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Sensor

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balaji raja rajan Venkatachalam
balaji raja rajan Venkatachalam

This document discusses the design of a temperature sensor using a two-dimensional photonic crystal. It describes the basic principles of photonic crystals and their ability to inhibit light propagation in bandgap regions. The sensor is designed by introducing a point defect in a silicon-based 2D photonic crystal structure. Simulation results show the output resonant wavelength shifts with increasing temperature levels, allowing for temperature sensing. Parameters like sensitivity, resolution and operating range are evaluated. Finite-difference time-domain (FDTD) simulation is used to analyze the sensor's performance.

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TEMPERATURE SENSOR WITH TWO DIMENSIONAL (2D) PHOTONIC CRYSTAL 103/26/19
Photonic Crystals:Introduction  Photonic crystals are periodic dielectric nanostructures that affect the propagation of electromagnetic waves(EM) .  Photonic crystals contain regularly repeating regions of high and low dielectric.  Wavelengths that are allowed to travel are known as modes; groups of allowed modes form bands. Disallowed bands of wavelengths are called photonic band gaps. This gives rise to optical phenomena such as inhibition of spontaneous emission. 203/26/19
Types of Photonic Crystals and Defects Types of Photonic Crystals  One Dimensional- Refractive index variation in single direction  Two Dimensional- Refractive index variation in two directions Three Dimensional- Refractive index variation in three different directions Types of Defects Point Defect- Removing a single rod Line Defect- Removing entire row of rods 03/26/19 Final Review 3 2D1D 3D
Objective  To design sensors using two dimensional Photonic Crystal .  To analyze the performance parameters of the sensors *To increase the Ultra compact device (Centimeter scale to Micrometer). *To design sensing device with Temperature . *To improve the Sensing sensitivity in dynamic temperature range 03/26/19 Final Review 4
PROCESS FLOW Si (P type) Si (P type) Substrate Oxidation /SPIN Coating/PR/SOFTBAKE Sio2 Si (P type) Sio2 Si Photo resist/AZ S1813 S18== Si (P type) Si Wet Etching PR removal Si (P type) Si Sio2 Masking Si (P type) Si Sio2 Electron beam lithography sio2Si -Substrate sio2 Si -Substrate sio2 Si -Substrate sio2 Final Device Deposition/Electron beam Deposition Dry Etching/DRIE
Device Structure 2 (21 X x23 Z) Si -Substrate Silicon ( p-type ) sio2 5000 nm 400 nm 2500nm 110 nm (Non defect Si rods) 540 nm 65 nm FILTER ROD 1 Si rods
BAND GAP STRUTURES BEFORE DEFECTS 21*23 03/26/19 Final Review 7
PROPOSED MODEL 03/26/19 Final Review 8
Working 03/26/19 Final Review 9
TEMEPERATURE O0 to 500 DEGREE CELSIUS 03/26/19 Final Review 10
Summarized Parameters 03/26/19 Final Review 11
Simulation tool- FDTD OPTI FDTD Group is the worldwide leader in Photonic design automation software, serves several industries including Optical Communication,optoelectronics, and Semiconductor manufacturing. Within optical communications,
Conclusion • The two dimensional photonic crystal based temperature sensor is designed and its sensing characteristics are analyzed • The output resonant wavelength of the sensor is shifted for every increasing temperature level. The proposed sensor could be incorporated for real-time applications for temperature sensing. 03/26/19 Final Review 13
Reference [1] Benedetto Troia, Antonia Paolicelli, Francesco De Leonardis and Vittorio M. N. Passaro “ Book of Photonic Crystals for Optical Sensing: A Review”. [2] JohnD.Joannopoulos Steven. Johnson, Robert D.Meade.(2014) “Book of Photonic crystals modeling the flow of light” Optik 125, pp.6562–6565. [3] Krishnan Vijaya Santhi and Savarimuthu Robinson(2014)” Two-Dimensional Photonic Crystal Based Sensor for Pressure Sensing “ Journal of photonic sensors , Vol. 4, No. 3, pp. 248–253 . [4] E. Chow, A. Grot, L. W. Mirkarimi, M. Sigalas, and G. Girolami(2004) ” Ultra compact biochemical sensor built with two dimensional photonic crystal microcavity” Optics Letters, Vol. 29, Issue 10, pp.1093-1095. [5] HarshadaPati, Ashwini., Dr.Indumathi, Dr. PreetaShara(2013)” Design and analysis of photonic crystal based fluidic sensor”, IET Conference publications(ARTCom 2013) , pp. 183-188. [6] V. P. Chubakov, P. A. Chubakov, and A. I. Plekhanov(2012)” Humidity Sensor Based on Photonic Crystal Opal Film” ISSN 1995_0780, Nanotechnologies in Russia, 2012, Vol. 7, Nos. 9–10,pp. 499–501 03/26/19 Final Review 14

