Series 274

Granville-Phillips® Series 274 Bayard-Alpert

Type Ionization Gauges

Instruction Manual
Instruction Manual part number 274026
Revision B - August 2014
Series 274 Tubulated and Nude Bayard-Alpert type Ionization Gauges.
See Figure 2-1 on page 13, Theory of Operation on page 15,
and Table 4-4 on page 28.
 Series 274
Granville-Phillips Series 274 Bayard-Alpert
®

Type Ionization Gauges

This Instruction Manual is for use with Granville-Phillips Series 274
Ionization Gauges. A list of applicable catalog numbers is provided
on the following page.

For Customer Service or Technical Support 24 hours per day,

7 days per week, every day of the year including holidays:
Phone: +1-800-227-8766 or +1-303-652-4691

MKS, Granville-Phillips Division

6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone: 1-303-652-4691 or 1-800-776-6543
FAX: 1-303-652-2844
Email: [email protected]

Corporate Office
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Phone: 1-978-645-5500
www.mksinst.com

Instruction Manual
© 2014 MKS Instruments, Inc. All rights reserved.
Granville-Phillips® is a registered trademark of MKS Instruments, Inc. All other
trademarks and registered trademarks are the properties of their respective owners.
Catalog numbers for Granville-Phillips Tubulated (Glass)
and Nude Ionization Gauges
Detailed information regarding the catalog numbers listed below
is provided in Figure 2-1 on page 13 and Table 4-4 on page 28.
 Table of Contents

Chapter 1 Introduction/Safety ................................... 7

1.1 Definitions of Terms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.2 Caution and Warning Statements . . . . . . . . . . . . . . . . . . . . 7
1.3 Electrical Shock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.4 Explosion / Implosion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.5 Overpressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.6 Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.7 System Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.8 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.9 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Chapter 2 Installation .......................................... 11

2.1 Receiving Inspection of Products . . . . . . . . . . . . . . . . . . . . 11
2.2 Vacuum System Connections . . . . . . . . . . . . . . . . . . . . . . . 11
2.3 Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.4 Grounding Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Chapter 3 Operation ............................................ 15

3.1 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.2 Filament Emission . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.3 Pumping Capacity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.4 X-ray Limit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
3.5 Degas Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
3.6 Bakeout Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

Chapter 4 Technical Information ................................ 21

4.1 Operating Principle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.2 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Gas Species Effects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Cathodes (Filaments) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Pressure Indication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Gauge Tube Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Gas Type Conversions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Gas Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Gauge Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
4.3 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

Ionization Gauge Instruction Manual - 274026 - Rev. B 5

6 Ionization Gauge Instruction Manual - 274026 - Rev. B
 Introduction/Safety
Chapter 1 Introduction/Safety

For personal and equipment safety, all safety notices, cautions, and
warnings must the adhered to at all times when working on or around a
vacuum system, whether or not the system is in actual use. Follow all safety
instructions provided throughout this instruction manual, and all safety
practices recommended by your company.
NOTE: These instructions do not and cannot provide for every contingency
that may arise in connection with the installation, operation, or
maintenance of this product. If you require further assistance, contact
Granville-Phillips Customer Support at the address on the title page, or page
10 of this instruction manual.

1.1 Definitions of Terms • Table 1-1 lists common terms that are used throughout this instruction

Operation
manual.
Table 1-1 Terms Describing Ionization Gauges

Term Description

Ionization Gauge, Ion Gauge, or IG A hot-cathode Bayard-Alpert type ionization gauge, which indicates pressure by
producing an electrical current that is proportional to gas density.

Tubulated (Glass) Ion Gauge An ionization gauge that is within a glass tube (enclosure) and is mounted on the
outside of a vacuum chamber.

Nude Ion Gauge An ionization gauge that is not enclosed in a glass tube, and is mounted so that
the working elements of the gauge are actually inside the vacuum chamber.

Filament (Cathode), Grid (Anode), Critical components of an ionization gauge that enable the gauge to provide
Ion Collector information to an IG Controller where a pressure reading is indicated. See Theory
of Operation in the Operation Chapter.

Troubleshooting
Degas A procedure used to clean the electrode(s) of an ion gauge. See Degassing an Ion
Gauge in the Operation Chapter.

1.2 Caution and Warning The caution or warning statement used throughout this instruction manual
Statements explain the specific hazard that you must prevent or unsafe practice that
you must avoid, the potential result of your failure to prevent the specified
hazard or avoid the unsafe practice, and what you must do to prevent the
specified hazardous result. Specifications

Ionization Gauge Instruction Manual - 274026 - Rev. B 7

Chapter 1

CAUTION
Caution statements alert you to hazards or unsafe
practices that could result in minor personal injury or
property damage.
Each caution statement explains what you must do to prevent or
avoid the potential result of the specified hazard or unsafe
practice.

