Europe

South Korea North

America
Japan
China

India Taiwan

Southeast
Asia

ROLL TO ROLL
E Q U I P M E N T

A P P L I C A T I O N

Contact JAPAN : ULVAC, Inc.

www.ulvac.co.jp/en
2500 Hagisono, Chigasaki, Kanagawa 253-8543, Japan

TEL: +81-467-89-2033 FAX: +81-467-89-2250

CHINA : ULVAC (Shanghai) Trading Co., Ltd. SOUTH KOREA : ULVAC KOREA, Ltd. USA : ULVAC Technologies, Inc.
www.ulvac-shanghai.com www.ulvackorea.co.kr www.ulvac.com
No.1000,Qixin Road,Minhang,Shanghai 201199, China 5, Hansan-gil, Cheongbuk-Myeon, Pyeongtaek-si, 401 Griffin Brook Drive Methuen, MA 01844, U.S.A.
Gyeonggi-Do, Korea 17792
+86-21-6217-6618 +1-978-686-7550
+82-31-683-2922
TAIWAN : ULVAC TAIWAN INC. SHINGAPORE : ULVAC SINGAPORE PTE. LTD. GERMANY : ULVAC GmbH

www.ulvac.com.tw www.ulvac.com.sg www.ulvac.eu

8F., No.5, Keji Rd., Hsinchu Science Park, 11 Tampines Street 92, Tampines Biz-Hub, Klausnerring 4, 85551 Kirchheim b. München, Germany
Hsinchu City 30078, Taiwan +R.O.C- #02-08, Singapore 528872
+49-89-960909-0
+886-3-579-5688 +65-6542-2700
VIETNAM : INDONASIA : PHILIPPINES :
ULVAC SINGAPORE PTD Vietnam Representative Office ULVAC SINGAPORE PTD Indonesia Representative Office ULVAC SINGAPORE PTE. LTD. Philippines Branch Office

+63-46-437-7700 +62-21-8990-5070 +63-46-437-7700

MALAYSIA : ULVAC MALAYSIA SDN. BHD. INDIA : ULVAC, Inc. India Branch THAILAND : ULVAC (THAILAND) LTD．

No.8 Jalan Gitar 33/3, Elite Industrial Estate Off Jalan, Bukit, 301, Tara Tycoon 12-13-97, www.ulvac.co.th
Kemuning 40350, Shah Alam, Selangor Darul Ehsan, Malaysia Tarnaka Secunderabad - 500 017, India 110/6 Moo 13 Soi 25/2 Kingkaew Road, Tambol Rachathewa
Amphur Bangplee, Samutprakarn 10540 Thailand
+60-3-5121-4700 +91-40-27007006
+66-2-7388883

4044E/2019061000JBA
 Roll to Roll
Equipment Application
Flexible Film is a foundational industry supports other advanced industries and our lives.
ULVAC develops Roll to Roll Vacuum Technology which is essential
for the manufacturing of highly functional Flexible Film.
These Roll to Roll vacuum systems serve various industries
such as energy device, electronics device, life science.
we provide high performance
Roll to Roll vacuum coating systems specialized
for high-volume mass production.

1 Roll to Roll Equipment Application Roll to Roll Equipment Application 2

 Flexible Display
te ring Roll C
ut
rgy

oa
e

Sp
E n

ter
Metal Wiring
t
Conductive Film
for Flexible Device for Touch Panel SPW
a r
Electronic
Series
Sm Capacitor
Device
EMI Shield for AR Film for
Smartphone,etc. Smart Phone, etc.

p oration Roll Coa Film Capacitor Film Capacitor

Eva ter for Hybrid Vehicle for Wind /Solar
Power
Actuator,
Polarizer, Wire Grid Flexible Sensor
RH Heating type
EWE Series

Roll to Roll Special

RH Heating type
RH Heating type
EWD Series
Li Ion Capacitor

Equipment Application EWK Series

Product Line-UP EB Heating type IH Heating type

Battery
EWJ Series EWA Series

Battery for Vehicle

Metallic Barrier Transparent Barrier

for Food Packaging, for Packaging,
etc. etc.

