CUP
NEAR AXIS ON AXIS
77 OR YW RD
A NEAR AXIS SYSTEM SUITABLE FOR DF-X1 DF-X3 DF-X5
76 1000 x 1000 PIXEL CAMERA’S HAS
THE TEXT “SLOWSCAN” ENGRAVED. 44
DF-X2 DF-X4 DF-X6
GN BN BK
EM5832A
(197 96832)
75
74
69
PMT
H
Contents
Figures
Fig. 825 Near axis system

CM 100/120 Mechanics 50129 060427 8-43
Contents
Figures
H
Spare parts STORE AND OPERATE
THIS MATERIAL IN
DARKNESS ONLY.
42
41
40
4
39
5
38
X6
A PRE AMP.
37 BROWN 3
32 16 X5 6
15 GREEN
31
12
11
14 7
BROWN X10
TO EARTH RAIL
30 GREEN X9 X6
29 X5
28
PMT
27
8
PMT
22 9
21
20
X1
19
18
17 EM5833
Fig. 826 Bright field detector

Contents
Figures
CM 100/120 Mechanics 50129 060427 8-43

8-44 50129 060427 CM 100/120 Mechanics
Contents
Figures
H
Spare parts
SOLDERING CONNECTION
OF DF DETECTOR
4
BROWN YELLOW
5
DF - X4 DF - X3
DF-X1 DF-X3
DF-X5
7 8
DF-X2
DF-X4 DF-X6
ON AXIS DF PRE AMPL.
(SSA - 3)
SIGNAL X9
EARTH X11
SCREEN NOT CONNECTED 1
ON AXIS DF PRE AMPL. SSA -3
BS DETECTOR PRE AMPL. SSA -2

COLUMN
OFF AXIS DF PRE AMPL. SSA -1
PROJ.
CHAMBER
EM5831A
Fig. 827 Central dark field detector

Contents
Figures
8-44 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-1
Contents
Figures
9 Spare parts H
9.1 Abbreviations
Abbreviations for screw types in parts lists:
Scr. Screw Stl. Stainless
Cyl. Cylindrical St. Steel
Skt. Socket (Allen) Cr. Chrome
Rd. Round Br. Brass
Hv. Heavy Ni. Nickel
Csk. Countersunk Zn. Zinc
Al. Aluminium Mo. Molybdenum
9.2 Miscellaneous spare parts

Item Description Qty Order code Remarks
Heating element ODP 2x 5322 695 15177
IGP HT feed-through 1x 5322 695 14402
Pirani gauge 1x 5322 695 14249
Penning anode 1x 5322 695 14515
Co-seal Viton Special 1x 5322 530 54494
Transformer oil 5322 695 15838
PV oil Leybold 2 x 5322 390 10118
PV oil Edwards 2 x 5322 390 10135
HV oil Santovac 100ml 2 x 5322 390 80037
Thermal switch 60 °C 1 x 5322 282 54055
Thermal switch 70 °C 1 x 5322 282 30203
Opto switch 1 x 5322 282 50032
Microswitch 2 x 5322 271 34234
Magnetic valve (water) 2 x 5322 360 50482
Magnetic valve (water) 1 x 5322 360 50483
Magnetic valve (air) 2 x 5322 695 15288
Magnetic valve (air) 1 x 5322 695 15289
Aperture gun 1 x 5322 695 15278
Aperture C1 1 x 5322 695 14668
Aperture C21, C22 1 x 5322 695 14781
Aperture diffr. 1 x 5322 695 14383
Aperture int. 1 x 5322 695 14382
Aperture proj. 1 x 5322 695 14384
Differential aperture 1 x 5322 695 14385
Aperture 800 µm 1 x 5322 695 14498
Indium wire 0.5 mm dia. 1 m 5322 695 14817
Zephyr: Repair kit general 1 x 9432 909 96221
Zephyr: Repair kit 1000C 1 x 9432 909 96231
Silicon paste Wacker P4 5322 390 20011
Silicon paste HT cable 4022 198 14921
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-1

9-2 50129 060427 CM 100/120 Mechanics
Contents
Figures
9.3 Cross section of microscope column H

Figure 801

1, 2 Hose coupling M5 5322 526 44104
3 Hose coupling Banjo M5 5322 526 44026
4, 7 Allen screw M6 x 16
10 Table top white (excluding stickers) 5322 695 15991
Sticker for table top 5322 455 11021 CM100 BioTWIN
Sticker for table top 5322 455 11014 CM120 BioTWIN
Sticker for table top 5322 455 11018 CM200 FEG
Sticker for table top 5322 455 11017 CM300
Sticker for table top 5322 455 11019 Cryo
NOTE: When a new table top is ordered new stickers must be ordered as well.
Stickers are delivered containing the maximum text. If the full text is not
needed, leave out the unwanted part of the sticker. E.g., for a CM 300
FEG the combination CM 200 FEG and CM 300 must be ordered and
locally assembled.
9.4 Rear view

Figure 802 and Figure 802A

4 C-clamp NW25 C110 04 340 Edwards
5 V6 valve PV 25 PK 5322 695 14911
7 Vacuum hose PA 12 x 9 NA 5322 530 20617 Length as stated
Clamping bush 5322 526 40519
9 Vacuum hose PA 8 x 6 NA 5322 530 20596
10, 11 Magnetic valve Herion 10808-08-0246 5322 695 15288
13 Elbow coupling for 8 mm tube 5322 526 40504
17 Penning tube CP 25K D14537000
18 V5 valve PV 40 PK 5322 695 15102 Not for CM100
20 IGP 5322 695 15774 No magnets
25 Magnetic valve Herion NC 5322 695 15951
25 Magnetic valve Herion NO 5322 695 15948
25 Hose coupling plastic to Herion valve 5322 528 20468
25 O-ring Special 9 x 2 in Herion valve 5322 530 50889
28 O-ring Special 13 x 2 in Herion valve 5322 530 50891
30 Manual valve V34 5322 360 54087
32 Manual valve V30, V31, V32, V33 5322 360 50495
33 Hose coupling Banjo 5322 526 44026
35 Table top See Fig. 801
Side panel 5322 466 30316 See note
Rear panel 5322 466 30317 See note
61 Hose coupling plastic to Herion valve 5322 528 15949
NOTE: Can be ordered if an EDAX is present.

Contents
Figures
9-2 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-3
Contents
Figures
9.5 Cross section of base plate (CM10) H

Figure 803A

4 Allen screw M12 x 40
5 Spacer
6 Allen screw special
7 Rubber vibration damper 5322 462 10266 CM100
9 Spacer
10 Screw M12 x 20
13 Air vibration damper 5322 695 15031 CM120
15 Hose coupling M5 5322 526 40508
16, 17 Hose coupling 5322 526 40509
16, 17 Polyflo hose (supply to lenses) 5322 530 20605
18 Compressed air levellers 5322 360 50499
19 Hose coupling M5 5322 526 40351
23 Hose coupling Banjo M5
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-3

9-4 50129 060427 CM 100/120 Mechanics
Contents
Figures
9.6 Cross section of base plate CM10(0)/CM12(0) H

Figure 803B From April 1992 onwards

2 Hose coupling M5 5322 526 40351
2 Hose coupling SO41521/8 bottom
4 Polyflo hose (supply to lenses) 5322 530 20605 Length as stated
4 Hose coupling SO041521/6 (water) 5322 526 40509
6, 7 Fast coupling female MA215-8 5322 526 40513
9, 24, 26 Allen screw M12 x 40
9, 24, 26 Spacer
10, 19, 27 Transport bolt M6 x 40
11, 21 Screw M8 x 30
17 Air vibration damper membrane 5322 695 16172
20 Hose coupling M5
31 Screw M8 x 40
40 Compressed air levellers 5322 360 50499
41 Hose coupling M5 5322 526 40351
43 Pressure hose PE 5 x 3.3 DZ 5322 530 24055 Length as stated
50, 51, 52 Support for mounting the covers
53, 54 Support for mounting the covers
60 Teflon ring 2922 031 90012 7.5 x 45 x 0.5
Contents
Figures
9-4 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-5
Contents
Figures
9.7 Emission chamber + lifting mechanism H

Figure 804

9 Allen screws M6 x 30 (St.Ni.) (4x)
11 Cable support plate 4022 199 56441
16 Nut M8 St.
17 Allen screw M4 x 8 (St.Ni.) (2x)
20 Microswitch 5322 271 34223
21 Lever 5322 401 10955
23 Cyl. screw M3 x 12 (Stl.St.)
27, 28 Allen screw M5 x 8 (St.Ni.)
30 Allen screw M8 x 25 (St.Ni).
33 Cable support bracket 4022 199 54771
35 Allen screw M5 x 8 (St.Ni.)
42 Ball Bearing 65 x 90 x 18 5322 520 20433
57 Nut M4
59, 66 Set of contacts 5322 278 90218
68 Cer. Capacitor 10 nF, 500 V 4022 190 13023
74 Porcelain insulator 5322 695 14776
75 HT cable 5322 695 15365 New flexible cable
76 Cyl. screw M6 x 60 x 24 (St.Zn.)
85 Nut M6
90 Allen screw M6 x 60 x 24 (St.Zn.)
98 Allen screw M4 x 16 (Stl.St.)
101 Grubscrew M2.6 x 3
104 Locking piece 5322 695 75001
107-127 Wehnelt assembly complete 9432 067 88001
118 Filament (box of 10) 9432 052 50001
LaB6 filament DENKA 9432 909 96101
LaB6 filament FEI 9432 909 96141
119 Spring washer 5322 530 80064
120 Nut 5322 505 10211
123 Supporting rings 5322 500 10301 Tungsten
Supporting rings 5322 695 15026 LaB6
124 Spring ring 5322 530 70084
126 Wehnelt cap 0.3 mm 5322 695 15017
Wehnelt cap 0.5 mm 5322 695 15019
Wehnelt cap 0.7 mm 5322 695 15018
127 Securing ring 5322 505 14287
129 Allen screw M4 x 8 (St.Zn.)
134 Cyl. screw M3 x 8 (Stl.St.) (3x)
137 Gun alignment coil 5322 695 15113
140 Microswitch 5322 271 34223
141 Allen screw M4 x 8 (upper);
Allen screw M4 x 12 (lower) (St.Ni.)
Contents
165 Grubscrew M4 x 4 (St.Zn.)

Figures
CM 100/120 Mechanics 50129 060427 9-5

9-6 50129 060427 CM 100/120 Mechanics
Contents
Figures
Item Description Qty Order code Remarks H

175 Anode 5322 695 14276
176 Emission chamber 5322 695 15065 Also for EM420
177 O-ring Viton 3.53 x 101.19 ISO 242 5322 530 50645
179 Cyl. screw M5 x 16 (Stl.St.) (4 x)
187 O-ring Viton 3.53 x 47.22 ISO 225 5322 530 54635
189 Allen screw M4 x 16 (Stl.Ni.)
193 Elbow vacuum pipe
194 Diaphragm 5322 492 90047
206 Allen screw M4 x 8 (St.Zn.)
208 O-ring Viton 3.53 x 56 x 74 ISO 228 5322 530 54422
210 O-ring Viton 3.53 x 47.22 ISO 225 5322 530 54635
217 Nut M4
9.8 Valve V7
Figure 805

3-66 Gun airlock complete 5322 695 15112 Not for CM100
4,5,8,10,11 Upper membrane assembly 5322 695 14244
5 Dished washers 28 x 16.3 x 0.7 (9x)
6 Screw M6 x 40 Stl.St.
9 X-Ray diaphragm, set of one 5322 695 15278
10 Indium wire dia. 0.7 mm; 36 mm long 5322 695 14818 Length 5 m
12 Indium wire dia. 1mm; 135 mm long 5322 695 14819 Length 5 m
13 Screw M4 x 25 Br.Ni.
14 Body, dummy V7 4022 186 78624
Assembly dummy V7 4022 197 98562
18 O-ring Viton 2.62 x 2.84 ISO 104 5322 530 54394
20 Ball 2.5 mm dia.
28 Dished washers 8.8 x 6.2 x 0.15 (2 x 9)
29 Screw special M4 x 8
30 Indium wire dia. 1 mm; 135 mm long 5322 695 14819 Length 5 m
32-37 Lower membrane assy. 5322 695 14243
34 Indium wire dia. 0.5 mm; 11.5 mm long 5322 695 14817 Length 1.5 m
35 Dished washers 8.8 x 6.2 x 0.15 (2 x 9)
39, 41 Shaft + bellows 5322 695 14521
44 Dished washer 25 x 12.2 x 0.9 mm (1x) 5322 530 80108
46 O-ring Viton 1.78 x 5.28 ISO 009 5322 530 54032
48 O-ring Viton 1.78 x 34.65 ISO 028 5322 530 54393
54 Elbow hose coupling 5322 526 44026
55 Pressure hose PE 5 x 3.3 D2 5322 530 24055 Length as stated
53 Screw M4 x 40
58 Lipseal DE 150100 5322 530 50858
61 O-ring Viton 178 x 6.07 ISO 010 5322 530 54033
Contents
Figures
9-6 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-7
Contents
Figures