WARNING
Warning statements alert you to hazards or unsafe
practices that could result in severe property damage or
personal injury due to electrical shock, fire, or explosion.
Each warning statement explains what you must do to prevent
or avoid the potential result of the specified hazard or unsafe
practice.

1.3 Electrical Shock

WARNING
Ionization gauges are safe for use ONLY if all exposed
conductors on the gauge, on the controller, and on the
vacuum system are insulated and grounded.

Do NOT touch any gauge electronics while the gauge is connected to the
controller. During normal operation, 180 volts will be applied to the grid
connections. During electron bombardment degas, as much as 700 volts
may be applied to some electrode pins.
All connections to the gauge tube should be covered by insulation. All
gauge tube pins should be covered by connectors or by pin covers.

8 Ionization Gauge Instruction Manual - 274026 - Rev. B

 Introduction/Safety

Introduction/Safety
1.4 Explosion / Implosion
WARNING
Do not operate ion gauges in an explosive atmosphere or
in the presence of flammable gases or fumes.
Danger of explosion or inadvertent venting to
atmosphere exists on all vacuum systems which
incorporate gas sources or involve processes capable of
pressurizing the system above safe limits.

Do not attach cables to glass gauge pins while the gauge is under vacuum.
Accidental bending of the pins may cause the glass to break and implode.
Cables, once installed, should be secured to the system to provide strain

Operation
relief for the gauge tube pins.
Danger of injury to personnel and damage to equipment exists on all
vacuum systems that incorporate gas sources or involve processes capable
of pressuring the system above the limits it can safely withstand.
For example, danger of explosion in a vacuum system exists during
backfilling from pressurized gas cylinders because many vacuum devices
such as glass ionization gauge tubes, glass windows, glass belljars, etc., are
not designed to be pressurized.

1.5 Overpressure Install suitable devices that will limit the pressure from external gas sources
to the level that the vacuum system can safely withstand. In addition, install
suitable pressure relief valves or rupture disks that will release pressure at a
level considerably below that pressure which the system can safely
withstand.

Troubleshooting
Do NOT use quick-connects or other friction-type connections where
positive pressure (such as backfilling operations) will exist within the gauge
tube.
Suppliers of pressure relief valves and pressure relief disks are listed in
Thomas Register under "Valves, Relief", and "Discs, Rupture".
Confirm that these safety devices are properly installed before installing the
ion gauge. In addition, check that (1) the proper gas cylinders are installed,
(2) gas cylinder valve positions are correct on manual systems, and (3) the
automation systems and programs are correct on automated systems.

1.6 Temperature During a degas procedure, the envelope of a gauge tube becomes much
hotter than during normal operation. Be sure that materials that are heat
sensitive are not in contact with the gauge tube. Be sure that the gauge tube
is not located where personnel might come in contact with the gauge tube
Specifications

during normal operation of the system.

Ionization Gauge Instruction Manual - 274026 - Rev. B 9

Chapter 1

1.7 System Grounding Grounding, though simple, is very important! Be certain that ground circuits
are correctly used on your ion gauge power supplies, gauges, and vacuum
chambers, regardless of their manufacturer. Safe operation of vacuum
equipment requires grounding of all exposed conductors of the gauges, the
controller and the vacuum system. Lethal Voltages may be established
under some operating conditions unless correct grounding is provided.
Ion producing equipment, such as ionization gauges, mass spectrometers,
sputtering systems, etc., from many manufacturers may, under some
conditions, provide sufficient electrical conduction via a plasma to couple
a high voltage electrode potential to the vacuum chamber. If exposed
conductive parts of the gauge, controller, and chamber are not properly
grounded, they may attain a potential near that of the high voltage electrode
during this coupling. Fatal electrical shock could then occur because of the
high voltage between these exposed conductors and ground.

1.8 Operation It is the installer's responsibility to ensure that the automatic signals
provided by the process control module are always used in a safe manner.
Carefully check manual operation of the system and the setpoint
programming before switching to automatic operation. Where an
equipment malfunction could cause a hazardous situation, always provide
for fail-safe operation. As an example, in an automatic backfill operation
where a malfunction might cause high internal pressures, provide an
appropriate pressure relief device.