Battery for Battery for Stational

ll Degassin IoT Device Power Supply
Ro g
Life

to

sy
Science

s t em
Ro l l
Window Film
for Automotive,
Stamp Foil, Labels TWH
etc. Series

Magnetic Tape Decoration

Storage Metallic Yarn

3 Roll to Roll Equipment Application Roll to Roll Equipment Application 4

 Selection Guide ~ Vacuum roll to roll system

Touch Panel Touch Panel Optical Film (IM, Metal Wiring, Polarizer, Wire Reflector, Traffic Metal Barrier, Transparent Transfer, Hologram,
Application Flexible Sensor FCCL, COF EMI Shield Battery Film Capacitor Window Film Application
(TCO) (Metal Mesh) AR) Contact Grid signs Decoration Barrier Stamping Security

Li ● Li

ITO ● ● ● ITO

NbOx ● ● NbOx

SiOx ● ● ● ● ● SiOx

AlOx ● AlOx

CuNi/NiCr ● ● ● ● CuNi/NiCr

Cu ● ● ● ● ● ● ● Cu

Ni ● ● ● Ni

Material Cr ● Cr Material

Ag ● ● ● ● ● ● Ag

Au ● Au

Al ● ● ● ● ● ● ● Al

Zn ● Zn

ZnS ZnS

In/Sn ● ● In/Sn

ZrOx ● ZrOx

H.M.M/Ox,Ny ● ● ● H.M.M/Ox,Ny

Sputter ● ● ● ● ● ● ● ● ● ● Sputter

IH-Evap. EWA ● ● ● ● ● ● ● IH-Evap. EWA

RH-Evap.EWE ● RH-Evap.EWE
System System
EB-Evap.EWJ ● ● ● ● EB-Evap.EWJ

RH-Evap.EWK ● RH-Evap.EWK

Degas TWH ● ● ● ● ● Degas TWH

5 Roll to Roll Equipment Application Roll to Roll Equipment Application 6

 Sputtering Roll coater / SPW-Series

SPW -025 is simple and compact type sputtering roll coater SPW -165Cn is wide width and high throughput type sputtering roll coater for
for fundamental development . It is ideal for short time operating. touch panel, optical film, window film and so on.
Features Features
• It can easy operation by simple roller formation and SPW-025 • It has double side maintenance dolly for cathode and SPW-165C1
simple vacuum system. for inner shield .

• It has high maintenancavility with large front door and • It has process extension by additional chambers and
cathode maintenance hatch. various options

• Sputtering cathode can be selected from DC single, • Low gas contamination with differential pumping
AC Dual. : Between Cathode to Cathode <1%

• Process extensibility with module chamber concept

and various option

SPW -060 is medium size and high performance type sputtering roll coater for
touch panel, optical film, electric device. It is ideal for multi layer deposition.
SPW-025 SPW-060 SPW-165Cn
Features Web Width Max 250mm Max 600mm Max 1600mm
Web Material PET,PEN,PI,PC,COP,TAC and others
• Low gas contamination with differential pumping SPW-060 Load-lock type
: Between Cathode to Cathode <1% Web Thickness PET : 50~200 μm PET : 25~200 μm
Web Diameter Φ290mm Φ550mm Φ900mm
• Selectable two types of platform
: Batch type, Load-lock type Winding Speed 0.2~5.0m/min 0.5~10m/min 0.5~10m/min

• Batch Type Cathode type Planer Planer/Rotary Planer/Rotary

: Stable film transfer by single roller base DC Single:4sets DC Dual : 4sets DC Dual : 4 x n sets
Cathode
: Optimal film pass line for various pre-process AC Dual: 2sets AC Dual : 4sets AC Dual : 4 x n sets
Sputtering Target Material ITO,Nb2O5,SiO2,Cu and Metal
• Load lock Type
: High productivity with load-lock chamber -20~80℃
Main Roller Temperature -5~80℃
Option : -10~180℃
: High maintenance performance with double side dolly system
Pre-process (Option) BMB(DC), Heater BMB(DC,RF), Ion Gun, Heater
(Load lock type) (C1Type)
Layout 9mW × 9.8mL × 2.6mH
15mW × 10mL × 3.9mH 19mW × 17mL × 4.3mH
* This specification may be changed without notice.