69 Screw M3 x 6
70 Microswitch . 4022 198 26841
73 Screw M2 x 20 St.Zn.
9.9 Upper lens section

Figure 806

2 Screw M4 x 10 (Stl.St)
4 Grubscrew M5 x 8 (St.Zn)
9 Lens coil C1 5322 695 15222
14 Diaphragm mechanism complete 5322 695 15784 Colour brown (modi-
fied)
5322 695 15782 Modification kit
14 Diaphragm mechanism complete 5322 695 15855 Colour white
15 Screw M4 x 50 (St.Zn)
16 Diaphragm holder only for C2 5322 695 15713
21 Lens coil C2 5322 695 15222
26 Dished washers 28 x 16.3 x 0.7 (7x)
27 Upper lining tube 5322 695 14779
29, 35 Set of circlips 5322 695 14556
30, 34 Set of fixed C2 diaphragms 5322 695 14781 The upper C2 diaphr.
should not be used in
the CM200
31 Diaphragm hat on top of fixed C2 5322 695 15708
36 Fixed C1 diaphragm with spring ring 5322 695 14668
38 Screws M3 x 6 (St.Cr)
41 Distance bush 4.1 x 6 x 30
42 Support From Oct. ’90
onwards
43 Dished washers 8 x 4.2 x 0.3 (9 x) From Oct. ’90
onwards
45 Screw M4 x 40 (St.Cr)
46 Polyflo hose PA 6 x 4 Bl 5322 530 20605 Length as stated
47 Inner bush 5322 526 40485
47 Clamping bush 5322 526 40484
47 Nut 5322 505 10804
48 Hose pillar 5322 695 15841 Bent + plate
49 O-ring Viton 1.42 x 4.7 5322 530 50856
56 Metal socket of lens plug 5322 268 20114
57 Special screw M5 x 8 (Br.Ni)
58 Allen screw M5 x 16 (St.Ni)
60 Screw M4 x 10 (Stl.St.)
65 Distance bush 41 x 6 x 30
67 Polyflo hose PA 6 x 4 Bl 5322 530 20605 Length as stated
67 Inner bush 5322 526 40485
67 Clamping bush 5322 526 40484
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-7

9-8 50129 060427 CM 100/120 Mechanics
Contents
Figures

68 Nut 5322 505 10804
74 O-ring Viton 1.42 x 4.7 5322 530 50856
Aperture, 10 micron 9432 061 11001 Set of three
Aperture, for strioscopy 9432 061 37001 Set of two
Thin foil aperture, 20 micron 9432 061 31001 Set of two
Thin foil aperture, 100 micron 5322 695 14982 Set of two, PW6143
Other thin foil apertures ** See below
Top Hat Low Background aperture 50 micron 9432 061 66001 Set of three, C2
** Order from: 1. Electron Microscope Aids

6 Lime Trees
Christian Malford
Chippenham
Wiltshire
ENGLAND
2. C.W. French Division

Ebtec Corporation
5 Shawsheen Avenue
Bedford Mass. 01730
USA
9.10 Goniometer stage (manual stage)

Figure 807

3 Screw M3x30x19 (Stl.St)
5 Distance piece 3.1 x 5 x 25
6 Hose pillar 5322 695 15842 Straight + plate
Contents
Figures
9-8 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-9
Contents
Figures

7 Clamping bush 6 mm SO40001-6 5322 526 40484
7 Inner bush 6 mm 5322 526 40485
8 Nut 5322 505 10804
9 Polyflo hose PA 6 x 4 BL 5322 530 20605 Length as stated
10 O-ring 1.42 x 4.7 5322 530 50856
13 Screw M4 x 10 (Stl.St) M3 x 6 from Oct. 1990
15, 16 Upper obj. housing 5322 695 15675
18 Allen screw M4 x 25 (St.Ni) M3 x 6 from Oct. 1990
19 Upper Obj. coil 5322 695 15223
22 Upper Obj. diaphragm (top) 5322 695 14435 CM 100
22 Upper Obj. diaphragm (top) 5322 695 14574 CM 120
23 BSD Obj. diaphragm (inside) 4022 197 12983 Only for BSD
24 Indium (37 mm) 5 m dia. 0.7 mm 5322 695 14818
25 Upper Obj. pole piece 5322 695 14786 CM120
25 Upper Obj. pole piece 5322 695 15082 CM100
25 Upper Obj. pole piece 5322 695 16054 CM100 BioTWIN
25 Upper Obj. pole piece ST 5322 695 15007 CM120 SuperTWIN
25 Upper Obj. pole piece BioTWIN 5322 695 15885 CM120 BioTWIN
26 Locking nut 5322 695 14931
27 O-ring Viton 2.62 x 52.07 ISO 137 5322 530 50621
30 Bellows 5322 695 15291
33 Hinged clamp NW40 08C10516402
35 Co-seal Special NW40 08B27158453 5322 528 20467
36 Allen screw M4 x 10 (St.Ni.) (4x)
40 O-ring Viton 2.62 x 32.99 ISO 125 5322 530 51316
43 O-ring Viton 1.78 x 34.65 ISO 028 5322 530 54393
44 Left-hand ear 5322 695 15301
45 O-ring Viton 1.78 x 26.70 ISO 023 5322 530 54038
46 Bellows assembly 5322 695 15531 CM 100
52 Spring 5322 492 51809
56 Bush and spring assembly 5322 695 14932
57 Diaphragm mechanism complete 5322 695 15784 Colour brown (modi-
fied)
Modification kit 5322 695 15782
57 Diaphragm mechanism complete 5322 695 15855 Colour white
58 Allen screw M4 x 30 (St.Zn)
66 Ball bearing 17 x 26 x 5
69 Special screw (Cr.St) 5322 502 60033
70 Pin 3 x 10 mm
75 Cyl. screw M2.5 x 6 (St.Cr)
76 Special screw (Cr.St) 5322 502 60033
78 Special screw M3 x 12 (Ni.Cr.St)
80 Pin 2 x 10
82 Diaphragm holder. See also SA 5322 695 14788 For aperture order
nos.
see Upper Obj. lens
section. TWIN only
82 Diaphragm holder. See also SA 5322 695 15009 SuperTWIN and
CM120 BioTWIN
82 Diaphragm holder 5322 695 16056 CM100 BioTWIN
83 O-ring Viton 1.78 x 5.28 ISO 009 5322 530 54032
86 SuperTWIN diaphr. holder tip (4) 5322 695 15341 Also CM120 BioTWIN
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-9

9-10 50129 060427 CM 100/120 Mechanics
Contents
Figures

86 SuperTWIN diaphragm holder tip (3) 5322 695 15342
89 Dished washers 12.5 x 62 x 0.5 mm (9x) 5322 530 80131
94 Threaded bush 5322 695 15782
100 Screw M4 x 8 (St.Zn.Ni) (4x)
103 Metal socket for lens plug 5322 268 20114
107 Cyl. screw M4 x 10 (Stl.St)
114 Image deflection coil 5322 695 15107
119 Screw M4 x 25 (St.Zn.Ni.)
120 O-ring 1.42 x 4.7 5322 530 50856
124 Polyflo hose PA 6 x 4 5322 530 20605 Length as stated
125 Nut 5322 505 10804
126 Hose pillar 5322 695 15842 Straight + plate
Inner bush 5322 526 40485
127 Distance piece 3 x 5 x 25 mm (Al)
129 Screw M3 x 30 x 19
131 Lower Obj. coil 5322 695 15223
134 Indium seal 0.7 mm (37 mm) 5322 695 14818
135 Lower Obj. pole piece 5322 695 14789 CM120
135 Lower Obj. pole piece 5322 695 15083 CM100
135 Lower Obj. pole piece 5322 695 16055 CM100 BioTWIN
135 Lower Obj. pole piece ST 5322 695 15008 CM120 SuperTWIN
135 Lower Obj. pole piece BioTWIN 5322 695 15886 CM120 BioTWIN
136 Locking nut 5322 695 14931
137 O-ring Viton 2.62 x 52.07 ISO 137 5322 530 50621
139 Ring 5322 530 80509
140 Special screw (Cr.St)
146 Dished washers (26x) 6 x 3.2 x 0.3
150 O-ring Viton 1.78 x 3.68 ISO 007 5322 530 54029
155 O-ring Viton 1.78 x 26.70 ISO 023 5322 530 54038
156 Bearing shell 5322 695 14463
158 O-ring Special Gaco RM-0271-16 5322 530 54615
162 O-ring Viton Special 2 x 10 5322 695 14824
170, 199 Universal coupling 5322 695 14918
180, 188 Ball bearing 8 x 22 x 7 5322 520 20244
186 Allen screw M4 x 10 (Stl.St)
194 Grubscrew M3 x 4
198, 200 Grubscrew M3 x 4
204 Right-hand ear complete 5322 695 15111
206 V8 magn. valve Herion 10808-08-0246 5322 695 15288
V8 modification kit 5322 695 15535
210 Clamping bush 5322 532 21051
211 Vacuum hose white PA 5322 530 20596 Length as stated
Contents
Figures
9-10 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-11
Contents
Figures

212 O-ring Viton 1.78 x 3.68 ISO 007 5322 530 54029
214 Dewar vessel 5322 418 40023
217 Cooling beard 5322 511 64007
218 Cooling device complete 9432 064 03001 Option for CM100
220 Allen screws M4 x 40 (Stl.St)
222 Plastic cap for anti-contamination 5322 462 70718
device
226 O-ring Viton 1.78 x 23.52 ISO 021 5322 530 54415 Was ISO 020
228 O-ring Viton 1.78 x 34.65 ISO 028 5322 530 54393
229 Cold trap 5322 695 15029 Not for CM100
246 Beam tilt/Alignment coil 5322 695 15108
248 Cyl. screw M4x10 (Stl. St)
304 O-ring Viton 2.62 x 32.99 ISO 125 5322 530 51316
309 O-ring Viton 2.62 x 32.99 ISO 125 5322 530 51316
350 O-ring Viton 1.78 x 14.00 ISO 015 5322 530 54036
359 O-ring Viton 2.62 x 13.94 ISO 113 5322 530 54043
403, 404 O-ring Viton 2.62 x 32.99 ISO 125 5322 530 51316
NOTE: For BSD and SED see Figure 824.
9.11 Goniometer stage (compustage)

Figure 807A

3 Distance piece 3.1 x 5 x 25
7 Screw M3 x 30 x 19 (Stl.St) all versions
8, 70 Hose pillar Inner channel 5322 526 40978 UT only
9, 69 Hose pillar Outer channel 5322 526 40979 UT only
10, 69 O-ring Viton 1.78 x 7.65 5322 530 54119 UT only
11,62 Hose pillar 5322 695 15842 Standard + FEG
12,61 O-ring Viton 1.42 x 4.7 5322 530 50856 Standard
16,17 Upper obj. housing 5322 695 15675 Standard
19 Allen screw M3 x 6(St.Ni)
25 Upper Obj. coil 5322 695 15223
25 Upper Obj. coil UltraTWIN 5322 695 15801
26 Upper Obj. diaphragm
27 Indium (37 mm) 5 m dia 0.7 mm 5322 695 14818
28 Upper Obj. pole piece 5322 695 15955 TWIN without SED
hole
28 Upper Obj. pole piece 5322 695 15714 TWIN with SED hole
28 Upper Obj. pole piece CM120 5322 695 14786 CM120
28 Upper Obj. pole piece CM100 5322 695 15082 CM100
28 Upper Obj. pole piece CM100 BioT- 5322 695 16054 CM100 BioTWIN
WIN
28 Upper Obj. pole piece SuperTWIN 5322 695 15007 SuperTWIN
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-11

9-12 50129 060427 CM 100/120 Mechanics
Contents
Figures

28 Upper Obj. pole piece CM120 BioT- 5322 695 15885 CM120 BioTWIN
WIN
29 Locking nut 5322 695 14931
30 O-ring Viton 2.62 x 52.07 ISO 137 5322 530 50621
32 Spacers 3x
36 Ring (2 mm) 5322 530 80509
37 O-ring Viton 2.62 x 52.07 ISO 137 5322 530 50621
39 Locking nut 5322 695 14931
40 Lower Obj. pole piece TWIN 5322 695 14789 TWIN
40 Lower Obj. pole piece CM100 5322 695 15083 CM100
40 Lower Obj. pole piece CM100 BioT- 5322 695 16055 CM100 BioTWIN
WIN
40 Lower Obj. pole piece SuperTWIN 5322 695 15008 SuperTWIN
40 Lower Obj. pole piece CM120 BioT- 5322 695 15886 CM120 BioTWIN
WIN
40 Lower Obj. pole piece UltraTWIN 5322 695 15799 UltraTWIN
Note In the drawing the lower pole piece of the UltraTWIN is shown.
43 Lower Obj. coil 5322 695 15223
43 Lower Obj. coil UltraTWIN 5322 695 15801
45 Indium (37 mm) 5m dia 0.7 mm 5322 695 14818
46 Screw M3 x 6 (St.Zn.Ni.)
48 Lower obj. housing
50 Cyl. screw M4 x 10(Stl.St)
57 Image deflection coil 5322 695 15107
64 Distance piece 3 x 5 x 25 (Al)
67 Screw M3 x 30 x 19 (Stl.St)
75 O-ring Viton 1.78 x 4.47ISO 008 5322 530 54031
80 Metal Inserts Locktited in the coil
97 Beam tilt/alignment coil 5322 695 15108
97 Beam tilt alignment coil HR STEM 5322 695 15953 Present from May 95
onwards
143 Objective diaphragm holder 5322 695 14788 TWIN
143 Objective diaphragm holder 5322 695 15009 SuperTWIN and
CM120 BioTWIN
143 Objective diaphragm holder 5322 695 16056 CM100 BioTWIN
143 Objective diaphragm holder UltraTWIN 5322 695 15803 (including tip)
Set of diaphragms for Objective holder 9432 061 48001 UltraTWIN
20 µm Ø 2 mm Au (1 piece) 5322 525 10136 Also for CM100 BioT-
WIN
WIN
WIN
750 µm Ø 2 mm Pt (1 piece) 5322 525 10139 Also for CM100 BioT-
WIN
2mm spring 5322 492 11532
Contents
Figures
9-12 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-13
Contents
Figures

144 Objective diaphragm holder tip (4) 5322 695 15341 Standard and BioT-
WIN
144 Objective diaphragm holder tip (3) 5322 695 15342 SuperTWIN and
EDAX
144 7-position Objective holder diaphragm 9432 061 49501 Only for 7-position
tip mechanism
LN2 cooling
Foam cover 4022 185 67850
Beard 5322 511 64007
Dewar (glass) 5322 418 40023
Dewar (stainless steel) 5322 695 16134
NOTE: For BSD and SED see Figure 824.
9.12 Goniometer stage (CS CM100/120/200)