1.9 Service Guidelines For customer service:

If the product requires service, contact the MKS, Granville-Phillips Division
Customer Service Department at +1-800-227-8766 or +1-303-652-4691
for troubleshooting help over the phone.
For Customer Service or Technical Support 24 hours per day, 7 days per
week, every day of the year including holidays:
Phone: +1-800-227-8766 or +1-303-652-4691
Email:[email protected]

MKS, Granville-Phillips Division

6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone: 1-303-652-4691 or 1-800-776-6543
FAX: 1-303-652-2844

10 Ionization Gauge Instruction Manual - 274026 - Rev. B

 Chapter 2 Installation

Before installing a Series 274 Bayard-Alpert (B-A) gauge on your vacuum

system, be sure you understand and follow the Cautions, Warnings, and
guidelines presented in the Introduction/Safety Chapter of this Instruction
Manual.
If you are replacing an existing gauge, Figure 2-1 lists B-A style gauges that
are equivalent to the Series 274 B-A gauges. Check the catalog number of
the gauge being installed to be sure you have a direct match.

2.1 Receiving Inspection of Thoroughly inspect the product(s) to be sure you have received the
Products product(s) you ordered, and that no shipping damage has occurred. For
missing or shipping damaged items, contact the carrier that made the
delivery. If you have any questions regarding the product(s), contact

Installation
Granville Phillips Customer Service; see Service Guidelines on page 10.

2.2 Vacuum System Location on the vacuum system:

Connections The gauge should be mounted as close as possible to the section of the
vacuum chamber where pressure measurement is important. Valves or
other restriction between the gauge and the area where pressure
measurement is required may cause erroneous readings.
Gauge port:
Pressure measurement in the high vacuum range does not require special
attention to port size. However, for ultra high vacuum (UHV) pressure
measurement, one-inch tubulation is minimal. For extreme UHV
measurement, the nude gauge geometry, where the gauge filament/ion
collector/grid assembly is actually in the vacuum chamber, will provide the
best results.
Gauge mounting orientation:
All mounting orientations are acceptable, but vertical is preferred for a
tubulated gauge. See Figure 4-1 on page 27.
Gauge to vacuum chamber connections:
When using O-ring quick connects on tubulated glass B-A gauges, care
must be taken when sliding the glass tubulation into the quick connect.
Gently tighten the compression ring so that the glass is not chipped or
cracked. Non-rotatable flanges are ordinarily installed on glass gauges. The
bolt ring of the flange can inadvertently be dropped on the gauge and break
the glass.

Ionization Gauge Instruction Manual - 274026 - Rev. B 11

2.3 Electrical Connections Do not use gauge cables with exposed conductors such as alligator clips.
All gauge pins must be covered by connectors or by pin covers (insulation).
Gauge cables should be firmly clamped to the vacuum station to provide
strain relief and ensure that minimal strain is transmitted to the gauge pins
if there is motion between the gauge and the gauge controller.
If a resistance heated (I2R) degassable nude gauge is being used with an
electron bombardment (EB) controller, be sure that the unused grid pin on
the gauge is covered (insulated).
Figure 2-1 lists the two types of electrical connectors available on the nude
gauges (near the botttom of the chart).
Figure 2-2 illustrates the pin connections for Series 274 B-A gauges.
Figure 4-1 illustrates the nude gauges with and without the strain relief for
the electrical connector.

2.4 Grounding Requirements All conductors in, on, or around the vacuum system that are exposed to
potential high voltage electrical discharges must either be shielded at all
times to protect personnel or must be connected to earth ground at all
times.
Connect a heavy duty #12 AWG or larger ground wire from the ground lugs
on the backs of the Power Supply and the Control Unit to your facility
grounding electrode system. This will provide an earth ground for the Power
Supply and for the Control Unit in the event either the interconnect cable
or power cable are not in place. Do not connect the ground lug to the
vacuum system or other component. Connect it directly to the facility
grounding system such as a grounded outlet box or a grounded copper
water supply pipe. Do not rely on small metal water lines to ground a
component. Someone may replace the metal tubing with plastic tubing thus
unwittingly causing a potentially dangerous situation.
Provide a connection to ground for other instruments with electrodes in the
vacuum system possibly exposed to high voltage electrical discharges.
Provide a connection to ground for each ungrounded metal component in,
on or around the vacuum system, including the gauge envelopes, which
personnel may touch and which can potentially be exposed to high voltage
electrical discharges within the vacuum system. For example, a metal bell
jar resting on an organic O-ring must be connected to ground if an
ionization gauge is to be used or if other high voltage sources are present in
the vacuum system.

12 Ionization Gauge Instruction Manual - 274026 - Rev. B

 Installation

Figure 2-1 Bayard-Alpert Ion Gauge Equivalent List

Installation
* Notes:
* Granville-Phillips Series 274 Nude Gauges are electrically equivalent to other manufacturers, but the pin
geometry may be different.
* Granville-Phillips Nude Gauges, catalog numbers 274022, 274023, 274028, and 274050 do not have a
strain relief for the electrical connector. See Figure 4-1.
* Granville-Phillips Nude Gauges, catalog numbers 274041, 274042, 274043 have a locking strain relief
connector. See Figure 4-1.

