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TEMPERATURE SENSOR WITH TWO
DIMENSIONAL (2D) PHOTONIC
CRYSTAL
103/26/19
Photonic Crystals:Introduction
 Photonic crystals are periodic dielectric nanostructures that
affect the propagation of electromagnetic waves(EM) .
 Photonic crystals contain regularly repeating regions of high and
low dielectric.
 Wavelengths that are allowed to travel are known as modes;
groups of allowed modes form bands. Disallowed bands
of wavelengths are called photonic band gaps. This gives rise to
optical phenomena such as inhibition of spontaneous emission.
203/26/19
Types of Photonic Crystals and Defects
Types of Photonic Crystals
 One Dimensional- Refractive index variation in
single direction
 Two Dimensional- Refractive index variation in
two directions
Three Dimensional- Refractive index variation in
three different directions
Types of Defects
Point Defect- Removing a single rod
Line Defect- Removing entire row of
rods
03/26/19 Final Review 3
2D1D
3D
Objective
 To design sensors using two dimensional Photonic Crystal .
 To analyze the performance parameters of the sensors
*To increase the Ultra compact device (Centimeter scale to Micrometer).
*To design sensing device with Temperature .
*To improve the Sensing sensitivity in dynamic temperature range
03/26/19 Final Review 4
PROCESS FLOW
Si (P type)
Si (P type)
Substrate
Oxidation /SPIN Coating/PR/SOFTBAKE
Sio2
Si (P type)
Sio2
Si
Photo resist/AZ S1813
S18==
Si (P type)
Si
Wet Etching
PR removal
Si (P type)
Si
Sio2
Masking
Si (P type)
Si
Sio2
Electron beam lithography
sio2Si -Substrate
sio2
Si -Substrate
sio2
Si -Substrate
sio2
Final Device
Deposition/Electron beam Deposition
Dry
Etching/DRIE
Device Structure 2 (21 X x23 Z)
Si -Substrate Silicon ( p-type )
sio2
5000 nm
400 nm
2500nm
110 nm (Non defect Si rods)
540 nm
65 nm
FILTER
ROD 1
Si rods
BAND GAP STRUTURES BEFORE DEFECTS 21*23
03/26/19 Final Review 7
PROPOSED MODEL
03/26/19 Final Review 8
Working
03/26/19 Final Review 9
TEMEPERATURE O0
to 500
DEGREE CELSIUS
03/26/19 Final Review 10
Summarized Parameters
03/26/19 Final Review 11
Simulation tool- FDTD
OPTI FDTD Group is the worldwide leader in Photonic design automation
software, serves several industries including Optical
Communication,optoelectronics, and Semiconductor manufacturing.
Within optical communications,
Conclusion
• The two dimensional photonic crystal based
temperature sensor is designed and its sensing
characteristics are analyzed
• The output resonant wavelength of the sensor is
shifted for every increasing temperature level. The
proposed sensor could be incorporated for real-time
applications for temperature sensing.
03/26/19 Final Review 13
Reference
[1] Benedetto Troia, Antonia Paolicelli, Francesco De Leonardis and Vittorio M. N. Passaro “
Book of Photonic Crystals for Optical Sensing: A Review”.
[2] JohnD.Joannopoulos Steven. Johnson, Robert D.Meade.(2014) “Book of Photonic crystals
modeling the flow of light” Optik 125, pp.6562–6565.
[3] Krishnan Vijaya Santhi and Savarimuthu Robinson(2014)” Two-Dimensional Photonic Crystal
Based Sensor for Pressure Sensing “ Journal of photonic sensors , Vol. 4, No. 3, pp. 248–253 .
[4] E. Chow, A. Grot, L. W. Mirkarimi, M. Sigalas, and G. Girolami(2004) ” Ultra compact
biochemical sensor built with two dimensional photonic crystal microcavity” Optics Letters,
Vol. 29, Issue 10, pp.1093-1095.
[5] HarshadaPati, Ashwini., Dr.Indumathi, Dr. PreetaShara(2013)” Design and analysis of
photonic crystal based fluidic sensor”, IET Conference publications(ARTCom 2013) , pp.
183-188.