Figure 807B
Item Description Order code Remarks Fab Kit

Complete compustage 5322 695 15852 Repairable
4 O-ring Viton 2.62 x 32.99 ISO 125 5322 530 51316 312 9279
5 EDAX stop 4022 268 01450 4022 186 76201 153 7014
6 Ring 4022 186 77411 291 9280
7 Washer 4.3 x 9 Stl.St. 419 9279
8 Allen screw M4 x 10 Stl.St. 215 9253
9 Lead shield (CM200 only) 4022 197 85321 265 9152
14 V8 magn. valve Herion 10808-08- 5322 695 15288 210 9253
0246
15 Cyl. screw M4 x 6 Stl.St. 408 9279
16 Bracket 4022 197 70152 125 7014
19 Anti-contamination device PW640
3
24 Housing 4022 197 15971 207 9253
27 Washer 4.3 x 9 Stl.St. 419 9279
28 Washer 4.3 x 12 Stl.St. 420 9279
29 Adapter ring 4022 197 18911 115 7014
33 O-ring Viton 1.78 x 23.52 ISO 021 5322 530 54415 308 9279
34 O-ring Viton 1.78 x 4.47 ISO 008 5322 530 54031 306 9279
35 V8 block 4022 197 68361 151 7014
36 O-ring Viton 1.78 x 34.65 ISO 028 5322 530 54393 310 9279
37 O-ring Viton 2.62 x 3.63 ISO 105 5322 530 51314 318 9279
38 Cold trap 5322 695 15029 PW640
3
Contents
38A/B Cryo shields CM120 BioTWIN 5322 695 16046 standard

Figures
CM 100/120 Mechanics 50129 060427 9-13

9-14 50129 060427 CM 100/120 Mechanics
Contents
Figures
Item Description Order code Remarks Fab Kit H

Cryo shields CM120 BioTWIN 9432 064 21001 Berilium
39 Fixing plate 4022 197 66091 103 7014
40 Grubscrew M6 x 10 4022 197 69721 148 7014
41 Wedge right 4022 197 05542 203 9280
42 Allen screw M3 x 8 Stl.St.
43 Lead segment 4022 260 11141
45 Bracket 4022 197 70031 130 7014
48 Counterweight 4022 197 70071 132 7014
49 Cable support bracket 4022 197 70271 140 7014
50 Knee coupling SO42421-8-1/8" 2922 006 02586 214 9253
55 Support block 4022 197 68471 146 7014
57 End stop (X) 3 x 8 4022 197 6786 258 7005
58 Cyl. screw M2.5 x 8 Stl.St. 440 9279
59 Grubscrew M2.5 x 4 452 9279
61 Teflon guiding ring
64 Support (X) 4022 197 68461 142 7014
65 Measuring system (X) 5322 695 15851
66 Bracket plug 4022 197 68451 138 7014
67, 68 Cyl. screw M4 x 6 Stl.St. 408 9279
69 Washer 4.3 x 9 Stl.St 419 9279
70 Spacing rod 4022 197 70271 137 7014
74 Measuring system (Y) 5322 695 15851 pwno
76 Block 4022 197 67311 144 7014
77, 78 Cyl. screw M2.5 x 10 Stl.St. 439 9279
79 Cyl. screw M2.5 x 16 Stl.St 457 9279
80 SIB-2 board 4022 192 57631
84 Spacer 2.7 x 4 x 10 Al. 455 9279
85 Spacer 2.7 x 4 x 5 Al. 456 9279
86 Front cover plate 4022 197 67391 43 7002
87 Nut M2.5 222 9280
88 Opto coupler 5322 130 91284 220 9280
90 Spacer 2.7 x 4 x 5 Al. 456 9279
94 Washer 2.7 x 6.5 Stl.St. 421 9279
95 Spacer 2.7 x 4 x 10 Al. 455 9279
96 LED Red TLHR 5413 TEF 4822 130 82124 9339 812 10682 5763
97 SIB-1 board 4022 192 57631
98 Safe entry switch UT 4022 197 70202 295 9281
99 Safe entry switch thick holders STwin 4022 197 70191 5 6928
100 Safe entry switch TWIN 4022 197 67382 295 9152
101 Safe entry switch BioTWIN 4022 260 21511
107 Bracket 4022 197 70041 131 7014
Contents
Figures
9-14 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-15
Contents
Figures

108 Plate nut M4 2522 471 01002 443 9279
110 TSI board 4022 192 57671
112 Cyl. screw M3 x 6 Stl.St. 449
9279
113 Bracket 4022 197 70921 913840
114 Spacer 2.7 x 4 x 5 Al. 456
9279
115 Allen screw M4 x 12 Stl.St. 416
9279
116 Dished washer (2 x ) 8 x 4.2 x 0.3 405
9279
117 Goniometer complete 5322 695 15852 9120
118 Cover bracket 4022 197 68261 126 7014
119 O-ring Viton 2.62 x 23.47 ISO 119 5322 695 15975 Special kit (see
note)
120 O-ring Viton 1.78 x 23.52 ISO 021 5322 695 15975 Special kit (see
note)
Note: O-rings 119, 120 and 125 are com-
bined in one kit (5322 695 15975).
121 Crown nut
122 O-ring Viton 1.78 x 26.70 ISO 023 5322 530 54038
123 Pressure ring 4022 197 69112 17 9133
124 Wedge CM100 4022 197 05572 205 9253
125 O-ring Viton 2 x 16 5322 695 15975 Special kit (see
note)
126 Worm-wheel for wedges 4022 268 01458 4022 197 05562 204 9280
127 Wedge left (not for CM100) 4022 197 05552 202 9280
129 Housing 4022 187 16996 6 9133
130 Fixing ring 5322 530 80509 2 9133
131 O-ring Viton 1.78 x 31.47 ISO 026 5322 530 54041 12 9133
132 Hemispherical bearing cup 5322 695 15853 11 9133
Note: The bearing cup must be ordered 5322 695 15975
with:
133 O-ring Viton 1.78 x 26.70 ISO 023 5322 530 54038 10 9133
136 O-ring Viton 1.78 x 14.00 ISO 015 5322 530 54036 314 9279
137 BSD stop 4022 197 69583 157 7014
138 Fixing ring 4022 186 77411 291 9280
139 Washer 4.3 x 9 Stl.St. 419 9279
141 Lead segment 4022 260 11141
144 Lead shield BSD (CM200 only) 4022 197 85331 269 9152
146 Lead shield BSD (UT only) 4022 197 70681 283 9281
147 O-ring Viton 1.78 x 37.82 ISO 029 5322 530 30111 307 9279
148 Bellows for Obj. Diaphr. mech. Twin 5322 695 15854 275 9253
and STwin
149 Pressure bush 4022 197 69002 276 9253
150 Lead shield 4022 197 68961 277 9253
151 Bellows for Obj. Diaphr. mech. 5322 695 15887 CM120 BioT-
WIN
154 Lead shield Obj. Diaphr. 4022 197 61611 278 9253
155 Fixing ring 4022 197 61652 279 9253
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-15

9-16 50129 060427 CM 100/120 Mechanics
Contents
Figures

158 Lead shield Obj. Diaphr. 4022 197 85301 261 9152
159 Pin H6 2 x 6 430 9279
160 Diaphragm mech. compl. (also for 5322 695 15855 pwno
UT)
165 End stop grubscrew M3 x 12 4022 198 09461 284 9281
166 Pin H6 2 x 6 430 9279
168 Diaphragm mech. compl. (also for 5322 695 15855 pwno
CM200)
170 Dished washer 8 x 4.2 x 0.4 285 9281
174 Lead shield (UT only) 4022 197 65112 280 9281
176 Fixing plate (UT only) 4022 197 55231 278 9281
177 Bush (UT only) 4022 197 70541 276 9281
178 Bush (UT only) 4022 197 70551 277 9281
179 Spring ring (UT only) 4022 197 70571 274 9281
180 Lead shield (UT only) 4022 197 70561 273 9281
184 Bellows for Obj. Diaphr. Mech. (UT 5322 695 15856 275 9281
only)
185 O-ring Viton 1.78 x 41.00 ISO 030 5322 530 51313 313 9279
185 O-ring Viton 2.62 x 37.77 ISO 128 5322 530 54047 from July 1994
onwards.
186 SED stop 4022 268 01460 4022 197 69562 155 7014
187 Fixing ring 4022 186 77411 291 9280
188 Washer 4.3 x 9 Stl.St. 419 9279
190 Lead shield SED 4022 197 70501 267 9152
194,196 Allen screw M4 x 16 Stl.St. 206 9152
195 Lead shield SED UT 4022 197 70511 282 9281
195 Lead shield SED UT 4022 197 70511 282 9281
197 Lead shield 4022 197 70321 271 9152
199 Washer 4.3 x 9 419 9279
200 Fixing ring 4022 186 77411 291 9280
204 Left-hand ear stop 4022 186 76208 153 7014
205,206 O-ring Viton 2.62 x 32.99 ISO 125 5322 530 51316 312 9279
207 Spring ring 4022 197 12331 121 7014
208 Flange 4022 197 12342 119 7014
209 Washer 4.3 x 9 419 9279
214 Lead shield 4022 197 16762 159 7014
215 Bellows assembly IGP-goniometer 5322 695 15291 161 7014
216 Lead rings 4022 197 36313 163 7014
217 Washer special 4,3 x 7.1 4022 197 36321 123 7014
Contents
Figures
9-16 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-17
Contents
Figures
9.13 Right-hand Ear H

Figure 808

Right-hand ear complete 5322 695 15111 Repair proc.(Brown)
1 O-ring Special Gaco RM 0271-16 5322 530 54615
3 O-ring Viton 1.78 x 26.70 ISO 023 5322 530 54038
4 O-ring Viton 1.78 x 3.68 ISO 007 5322 530 54029
5 Bearing shell 5322 695 14463
14 Hemispherical bearing 5322 695 14465
17/20 Goniometer airlock 5322 695 14464
26 Dished washer 5322 530 80219
28 O-ring Viton 1.78 x 17.17 ISO 017 5322 530 54283
29 Floating tube assy 5322 695 14466 Tube with only one
hole: 5322 695 15693
36 Ball dia. 2.5 mm 5322 520 40033
42-55 Tilt bearing assembly complete 5322 695 14933
198-208
56, 57 Bearing shoe assy. 5322 695 14453
59 Pushing lever 5322 695 14469
61, 62 Bearing shoe assy. 5322 695 14453
65, 190 Cyl. screw M2.5 x 8 (St.Zn)
66 Bearing 1 x 4.25 x 1.95 5322 520 20349
67 Cyl. screw M2 x 10
69 Distance bush 3.1 x 5 x 4 mm
70, 196 Pivot 11 mm 5322 693 11012
71 Cyl. screw M3 x 4 (St.Cr)
73 Distance bush M3 x 15
75 Cyl. screw M3 x 4 (St.Zn)
77 Coax connector 5322 526 40755 Via item 76
96, 100 C.S. screw M2 x 16 (St.Cr)
110 Gear ring 5322 522 30534
118 Cyl. screw M2.5 x 8 (Stl.St)
119 Pressure pin 5322 535 91537
120 Microswitch 5322 271 30078
125 Cyl. screw M1.4 x 8 (St.Zn)
134, 135 Cyl. screw M2 x 4 (Stl.St)
137 Pivot 11 mm 5322 693 11012
139 Lever 5322 695 14219
141 Ball bearing 1 x 4.25 x 1.95 5322 520 20349
142 Nut 4022 186 76131
143 Special nut hecagel adjustment 4022 186 76141
144 Special screw (Cr.Mo.St) 4022 186 76151
145 Special screw (Ni.Cr.St) 4022 187 83085
Contents

Figures
CM 100/120 Mechanics 50129 060427 9-17

9-18 50129 060427 CM 100/120 Mechanics
Contents
Figures

151 Miniature lamp 24 V 35 mA 2412 533 00158
152, 155 Cyl. screw M2 x 4
154 Led red CQY24B-III 4822 130 31144
156-166 Translation rod complete 5322 695 14114
167 Friction ring 5322 532 50654
168 Friction bush 5322 532 20072
169 Washer 5322 530 80077
170 Dished washer 10 x 5.2 x 0.5 (2x) 5322 492 60517
175 Grubscrew M2.5 x 4 (St.Zn)
178 Motor with gearbox 1-485 5322 361 60156 Option for CM100
178 Motor for CM100 9432 064 02001
195 Return lever 5322 695 14452
204 Double pressure bearing 5322 695 14934
207 Cyl. screw M2 x 3 (Br.Ni)
209 Special screw (St.Zn)
210, 215 Spacers 4.3 x 9 (2x) 4822 532 10333
214 Dished washers (4x) 8 x 4 x 0.3 5322 492 60956
304 Jewel 5322 695 14984
304-324 Specimen holder
305 Specimen tip 5322 695 14612
306 Clamping ring 5322 695 14978
307 Clamping device 5322 405 74001
315 Pin 5322 535 14051
318 O-ring Viton Special 1.78 x 8.73 5322 695 14688
325 Tool 5322 395 90196
High resolution specimen (point) 5322 695 14852 S100 Agar
Contamination specimen 5322 397 60034 S114A Agar
High res. specimen (lattice 3.4 Å) 5322 397 60036 S140 Agar
High res. specimen (lattice 2.04 Å) 5322 695 14199 S135 Agar
Gold on carbon (lattice 2.3 Å) 5322 695 15003 S132 Agar
Specimen grid 200 mesh 9432 061 25001 S102 Agar
Cross lattice grating 2160 5322 695 14974 S106 Agar
Latex gold shadowed 5322 695 14749 S128B medium Agar
Germanium high resolution specimen 5322 695 15812
9.14 Exploded view of CS, CM100/120/200

Figure 808A

2 Counterweight 4022 197 70071 132 7014
5 Tyrap
6 Cable tree 4022 197 81921 446 9279
7 Bracket 4022 197 68271 47 7002
8 Spacer 3.1 x 5 x 20 Al. 596 9120
Contents
Figures
9-18 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-19
Contents
Figures