Ionization Gauge Instruction Manual - 274026 - Rev. B 13

Chapter 2

Figure 2-2 Series 274 Bayard-Alpert Ion Gauge Connectors

14 Ionization Gauge Instruction Manual - 274026 - Rev. B

 Chapter 3 Operation

Introduction
This chapter explains the basic operating principles of a Bayard-Alpert (B-A)
ionization gauge, including:
• Theory of operation of B-A gauges
• Filament emission of B-A gauges
• Pumping capacity of B-A gauges
• X-ray limit of B-A gauges
• Degas procedure for B-A gauges
• Bakeout procedure for B-A gauges

3.1 Theory of Operation A Bayard-Alpert vacuum gauge ionizes the gas molecules within the gauge
volume, collects those ions on a thin ion collector wire, and measures the
resulting current to the ion collector to determine the number of molecules
present and indicates a pressure based on that measurement.
A B-A gauge is a hot-filament style ionization gauge. It is called such
because a heated filament (cathode) is used to emit electrons toward a grid
(anode). See Figure 3-1.
The pressure indication of a B-A vacuum gauge is based on the ionization
of the gas molecules by a constant flow of electrons. The negative electrons
are emitted at a well-controlled, selectable rate from a heated filament
(cathode) and are accelerated toward a positively-charged wire grid
(anode). Electrons pass into the space enclosed by the grid. In this space the
electrons collide with the gas molecules that are in the vacuum system, and
produce positive ions. The positive ions are then collected by the ion
collector that is located along the axis of the cylindrical grid. The ion

Troubleshooting
collector is at nearly ground potential, which is negative with respect to the
grid. At a constant filament-to-grid voltage and electron emission current,

Operation
the rate that positive ions are formed is directly proportional to the density
of molecules (pressure) in the gauge for pressures below approximately 1 x
10-3 Torr. The strength of the ion current is then indicated on an
electrometer that is calibrated in units of pressure.
Because the pressure indication is linear, the hot cathode B-A gauge is
generally considered to be the most accurate continuous indicator for
pressures below 1 x 10-3 Torr.
Specifications

Ionization Gauge Instruction Manual - 274026 - Rev. B 15

Chapter 3

Figure 3-1 Elements of a Bayard-Alpert Ionization Gauge

Electrons are created by a hot filament and accelerated

to the grid.
The current is actively controlled by the electronics.
The recommended operating voltage potentials are:
Collector = 0 V; Grid = +180 Vdc; Filament = +30 Vdc
See the Operating Characteristics Charts for variations of
these parameters.

Figure 3-2 Series 274 Nude style Bayard-Alpert Ion Gauges

Tungsten (Helical) I2R Flat Ribbon

Filament (cathode) Filament (cathode)

Filament support Filament support

Collector wire Collector wire

(ion collector) (ion collector)

Mesh grid Helical coil

(anode) grid (anode)

Grid support Grid support

UHV Nude B-A Nude B-A Gauge

Gauge with dual with thoria-coated
tungsten filaments iridium filaments

16 Ionization Gauge Instruction Manual - 274026 - Rev. B

 Operation

Introduction
3.2 Filament Emission There are two types of materials commonly used for filaments: tungsten or
thoria-coated iridium. The most common style is coated iridium because
they operate at a lower temperature than tungsten, therefore less reactive.
Coated iridium filaments are also more burnout resistant when exposed to
atmospheric pressure while power is on. Tungsten filaments will burn out
immediately if exposed to pressures of 1 x 10-2 Torr or higher while they're
on. However, tungsten filaments are the best type to use when the chemistry
(such as halogen compounds) of the vacuum process causes premature
failure of coated iridium filaments.
The amount of emission current that a B-A gauge requires for proper
operation depends on many factors such as: the size or style of the gauge,
the process in which the gauge is used, the pressure range of operation, and
the desired accuracy of the indicated pressure. Emission currents are

Operation
typically in the range of 25 µA to 10 mA.
Generally, low emission current is used in the high pressure end of the
range of a B-A gauge, which helps avoid the ion turn-around phenomenon
and glow discharge. High emission current is used at ultra high vacuum to
obtain ion currents large enough for convenient measurement. Typical
values are 100 µA at 10-3 Torr and 10 mA at 10-9 Torr. The trade-offs on
emission current are that high emission current gives better readout stability
and sensitivity, but more pumping if the gauge is clean, and more
outgassing if the gauge is contaminated. Likewise, low emission currents
minimize gauge outgassing and minimize pumping. However, low
emission currents yield low ion currents which are sensitive to electronic
noise and may be too low for a given electrometer to measure.

