Thin Film Deposition Techniques

Download as pptx, pdf, or txt
Download as pptx, pdf, or txt
You are on page 1of 20

Thin Film Deposition Techniques

Presented by : Mr. SHAYAN AHMAD KHATTAK


What we are going to learn ?

• What is Thin Film Deposition .

• Why we use this technique .

• Some different Methods for this technique .


Historical background

To

Gold Beating & Gilding Advanced Technology

By (Flexible Displays)

Egyptians (1567-1320 B.C) Very Thin material


From Bulk to Nano Scale

•Properties of the Materials changes on moving from


Bulk (Macro) scale to Nano scale.
• Gold seems Red Instead of yellow at Nano level.
INTRODUCTION
Thin Film deposition is a process of applying a very thin layer of about

Nano-meters (nm)  100 micro-meters (mm)

On to a substrate material .

A Simple Example:

Why We Eat jam on bread ?

Of course because it tastes good ...


Similarly, we Coat different layers on different Materials to obtain different desired
properties.

Just like we use Butter instead of jam to Experience different taste …

Omg That’s yummy Too … 😁


Purpose of using this Technique

Aims of using this technique is vast enough & can vary although some of the highlighted
ones are :

• To maintain the surface Uniformity.

• To achieve desired Electrical & Opto-electrical properties.

• To achieve rust free & corrosion free surfaces.

• To decrease the weight & bulkiness of the material.

• To achieve Superior functional Medical coatings.


Applications

We use this process mainly in Semi-Conductor Industry i.e


• Solar Panels
• CD’s
• Disk Drive
• Optical Devices
• Medical Devices
Also have useful applications in
Optics ,Space science & defense.

etc ….
Different deposition techniques
(Methods)

Þ We use different deposition techniques to generate different features in substrate.

Þ The properties & versatility mainly depends on the technique we will apply.

So , The selection of deposition Technique is very important part of the process.

Þ we cannot use same deposition technique for all types of material or substrate.
Types

There are Several types of deposition techniques but Generally it is divided into two main types i.e

• Physical vapour deposition (PVD)

• Chemical vapour deposition (CVD)


Classification Diagram
The process of Vapour deposition:

This process involves the deposition of thin films Or layers of a Material onto a Substrate
by atom by atom Or Molecule By Molecule .

• The source material is evaporated to get into vapourized Phase

& than condenses onto substrate to form a layer.

• The whole process is performed in a vacuum.


Purpose of this process

• Less Contamination.

• Low pressure plasma conditions .

• Composition of the gas & vapour can be easily controlled.

• Flow of vapours can also be controlled.


Physical vapour deposition

• It is a way of coating a thin film (pure metals, metallic alloys, ceramics )


on a substrate .
• Thickness usually ranges from 1 (um) to 10 (um).

Steps Involved:

Solid
Source Evap
orati
o n
Vapour
Tran
sp orta
Phase ti on

Condensed
on
Substrate
Why PVD ?

• PVD can convert solid materials into vapour phase without chemical

processes.

•They are very Convenient & easy to deposit many types of materials.

•The range of deposition (thickness) by PVD is of few nm’s to thousand of

nm’s.

•The substance range (substrate) in size can be from very small to very large.

•Typical PVD deposition rates are 1-10 nm/sec.


Classification of PVD

PVD technique can be classified on the type of technique used to evaporate the solid source Material into Vapour

Phase.

These are

• Thermal evaporation.

• Sputtering.
Thermal Evaporation

Involves the evaporation of source material by means of High current filament


Sputtering

• When a surface is bombarded with high velocity

positive ions, it is possible to cause ejection of the

surface atoms.

• This process of ejection atoms from the surface by

bombardment of positive ions ( usually inert

gas ions), by momentum transfer process between

the sputter gas& target atom is commonly known as

sputtering (cathode sputtering)

• (Ar) is commonly used as sputtering gas.


Sputtering
Thank you !

You might also like