10 EPD switch (normally closed) 5322 271 30808 4022 197 83961 447 9279
15 Blade spring 4022 197 67561 44 7002
16 Housing 4022 197 66103 109 7005
17 Fixing nut 4022 197 67292 170 7005
18 Back-to-back bearing 50 x 72 x 12 4022 198 17241 333 9120
19 Ring 4022 197 67371 173 7005
24 Y-Z support 4022 197 66113 110 7005
25 Spring holder 4022 197 67461 181 7005
26 Bearing pin 4022 197 73001 328 9120
27 Grubscrew M2 x 3 540 9120
28 X-lever 4022 197 66135 111 7005
29 End stop (X) H6 2.5 x 10 2522 670 07037 593 9120
30 Bearing bush (short) 4022 197 70702 235 7005
34 Ball KWST 2.5 mm 5322 520 40033 2622 890 00102 454 9120
35 Upper X-support 4022 197 66245 121 7005
36 Grubscrew M2 x 5 542 9120
37 Ball KWST 2.5 mm 5322 530 40033 2622 890 00102 454 9120
38 Pressure spring 2 x 0.32 4022 198 17831 322 9120
39 Grubscrew M2 x 5 542 9120
40 Spring locking pin (X) H6 1.5 x 6 2522 670 07018 585 9120
44 Bearing bush long 4022 197 70712 236 7005
46 Cyl. screw M2 x 6 St. St. 458 9279
47 EPD spring 4022 260 13261 342 9120
48 EPD switch (normally closed) 5322 271 30809 4022 197 83961 447 9279
49 EPD bracket 4022 197 67321 172 7005
54 EPD switch (normally open)(CM300 5322 277 11493 448 3810
only)
56 X driving rod 4022 197 66741 249 7005
57 Anti-backlash spring X motor 4022 187 76111 316 9120
58 EPD actuator plate 4022 197 66802 42 7002
58A Circlip 3.2 581 9120
59 EPD switch (normally closed) 5322 271 30809 447 9279
63 Clamping block 5322 695 16168 4022 197 66182 117 7005
64 Grubscrew M2 x 3 540 9120
65 Dished washers (3x) 8 x 3.2 x 0.4 481 9120
68 DC motor without reduction (X) 5322 695 15857 346 9120
70 Donator complete 5322 695 15858 Repair proce- 120 7005
dure
74 Pin 4022 197 67831 211 7005
75 Bearing 2.5 x 6 x 2.6 2622 001 40263 461 9120
77 Lever 4022 197 66151 112 7005
78 Eccentric screw 4022 197 67492 184 7005
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-19

9-20 50129 060427 CM 100/120 Mechanics
Contents
Figures

79 Pin for lever 77 H6 2 x 10 2522 670 07028 591 9120
80 Pin to guide specimen holder 4022 197 66245 7005
84 Spring 4022 187 76031 312 9120
85 Grubscrew M2 x 5 542 9120
86, 88 Spring locking pin (Y) H6 1.5 x 12 2522 670 07022 586 9120
87 Pin for lever 77 H6 2 x 10 2522 670 07028 591 9120
89 Grubscrew M2 x 5 542 9120
90 Spring holder 4022 187 72981 103 7005
91 Safe entry switch 4022 197 67382 295 9152
94 Washer 562 9120
95 Bearing plate 4022 197 66245 121 7005
96 Pulling spring Z-upper 4022 187 76061 314 9120
97 Spring loaded ball M3 1.5 x 0.5 552 9120
98 Eccentric bearing 4022 197 67481 183 7005
99 Nut M4 562 9120
100 Circlip 1.5 583 9120
104 Spring holder 163 7005
106 Countersunk screw M2 x 6 Stl.St. 551 9120
107,111 Bearing holder 4022 197 67471 182 7005
108, 110 Bearing 4022 268 01437 4022 198 17622 331 9120
109 V-groove assembly 4022 197 67452 180 7005
114 Countersunk screw M2 x 6 Stl.St. 551 9120
115 Block 4022 197 68471 146 7014
118 Grubscrew M2.5 x 4 Stl.St. 452 9279
124 End stop grubscrew (X) M3 x 7 4022 197 67861 258 7005
125 Measuring system support 4022 197 68463 142 7014
126 Measuring system (X) 5322 695 15851 pwno
130 Washer 4.3 x 9 419 9279
135 Spacer 4022 197 68441 137 7014
136 Bracket 4022 197 68451 138 7014
138 Front plate 4022 197 67392 43 7002
139 Nut M2.5 222 9280
140 Opto coupler 5322 130 91284 220 9280
141 Ring 4022 197 72011 66 7002
145 Screw M1.4 4022 197 67592 254 7005
146 Isolation ring 4022 197 73951 195 7005
147 Contact spring 4022 197 73971 341 9120
148 Pressure ring 4022 197 73961 262 7005
149 Blade spring 4022 268 01459 4022 197 67582 39 7002
150 Hemispherical bearing 5322 695 15859 35 7002
154 O-ring Viton 2 x 8 5322 530 54473 303 9120
155 Pressure ring 4022 197 66641 36 7002
Contents
Figures
9-20 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-21
Contents
Figures

159 Airlock assembly (inclusive 157, 158) 5322 695 15866 32 7002
160 Adjustment nut 4022 185 18792 3 7002
164 Dished washer 4022 187 86903 6 7002
165 Guiding bush 4022 197 66442 33 7002
167 Segment 4022 268 01463 4022 197 73242 75 7002
169 Braided wire assembly 4022 268 01464 4022 197 74711 343 9120
170 Bracket 4022 197 73231 76 7002
174 Cyl. screw M2.5 x 10 Stl. St. 9120
175 Braided wire assembly 4022 197 74061 71 7002
176 Guide bush 4022 197 66442 33 7002
178 Block 4022 197 67311 144 7014
180 LED (included in measuring system) 5322 130 91254 9322 042 32682 36 9134
184 Ruler (included in measuring sys- 4022 197 68131 8 9134
tem)
185 Measuring system (Y) 5322 695 15851 pwno
187 Measuring rod 4022 197 68061 5 9134
Glass ball 2622 776 21915
188 O-ring Viton 1.78 x 21.95 ISO 020 5322 530 54391 305 9120
189 Intermediate bearing scale 4022 197 67253 41 7002
190 Bearing 1.5 x 4 x 1.2 2622 001 40464 464 9120
194 Bellows assembly (bellows only) 4022 197 68482 325 9120
195 Floating bearing pin 5322 695 15861 334 9120
196 Protection spring 4022 268 01462 4022 197 72021 318 9120
197 Spring 4022 187 76041 313 9120
198 Spring holder 4022 197 67261 165 7005
199 Hinge bush (included in bellows 4022 197 66145 246 7005
assembly)
200 Lower X support 4022 197 66123 245 7005
204 Spring 4022 187 76021 311 9120
205 Pin 1.5 x 6 4022 197 72961 242 7005
206 Ring 4022 197 72991 329 9120
207 Bearing 1 x 3 x 1 2622 001 30549 466 9120
208 Ring 4022 197 72991 329 9120
209 Spring holder 4022 197 67261 165 7005
210 Protection spring 4022 197 72021 318 9120
214 Spring 4022 187 76041 313 9120
215 Pin (special) 4022 197 72771 334 9120
216 Pin 1 x 6 4022 197 70782 241 7005
217 Ring 4022 197 70761 326 9120
218 Bearing 1.5 x 4 x 1.2 2622 001 40464 464 9120
219 Ring 4022 197 70761 326 9120
220 Screw special M3 x 6.5 4022 197 73351 72 7002
224 O-ring 1 x 3 5322 530 51312 319 9279
226 O-ring Viton 1.78 x 17.17 ISO 017 5322 530 54283 304 9120
227 Bearing pivot CF1075 2622 001 32003 470 9120
228 Grubscrew M5 x 5 2522 043 69054 544 9120
229 Bearing pin 4022 197 67511 191 7005
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-21

9-22 50129 060427 CM 100/120 Mechanics
Contents
Figures

230 Grubscrew M2 x 3 2522 043 02016 540 9120
232 Upper end stop Z Not in first
series
234 Z-lever 4022 197 69903 228 7005
235 Bearing pin 4022 197 67511 191 7005
236 Grubscrew M5 x 5 2522 043 69054 544 9120
237 Switching arm 4022 197 67371 50 7002
239 Spring Z lower 4022 199 39921 315 9120
240 Spindle nut 4022 197 67441 252 7005
241 Z-motor support 4022 197 69571 221 7005
242 Upper end stop (Z) 4022 197 67871 110 7005
243 Grubscrew M2.5 x 4 2522 043 69225 541 9120
244 Z-bracket 4022 197 69632 48 7002
246 Spacer 2.7 x 4 x 5 Al. 456 9279
247 SIB-2 4022 192 57631
250 Spacer 2.7 x 4 x 10 Al. 455 9279
251, 265 Cyl. screw M3 x 6 Stl.St. 515 9279
252-254 Spindle 36 teeth 4022 199 45191 354 9120
255 Lower end stop (Z) 4022 199 44521 227 9120
256 Shaft 4022 199 44531 209 7005
257-260 Ball bearing 3x6x2 2622 001 30577 457 9120
258 Gearwheel 16 teeth 4022 199 45181 355 9120
259 Gearwheel 36 teeth 4022 199 45171 356 9120
261 Concave ring 3.2 x 4.3 x 0.1 2622 890 14109 475 9120
262, 263 Grubscrew M2.5 x 4 541 9120
264 Gearwheel mounting plate 4022 199 44491 351 9120
266 Spacer 2.7 x 4 x 5 Al. 456 9279
267 Fixing screw M3 x 12 Stl.St. 529 9120
268 Washer 2.7 x 6.5 421 9279
269 Spacer 2.7 x 4 x 10 Al. 455 9279
270 LED RED TLHR 5413 TEF 4822 130 82124 9339 812 10682 5763
271 SIB-1 4022 192 57631
275 Grubscrew M2 x 3 Stl.St. 2522 043 02016 540 9120
276 Z-motor complete 5322 695 15862 344 9120
278 Gearwheel 16 teeth 4022 199 45161 353 9120
279 Holder height adjustment bracket 4022 197 69931 49 7002
(heavy position)
280 Grub screw M2.5 x 4
284 Opto coupler 5322 130 91284 447 9279
286 Bracket Y-motor 4022 197 70041 131 7014
288 Clamp Y-motor 4022 197 67401 175 7005
Contents
Figures
9-22 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-23
Contents
Figures

290, 291 Donator complete 5322 695 15858 120 7005
294 Grubscrew M2 x 3 2522 043 02016 540 9120
295 Dished washer (3x) 8 x 3.2 x 0.4 2622 015 10157 481 9120
296 Clamping block 5322 695 16168 4022 199 77941 117 7005
298 EPD switch (normally closed) 5322 271 30809 447 9279
300 Y driving rod 4022 197 66864 250 7005
302 EPD actuator plate 4022 197 66802 42 7002
302A Circlip 3.2 581 9120
303 Anti-backlash spring Y-motor 4022 187 76121 317 7014
304 DC-motor without reduction (Y) 5322 695 15857 346 9120
307 Alpha tilt end stop 4022 197 47841 45 7002
308 Allen screw M2 x 4 4022 197 67841 517 9120
309 Toothed gear-wheel worm drive 5322 695 16156 256 7005
310 Alpha tilt end stop 4022 197 67841 46 7002
314 Eccentric airlock end stop 4022 268 01461 4022 197 70831 260 7005
315 Pivot bearing CF1075 470 9120
316 Grubscrew M3 x 4 2522 043 69037 543 9120
317 End stop (Y) M3 x 7 4022 197 67861 528 7005
318 Alpha motor complete 5322 695 15862 344 9120
319 Flange 4022 197 67771 210 7005
324 Grubscrew M2 x 3 2522 043 02016 540 9120
325 Coupling 4022 197 67761 205 7005
326 Grubscrew M2 x 3 2522 043 02016 540 9120
327 Coupling 4022 197 67751 204 7005
328 Tilt drive + gear wheel complete 5322 695 16156 203 7005
329 Grubscrew M3 x 4 2522 043 69037 543 9120
330 Spacer 2.7 x 4 x 5 Al. 456 9279
334 TSI board 4022 192 57671 xx xx
337 Spring ring BSR8 477 9120
338 Bearing 2.5 x 8 x 2.8 2622 001 30544 463 9120
339 Worm wheel 4022 197 67621 255 7005
340 Dished ring FS 3 x 4.5 475 9120
341 Grub screw M3 x 7 163 7005
343 Plate nut 2522 471 01002 443 9279
344 Bearing 3 x 10 x 4 2622 001 40462 462 9120
345 Locking nut 4022 197 67731 202 7005
346, 347 Grubscrew special M5 x 9.5 4022 197 75431 330 9120
348 Grubscrew special M2.5 x 4
349 Grubscrew M3 x 4 2522 043 69037 543 9120
350 Grubscrew M5 x 9.5 4022 197 75431 330 9120
500 O-ring Viton 3.53 x 5.94 ISO 202 5322 530 51315 3461 3019
504 Cyl screw M2 x 4 Stl. St 517 9120
505 Transport holder 4022 860 34401
506 Cyl screw M2 x 8 Stl. St 3471 3019
508 Nut M3 3472 3019
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-23

9-24 50129 060427 CM 100/120 Mechanics
Contents
Figures

510 Cyl. screw M4 x 6 3463 3019
510A Nut M4 3466 3019
Connector cable plug (3p) 2422 025 10485 5 8396
Floating rod assy 5322 695 15984
Contents
Figures
9-24 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-25
Contents
Figures
9.15 Covers for compustage, CM100/120/200 H