7 Roll to Roll Equipment Application Roll to Roll Equipment Application 8

 RH Evaporation Roll coater / EWE-Series・EWD-Series
* Special use for film capacitor

EWE series is RH heating type evaporation roll coater for high-end Film capacitor. Patterning Technology Pattern

It is ideal for high speed and high accuracy pattern deposition. Pattern Deposition

Features
• Ultra thin OPP web handling with high speed deposition. EWE-110
0.2±<0.05mm
: OPP 2.0μm - Depo speed 600m/min

• High speed patterning for self-security function

: Pattern accuracy < 0.2 ± 0.05mm Ultra Thin OPP
Pattern Deposition
: Depo speed 750m/min
Heavy Edge
• High definition and high speed patterning technique by AL/Zn multi
Ultra Thin OPP Technology (EB+DC Method)
source and flexographic unit
[Result of EB+DC Method] [Result of Conventional Method]
• Web thermal damage-less Thin web handling by EB+DC Bias
OPP 2.3μm OPP 2.3μm
process
: Thin web closely contact to main roller and heat exchange rate
improves

Ultra Thin OPP

EWD series is RH heating type “Double Side” evaporation roll coater for high-end
Film capacitor.
EWE-060 EWE-080 EWE-110
Features Web Width Max.670mm Max.820mm Max.1050mm
Web Material OPP 2.0 ~ 6.0μm OPP 2.0 ~ 6.0μm OPP 2.0 ~ 6.0μm
• EWD can double-sided deposition.
Web Diameter Φ650 Φ650 Φ620
• Common specifications are same as EWE series
Winding Speed 100 ~ 1200m/min 100 ~ 1200m/min 100 ~ 1000m/min
Driving Motor 8 motor system
AL Evap.Boat Qty 11 13 15
750m/min 750m/min 750m/min
Deposition Winding Speed
(OPP 2.3µ ~ Al 10Ω/▪~) (OPP 2.3µ ~ Al 10Ω/▪~) (OPP 2.3µ ~ Al 10Ω/▪~)
UW WD UW WD
Al : 1.0 ~ 60Ω/▪
Resistance
* Reference examples
Deposition Length 55,000m (OPP 2.0µ~)
< 0.2 ± 0.05mm
Pattern accuracy
(Depo speed 750m/min, OPP 2.3µ~)
Main Main Main
Roller Roller 1 Roller 2 Main Roller Temperature -20 ~ 20℃
8.5mW × 14mL 8.5mW × 15mL 8.5mW × 15.5mL
Layout × 4.2mH × 4.2mH × 4.2mH
+ 2.5mD (Pit) + 2.5mD (Pit) + 2.5mD (Pit)
* This specification may be changed without notice.
EWE Series EWD Series

9 Roll to Roll Equipment Application Roll to Roll Equipment Application 10

 IH Evaporation Roll coater / EWA-Series EB Evaporation Roll coater / EWJ-Series

EWA series is IH heating type evaporation roll coater for life-science films. EWJ series is EB heating type evaporation roll coater for multi purpose.
It is ideal for high speed deposition and wide web handling. It is ideal for ultra high rate deposition, and high-melting-point metal and
Sublimation material deposition (Cu, Ni, Ti, AlOx, SiOx, MgO, etc…)
Features
• Web width : Up to 3300mm EWA-165
Features
• Low pin-hole deposition with IH Heating • Web width : Up to 2100mm EWJ-060
• High Rate deposition : Cu 12μm・m/min (Max Value)
• 6 motor system for high stability web winding
under high speed deposition • High power EB gun : 100kW
• Thick Layer deposition with thin under/top coating with sputtering
• Oxide deposition for transparent barrier film (AlOx, SiOx) cathode (EWJ-060, -165)
• It can deposit various materials for multi purpose
(Al, Cu, Ag, Cr, Sn, In , ZnS, SiOx, (AlOx,)

• Adopt to low O.D. value

Pin-hole comparison IH vs RH
Top Coat (Sputter)
140 135 Internal drawing EWJ-060
Boat(RH) Crucible(IH) Vacuum Vacuum Vacuum
Main Layer (EB Evap.)
120
Under Coat (Sputter)
100
Number of Pin Hole

sputter Cathode
sputter CR
or Pre-process unit Base Film
Cathode
(/1000m2)

80 EB Gun

60
CR

40 UW

20 17 Crucible
3.5 0.3 1.6 0.03 WD
0
0.5 - 1.0 1.0 - 1.5 1.5 - 2.5
Chamber
Pin Hole Size (mm)
Vacuum

