Mems 3
Mems 3
Mems 3
Actuation Methods
Actuation
Electrostatic
Thermal
Magnetic
Piezoelectric
Piezoresistive
Electrostatic
Thermal
Magnetic
Piezoelectric
Shape Memory Alloys
Design considerations
Sensor
Sensitivity
Linearity
Responsivity
SNR
Dynamic Range
Bandwidth
Drift
Reliability
Cross talk
Cost
Actuator
Torque or force output
capacity
Range of motion
Dynamic response
Ease of fabrication
Power consumption &
energy efficiency
Linearity of displacement
as a function of driving
bias
Cross sensitivity &
environmental stability
Foot Print
Principle of operation
A capacitor is broadly defined as two conductors that can
hold opposite charges
If the distance/relative position or dielectric medium
between two conductors change as a result of applied
stimulus,the capacitance value will change.This forms
the basis of capacitive (Electrostatic) sensing.
If a voltage or electric field is applied across two
conductors,an electrostatic force would develop between
these two objects resulting in actuation. This is defined
as electrostatic actuation.
Principle of operation
Two Types of capacitive electrode geometries
* Parallel Plate Capacitors
* Interdigitated Finger (Comb Drive) Capacitors
Electrostatic Actuation
Amplitude of
electrostatic &
mechanical force
At tangent,Magnitude
of Fe equals Fm
Pull-in Voltage
The // plate
electrostatic actuator
becomes unstable for V
greater than Vp
Analytical Solution
At Pull in Voltage, magnitudes of electrical and mechanical
balance forces are same.By equating these two forces
We know
Putting V2 from above
Independent of Vp &
Spring constant
Putting x = xo/3 in
at V = V pull in or Vp
We get
Two Types
-Transverse
- Longitudinal
Many Parallel
plates can increase
Actuation force.
Capacitance at Rest
Csl=Csr=0 l0 t/x0
Capacitance after movement x Csl= 0 l0 t/x0-x
Csr= 0 l0 t/x0+x
Total value of capacitance= Csl+Csr+Cf
The displacement
sensitivity Sx=Ct ot/
x
Magnitude of
force(Actuator)
Applications
Electrostatic Motor
Inertia Sensor
- Parallel plate- capacitive accelerometer
- Torsional plate- capacitive accelerometer
Pressure Sensor
- Membrane parallel plate pressure sensor
- Membrane capacitive condenser microphone
Flow sensor
Tactile sensor
Typical Calculations
The force constant associated with the mass is twice that of each
individual fixed-guided cantilever. The overall force constant is
K= 24EI/L3
Change in capacitance
under angular displacement
n r l f
d
(2lm l f )
Where,
lm :length of inertia mass
lf: length of sensing finger
d: gap distance
n: number of sense fingers
ADXL50
RT Process
Ni Plate Size
1x0.6mm2 in area
5um Thick
Oxidation +
Patterning
Dielectric +
Patterning
Anisotropic
Etch ( 9um)
Poly + Doping
Oxide Etch
Oxidation
Patterning
CMP + Cr/Au
deposition+
Oxide
Dep+Pattern
Flip chip
Bonding
B Diffusion
15um
Reoxidise
+Pattern
Silicon Etch
Capacitance change
under normal force
r 0 L2
C
d
2
d
Total Capacitance
under shear force
r 0 L2
C
d 0.5L
Square Pulse