3.3 Pumping Capacity The ionization gauge exhibits a certain pumping capacity. This is due to
both chemical and electrical effects. Chemical pumping is due, in general,
to the affinity of gases for very clean surfaces. As the surface becomes

Operation
saturated, the pumping action is diminished and reaches a steady state
value. Readings for a typical glass- tabulated gauge will be 20 to 50 percent
lower during the period of chemical pumping. The duration of the pumping
may be of the order of four hours at I x 10-9 Torr. Electronic, or ionic
pumping saturates after pumping approximately three months at I x 10-9
Torr. The most common remedy for pumping effects is to provide a passage
of large conductance between the gauge and the vacuum system.
A third mechanism of pumping in gauges involves chemical reactions with
the hot cathode. A number of gases such as oxygen, nitrogen, water vapor,
and hydrogen have been shown to react with the carbon present in
tungsten. The ratio of these reactions are dependent on the cathode
temperature, and are low enough that serious errors in measurement can be
avoided when high-conductance connections are used. In small systems,
Specifications

however, the change in gas composition may be significant.

Ionization Gauge Instruction Manual - 274026 - Rev. B 17

Chapter 3

Several gauge configurations are available to cope with the pumping

phenomenon.
The tubulated glass gauge equipped with a 3/4-inch tubulation, such as the
274002, has adequate conductance for use down to the 10-8 Torr scale.
A gauge for use down to the 10-10 Torr scale is available with 1-inch
tubulation (274015).
The nude gauges are the best solution to severe ionization gauge pumping
problems. With the nude geometry, the gauge elements are positioned
directly in the vacuum chamber thereby eliminating the pressure
differential normally associated with a tubulated gauge. The time response
of this gauge system is greatly reduced as compared to the tubulated gauge.
Comparing the requirements of a given application to the items above will
permit the selection of the most appropriate gauge for the purpose.

Figure 3-3 Operating Characteristics for Series 274 Bayard-Alpert Gauges

3.4 X-ray Limit The low end of the operating range of a B-A gauge is determined by the
X-ray limit of this type of gauge. The X-ray limit varies with different gauge
designs. X-rays are produced when the electrons emitted by the cathode
impact the grid (anode). Because of the geometry of the B-A gauge, only a
small fraction of the X-rays emitted from the grid are intercepted by the ion
collector. When the X-rays strike the collector they cause electrons to be
photoelectrically ejected from the collector. This photoelectron current
from the ion collector is detected the same as positive ions arriving at the
ion collector and consequently adds to the ion current. This X-ray current
limits the pressures that can be measured, and is equivalent to a pressure
reading in the 10-10 to 10-11 Torr ranges. Earlier design triode gauges which
have a cylindrical collector outside the grid experience an X-ray limit of
about 10-8 Torr. The X-ray limit refers to the lowest pressure indication that

18 Ionization Gauge Instruction Manual - 274026 - Rev. B

 Operation

Introduction
may be obtained in a gauge when all the output current is due to X-ray
induced photo emission and there is an absence of gas.
The X-ray limit of standard glass or nude B-A gauges is approximately
3x10-10 Torr. To measure below this limit, an ultrahigh vacuum (UHV)
nude B-A gauge can be used. The UHV nude gauge has an X-ray limit of
approximately 2x10-11 Torr. This lower X-ray limit is achieved by modifying
two elements of the standard B-A gauge design. First, the diameter of the
collector is reduced. The smaller cross-sectional area reduces the
probability that the X-rays created at the grid will strike the collector.
Second, the helical grid structure is replaced with a fine-wire mesh grid
structure, and there is also a fine-wire structure across both ends of the grid.
The fine grid wires provide a more transparent grid for longer electron path
lengths, and the grid ends confine the positive ions for better ion collection.

Operation
Together, these two modifications cause a higher gauge sensitivity for ions
from the gas phase which causes the X-ray current to be converted into a
smaller pressure indication (i.e., a lower X-ray limit).
Some processes can result in deposits on the electrodes. These deposits can
lead to an increase in X-ray limit since more electrons are released under
X-ray bombardment. Process deposits can generally be removed by
degassing the electrodes.