[6] V. P. Chubakov, P. A. Chubakov, and A. I. Plekhanov(2012)” Humidity Sensor Based on
Photonic Crystal Opal Film” ISSN 1995_0780, Nanotechnologies in Russia, 2012, Vol. 7,
Nos. 9–10,pp. 499–501
03/26/19 Final Review 14

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Sensor

  • 1. TEMPERATURE SENSOR WITH TWO DIMENSIONAL (2D) PHOTONIC CRYSTAL 103/26/19
  • 2. Photonic Crystals:Introduction  Photonic crystals are periodic dielectric nanostructures that affect the propagation of electromagnetic waves(EM) .  Photonic crystals contain regularly repeating regions of high and low dielectric.  Wavelengths that are allowed to travel are known as modes; groups of allowed modes form bands. Disallowed bands of wavelengths are called photonic band gaps. This gives rise to optical phenomena such as inhibition of spontaneous emission. 203/26/19
  • 3. Types of Photonic Crystals and Defects Types of Photonic Crystals  One Dimensional- Refractive index variation in single direction  Two Dimensional- Refractive index variation in two directions Three Dimensional- Refractive index variation in three different directions Types of Defects Point Defect- Removing a single rod Line Defect- Removing entire row of rods 03/26/19 Final Review 3 2D1D 3D
  • 4. Objective  To design sensors using two dimensional Photonic Crystal .  To analyze the performance parameters of the sensors *To increase the Ultra compact device (Centimeter scale to Micrometer). *To design sensing device with Temperature . *To improve the Sensing sensitivity in dynamic temperature range 03/26/19 Final Review 4
  • 5. PROCESS FLOW Si (P type) Si (P type) Substrate Oxidation /SPIN Coating/PR/SOFTBAKE Sio2 Si (P type) Sio2 Si Photo resist/AZ S1813 S18== Si (P type) Si Wet Etching PR removal Si (P type) Si Sio2 Masking Si (P type) Si Sio2 Electron beam lithography sio2Si -Substrate sio2 Si -Substrate sio2 Si -Substrate sio2 Final Device Deposition/Electron beam Deposition Dry Etching/DRIE
  • 6. Device Structure 2 (21 X x23 Z) Si -Substrate Silicon ( p-type ) sio2 5000 nm 400 nm 2500nm 110 nm (Non defect Si rods) 540 nm 65 nm FILTER ROD 1 Si rods
  • 7. BAND GAP STRUTURES BEFORE DEFECTS 21*23 03/26/19 Final Review 7
  • 10. TEMEPERATURE O0 to 500 DEGREE CELSIUS 03/26/19 Final Review 10
  • 12. Simulation tool- FDTD OPTI FDTD Group is the worldwide leader in Photonic design automation software, serves several industries including Optical Communication,optoelectronics, and Semiconductor manufacturing. Within optical communications,
  • 13. Conclusion • The two dimensional photonic crystal based temperature sensor is designed and its sensing characteristics are analyzed • The output resonant wavelength of the sensor is shifted for every increasing temperature level. The proposed sensor could be incorporated for real-time applications for temperature sensing. 03/26/19 Final Review 13
  • 14. Reference [1] Benedetto Troia, Antonia Paolicelli, Francesco De Leonardis and Vittorio M. N. Passaro “ Book of Photonic Crystals for Optical Sensing: A Review”. [2] JohnD.Joannopoulos Steven. Johnson, Robert D.Meade.(2014) “Book of Photonic crystals modeling the flow of light” Optik 125, pp.6562–6565. [3] Krishnan Vijaya Santhi and Savarimuthu Robinson(2014)” Two-Dimensional Photonic Crystal Based Sensor for Pressure Sensing “ Journal of photonic sensors , Vol. 4, No. 3, pp. 248–253 . [4] E. Chow, A. Grot, L. W. Mirkarimi, M. Sigalas, and G. Girolami(2004) ” Ultra compact biochemical sensor built with two dimensional photonic crystal microcavity” Optics Letters, Vol. 29, Issue 10, pp.1093-1095. [5] HarshadaPati, Ashwini., Dr.Indumathi, Dr. PreetaShara(2013)” Design and analysis of photonic crystal based fluidic sensor”, IET Conference publications(ARTCom 2013) , pp. 183-188. [6] V. P. Chubakov, P. A. Chubakov, and A. I. Plekhanov(2012)” Humidity Sensor Based on Photonic Crystal Opal Film” ISSN 1995_0780, Nanotechnologies in Russia, 2012, Vol. 7, Nos. 9–10,pp. 499–501 03/26/19 Final Review 14