Figure 808C

4 Bracket 4022 197 70152 125 9279
6 Cover plate 4022 197 75166 105 9279
7 Intermediate cover CM10/12 (old 4022 199 36582
colour)
7 Intermediate cover CM100/120 (new 4022 197 92542
colour)
7 Intermediate cover CM20 (old 4022 260 13993
colour)
7 Intermediate cover CM200 (new 4022 197 92442
colour)
7 Intermediate cover CM30 (old 4022 199 36762
colour)
7 Intermediate cover CM300 FEG 4022 199 47312
(new colour)
7 Intermediate cover CM300 (new 4022 197 92843
colour)
8 Allen screw M4 x 8 Stl.St. 4022 197 92843 411 9279
9 Front cover 4022 260 14762 83
10 Allen screw M4 x 8 Stl.St. 4022 260 14801 411 9279
14 Bracket Y-motor 4022 197 70041 131 7014
15 Bracket 4022 197 70921 91 3840
16 Cover ring 4022 197 68261 126 7014
17 Microswitch (CM300 only) 2422 120 00278
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-25

9-26 50129 060427 CM 100/120 Mechanics
Contents
Figures
9.16 Compustage joypad, CM100/120/200 H

Figure 808D

4 Knob 16 M4 4022 197 70941 29 9139
5 Spacers (2x) 2612 890 12001 32 9139
6 Knob 10 M3 4022 197 70931 28 9139
7 Cover 4022 197 68893 24 9139
8 Membrane 4022 197 71132 31 9139
10 Washer 3.1 x 6.2 16 9139
14 Plate 4022 197 68871 14 9139
15 Joystick controller 5322 218 41051 1 9139
16 Threaded rod 4022 197 84521 27 9139
18 Axle 4022 197 70221 9 9139
19 Lever 4022 197 68862 6 9139
20 Grubscrew M3 x 4 Stl.St. 2522 043 69037 10 9139
25 Cable 4022 199 33261 21 9139
26 Spring special 18 9139
28 Rubber sleeves
29 Circlip 4 11 9139
30 Axle 4022 197 70172 5 9139
34 Circlip 2.312 12 9139
35 Lever 4022 197 7024 8 9139
36 Axle 4022 197 70221 9 9139
37 Grub screw M3 x 4 Stl.St. 2522 043 69037 10 9139
38 Plate 4022 197 70232 7 9139
39 Ground sticker plate 4022 197 71031 30 9139
40 Nut (delivered with potentiometer) 9139
44 Plate bottom 4022 197 68811 3 9139
46 Potentiometer 10 K 1 turn 5322 103 24023 2 9139
9.17 Left-hand ear

Figure 809

2-85 Unit complete 5322 695 15301 Return Proc. Brown
9 Bearing 5322 520 20029
17 Grubscrew M4 x 4
20 Screw M2 x 6 (Mo.St. Csk)
30 Special screw M4 x 102
35 Grubscrew
44 Cyl. screw special
45 Floating rod with jewel 5322 695 14461
Contents
Figures
9-26 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-27
Contents
Figures

45 Floating rod with jewel for UHR 5322 695 15844 Titanium
47 Membrane 5322 695 14459
48 Nut special
49 O-ring Viton 1.78 x 34.65 ISO 028 5322 530 54393
54 O-ring Viton 1.78 x 15.60 ISO 016 5322 530 54228
55 Bellows assy. 5322 695 15039
65 Pisello lamp 24 V, 35 mA 5322 134 44025
70 Micrometer assy. 5322 695 14549
75 Axis 4022 186 65791
76 Spring washer 5.2 x 6.75 (2 x) 5322 532 14609
77 Ring 5 x 7 x 0.15 max. (3x)
9.18 Lower lens section

Figure 810

1 Indium trap
3 Diffraction diaphragm 5322 695 14383 Not for CM100
5 Intermediate diaphragm Not for CM100
7 Vacuum lining tube 5322 695 14792 CM120
7 Vacuum lining tube 5322 695 15292 CM100
8 Lead plate 4022 186 77563
9 Washer 28 x 16 mm
14 Screw M4 x 25 (St.Zn.)
18 Lens coil Diffr./Intermediate 5322 695 15222
25 Lens coil Intermediate / Diffr 5322 695 15222
27, 28 Ch.scr. M4 x 8 (Stl.St)
31 Ch.Scr. M4 x 10 (Stl.St)
34 Clamping bush 5322 526 40484
34 Inner bush 5322 526 40485
35 Nut 5322 505 10804
36 Screw M4 x 40 (St. Cr.)
37 O-ring Viton 1.42 x 4.7 5322 530 50856
39 Spacer 4.1 x 6 x 30
45 Dished washer 28 x 16.3 x 0.7 mm (7x)
50 Shutter coil complete 5322 695 15293
57 Lens coil Proj.1 5322 695 15106
58, 60 Screw M4 x 10 (Stl.St)
64 Lens coil Proj.2 5322 695 15222
68, 69 Proj.2 upper diaphragm+spring 5322 695 15294
70 O-ring Viton ISO 010 5322 530 54033
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-27

9-28 50129 060427 CM 100/120 Mechanics
Contents
Figures

71 Diaphragm carrier
74 Differential diaphragm 5322 695 14385
75 Ring 4022 185 96776
76 Diaphragm 4022 186 71112
77 Diaphragm holder 4022 186 71122
80 S.A. diaphragm mechanism 5322 695 15784 Colour brown (modi-
fied)
5322 695 15782 Modification kit
80 S.A. diaphragm mechanism 5322 695 15855 Colour white
89 Diaphragm holder (see also Obj.) 5322 695 14788
(For aperture order nos. see Upper
Obj. lens section)
99 Contact plug for lens cable 5322 268 20114
109 O-ring Viton 3.53 x 139.29 ISO 254 5322 530 54462
112 Dished washers 8 x 4.2 x 0.3 (10 x) From Oct. ’90
onwards
113 Support From Oct. ’90
onwards
116 Clamping bush 5322 526 40484
116 Inner bush 5322 526 40485
116 Nut 5322 505 10804
118 Allen screw M4 x 40 (St. Cr.)
120 Distance piece 4.1 x 6 x 31 P2
124 O-ring Viton 1.42 x 4.7 5322 530 50856
125 Distance piece 4.1 x 6 x 27 P1
NOTE: For some CM100/120 microscopes a teflon ring 62 has been added to
ensure a better pressure on the indium seal of the lower pole piece. This
was necessary because of the build up of tolerances in the lower lens
section.
9.19 Camera airlock

Figure 811

5 Pressure hose PE 5 x 3.3 D2 5322 530 24055 Length as stated
6 Hose coupling M5 5322 526 40351
7 O-ring Viton 2.62 x 37.77 ISO 128 5322 530 54047
8 Nut M4
10 O-ring Viton 1.78 x 4.47 ISO 008 5322 530 54031
11 Ring magnet 4022 197 59381
14 Lipseal DE 150100 5322 530 50858
17, 26 Bearing 5322 520 20435
Contents
18, 25 Quad ring mini 4011 5322 532 54423

Figures
9-28 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-29
Contents
Figures

27 O-ring Viton 2.62 x 12.37 ISO 112 5322 530 54042
28 O-ring Viton 2.62 x 23.47 ISO 119 5322 530 54046
34 Pin 3 x 16
35 Pin 4 x 16
38 Ball 4 mm (4x)
39 Shaft 5322 695 15295
40 Allen screw M4 x 8 (Stl. St.)
46 Circlip 5322 530 70122
50 Nut M4
54 O-ring Viton 3.53 x 139.29 ISO 254 5322 530 54462
55 Dished washers 5.2 x 0.25 (10x)
59 Circlip 5322 530 70123
63 O-ring Viton 5.00 x 115 5322 530 51236
65-79 Beam stop mechanism complete 9432 064 11001 Option for CM100
66 Beam stop needle 5322 695 75029
67, 68 Beam stop assy. 5322 695 14695
69 O-ring Viton 1.78 x 2.90 ISO 006 5322 530 54028
73 Grubscrew M3 x 4
74 Special screw
75 O-ring Viton 2.62 x 7.59 ISO 109 5322 530 54332
9.20 Projection chamber & plate camera, drive+

numbering
Figure 812A

4-45 Plate camera drive 5322 695 15104
5,7 Nut M6
10 O-ring Viton 1.78 x 20.35 ISO 019 5322 530 54037
14 Nut M5
16 Mu-shaped cuffs 5322 530 50857
18 O-ring Viton 1.78 x 9.25 ISO 012 5322 530 54413
20 O-ring Viton 1.78 x 4.47 ISO 008 5322 530 54031
26 Threaded rod M5
27 Shaft 4022 19708151 39 Fig. 11
29, 45 Circlip 17 mm (St. phos.)
34 Bearing 5322 532 51722
35 O-ring Viton 1.78 x 20.35 ISO 019 5322 530 54037
36 Quadring mini 4010 5322 530 54351
37 Hose coupling M5 5322 526 40351
Pressure hose PA 4.76 x 3.56 NA 5322 530 24072 Length as stated
38 Grubscrew M3 x 4
40 O-ring Viton 1.78 x 26.70 ISO 023 5322 530 54038
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-29

9-30 50129 060427 CM 100/120 Mechanics
Contents
Figures

41 Magnetic switch SPWG/29/1 5322 360 50498
53, 54 Cyl. screw M4 x 8
59 Ball dia. 6 mm
67 Pin 3 x 10
70 Ball bearing 3 x 10 x 4 NKF 5322 520 20044
76, 79 Bearing 6 x 8 x 10 5322 520 30427
78 O-ring Viton 2.62 x 13.94 ISO 113 5322 530 54043
80 O-ring Viton 1.78 x 6.07 ISO 010 5322 530 54033
85 Circlip 6 mm
86 Shift/axis small screen 4022 197 07742
88 Circlip 40 mm
89, 96 Allen screw M3 x 16 (Stl.St)
100, 113 Nut M3
107 O-ring Viton 1.78 x 18.77 ISO 018 5322 530 54414
108 O-ring Viton 1.78 x 2.90 ISO 006 5322 530 54028
110 Circlip 5 mm
113 Nut M3
120 Pin 4 x 12 H6 (Stl.St)
124 Optoswitch 5322 282 50032 See Electronics
Sect. 3.3
128, 138 Bearing 16 x 18 x 15 5322 520 30428
130 Ball dia. 6 mm
136 Pin H6 3 x 10 (Stl.St)
137 O-ring Viton 2.62 x 25.07 ISO 120 5322 530 54417
139 O-ring Viton 2.62 x 15.54 ISO 114 5322 530 54224
144 Circlip 16 mm St. phos.
158, 172 Rubber seal, MU shaped cuff 5322 321 40088
171 O-ring Viton 3.53 x 113.89 ISO 246 5322 530 54538
178 Threaded rod M4
181 Allen screws M3 x 15
184 Nut M4
187 Nut M3
189 Special screw (Stl.St)
196 Allen screw M5 x 30 (4x) + M5 x 16 (1x)
197 35 mm camera block 9432 064 01001 Option for CM100
200 Knurled captive screw 5322 502 10267
205 O-ring Viton 3.53 x 82.14 ISO 236 5322 530 54459
206 Pin 4 x 12
211 O-ring Viton 5.0 x 115.0 5322 530 51236
214 Special screw
219 Dished washers 20 x 10 x 0.8
Contents
Figures
9-30 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-31
Contents
Figures

221 Binocular USFA 5322 695 15798 Brown
4022 199 30831 New color
223 Rubber eye piece 5322 462 40602
226 Cover 220 mm dia. 5322 441 80696
226 Cover 210 mm dia. with opening 5322 441 80697
227 Front window 5322 695 15296
230 O-ring Viton 3.53 x 82.14 ISO 236 5322 530 54459
234 O-ring Viton 3.53 x 209.14 ISO 267 5322 530 50632
235 Binocular viewing screen 5322 695 34031
236 Insulator set for both screens 5322 695 15687
244 Nut M5 Br.Ni.
248 Clamping block 4022 197 07722
249 O-ring Viton 3.53 x 142.47 ISO 255 5322 530 54463
254 Side window 5322 695 14241
254 Cover 155 mm dia. 5322 441 80695
256 O-ring Viton 3.53 x 47.22 ISO 225 5322 530 54635
265 Pin 4 x 12
269 Mirror assy. for CMXX 5322 380 30266
270 O-ring Viton 3.53 x 18.64 ISO 210 5322 530 54418
272 Anti reflection plate 5322 450 61322
274 O-ring Viton 2.62 x 15.07 ISO 120 5322 530 54417
275 Lens 5322 381 10791
276 Ring 5322 532 52094
279 Pin 4 x 12
284 Cyl. screw M4 x 12 (Cs.Stl.St)
304 Dished washers 8 x 4.2 x 0.3 (St.)
306 Nut M4 (Stl.St)
307 Main viewing screen 5322 695 14239
308 O-ring Viton 3.53 x 215.49 ISO 268 5322 530 54637
315 O-ring Viton 2.62 x 71.12 ISO 149 5322 530 50895
316, 324 Cyl. screw M3 x 10 (Br.Ni.)
320 Insulating bush 5322 325 60307
326 Insulating bush (2x) 5322 325 60306
333 O-ring Viton 1.78 x 37.77 ISO 128 5322 530 54047
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-31

9-32 50129 060427 CM 100/120 Mechanics
Contents
Figures
9.21 Interface block H

Figure 812-1A

1 O-ring Viton 2.62 x 107.62 ISO 156 5322 530 51201 4022 199 21561
2 Interface block flange 4022 197 43963
3 O-ring Viton 3.53 x 107.72 ISO 245 5322 530 54504 4022 199 22451
4 Washer 6.4 x 12.5 (Stl.St) 2522 600 27147
5 Allen screw M6 x 40 (Stl.St.) 2522 006 04059
6 Lead ring 4022 199 65401
7 Circlip 1.9 2522 634 04004
8 Cyl. screw M3 x 30 (Stl.St.) 4022 187 71051
9 Aluminum disc 4022 197 43892
10 Blind flange 4022 199 59441
11 Cyl. pin 3 x 30 (Stl.St.) 2522 670 07056
12 Dummy flange 4022 197 43914
13 Washer 6.4 x 12.5 (Stl.St.) 2522 600 27147
14 Spring washer 6.1 x 11.8 (Stl.St.) 2522 613 12014
15 Allen screw M6 x 12 (Stl.St.) 2522 006 04051
16 Pin 4022 197 43972
17 Circlip 3.2 2522 634 04006
18 Lead ring 4022 197 43882
9.22 Plate numbering unit