3.5 Degas Procedure The deposition of elements or compounds on exposed gauge surfaces can
result from some processes, such as sputtering or coating operations. Water
vapor is another compound that can collect inside the gauge when a
vacuum chamber is exposed to atmosphere. During normal operation these
materials will slowly come off the gauge surfaces, increasing the local
pressure in the gauge. To more rapidly get the pressure in the gauge in
equilibrium with the pressure in the chamber, "degassing" can be used to
drive the molecules on the inner walls and surfaces from the gauge back

Operation
into the chamber where they can be pumped out of the system. Degassing
can be done as required or as part of a regular pumpdown sequence.
Regular degassing helps prevent process deposits from collecting and
allows the gauge to provide lower and more repeatable pressure indications
by bringing the pressure in the gauge closer to equilibrium with the
chamber.
There are two types of degassing techniques: Electron Bombardment (EB)
and Resistive (I2R). EB degas must be used for UHV nude gauges with fine
wire mesh grids and can also be used for glass or nude gauges with helical
coil grids. I2R degas can only be used for gauges with helical grids.
Although similar in result, each degassing technique employs a different
mechanism to perform this beneficial function.
• EB degassing is accomplished by increasing the anode voltage and the
Specifications

emission current to bombard the gauge with electrons of sufficient

quantity and energy to displace deposited molecules. EB degassing is

Ionization Gauge Instruction Manual - 274026 - Rev. B 19

Chapter 3

preferable at ultra-high vacuum.

• I2R degassing is accomplished by passing current through the grid
(anode) at a sufficient level to raise the grid temperature to displace the
molecules. I2R degassing requires longer degassing periods, and is
preferable to perform only at pressures below 10-5 Torr. Only a few
minutes is required at pressures above 10-6 Torr. If a system is used in the
UHV range, degas in the 10-6 Torr range, then again at the UHV
operating pressure.
Use ONLY the EB degas mode for the EB degassable nude gauges 274022,
274023, 274041, 274042, 274050, 274057, and 274058. See the NUDE
gauges listed in Figure 2-1.
Tubulated glass gauges and nude gauges 274028 and 274043 can be
degassed using either the EB or I2R mode. See the NUDE gauges listed in
Figure 2-1.
Cleaning a gauge with solvents is not recommended. However, if a gauge
has been exposed to silicone-based pump oil, solvent may be needed to
remove the oil. If solvent is used, the gauge must be thoroughly dried before
installing it back on the system and operating or degassing it.

3.6 Bakeout Procedure Bakeout of a B-A gauge is necessary if the system is expected to pump down
to an ultra-clean state. Do not bake glass B-A gauges over 450 oC because
glass softening may occur above that temperature.

20 Ionization Gauge Instruction Manual - 274026 - Rev. B

 Chapter 4 Technical Information

Introduction
4.1 Operating Principle The pressure indication of a hot cathode Bayard-Alpert (B-A) gauge is based
on the ionization of gas molecules by a constant flow of electrons. The
negative electrons are emitted at a well-controlled, selectable rate from a
heated cathode and are accelerated toward a positively charged wire grid
(anode). Electrons pass into the space between the grid and the collector
wire. In this space the electrons collide with gas molecules from the
vacuum system, producing positive ions. The positive ions are then
collected by the ion collector wire which is at nearly ground potential, thus
negative with respect to the grid and is located along the axis of the
cylindrical grid. At a constant filament to grid voltage and electron emission
current, the rate that positive ions are formed is directly proportional to the

Operation
density of molecules (pressure) in the space for pressures below 1 x 10-3
Torr. The strength of the ion current is then indicated on a electrometer that
is calibrated in units of pressure. Since as the pressure indication is linear,
the hot cathode Bayard-Alpert gauge is generally considered the most
accurate continuous indicator for pressures below 1 x 10-3 Torr.
More detailed information regarding the theory of operation for B-A gauges
is presented in the Operation Chapter of this Instruction Manual.
The low end of the operating range of a B-A gauge is determined by the
X-ray limit of this type of gauge. The X-ray limit varies with different gauge
designs. X-rays are produced when the electrons emitted by the cathode
impact the grid and support wires. Because of the geometry of the B-A
gauge, only a small fraction of the emitted X-rays are intercepted by the ion
collector. When the X-rays strike the collector wire they cause electrons to
be photoelectrically ejected from the collector. This X-ray current limits the

Troubleshooting
pressures that can be measured, and is equivalent to a pressure reading in
the 10-11 Torr range. Earlier gauges that had a cylindrical collector outside
the grid experienced an X-ray limit of about 10-8 Torr. The X-ray limit refers
to the lowest pressure indication that may be obtained in a gauge when all
the output current is due to X-ray induced photoemission and there is an
absence of gas.
The X-ray limit will be increased as a result of hydrocarbon contamination
of the electrodes, since contaminated surfaces release more secondary
electrons under X-ray bombardment. Such contamination can generally be
removed by thorough degassing of the electrodes
More detailed information regarding the X-ray limit of B-A gauges is
presented in the Operation Chapter of this Instruction Manual.
Technical Info/Specs

