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ERA-NET Taguchi

Taguchi örnek çalışma

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Ebubekir Camızcı
Copyright
© © All Rights Reserved
Available Formats
Download as XLSX, PDF, TXT or read online on Scribd
Download as xlsx, pdf, or txt
11 views1 page

ERA-NET Taguchi

Taguchi örnek çalışma

Uploaded by

Ebubekir Camızcı
Copyright
© © All Rights Reserved
Available Formats
Download as XLSX, PDF, TXT or read online on Scribd
Download as xlsx, pdf, or txt
Download as xlsx, pdf, or txt
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Güç (W) Substrate Temp.

(C) Ar Flow (sccm) Ar/O2 Ratio (%)


1 75 30 5 0
2 75 100 10 5
3 75 200 15 25
4 75 300 20 50
5 100 30 10 25
6 100 100 5 50
7 100 200 20 0
CuCrO2 8 100 300 15 5
9 125 30 15 50
10 125 100 20 25
11 125 200 5 5
12 125 300 10 0
13 150 30 20 5
14 150 100 15 0
15 150 200 10 50
16 150 300 5 25
Güç (W) Substrate Temp. (C) Ar Flow (sccm) Ar/O2 Ratio (%)
1 75 30 5 0
2 75 100 10 5
3 75 200 15 25
4 75 300 20 50
5 100 30 10 25
6 100 100 5 50
7 100 200 20 0
CuFeO2 8 100 300 15 5
9 125 30 15 50
10 125 100 20 25
11 125 200 5 5
12 125 300 10 0
13 150 30 20 5
14 150 100 15 0
15 150 200 10 50
16 150 300 5 25
Güç (W) Substrate Temp. (C) Ar Flow (sccm) Ar/O2 Ratio (%)
1 75 30 5 0
2 75 100 10 5
3 75 200 15 25
4 75 300 20 50
5 100 30 10 25
6 100 100 5 50
7 100 200 20 0
CuAlO2 8 100 300 15 5
9 125 30 15 50
10 125 100 20 25
11 125 200 5 5
12 125 300 10 0
13 150 30 20 5
14 150 100 15 0
15 150 200 10 50
16 150 300 5 25

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