Figure 812B

1 Mirror CMXXX
1, 3 Mirror assy. CMXXX 4022 260 34561
5 O-ring Viton 1.78 x 21.95 ISO 020 5322 530 54391
6 O-ring Viton 2.62 x 25.07 ISO 120 5322 530 54417
7 Lens 197 73191
8 Ring 197 05282
15 Hex. nut M4
16 Washer 4.3 x 12
18 St. dished washer 8 x 4.2 x 0.3
19 Washer M4 x 12
25, 29 Washer 3.2 x 7
27 VFD module GU256X64-312 5322 130 91508
29 Washer 3.2 x 7
30 Cable GCB-X5 to VFD module 199 40911
31 Cord grip 1 x 8 x 10
32 Washer 3.2 x 9
Contents
Figures
9-32 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-33
Contents
Figures
9.23 Exchange unit plate film & plate film cassette H

Figure 813

2 Cyl. screw M3 x 10 St.Cr.
4 Unexposed plates magazine (cover 5322 695 15571 36 plates
only)
4 Complete magazine for unexposed
plates or
film, incl. the exchange unit. 9432 062 20011 36 plates
4 Complete magazine for unexposed
plates or
film, incl. the exchange unit. 9432 062 22001 56 plates
6 Round head cross screw M3 x 5
7 Clip 5322 405 90314
10, 57 Blade spring, set 5322 695 14963
15 Round head screw M3 x 6 Nr.St.
16 Blade spring 5322 492 64756
17 Cover plate 5322 466 30132
20 Cyl. screws M3 x 4 St.Cr.
25 Guiding rail right 4022 159 64151
25 Guiding rail left 4022 159 64161
36, 37 Lock assy 5322 695 14584
45 Grubscrew M3 x 8 St.Zn.
46 Frame
52 Exposed plates magazine (cover only) 5322 695 15569 36 plates
52 Complete magazine for exposed 9432 062 21001 36 plates
plates or film
52 Complete magazine for exposed 9432 062 23001 56 plates
plates or film
53 Clip 5322 405 90314
54 Round head cross screw M3 x 5 St.Zn.
57 Blade spring 5322 695 14963
59 Round head screw 5N 3/8" St.Zn.
60 Cover plate 5322 466 30132
100 Set of 18 holders for 6.5 x 9 cm plates 9432 062 14181 Glass plates
100 Set of 28 holders for 6.5 x 9 cm plates 9432 062 08201 Sheet film
101 Set of 18 holders for 3 1/4" x 4" pl. 9432 062 10181 Glass plates
101 Set of 28 holders for 3 1/4" x 4" pl. 9432 062 09201 Sheet film
102 Set of 18 holders for 6.5 x 9 cm flat film 9432 062 15481 Sheet film insert
103 Set of 18 holders for 3 1/4" x 4" flat film 9432 062 15181 Sheet film insert
As from October 1991 onwards, two types of film magazines are in existence,
viz.:
A set of magazines for 56 plates:

• Unexposed plates magazine 9432 062 22001
• Exposed plates magazine 9432 062 23001
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-33

9-34 50129 060427 CM 100/120 Mechanics
Contents
Figures
In these magazines the following types of film holders must be used. H

• 6.5 x 9 cm sheet film holder 9432 062 08201 (28 pieces)
• 3.25 x 4 inch sheet film holder 9432 062 09201 (28 pieces)
The 56-plates magazines can be identified in two ways:
• A square metal plate with the letters 56 engraved, and/or a square
fluorescent sticker with the text 56.
• The 56-film sheet holder can easily be identified as it is only about 2.1 mm
thick.
A set of magazines for 36 plates:
• Unexposed plates magazine 9432 062 20011
• Exposed plates magazine 9432 062 21001
In these magazines the following types of film holders must be used:

• 6.5 x 9 cm glass film holder 9432 062 14181 (18 pieces)
• 6.5 x 9 cm sheet film insert 9432 062 15481 (18 pieces)
• 3.25 x 4 inch glass film holder 9432 062 10181 (18 pieces)
• 3.25 x 4 inch sheet film insert 9432 062 15181 (18 pieces)
The 36-plates magazines have no identification.

The 36-film holder is about 3.5 mm thick.
CAUTION! The new 56-plates magazines are physically different from the 36-
plates magazine and cannot be upgraded or modified in the field.
- The 56-film holders must be loaded only in the 56
unexposed plates magazine
- The 36-film holders must be loaded only in the 36
unexposed plates magazine
NOTE: For using the film holders and magazines, see the Operating Manual
section on Photography.
9.24 Water and air connections, circuit diagram

Figure 814A (Up to Oct. 1988)

4 Water filter G 3/8" housing 5322 360 50496
(4) Filter 5322 480 50299
(4) O-ring Viton 1.78 x 26.70 ISO 023 5322 530 54038
5 V22 magnetic valve Herion 5322 360 50483
6, 15 Watts water regulator 5322 281 20087
7 V23 magnetic valve Herion 5322 360 50482 Not for CM100
9 Non-return valve V26 5322 360 50494
10, 14 Fast coupling KA 215-8 (female) 5322 526 40513 For water hose
Fast coupling TA 211-LW6 (male) 5322 526 40514 For water hose
Water hose 6 x 13 5322 530 20591 Length as stated
Hose clamp SO40512/13/15 5322 401 10957
Contents
Figures
9-34 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-35
Contents
Figures

Polyflo hose PA 6 x 4 BL 5322 530 20605 Length as stated
Inner bush 6 - 4 5322 526 40485
Inner bush 8 - 6 5322 532 21051
Inner bush 12 - 9 5322 526 40519
Nut (Ni) 6 5322 505 10804
Clamping bush dia. 6 5322 526 40484
Clamping bush dia. 6 + nut 5322 526 40748
Clamping ring with reduction 8<->6 5322 530 70427
Water supply hose 6 mm 5322 530 20591 From microsc. to wall
Water supply hose 8 mm 5322 530 20598
Hose clamp 14 mm 4822 401 10257
Hose clamp 20 mm 4822 401 10492
9.25 Water and air connections, circuit diagram

Figure 814B (From April 1992 onwards)

(4) Filter 5322 480 50299
(4) O-ring Viton 1.78 x 26.70 ISO 023 5322 530 54038
6, 15 Watts water regulator 5322 281 20087
10 Fast coupling KA 215-8 (female) 5322 526 40513 For water hose
Fast coupling TA 211-LW6 (male) 5322 526 40514 For water hose
Water hose 6 x 13 5322 530 20591 Length as stated
Hose clamp SO40512/13/15 5322 401 10957
Polyflo hose PA 6 x 4 BL 5322 530 20605 Length as stated
Inner bush 6 - 4 5322 526 40485
Inner bush 8 - 6 5322 532 21051
Inner bush 12 - 9 5322 526 40519
Nut (Ni) 6 5322 505 10804
Clamping bush dia. 6 5322 526 40484
Water supply hose 6 mm 5322 530 20591 From microsc. to wall
Hose clamp 14 mm 4822 401 10257
Hose clamp 20 mm 4822 401 10492
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-35

9-36 50129 060427 CM 100/120 Mechanics
Contents
Figures
9.26 Water and air connections mechanical H

Figure 815A (Up to October 1988)

4 Fast coupling TA 213-R1/4 (male) 5322 526 40515
5 Fast coupling KA 213-R1/4 (female) 5322 526 40761
7 Microswitch 250 V, 10 A 5322 271 34223
14 V23 magnetic valve Herion 5322 360 50482 Not for CM100
15 Watts water regulator 5322 281 20087
16 Hose pillar SO40503-10 x 10 5322 526 40516
18 Water filter 5322 360 50497
19 O-ring Viton 1.78 x 26.70 ISO 023 5322 530 54038
24 Watts water regulator 5322 281 20087
25 Compressed air filter 5322 360 50502
29 Pressure switch 0.1-10 bar 5322 278 90702
Compressed air supply hose 5322 530 24055
General parts:
Water:
Water hose 13-6 5322 530 20591 Length as stated
Polyflo hose PA 6-4 BL (water) 5322 530 20605 Length as stated
Hose pillar SO40503-6-6 5322 530 20795
Hose clamp SO40512-13-15 5322 401 10957
Compressed air:
Pressure hose PE 5 x 3.3 DZ 5322 530 24055 Length as stated
Pressure hose PA 8 x 6 NA 5322 530 20596 Length as stated
Clamping material:
Inner bush 6 - 4 5322 526 40485
Inner bush 8 - 6 5322 532 21051
Inner bush 12 - 9 5322 526 40519
Nut (Ni) 6 5322 505 10804
Clamping bush dia. 6 S040001-6 5322 526 40484
Nut + clamping bush dia. 6 5322 526 40748
N2:
N2 filter grade 0.3 µm 5322 480 20066
External supply hoses:
Water supply hose 6 mm 5322 530 20591 Length as stated
Hose clamp 14 mm max. 4822 401 10257
Hose clamp 20 mm max. 4822 401 10492
Hose clamp 25 mm max.
Tools
Tools for opening Herion valves 5322 395 50272
Contents
Figures
9-36 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-37
Contents
Figures

Figure 815B (From Oct. ’88 up to Apr. ’92)

4, 14, 24 Watts water regulator 5322 281 20087
5 Microswitch 250 V, 10 A 5322 271 34223
6 Fast coupling TA 213-R1/4 (male) 5322 526 40515 For air
7 Manual tap SO 47000-6 5322 360 50717
8 Fast coupling KA 213-R1/4 (female) 5322 526 40761 For air
15 Manual tap SO 47121-8 5322 360 50494
16, 17 Hose pillar SO 40503-10-10 5322 526 40516
18 Water filter G 3/8” housing 5322 360 50496
19 Water filter 5322 360 50497
20 O-ring Viton 1.78 x 26.70 ISO 023 5322 530 54038
25 Magnetic valve Herion 92019 5322 360 50483
26 Magnetic valve Herion 93019 5322 360 50482 Not for CM100
26 Tool for opening Herion valves 5322 395 50272
27, 28, 29 Glass filter with reduction valve 5322 360 50693
30 Pressure switch 0.1- 10 bar 5322 278 90702
34 Manometer 5322 395 84065
General parts:
Water:
Hose pillar SO 40503-6-6 5322 530 20795
Hose clamp SO 40512-13-15 5322 401 10957
Compressed air:
Pressure hose PE 5 x 3.3 DZ 5322 530 24055 Length as stated
Clamping material:
Inner bush 6 - 4 5322 526 40485
Inner bush 8 - 6 5322 532 21051
Inner bush 12 - 9 5322 526 40519
Nut (Ni) 6 5322 505 10804
N2:
N2 filter grade 0.3 µm 5322 480 20066
Hose clamp 14 mm max. 4822 401 10257
Hose clamp 20 mm max. 4822 401 10492
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-37

9-38 50129 060427 CM 100/120 Mechanics
Contents
Figures

Figure 815C (From April ’92 onwards)

5, 9, 15, 17, Watts water regulator 5322 281 20087
26, 28
7 Microswitch 250 V, 10 A 5322 271 34223
8 Fast coupling TA 213-R1/4 (male) 5322 526 40515 For air
14 Fast coupling KA 213-R1/4 (female) 5322 526 40761 For air
20, 36 Manual valve V22 SO 47000-12 5322 526 40762
30 Water filter 5322 360 50497
33 O-ring Viton 1.78x26.70 ISO 023 5322 530 54038
34, 35 Hose pillar SO 40503-10x10 5322 526 40516
Compressed air filter 4022 198 25251
40, 47 Glass filter with reduction valve 5322 360 50693
41 Non return valve SO 47321-6 5322 360 50449
46 Manometer 5322 395 84065
48 Hose pillar N2 SO 40503-8-8 5322 526 40972
49 Pressure switch 0.1 - 10 bar 5322 278 90701
50 Needle valve V34 (M5) 5322 360 54087
54 Manual valve V30 5322 360 50495
56, 58, 73 Flow meter tube 5/60 litre/hour 5322 349 20144
57, 59, 74 Flow meter switch 5322 280 40325
60 Flow meter tube 15/160 litre/hour 5322 349 20148
64 Flow meter switch 5322 280 40325
65, 66 Manual valve V35, V36 (UT obj.) 5322 360 50887
67 Hose pillar (UT obj.) 5322 526 40516
71 Knee coupling
72 O-ring Viton 3.53 x 20.22 ISO 211 5322 530 51241
75 Coupling
80, 81 Fast coupling KA 213-R1/4 (female) 5322 526 40761 For water Gatan CCD
General parts:
Water:
Hose pillar SO 40503-6-6 5322 530 20795
Hose clamp SO 40512-13-15 5322 401 10957
Compressed air:
Pressure hose PE 5x3.3 DZ 5322 530 24055 Length as stated
Pressure hose PA 8x6 NA 5322 530 20596 Length as stated
Pressure hose PA 12x9 NA 5322 530 20617 Length as stated
Clamping material:
Inner bush 6 - 4 5322 526 40485
Inner bush 8 - 6 5322 532 21051
Inner bush 12 - 9 5322 526 40519
Nut (Ni) 6 5322 505 10804
Clamping bush Ø 6 SO 40001-6 5322 526 40484
Clamping bush Ø 8 SO 40001-8 5322 526 40749
Nut + clamping bush Ø 6 5322 526 40748
Contents

Figures
9-38 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-39
Contents
Figures
N2:
N2 filter grade 0.3 µm 5322 480 20066
Hose clamp 14 mm max. 4822 401 10257
Hose clamp 20 mm max. 4822 401 10492
9.29 Pneumatic circuit diagram

Figure 816

Compressed air hose PE 5 x 3.3 DZ 5322 530 24055
N2 filter 5322 480 20066 Grade 0.3 µm
For other spare parts see water and air connections.