Ionization Gauge Instruction Manual - 274026 - Rev. B 21

4.2 Specifications

Gas Species Effects Bayard-Alpert (B-A) ionization gauges have different relative sensitivities for
different gas species. As a result, the pressure readout provides a direct
reading only for the gas for which the gauge is specified (usually nitrogen).
This is called a readout of nitrogen equivalent pressure. A simple
mathematical conversion of the direct pressure readout to the pressure of
the non standard gas can be made. This conversion is made using the
relative gauge sensitivity for the specific gas. These sensitivities are in
Table 4-3 on page 26.
B-A gauges work best in given pressure ranges for individual gauge designs
as shown in Table 4-1. The useful range of most of these gauges starts at
1 x10-3 Torr. Variations in design permit operation to various orders of
vacuum. The nude-type ionization gauges 274022, 274023, 274041,
274042, 274050, 274057, and 274058 are suitable to 2 x 10-11 Torr.

Table 4-1 Operating Ranges of Bayard-Alpert Ionization Gauges.

Cathodes (Filaments) All Granville-Phillps’ Series 274 ionization gauges have either tungsten or
thoria-coated iridium filaments. The advantages/disadvantages of each are
listed in Table 4-2.

Table 4-2 Ionization Gauge Cathode Characteristics

Phenomenon Tungsten Filament Thoria-Iridium Filament

Accidental exposure to Atmosphere • No tolerance • High tolerance

High Oxygen partial pressure • Easily oxidized • Relatively immune to oxidation

Chemical reaction with gas to be • Higher filament temperature • Lower filament temperature
measured • Higher reaction rate • Lower reaction rate

Corrosive environment • Higher tolerance • Low tolerance

• Lower reaction rate • Higher reaction rate
• More resistant to some corrosive • Filament coating can be compromised
gases by interaction to corrosive gases

22 Ionization Gauge Instruction Manual - 274026 - Rev. B

 Technical Information

Introduction
Pressure Indication Ionization gauge controllers measure the positive ion current in amperes
from the ion gauge, but the readout is in pressure units. These pressure units
are direct reading only for the gas of which is specified - usually nitrogen or
air. Other gases may give much different readings than does nitrogen.

Gauge Tube Sensitivity To present conversions from gas types, the gauge sensitivity,
K is defined as:

where i+ is the positive ion current to the ion collector, i_ is the electron
emission current from the filament to the grid, and P is the pressure. The
glass envelope gauge tube and the I2R degassable nude gauge have

Operation
K=10/Torr for nitrogen (or air), and the electron bombardment degassable
nude gauge has K=25/Torr for nitrogen (or air).
Gauge sensitivities for various gases are tabulated in reference material
either directly in Torr-1 or listed, such as:

Gas Type Conversions There are two ways to read the pressure of a gas other than the gas for which
a gauge is specified: 1) perform a mathematical conversion on the direct
pressure readout (usually nitrogen/air); 2) use an emission current other than
the value for which the ion gauge controller is set.
1) To correct for an ion gauge controller which is set up for a different
sensitivity (KN2, cont) than the ion gauge ( KN2, tube), the following correction
to the pressure readout will yield the nitrogen equivalent pressure:

Troubleshooting
Technical Info/Specs

Ionization Gauge Instruction Manual - 274026 - Rev. B 23

Chapter 4

To convert the readout to a different gas, the equation must also include
KgasX, tube

2) Most ion gauge controllers are designed for some calibrated set-point of
emission = i_. The emission that corrects for both controller sensitivity and
gas type is:

24 Ionization Gauge Instruction Manual - 274026 - Rev. B

 Technical Information

Introduction
Gas Sensitivity Table 4-3 lists relative gauge sensitivities (rX) for various gases. The values
listed are averages of several gauges and several references from literature
(Table II, Ionization Gauge Sensitivities As Reported in the Literature, from
NASA Technical Note TND5285 by Robert L. Summers, Lewis Research
Center, National Aeronautics and Space Administration). Refer to this
reference for further definition of these average values and for calculations
of the gauge sensitivities of other gases.
To convert ion gauge readout from nitrogen equivalent pressure, divide the
readout by the values listed for rx.
.

Table 4-3 Gas Sensitivity

Gas Type Average Value of rX

Operation
He 0.18

Ne 0.30

D2 0.35
H2 0.46

N2 1.00

Air 1.00
O2 1.01

CO 1.05

H 2O 1.12
NO 1.16

Troubleshooting
Ar 1.29

CO2 1.42
Kr 1.94

SF6 2.50

Xe 2.87

Hg 3.64 Technical Info/Specs

Ionization Gauge Instruction Manual - 274026 - Rev. B 25

Chapter 4

Figure 4-1 Series 274 Bayard-Alpert Ionization Gauges

Tubulated B-A Gauge Nude B-A Gauge UHV Nude B-A Gauge
I2R or EB Degas I2R or EB Degas EB Degas

Nude ion gauge with cable

Nude ion gauge without connector strain relief.
cable connector strain relief. Catalog numbers: 274041,
Catalog numbers: 274022, 274042, and 274043.
274023, and 274028.

