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    0-7803-7185-2/02/$10.00 ©2002 Ieee

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    denghuei
    Flow rate was measured from the averaged speed of liquid level under almost the same static pressure at the inlet and the outlet. The generated pressure at the outlet (forward direction) was measured by setting a pressure sensor at the end of the tube connected to the drain port. The experimental values were about 70 % less than the theoretical ones. The pumping direction was switched over by changing the shape of waveform and the flow rate was adjusted with good controllability in a range from 15 nl / s to 2

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    0-7803-7185-2/02/$10.00 ©2002 Ieee

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    denghuei
    18 views4 pages
    Flow rate was measured from the averaged speed of liquid level under almost the same static pressure at the inlet and the outlet. The generated pressure at the outlet (forward direction) was measured by setting a pressure sensor at the end of the tube connected to the drain port. The experimental values were about 70 % less than the theoretical ones. The pumping direction was switched over by changing the shape of waveform and the flow rate was adjusted with good controllability in a range from 15 nl / s to 2

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    Flow rate was measured from the averaged speed of liquid level under almost the same static pressure at the inlet and the outlet. The generated pressure at the outlet (forward direction) was measured by setting a pressure sensor at the end of the tube connected to the drain port. The experimental values were about 70 % less than the theoretical ones. The pumping direction was switched over by changing the shape of waveform and the flow rate was adjusted with good controllability in a range from 15 nl / s to 2

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    18 views4 pages

    0-7803-7185-2/02/$10.00 ©2002 Ieee

    Uploaded by

    denghuei
    Flow rate was measured from the averaged speed of liquid level under almost the same static pressure at the inlet and the outlet. The generated pressure at the outlet (forward direction) was measured by setting a pressure sensor at the end of the tube connected to the drain port. The experimental values were about 70 % less than the theoretical ones. The pumping direction was switched over by changing the shape of waveform and the flow rate was adjusted with good controllability in a range from 15 nl / s to 2

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    of 4

    0-7803-7185-2/02/$10.

    00 ©2002 IEEE 113


    0-7803-7185-2/02/$10.00 ©2002 IEEE 114
    Pump chamber Flow channel pressure sensor
    Drain port ruler
    Outlet
    Inlet
    20 mm
    Reservoir

    Supply port
    35 mm

    (a) Flow Rate (b) Pressure


    (a) micro pump chip
    Measurement Measurement
    Outlet Figure 7. Schematic of experimental setups.
    3 mm
    rate and pressure of the micro pump, respectively. The driving
    (c) inlet waveforms were supplied to the electrical probes on PZT plate
    by a function generator in combination with an amplifier. The
    displacement of the PZT plate surface was directly measured by
    Pump chamber
    0.5 mm a Laser Doppler Vibrometer (LDV) to estimate the displacement
    Inlet of the diaphragm on the pump chamber. The flow rate was
    (b) pump chamber (d)outlet measured from the averaged speed of liquid level under almost
    the same static pressure at the inlet and the outlet. The
    Figure 6. Photograph of the completed micro
    generated pressure at the outlet (forward direction) was
    pump and SEM images of the pump chamber, the
    measured by setting a pressure sensor at the end of the tube
    inlet and the outlet channel.
    connected to the drain port. The pressure was measured at
    chamber, two diffusers and flow channels was formed by Deep zero flow rate with keeping the inlet open and the outlet closed.
    Reactive Ion Etching (DRIE) process, as shown in Fig. 5 (4)-(6). The pump was turned on after the pressure reaching the
    The remaining thickness of the silicon for the pump chamber equilibrium state. The generated pressure at inlet (backward
    was available as a diaphragm. After removing the silicon direction) was measured in the same way as forward direction
    dioxide layers, a indium tin oxide (ITO) layer was formed on the by setting the pressure sensor on the supply port side.
    opposite surface of the silicon substrate. A pyrex glass plate
    with supply and drain ports was stacked on the silicon by anodic RESULTS AND DISCUSSIONS
    bonding. A 70 µm thick PZT plate was mounted on the
    diaphragm with glue, as shown in Fig. 5 (7)-(8). Figure 8 shows the displacement of the diaphragm at
    Figure 6 shows a photograph of the completed micro pump different voltage of 1 kHz sine wave. The theoretical values
    with size of 20 mm x 35 m m x 0.7 mm and SEM images of the analyzed by FEM were compared with the experimental results.
    pump chamber with size of 0.5 mm x 3 mm and the inlet/outlet The experimental values were about 70 % less than the
    channels. theoretical ones. This discrepancy was thought to be caused by
    inadequate poling of PZT, location error of PZT, thickness error
    EXPERIMENTS of diaphragm and effect of glue layer.
    Figure 9 and Figure 10 show the flow rate and the
    The displacement of the diaphragm, flow rate and pressure generated pressure of the micro pump as a function of driving
    were evaluated for the characteristics of the completed micro voltage (height of waveform) at 11 kHz of repeating frequency,
    pump. The micro pump was set in a polycarbonate flame with respectively. The theoretical values were shown in the same
    electrical probes and fluid connectors for measurement of flow graph. Bi-directional pumping was successfully confirmed.
    rate and pressure. As a fluid connector, silicone tubes of 2 mm The pumping direction was switched over by changing the
    inner diameter were used. shape of waveform and the flow rate was adjusted with good
    Figure 7 (a) and (b) show the experimental setups of flow controllability in a range from 15 nl/s to 220 nl/s by changing the

    0-7803-7185-2/02/$10.00 ©2002 IEEE 115


    0-7803-7185-2/02/$10.00 ©2002 IEEE 116

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