Contents
Figures
CM 100/120 Mechanics 50129 060427 9-39

9-40 50129 060427 CM 100/120 Mechanics
Contents
Figures
9.30 General Tools H

Figure 818
NOTE: The tools listed below are not necessarily supplied as standard items
with the microscope.

3 Inserter and extractor for final lens dia- 4022 186 30245
phragm
4 Injector and extractor for fixed lining 5322 695 14557
tube diaphragms Tip of injector 4
4A SED diaphragm extractor/injector 4022 186 65411
5 Set of indium tools 5322 695 14633
a. Scraper, small
b. Scraper, large
c. Cutting guide piece
d. Insert
e. Pin
f. Guide bush
6 Pole piece key
7 Screws to lift all pole pieces
8 T Allen key 3 mm, for M4
T Allen key 5 mm, for M6
9 Set of indium wires
0.5 mm dia.
0.7 mm dia.
1.0 mm dia.
10 Hex head screwdriver 2.5 mm for M3.5
10 Hex head screwdriver 3 mm for M4
11 Set of Allen keys:
1.5 mm 4822 395 50081
2.0 mm 4822 395 50048
2.5 mm 4822 395 50085
3.0 mm 4822 395 50013
4.0 mm 4822 395 50014
5.0 mm 4822 395 50015
6.0 mm 4822 395 50019
8.0 mm 4822 395 50092
10.0 mm 4822 395 54079
1.27 mm 4822 395 54078
5/64 inch 4822 395 50016
3/32 inch 4822 395 50017
Shortened 0.9 mm Shortened
Shortened 3 mm Shortened
Shortened 3/64 inch
Contents
Figures
9-40 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-41
Contents
Figures

12 Fomblin grease 5322 390 10144
13 Tool for goniometer wedges 5322 395 50403
14 Tool for centring left-hand ear
15 Nylon gloves, size 9 5322 395 94022
Nylon glove, size 10 5322 395 90203
16 P.C. board extender, single 5322 216 92617
16A P.C. board extender, double 5322 397 60131 With jumpers
P.C. board extender, double 5322 263 74129 No jumpers
17 Centring tool to align proj. pole pieces
18 Tool for single tilt holder 5322 395 90196
19A/B Set of trimming tools 4822 310 50095
20 Tool for wehnelt cylinder 5322 695 15298
21 Circlip injector for goniometer holder 5322 695 14234
22 Flexible Allen key 5322 395 54014
23 Key for knob nut 4022 198 07360
24 Extractor for pushbutton caps
25 Extension cable for gonio. holders
26 Anode tool 5322 695 14581
27 Extension cable for the lenses 4022 186 78731
28, 29 Tool to position upper obj. pole piece
(SED pole pieces only)
30 Pin for lifting mech. column 12 mm dia.
Positioning pin for lifting mech. 13 mm dia.
31 Cover, side window dia. 155 mm 5322 441 80695
32 Cover, front window dia. 220 mm 5322 441 80696
32 Cover, front window + opening 5322 441 80697
33 Extractor for pins of AMP plugs
34 Extractor for pins of AMP plugs; 5322 395 60042 pins 0.8 dia.
91067-3 AMP
35 Extractor for pins of AMP plugs 5322 395 64007 pins 1.6 dia.
36 Extractor for pins of AMP lens plugs; 5322 395 60041 pins 2.2 dia.
AMP 725840
37 Test piece for obj. pole pieces
38 Test piece for emission chamber on
top of block 4, Figure 820A
39 Test piece for top proj. chamber
40 Ball 24 mm
41- 58 Goniometer tool kit 5322 695 14509 All manual gonio’s
41 Glass plate, ring and O-ring to check
goniometer movement under vacuum
conditions
42 Key to remove crown nut 129,
Figure 808
43 Key to open airlock, Figure 808
44 Clamping plate to fix floating tube 29, (see 44+44B)
Fig. 808 to housing 42, Figure 808
44A Clamping plate to fix floating tube
44B Intermediate plate mounted between 5322 695 14987 Plate 44A and 44B
right-hand ear and plate 44 A
44, 44B Clamping system for goniometer
45 Key to remove airlock nut 37,
Figure 808
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-41

9-42 50129 060427 CM 100/120 Mechanics
Contents
Figures

46 Key to unscrew locking ring 6,
Figure 808
47 Tool to remove the bearing shell 5 from 5322 395 90197
its seating, Figure 808
47A Tool to remove bearing shell 5322 695 16047 Only for CompuStage
48, 49 Keys to unscrew nuts 209, Fig 4a only for EM400 and
400T
50 Key to hold plate 126, Fig. 808 when
using tool 41
51 Cover for L.H. ear (only for goniome-
ters PW 6500)
52,53 Screws to adjust centre of L.H. ear with (only for goniometers
respect to the tilt axis (only for goniom- PW 6500)
eters PW 6500)
54 Screw to take over L.H. ear movement
55 Key to unscrew nut 16, Fig. 7. Only for EM400,
D601-D820
56,57 Tools to remove and insert the bearing (only for goniometers
cup PW 6500)
58 Tool to adjust the play in the microme-
ter spindle
60 Test flange for Helium detector 5322 695 14966 EM400 series only
61 Test flange on top of V6
62 Tool to remove the hole count dia- Not for CM100/120
phragms from the upper pole piece
63 Mounting dummy for adjustable dia- Not for CM100/120
phragms
64 Pulling tool to remove anode, dynodes 5322 695 16001 Not for CM100/12
and cathode carrier with inserts 65, 66,
67
65 The anode insert Not for CM100/120
66 The dynodes insert Not for CM100/120
67 The cathode carrier insert Not for CM100/120
68 Support to mount the complete cath- Not for CM100/120
ode
69 Tool (2x) to separate the wehnelt cap Not for CM100/120
from the cathode assy
70 Block (3x) to facilitate adjustment of Not for CM100/120
upper and lower column halves.
71 Wheels for relocating HT tank. (set of 5322 695 15004 Not for CM100/120
3)
72 Extension cable for supplying the p.v. CM300 only
pump from an external source.
73 Vacuum flange for pre-pumping the CM300 only
emission chamber after opening
74, 75, 76 Hoses for pumping and filling the HT CM300 only
tank and emission chamber.
77 Connector block for SF6 pumping and CM300 only
filling.
78 Key for Herion valve 5322 395 50272
79 Tool to lift the emission chamber CM200 only
Contents
Figures
9-42 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-43
Contents
Figures

80 Tool to fill and pump the HT tank and CM200 only
emission chamber
81, 82 Hose for filling and pumping emission 5322 530 20617 Not for CM100/120
chamber and HT tank; PA 12 x 9
83, 84 Hose for filling N2 or SF6 Pa 8 x 6 5322 530 20596 Not for CM100/120
90 Silicon grease 5322 390 20011 Not for CM100/120
91 HT test flange 5322 695 15722 CM200 only
94,94A, CompuStage transport plate
94B,94C
95 CompuStage vacuum test piece
96,96A, 96B CompuStage mounting support
98,99,100 Filling tool for UltraTWIN
101 Circlip injector for Objective diaphragm UltraTWIN and
holder 2 mm CM120 BioTWIN only
102, 103 Tools to align the CM120 Cryoshields
104 Universal stub on lower pole piece 5322 695 16036
105 Adaptor (K flange) 2922 010 15004
106 Ball flange 2922 021 55041
General:
Calibrated eyepiece for measuring res- 5322 381 44014
olution, etc.
Tweezers with platinum points for 5322 395 70001
cleaning diaphragms
Solder sucker 4822 395 10082 CM100/120 only
Solder sucker 4822 395 10159 Not for CM100/120
Paint repair set, (beige and brown) 5322 695 15173
Paint repair set, (CMxxx) 5322 390 10132 Dark mushroom
5322 390 10131 Light grey
5322 390 10129 Dark grey
Note: The paint can be ordered via HelpDesk
Loctite 542 5322 390 34007 50 ml
Alvania 4822 389 10001
Molub. alloy grease (med.): 5322 390 24011 Manufacturer:
Imperial Oil and
Grease Co. Ltd.
6505 Wilshire Blvd.
L.A. California
USA
Foot switch 5322 695 15172
Impulse relay 5322 280 40278
Service test software (Siemens) 5322 695 15492 CM100/120 only
Service test software version 1 (64 k) 5322 695 15557
Service key 5322 695 15356

Set of version 1.2 service keys 5322 695 15684
I/O cable PC CPU 5322 695 15647
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-43

9-44 50129 060427 CM 100/120 Mechanics
Contents
Figures
9.31 OD Pump + Pre-vacuum Valves H

Figure 820A (From June 1990 onwards)

4 Magnetic valve Herion 5322 695 15289
15 Coupling (plastic + nut) Herion 0551 5322 528 20468
623
20 Pressure hose 8 x 6 NA 5322 530 20596 Length as stated
29 Microswitch 5322 271 30491
46 O-ring Viton 1.78 x 9.25 ISO 012 5322 530 54413
66, 79 Pressure hose PE 5 x 3.3 5322 530 24055 Length as stated
68, 80 Hose coupling M5 x 1/8" 5322 526 44104
98 Pneumatic cylinder complete 5322 695 15087
Spares kit for pneumatic cyl. assy. 5322 695 14937
111 O-ring Viton 1.78 x 9.25 ISO 012 5322 530 54413 2x
117 Extractor tool
128, 129 Co-seal Viton Special 5322 530 54494
131 O-ring Viton 5.33 x 69.22 ISO 335 5322 530 54506
134 O-ring Viton 5.33 x 53.34 ISO 330 5322 530 54543
138 OD pump complete 63-PH2/B624-24- 5322 695 15299
00
Oil for ODP, Santovac 100 ml 5322 390 80037
144 Rubber sleeve SC10 5322 695 14258
148, 155 Clamp KF10 5322 401 10953
193, 240 Clamp KF10 5322 401 10953
310, 325 Clamp KF10 5322 401 10953
318, 328 Clamp KF10 5322 401 10953
344, 347 Clamp KF10 5322 401 10953
360, 409 Clamp KF10 5322 401 10953
146, 150 O-ring carrier KF10 5322 530 50879
190, 245 O-ring carrier KF10 5322 530 50879
314, 327 O-ring carrier KF10 5322 530 50879
337, 339 O-ring carrier KF10 5322 530 50879
349, 365 O-ring carrier KF10 5322 530 50879
414 O-ring carrier KF10 5322 530 50879
149, 154 O-ring Viton special 5x15 NW10 5322 530 50881 Edw. H021-24-032
410 O-ring Viton special 5x15 NW10 5322 530 50881 Edw. H021-24-032
172 Connection wire 5322 321 20818
176 Threaded rod M6 x 80
178 Rubber sleeve
179 O-ring Viton 2.62 x 12.37 ISO 112 5322 530 54042
Contents
183 Rubber feed-through

Figures
9-44 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-45
Contents
Figures

187/192 Coupling
198 Thermal switch 70 °C 5322 282 30203 70 °C Klixon
replaces100 °C
202 Heating element 450 W, 220 V 5322 695 15177
207 Nut M8
208 Pirani gauge 5322 695 14249
215 Thermal switch 60 °C 5322 282 54055
219, 224 O-ring Kalrez 2.4 x 5.3 5322 530 51165 Replaces O-ring Viton
special 2.4 x 5.3
5322 530 50848
230 Microswitch 5322 271 30491
238 Vacuum hose 5322 530 20167 Length as stated
254 O-ring Viton 1.78 x 4.47 ISO 008 5322 530 54031
260 Hose coupling 5322 526 44026
275, 277 Hose pillar
276 T-coupling
279, 392 Armoured hose 15 mm 5322 530 24152 Length as stated
281 O-ring Viton 1.78 x 25.12 ISO 022 5322 530 54514
286, 307 O-ring Viton 1.78 x 28.20 ISO 024 5322 530 54392
287 O-ring Viton 1.78 x 4.47 ISO 008 5322 530 54031
289 Pneumatic valve complete V1 5322 695 14541
295, 405 Clamp KF16
296 Filter
297, 406 O-ring Viton Special Edw. H021-24-033
304 Pre-vacuum pump Trivac D8B 5322 360 20095 Discontinued
* Oil for pre-vacuum pump 5322 390 10097 (5 L)
304 Adapter kit from Trivac, Leybold to 5322 695 15981
RV8
304 Pre-vacuum pump Edwards RV8 5322 360 20123
Oil for pre-vacuum pump ((Ultragrade 5322 390 10098 (4 L)
19)
306 O-ring Viton Special 2.62 x 15.88 5322 530 51024 Edw. H021-26-121
308 Pneumatic valve complete V2 5322 695 14541
330 Vacuum hose length 40 cm 5322 530 20167 Length as stated
354 O-ring Viton 1.78 x 17.17 ISO 017 5322 530 54283
359 Coupling M5 Banjo 5322 526 44026
367 Pirani gauge 5322 695 14249 with 420 plug
368 Electromagnetic valve Herion 5322 695 15288
375 Vacuum hose Brown 35 x 25 NLN K216 5322 530 20167 Length as stated
Spring in hose 5322 492 90172
383 Filter 5322 695 15508
387 Filter candle 5322 480 10226
389 DOWTY seal PP45-3 5322 532 40069
391 Hose pillar 5322 526 40518
407 Carrier KF16
* All Leybold pre-vacuum pumps with code numbers 1125514 or 1125524

Contents
Figures
CM 100/120 Mechanics 50129 060427 9-45

9-46 50129 060427 CM 100/120 Mechanics
Contents
Figures
must run on the SYNTHETIC oil with ordering code 4022 268 00653. (1 L) H
9.32 OD Pump + Pre-vacuum Valves

Figure 820B (From 1994 onwards)