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Sensor

  • 1. TEMPERATURE SENSOR WITH TWO DIMENSIONAL (2D) PHOTONIC CRYSTAL 103/26/19
  • 2. Photonic Crystals:Introduction  Photonic crystals are periodic dielectric nanostructures that affect the propagation of electromagnetic waves(EM) .  Photonic crystals contain regularly repeating regions of high and low dielectric.  Wavelengths that are allowed to travel are known as modes; groups of allowed modes form bands. Disallowed bands of wavelengths are called photonic band gaps. This gives rise to optical phenomena such as inhibition of spontaneous emission. 203/26/19
  • 3. Types of Photonic Crystals and Defects Types of Photonic Crystals  One Dimensional- Refractive index variation in single direction  Two Dimensional- Refractive index variation in two directions Three Dimensional- Refractive index variation in three different directions Types of Defects Point Defect- Removing a single rod Line Defect- Removing entire row of rods 03/26/19 Final Review 3 2D1D 3D
  • 4. Objective  To design sensors using two dimensional Photonic Crystal .  To analyze the performance parameters of the sensors *To increase the Ultra compact device (Centimeter scale to Micrometer). *To design sensing device with Temperature . *To improve the Sensing sensitivity in dynamic temperature range 03/26/19 Final Review 4
  • 5. PROCESS FLOW Si (P type) Si (P type) Substrate Oxidation /SPIN Coating/PR/SOFTBAKE Sio2 Si (P type) Sio2 Si Photo resist/AZ S1813 S18== Si (P type) Si Wet Etching PR removal Si (P type) Si Sio2 Masking Si (P type) Si Sio2 Electron beam lithography sio2Si -Substrate sio2 Si -Substrate sio2 Si -Substrate sio2 Final Device Deposition/Electron beam Deposition Dry Etching/DRIE
  • 6. Device Structure 2 (21 X x23 Z) Si -Substrate Silicon ( p-type ) sio2 5000 nm 400 nm 2500nm 110 nm (Non defect Si rods) 540 nm 65 nm FILTER ROD 1 Si rods
  • 7. BAND GAP STRUTURES BEFORE DEFECTS 21*23 03/26/19 Final Review 7
  • 10. TEMEPERATURE O0 to 500 DEGREE CELSIUS 03/26/19 Final Review 10
  • 12. Simulation tool- FDTD OPTI FDTD Group is the worldwide leader in Photonic design automation software, serves several industries including Optical Communication,optoelectronics, and Semiconductor manufacturing. Within optical communications,
  • 13. Conclusion • The two dimensional photonic crystal based temperature sensor is designed and its sensing characteristics are analyzed • The output resonant wavelength of the sensor is shifted for every increasing temperature level. The proposed sensor could be incorporated for real-time applications for temperature sensing. 03/26/19 Final Review 13
  • 14. Reference [1] Benedetto Troia, Antonia Paolicelli, Francesco De Leonardis and Vittorio M. N. Passaro “ Book of Photonic Crystals for Optical Sensing: A Review”. [2] JohnD.Joannopoulos Steven. Johnson, Robert D.Meade.(2014) “Book of Photonic crystals modeling the flow of light” Optik 125, pp.6562–6565. [3] Krishnan Vijaya Santhi and Savarimuthu Robinson(2014)” Two-Dimensional Photonic Crystal Based Sensor for Pressure Sensing “ Journal of photonic sensors , Vol. 4, No. 3, pp. 248–253 . [4] E. Chow, A. Grot, L. W. Mirkarimi, M. Sigalas, and G. Girolami(2004) ” Ultra compact biochemical sensor built with two dimensional photonic crystal microcavity” Optics Letters, Vol. 29, Issue 10, pp.1093-1095. [5] HarshadaPati, Ashwini., Dr.Indumathi, Dr. PreetaShara(2013)” Design and analysis of photonic crystal based fluidic sensor”, IET Conference publications(ARTCom 2013) , pp. 183-188. [6] V. P. Chubakov, P. A. Chubakov, and A. I. Plekhanov(2012)” Humidity Sensor Based on Photonic Crystal Opal Film” ISSN 1995_0780, Nanotechnologies in Russia, 2012, Vol. 7, Nos. 9–10,pp. 499–501 03/26/19 Final Review 14