26 Ionization Gauge Instruction Manual - 274026 - Rev. B

 Technical Information

Introduction
Gauge Specifications

Table 4-4 Series 274 Bayard-Alpert Gauge Physical and Operating Data

Physical Data Tubulated Gauge EB Degassable Nude Gauge I2R Degassable Nude Gauge

Tubulation .75 inch (19mm) or 1 inch N.A. N.A.

(25mm) dia. x 2.25 inch (57mm )
long, Kovar, Pyrex, or flanged

Envelope Nonex 7720 Glass, 2.25 inch Nude with 2.75 inch o.d. Nude with 2.75 inch o.d.
(57mm) dia. x 5 inch (127mm) ConFlat flange ConFlat flange
long

Mounting Position Any - Vertical preferred Any Any

Collector Tungsten, .010 inch dia. Tungsten, .005 inch dia. Tungsten, .010 inch dia.

Operation
Cathode Dual tungsten or one thoria Dual tungsten or dual thoria Thoria coated iridium on
coated Iridium coated Iridium on replaceable replaceable assembly
assembly

Grid Refractory metals Refractory metals Refractory metals

Overall Length 6 inch (152mm) 4.125 inch (105mm) 4.125 inch (105mm)

Insertion Length N.A. 3 inch (76mm) 3 inch (76mm)

Operating Data Tubulated Gauge EB Degassable Nude Gauge I2R Degassable Nude Gauge

Sensitivity for N2 10/Torr 25/Torr 10/Torr

Typical Accuracy ± 20% ± 20% ± 20%

X-ray Limit About 3 x 10-10 About 2 x 10-11 About 4 x 10-10

EB Degas 100 watts max. 40 watts max. 100 watts max., 70 watts
nominal

Troubleshooting
I2R Degas 6.3 to 7.5 VAC at 10 A N.A. 6.3 to 7.5 VAC at 10 A

Bakeout 450 oC 450 oC 450 oC

Cathode Heating Current 4 to 6 A 2.5 to 3.5 A 4 to 6 A

Cathode Heating Voltage 3 to 5 V 3 to 5 V 3 to 5 V

Cathode Heating Potential +30 Vdc +30 Vdc +30 Vdc

Collector Potential 0V 0V 0V

Grid Potential +180 Vdc +180 Vdc +180 Vdc

EB = Electron Bombardment Degas / I 2R = Resistance Heated Degas / N2 = Nitrogen / N.A. = Not Applicable
Technical Info/Specs

Ionization Gauge Instruction Manual - 274026 - Rev. B 27

Chapter 4

4.3 Service Guidelines For customer service:

If the product requires service, contact the MKS, Granville-Phillips Division
Customer Service Department at +1-800-227-8766 or +1-303-652-4691
for troubleshooting help over the phone.
If the product must be returned to the factory for service, request a Return
Material Authorization (RMA) from Granville-Phillips. Do not return
products without first obtaining an RMA. In some cases a hazardous
materials document may be required. The MKS/Granville-Phillips Customer
Service Representative will advise you if the hazardous materials document
is required.
When returning a products to Granville-Phillips, be sure to package the
products to prevent shipping damage. Circuit boards and modules
separated from the gauge assembly must be handled using proper anti-static
protection methods and must be packaged in anti-static packaging.
Granville-Phillips will supply return packaging materials at no charge upon
request. Shipping damage on returned products as a result of inadequate
packaging is the Buyer's responsibility.
For Customer Service or Technical Support 24 hours per day, 7 days per
week, every day of the year including holidays:
Phone: +1-800-227-8766 or +1-303-652-4691
Email: [email protected]

MKS, Granville-Phillips Division

6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone: 1-303-652-4691 or 1-800-776-6543
FAX: 1-303-652-2844

28 Ionization Gauge Instruction Manual - 274026 - Rev. B

Instruction Manual part number 274026
Revision B - August 2014
Series 274

Granville-Phillips® Series 274 Bayard-Alpert

Type Ionization Gauges

For Customer Service or Technical Support 24 hours per day,

7 days per week, every day of the year including holidays:
Phone: +1-800-227-8766 or +1-303-652-4691

MKS, Granville-Phillips Division

6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone: 1-303-652-4691 or 1-800-776-6543
FAX: 1-303-652-2844
Email: [email protected]

Corporate Office
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Phone: 1-978-645-5500
www.mksinst.com

Instruction Manual
Instruction Manual part number 274026
Revision B - August 2014