3 Magnetic valve Herion NO 5322 695 15948 No. 9037700.0151
5 Coupling Herion (628-0203) 5322 695 15949
7 Magnetic valve Herion NC 5322 695 15951 No. 9032600.0151
12 Pressure hose 8 x 6 NA 5322 530 20596 Length as stated
29, 29A Microswitch S3, S3’ 5322 271 30491
68, 105, 269 Hose coupling 5322 526 44026
443, 450 Hose coupling 5322 526 44026
95 Pneumatic cylinder complete 5322 695 15087 Edw. no. B34432020
Spares kit for pneumatic cyl. assy. ABEX, MEAD
111 O-Ring Viton 1.78 x 9.25 ISO 012 5322 530 54413 2x
113 Rubber sleave
117 Extractor tool
128, 129 Co-seal Viton Special 5322 530 54494
131 O-Ring Viton 5.33 x 69.22 ISO 335 5322 530 54506
132 Threaded rod M6 x 80
134 O-Ring Viton 5.33 x 53.34 ISO 330 5322 530 54543
135, 136 Allen screw M5 x 12
138 OD pump without valves 5322 695 15299
Oil for ODP, Santovac 100 ml 5322 390 80037
142, 148 Clamp KF10 5322 401 10953
155, 193 Clamp KF10 5322 401 10953
240, 310 Clamp KF10 5322 401 10953
318, 325 Clamp KF10 5322 401 10953
344, 347 Clamp KF10 5322 401 10953
360, 409 Clamp KF10 5322 401 10953
140, 146 O-ring carrier KF10 5322 530 50879
150, 190 O-ring carrier KF10 5322 530 50879
245, 314 O-ring carrier KF10 5322 530 50879
327, 337 O-ring carrier KF10 5322 530 50879
339, 349 O-ring carrier KF10 5322 530 50879
365, 414 O-ring carrier KF10 5322 530 50879
163 Allen screw M5 x 12 (Stl. Ni)
Contents
Figures
9-46 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-47
Contents
Figures

172 Connection wire 5322 321 20818
175 Screw M8 x 70
176 O-Ring Viton 5.33 x 53.34 ISO 330 5322 530 54543
179 O-Ring Viton 2.62 x 12.37 ISO 112 5322 530 54042
181 Rubber feed through
187, 192 Coupling
198 Thermal switch 70 °C 5322 282 30203 70 °C Klixon replaces
100 °C
202 Heating element 450 W, 210 V 5322 695 15177
207 Nut M8
208 Pirani gauge 5322 695 14249
215 Thermal switch 60 °C 5322 282 54055
219, 224 O-Ring Kalrez 2.4 x 5.3 5322 530 51165 Replaces O-Ring
Viton special 2.4 x 5.3
5322 530 50848
238 Vacuum hose length 40 cm. 5322 530 20167 Length as stated
251 Microswitch
265 V1/V2 complete Edwards C41111000
266 O-Ring Edw. 23712-047
275, 277 Hose pillar
276 T-coupling
279, 392 Armoured hose 15 mm 5322 530 24152 Length as stated
289 Pneumatic valve complete V1 5322 695 14541 Edw. C417-23-000
295, 405 Clamp KF16
296 Filter
297, 406 O-Ring Viton Special Edw. H021-24-033
304 Pre-vacuum pump Edwards RV8 5322 360 20123
Oil for pre-vacuum pump (Ultragrade 5322 390 10098 (4L)
19)
Adapter kit from ...to RV8 5322 695 15981
306 O-Ring Viton Special 2.62 x 15.88 5322 530 51024 Edw. H021-26-121
307 O-Ring kit V1/V2 including U-seal 5322 310 32222 Edw. 23712-040
308 Pneumatic valve complete V2 5322 695 14541 Edw. C417-23-000
330 Vacuum hose length 70 cm 5322 530 20167 Length as stated
354 O-Ring Viton 1.78 x 17.17 ISO 017 5322 530 54283
359 Coupling M5 Banjo 5322 526 44026
367 Pirani gauge 5322 695 14249 with 420 plug
368 Electromagnetic valve Herion 5322 695 15288
383 Filter 5322 695 15508
387 Filter candle 5322 480 40026
389 DOWTY seal PP45-3 5322 532 40069
391 Hose pillar 5322 526 40518
407 Carrier KF16
425 Spring in hose 5322 492 90172
447 Pneumatic cylinder complete 5322 695 15952 Edw. no. B34432020
Spares kit for pneumatic cyl. assy. Schrader B21007022
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-47

9-48 50129 060427 CM 100/120 Mechanics
Contents
Figures
9.33 UHV valve + tubing H

Figure 821

5 O-ring Viton Special 5 x 15 NW10 5322 530 50881 Edw.H021-24-032
6 O-ring carrier NW10 5322 530 50879 Edw.C105-11-081
10 O-ring Viton 1.78 x 44.17 ISO 031 5322 530 54416
11 O-ring Viton 1.78 x 25.12 ISO 022 5322 530 54514
19 O-ring Viton 2.62 x 7.92 VIT4A 5322 530 54353
21 Hose coupling M5 5322 526 40351
26 Elbow coupling for 8 mm hose 5322 526 40504
27 Inner bush SO 40003-6-4 2922 007 03053
28 Clamping bush 5322 532 21051
29 Nylon hose PA 6 x 4 NA 5322 530 20596 Length as stated
33 O-ring Viton 1.78 x 17.17 ISO 017 5322 530 54283
34, 35 Magnetic valve Herion 5322 695 15288 Herion: 0573846
37 Inner bush 8 mm 5322 532 21051
38 Clamping bush 5322 532 21051
42 Inner bush 12 mm 5322 526 40519
44 Nut with clamping bush 5322 532 21298
45 Pressure hose PE 12 x 9 NA 5322 530 20617 Length as stated
49 Hex. screw Br.Ni. M8 x 30
54, 55, 56 Co-seal NW40 Special 5322 528 20467 Edw.B271-58-453
57 Valve V5 5322 695 15102
O-ring kit V5 5322 310 32224 Edw. C41401800
69 Stud M6 x 120
74 Nut M6
84 O-ring Viton 3.53 x 26.57 ISO 215 5322 530 54221
85 O-ring Viton 1.78 x 44.17 ISO 031 5322 530 54416
86 Valve V6 PVK25 5322 695 14911
O-ring kit V6 5322 310 32223 Edw. C41301800
90 Hexagonal screw M8 x 30 (Br.Ni)
95 C-Clamp KF25 5322 401 10956
101 Ion getter pump 5322 695 15774 No magnets
104, 117 O-ring Viton 3.53 x 50.39 ISO 226 5322 530 54068
118, 129 O-ring Viton 3.53 x 50.39 ISO 226 5322 530 54068
121 IGP HT feed-through 5322 695 14402
134, 135 O-ring Viton 5.33 x 53.34 ISO 330 5322 530 54424
136, 138 Circlip 55 mm
139, 140 O-ring Viton 5.33 x 53.34 ISO 330 5322 530 54424
Contents
144 O-ring Viton Special 3.53 x 60.33 5322 530 50885 Edw.H021-26-164
Figures
9-48 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-49
Contents
Figures

149 O-ring Viton 5.33 x 40.64 ISO 326 5322 530 50887 Edw.H021-26-041
158 O-ring Viton Special 3.53 x 60.33 5322 530 50885 Edw.H021-26-164
161 O-ring Eriks 5.7 x 47.2 5322 530 51189
164 Banjo coupling M5 5322 526 44026
165 Pressure hose PE 5 x 3.3 5322 530 24055 Length as stated
171,174,175 Co-seal NW25 Special 5322 528 20466 Edw.B271-58-448
177 Hex screw M8 x 30 (St.Ni)
187 O-ring Viton 2.62 x 23.47 ISO 119 5322 530 54046
188 Anode assy. 5322 695 14515
190 HT coax plug U6 932A/U-Suhner 5322 264 10006
194, 195 Allen screw M4 x 12 Stl.St.
200 O-ring Viton 2.62 x 20.23 ISO 117 5322 530 54395
204 HT feed-through assy. 5322 695 14402
210 O-ring Viton Edwards Special 5 x 28 5322 530 50894
213 O-ring carrier KF25 5322 256 90981
214 Edwards KF25 blind flange
215 C-Clamp KF25 5322 401 10956
9.34 35 mm Film Transport Mechanism

Figure 822

2-64 Transport mechanism complete 9432 063 04501
3 Screw M2 x 8
4 Microswitch SK10A-B
9 Contact pin for ANP-plug 5322 268 14012
Contact socket for ANP plug 5322 268 24009
12 Motor 5322 361 60446
Capacitor for motor (0.18 µF, 250 V) 4822 120 51167 old motor
Capacitor for motor (0.1 µF, 630 V) 2222 376 62104 new motor
17 Gear wheel 5322 522 30759
23 Bolt 5322 535 80373
25 O-ring Viton 3.53 x 82.14 ISO 236 5322 530 54459
28 O-ring Viton 2.62 x 10.77 ISO 111 5322 530 54352
29 Guide pin 5322 535 80202
31 Spring 5322 492 50867
33 Ball 5322 520 40058
35 Driver 5322 532 20143
39 Screw ring 5322 502 10653
40 Ring 5322 532 10237
41 O-ring Gaco 2.62 x 9.92 R 112 5322 530 54262
43 O-ring Viton 2.62 x 17.12 ISO 115 5322 530 54044
45 Guide bush 5322 532 80196
51 Microswitch SK11 5322 271 30078
52 Microswitch lever 5322 492 61187
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-49

9-50 50129 060427 CM 100/120 Mechanics
Contents
Figures

61 Shaft 5322 535 80372
Male plug 15-pole MV-BU2 5322 265 40062
Special extension cable to connect 5322 695 15345
PW6304 of an EM400 system to a
CM100/120
9.35 35 mm Film Holder 9432 065 28001

Figure 823

Film holder complete 9432 065 28001
3, 27 Film coil 5322 528 10085
5 Spring 5322 492 50865
24 Diaphragm 5322 525 10059
9.36 STEM Detectors

Figure 824
9.36.1 BF/DF Detector

For electrical spare parts see also section PMT 3.20.1

19 Nut M3 (Stl.)
24 O-ring Viton 2.62 x 37.77 ISO 128 5322 530 54047
26 O-ring Viton 1.78 x 2.90 ISO 006 5322 530 54028
27 Nut M2.5 (Stl.)
28 Dark field detector complete 5322 695 15394
31 O-ring Viton 1.78 x 9.25 ISO 012 5322 530 54413
34 Light conductor with flu-screen 5322 695 15393
36 O-ring Viton 1.78 x 44.17 ISO 031 5322 530 54416
38 O-ring Viton 1.78 x 50.52 ISO 033 5322 530 50853
44 Photo multiplier XP2012 5322 693 11074
46 Cyl. screw M4 x 8 (St.Ni.)
48 O-ring Viton 1.78 x 69.57 ISO 039 5322 530 51211
Contents
Figures
9-50 50129 060427 CM 100/120 Mechanics

CM 100/120 Mechanics 50129 060427 9-51
Contents
Figures
9.36.2 SED Detector (PW6433/00) H

For electrical spare parts see also section PMT 3.20.1

108 Cyl. screw M4 x 8 (St.Ni.)
114 Photo multiplier XP2012 5322 693 11074 (9300 855 60112)
117 O-ring Viton 1.78 x 50.52 ISO 033 5322 530 50853
119 O-ring Viton 1.78 x 29.87 ISO 025 5322 530 51198
125 HT feed-through 5322 695 14827
127 O-ring Viton 1.78 x 3.68 ISO 007 5322 530 54029
128 O-ring Viton 1.78 x 9.25 ISO 012 5322 530 54413
129 Isolation bush 5322 695 14985
134 Light conductor with flu-screen 5322 695 14939
136 Protection bush 5322 695 14986
137 Special screw
138 O-Ring Viton 1.78 x 34.65 5322 530 54393
139 Cyl. screw M3 x 6 (St.)
151 O-ring Viton 1.78 x 69.57 ISO 039 5322 530 51211
212 Extractor (without BSD chip) 5322 695 14943
9.36.3 BSD detector (PW6431/00)

Mechanical
205 Nut M2 (Stl.)
206 Cyl. screw M3 x 5 (Stl.)
210 O-ring Viton 2.62 x 13.94 ISO 113 5322 530 54043
212 Detector chip 5322 695 15395
214 O-ring Viton 1.78 x 1.78 ISO 004 5322 530 54026
215 O-ring Viton 1.78 x 2.90 ISO 006 5322 530 54028
225 Nut M1.4
226 O-ring Viton 1.27 x 1.07 5322 530 51051
Electrical
C001 Capacitor film 10 nF, 400 V 5322 121 42919
R001 High voltage resistor 10 M 4822 110 72214
Contents
Figures
CM 100/120 Mechanics 50129 060427 9-51

9-52 50129 060427 CM 100/120 Mechanics
Contents
Figures
9.37 Near axis system H

Figure 825

25 DF Detector 5322 695 15696
29 Scintillator with flu' screen 5322 695 15697
35 O-ring Viton 1.78 x 9.25 ISO 012 5322 530 54413
57 O-ring Viton 1.78 x 28.20 ISO 024 5322 530 54392
58 Optical prism 5322 695 15754 Delivered as inDE-
TAIL A
77 O-ring Viton 3.53 x 110.72 ISO 245 5322 530 54504
98 O-ring Viton 2.62 x 45.52 ISO 131 5322 530 51021
104 Electrical feed-through 5322 695 15755
116 O-ring Viton 2.62 x 107.62 ISO 156 5322 530 51201
9.38 Bright Field Detector

Figure 826

5 PMT pre-amplifier 5322 695 15207
19 O-ring Viton 2.62 x 40.94 ISO 130 5322 530 51212
20 O-ring Viton 2.62 x 45.69 ISO 133 5322 530 51213
21 Voltage divider 5322 218 41044
22 Photo multiplier XP2012 5322 693 11074
41 O-ring Viton 2.62 x 45.69 ISO 133 5322 530 51213

Contents
Figures
9-52 50129 060427 CM 100/120 Mechanics

CM 100 120 Mechanics

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