EWA-165 EWA-210 EWA-250 Floor Level

Web Width Max.1650mm Max.2150mm Max.2500mm

Web Material PET : 9 - 50 μm CPP : 20 - 30 μm Model EWJ-025 EWJ-060 EWJ-165 EWJ-210
Web Diameter Φ1150mm Web Width Max.250mm Max.600mm Max.1450mm Max.2120mm
Winding Speed range 100 ~ 600 m/min Web Material PET 9~50µm
Evaporation Material Al, Cu, Ag, Cr, Sn, In , ZnS, SiOx, (AlOx) Web Diameter Φ500mm Φ500mm Φ650mm Φ1200mm
Crucible Qty. 11 14 16 Evaporation Material Cu, Al, Ag, Ni, Ti, AlOx, SiOx, MgO, other high melting point metals and sublimation materials
O.D.(Al) 0.3 ~ 3.0 100kW 100kW 300kW
Material Heating
Driving Motor 6 motor system EB Gun 1pc EB Gun 2pcs EB Gun 2pcs
Deposition Winding Speed 450m/min (Al O.D. 2.2) Thickness Monitor Transmittance Monitor, Option : Eddy Current Monitor
Deposition Length 36,000m (Al O.D.2.2) Main Pump Depo Zone : Oil Diffusion Pump
Main Roller Temp. -20 ~ 30℃ Pre-process Option BMB(DC,MF,RF), Ion Gun
Thickness Monitor Transmittance Monitor (ULVAC FADM) Option : EDDY current monitor Sputtering Option – DC Cathode DC Cathode –
Thickness Monitor Prove Qty. 11pts 14pts 16pts Main Roller Temperature -20 ~ 20℃
9.2mW × 16mL 9.5mW × 17mL 10mW × 21.5mL 8mW × 8mL 9.5mW × 15mL 11.5mW × 7mL 20mW × 22mL
Layout Layout
× 4.2mH + 2.6mD(Pit) × 4.2mH + 3.5mD(Pit) × 4.2mH + 3.5mD(Pit) × 3mH × 4.3mH +2.5mD(Pit) × 4mH + 3mD(Pit) × 4.1mH + 3.5mD(Pit)
* This specification may be changed without notice. * This specification may be changed without notice.

11 Roll to Roll Equipment Application Roll to Roll Equipment Application 12

 RH Evaporation Roll coater / EWK-Series Roll to Roll Degassing / TWH-Series
* Special use for Li evaporation

EWK series is special RH heating type evaporation roll coater for LiB/LiC. TWH series is roll to roll type vacuum degassing system.
It is ideal for high speed Li Metal deposition. It is ideal for degassing of high moisture films such as PI, TAC, etc.

Features Features
• Web Width : Up to 600mm EWK-060 • Web Width : Up to 2100mm TWH-060

• Evaporation Source : Resistance Heating type • Heating Source : IR Plate Heater, Ramp Heater, Hot Roller

• Sharp film edge control : < 0.5mm • Clean and effective degassing under vacuum condition and web
transfer condition
• High rate Li deposition : 20μm・m/min
• Selectable various heating method for purpose
• Li surface protection with passivation treatment

Sharp Edge Control Technology <SEM x500>

Cu Li
WD UW
Edge
Uncontrollable WD UW WD UW
Area ≒ 40μm

Hot Roller

600mm

Hot Roller type Sheath Heater type Lamp Heater type

EWK-030 EWK-060
Web Width Max 300mm Max 600mm
Web Material Cu, PET and others TWH-060 TWH-165
Web Thickness Cu : 6~ 10 μm Web Width Max 600mm Max 1600mm
Web Diameter Φ300mm Φ600mm Web Material PET,PEN,PI,PC,COP,TAC and others
Winding Speed 0.1~5m/min 0.1~10m/min Web Thickness PET : 25~200 μm
Evaporation Material Li Web Diameter Φ550mm Φ900mm
Main Roller Temperature -25~80℃ Winding Speed 0.5~10m/min
Option Inter Leaf Hot Roller
Degassing Source
Sheath Heater, Lamp Heater
8.5 mW × 10 mL 8.5 mW × 14.5 mL
Layout Main Roller Temperature R.T.~150℃
× 3.5mH × 3.5mH
4 mW × 5 mL 8.3 mW × 8.3 mL 10mW × 10mL 10mW × 12mL
Dry Room Area Requirement Layout
× 3.5mH × 3.5mH × 3.9mH × 3.9mH

13 Roll to Roll Equipment Application Roll to Roll Equipment Application 14